|Publication number||US7485214 B2|
|Application number||US 11/015,633|
|Publication date||Feb 3, 2009|
|Filing date||Dec 17, 2004|
|Priority date||Dec 23, 2003|
|Also published as||EP1547688A1, US20050155860|
|Publication number||015633, 11015633, US 7485214 B2, US 7485214B2, US-B2-7485214, US7485214 B2, US7485214B2|
|Original Assignee||Stmicroelectronics S. R. L.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (41), Non-Patent Citations (3), Referenced by (6), Classifications (16), Legal Events (3)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application claims priority to application EP03425822.8, filed on Dec. 23, 2003.
The present invention relates to a microfluidic device, in particular a chemical microreactor for the analysis of charged molecules, such as nucleic acid, and to a method for increasing the local concentration of charged molecules in the device.
As is known, microfluidic devices may be exploited in a number of applications, and are particularly suited to be used as chemical microreactors. Thanks to the design flexibility allowed by semiconductor micromachining techniques, single integrated devices have been made that are capable of carrying out individual processing steps or even an entire chemical process.
In general, microfluidic chemical microreactors are provided with a microfluidic circuit, comprising a plurality of processing chambers in mutual fluidic connection through microchannels. In the most advanced microfluidic devices the microchannels are buried in a substrate and/or in an epitaxial layer of a semiconductor chip.
Substances to be processed, which are dispersed in a fluid medium, are supplied to one or more inlet reservoirs of the microfluidic circuit and are moved therethrough. Chemical reactions take place along the microfluidic circuit, either in the processing chambers or in the microchannels.
For example, microfluidic devices are widely employed in biochemical processes, such as nucleic acid analysis. Such microreactors may also be called “Labs-On-Chip.” In general, the microfluidic device may comprise one or more mixing chambers, heating chambers, dielectrophoretic cells, micropumps, amplification chambers, detection chambers, capillary electrophoresis channels, and the like. Heaters, sensors, controls, and the like may also be incorporated into the device.
Some reactions, however, are lengthy and their efficiency and speed depend on several factors, such as the likelihood of interaction between the substances involved. In particular, the likelihood of interaction is greatly affected by the concentration of the reagents.
For example, DNA amplification involves a series of enzyme-mediated reactions whose final result are identical copies of the target nucleic acid. In particular, Polymerase Chain Reaction (PCR) is a cyclical process where the number of DNA molecules substantially doubles at every iteration, starting from a mixture comprising target DNA, enzymes (typically a DNA polymerase such as TAQ), primers, the four dNTPs, cofactor, and buffer.
During a cycle, double stranded DNA is first separated into single strands (denatured). Then the primers hybridize to their complementary sequences on either side of the target sequence. Finally, DNA polymerase extends each primer, by adding nucleotides that are complementary to the target strand. This doubles the DNA content and the cycle is repeated until sufficient DNA has been synthesized.
Although PCR allows the production of millions of copies of target sequences in few hours, in many cases its efficiency and speed might be improved by increasing the concentration of the reagents. Similarly, end-point detection of amplified DNA (amplicons) by hybridization is highly concentration dependent.
However, in known microfluidic devices the reagents are merely supplied and moved through the microfluidic circuit (e.g. by a micropump coupled thereto). Thus, the reagents tend to be uniformly distributed and the concentration is exclusively determined by their amount and by the geometry of the microfluidic circuit.
The aim of the present invention is to provide a microfluidic device and a method for increasing the concentration of electrically charged substances in a microfluidic device, which overcome the above-described problem and, in particular, improve reaction efficiency by locally increasing reagent concentration.
According to the present invention there are provided a microfluidic device and a method for increasing the concentration of electrically charged substances in a microfluidic device, as defined in claims 1 and 11, respectively.
In particular, the microfluidic device includes a microfluidic circuit having an axis, and an electric field generator, arranged to establish an electric field (E) within at least a section of the microfluidic circuit, the electric field (E) being oriented transversally to the axis. The electric field is used to locally concentrate charged molecules, thus increasing the reaction rate. The electric field is established using N-type and P-type semiconductor materials and is thus very simple and cost effective to manufacture.
In a preferred embodiment, the microfluidic circuit comprises a buried channel, as defined and described in U.S. Pat. Nos. 6,770,471, 6,673,593, US20040096964, US20040227207, U.S. Pat. Nos. 6,710,311, 6,670,257, 6,376,291 and their related patents and applications (each incorporated by reference in their entirety).
In a preferred embodiment, the method can be applied to an integrated microreactor, but it is equally applicable to partially integrated microdevices. Further, although we have exemplified the inventive concept by reference to locally concentrating nucleic acid, it can be applied to any other charged molecules, such as proteins, glycoproteins, phospho-lipids, and the like.
For a better understanding of the present invention, some preferred embodiments are described, purely by way of non-limiting example, with reference to the attached drawings.
With reference to
Processing chambers 8 are formed at respective sections of the microfluidic circuit 5 and are mutually connected through connection segments 9. The processing chambers 8 are per se known and are not illustrated in detail. For example, the microfluidic circuit 5 may comprise mixing chambers, dielectrophoretic cells, an amplification or other reaction chamber, and a detection chamber.
In the embodiment described, the microfluidic circuit 5 extends along a substantially rectilinear path and has a longitudinal axis X, which is rectilinear and corresponds to the direction of movement of the fluid medium. However, it is understood that the microfluidic circuit 5 may have a plurality of non-aligned sections as well (rectilinear sections forming right angles or bent sections, for example). In this case, each section extends along a respective rectilinear or curvilinear axis, which corresponds to direction of movement of the fluid medium.
The microfluidic circuit 5 is buried inside the chip 1. In greater detail, the chip 1 comprises a substrate 10, of monocrystalline silicon, and a structural layer 11 of semiconductor material, for example an epitaxial or a polycrystalline layer. Both the substrate 10 and the structural layer 11 have N-type conductivity. Moreover, a conductive region 12, of P-type, extends through the structural layer 11, above the microfluidic circuit 5. The microfluidic circuit 5, which is preferably formed as a microfluidic channel having triangular cross-section (
Preferably, side walls 5 a and an upper wall 5 b of the microfluidic circuit 5 are coated with a silicon dioxide layer 14, having a thickness e.g. of between 0.1 μm and 1 μm. However, other coatings suitable for the application of interest may be used.
In practice, the processing chambers 8 and the connection segments 9 of the microfluidic circuit 5 are surrounded partly by an N-type region, comprising the substrate 10 and an external portion 11 a of the structural layer 11 around the conductive region 12, and partly by a P-type region, i.e. the conductive region 12 itself. N-type region 10, 11 a and P-type region 12 preferably extend along the whole processing chambers 8. Furthermore, P-N junctions 15 are formed between the conductive region 12 and the above defined N-type region, in particular the external portion 11 a of the structural layer 11. It is understood that conductive region 12 may overlap the substrate 10; in this case, the P-N junctions 15 extend to the substrate 10.
The voltage source 6 has a positive terminal 6 a connected to the external portion 11 a of the structural layer 11, and a negative terminal 6 b connected to the conductive region 12 (here grounded), and supplies a bias voltage VB, e.g. of 5 V. Hence, when the voltage source 6 is activated, the P-N junctions 15 are reverse biased and a voltage drop equal to the bias voltage VB is established between the external portion 11 a of the structural layer 11 and the conductive region 12. Accordingly, the same voltage drop is established between the side walls 5 a (surrounded by the substrate 10, of N-type) and the upper wall 5 b (overlaid by the conductive region 12, of P-type) of the microfluidic circuit 5, thus establishing an electric field E.
In order to carry out a nucleic acid analysis through the microfluidic device 2, substances to be processed (e.g. DNA or RNA molecules, polymerase, primers, and dNTPs or NTPs) are provided in the inlet reservoir 3 and moved toward the outlet reservoir 4 by the micropump (not shown).
As is well known, DNA 18 is negatively charged because it has an alternating phosphate-sugar backbone, each phosphate carrying a negative charge. Hence, DNA 18 (illustrated here as single stranded DNA) is subject to the action of the electric field E, once the voltage source 6 has been activated. In particular, the DNA 18 migrates toward high voltage regions according to its negative charge and to the field lines 17. In other words, the DNA 18 tends to concentrate in the vicinity of the side walls 5 a, which are at the bias voltage VB, whereas the microfluidic circuit 5 is depleted of DNA 18 around the upper wall 5 b, which is maintained at a lower voltage (ground). Therefore, the concentration of DNA 18 is increased around the positive-biased regions of the microfluidic circuit 5 with respect to a homogeneous concentration over a cross-section of the microfluidic circuit 5.
It is clear from the above description that the invention advantageously allows the user to locally modify the concentration of DNA or other electrically charged reagents, in order to favor interactions and improve the speed and the efficiency of the reactions. Moreover, the integration of the microfluidic device 2 inside the chip 1 is cheap and simple, since only standard microfabrication steps are required.
According to a second embodiment shown in
The positive terminal 6 a and the negative terminal 6 b of the voltage source 6 are connected to the substrate 24 and to the structural layer 25 (here grounded), respectively. Hence, when the voltage source 6 is activated, the P-N junctions 27 are reverse-biased (with the bias voltage VB). Furthermore, a voltage field E′ is established within the microfluidic circuit 22, owing to the voltage drop between the substrate 24 and the structural layer 25. In
Hence, when the voltage source 6 is activated, the DNA 18 or other negatively charged substances tend to concentrate at the lower portion 22 b, which is surrounded by the N-type substrate 24 of the chip 20.
Further advantages are provided by the above-described embodiment. In the first place, higher concentration of DNA 18 or other negatively charged substances may be obtained because the negatively charged particles are confined in a small volume by the electric field E′. Second, the microfluidic device 21 is even simpler to manufacture, because the microfluidic circuit 21 is mostly embedded in the structural layer 25, rather than in the substrate 24.
A third embodiment of the invention is shown in
Hence, a high bias voltage VB, even of several tens of volts, may be advantageously applied between the substrate 44 and the structural layer 45, without danger of inverse breakdown. Accordingly, also a high electric field E″ (lines 47 in
Finally, it is clear that numerous modifications and variations may be made to the microfluidic device and to the methods described and illustrated herein, all falling within the scope of the invention, as defined in the attached claims. For example, the semiconductive regions (substrate, structural layer, conductive region) of the chip housing the microfluidic device may have dual conductivity with respect to those described above. Accordingly, either the concentration of positively charged substances in the lower portion or the concentration of negatively charged substances in the upper portion of the microfluidic circuit is increased. The microfluidic circuit may also have a different configuration, e.g. its cross section may have rectangular or circular shape.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US4993143||Mar 27, 1990||Feb 19, 1991||Delco Electronics Corporation||Method of making a semiconductive structure useful as a pressure sensor|
|US5133844||Mar 15, 1990||Jul 28, 1992||United States Department Of Energy||Method of electric field flow fractionation wherein the polarity of the electric field is periodically reversed|
|US5429734||Oct 12, 1993||Jul 4, 1995||Massachusetts Institute Of Technology||Monolithic capillary electrophoretic device|
|US5582701||Dec 20, 1994||Dec 10, 1996||Massachusetts Institute Of Technology||Ionic liquid-channel charge-coupled device|
|US5637469||Nov 30, 1994||Jun 10, 1997||Trustees Of The University Of Pennsylvania||Methods and apparatus for the detection of an analyte utilizing mesoscale flow systems|
|US5639423||Aug 31, 1992||Jun 17, 1997||The Regents Of The University Of Calfornia||Microfabricated reactor|
|US5922591||Jun 27, 1996||Jul 13, 1999||Affymetrix, Inc.||Integrated nucleic acid diagnostic device|
|US5939312||May 17, 1996||Aug 17, 1999||Biometra Biomedizinische Analytik Gmbh||Miniaturized multi-chamber thermocycler|
|US5942443||Jun 28, 1996||Aug 24, 1999||Caliper Technologies Corporation||High throughput screening assay systems in microscale fluidic devices|
|US6046056||Dec 6, 1996||Apr 4, 2000||Caliper Technologies Corporation||High throughput screening assay systems in microscale fluidic devices|
|US6136171||Sep 18, 1998||Oct 24, 2000||The University Of Utah Research Foundation||Micromachined electrical field-flow fractionation system|
|US6136630 *||Jun 3, 1999||Oct 24, 2000||The Regents Of The University Of Michigan||Method of making a micromechanical device from a single crystal semiconductor substrate and monolithic sensor formed thereby|
|US6261431||Dec 28, 1998||Jul 17, 2001||Affymetrix, Inc.||Process for microfabrication of an integrated PCR-CE device and products produced by the same|
|US6267858||Jun 24, 1997||Jul 31, 2001||Caliper Technologies Corp.||High throughput screening assay systems in microscale fluidic devices|
|US6376291||Apr 25, 2000||Apr 23, 2002||Stmicroelectronics S.R.L.||Process for manufacturing buried channels and cavities in semiconductor material wafers|
|US6518022||Nov 22, 1999||Feb 11, 2003||Nanogen, Inc.||Method for enhancing the hybridization efficiency of target nucleic acids using a self-addressable, self-assembling microelectronic device|
|US6537437||Nov 13, 2000||Mar 25, 2003||Sandia Corporation||Surface-micromachined microfluidic devices|
|US6670257||Apr 7, 2000||Dec 30, 2003||Stmicroelectronics S.R.L.||Method for forming horizontal buried channels or cavities in wafers of monocrystalline semiconductor material|
|US6673593||Feb 8, 2001||Jan 6, 2004||Stmicroelectronics S.R.L.||Integrated device for microfluid thermoregulation, and manufacturing process thereof|
|US6710311||Jun 4, 2001||Mar 23, 2004||Stmicroelectronics S.R.L.||Process for manufacturing integrated chemical microreactors of semiconductor material|
|US6727479||Apr 22, 2002||Apr 27, 2004||Stmicroelectronics S.R.L.||Integrated device based upon semiconductor technology, in particular chemical microreactor|
|US6770471||Sep 26, 2001||Aug 3, 2004||Stmicroelectronics S.R.L.||Integrated chemical microreactor, thermally insulated from detection electrodes, and manufacturing and operating methods therefor|
|US20010036672||Dec 31, 2000||Nov 1, 2001||Anderson Rolfe C.||Integrated nucleic acid diagnostic device|
|US20020022261||Dec 31, 2000||Feb 21, 2002||Anderson Rolfe C.||Miniaturized genetic analysis systems and methods|
|US20020055167||Nov 7, 2001||May 9, 2002||Cepheid||Device incorporating a microfluidic chip for separating analyte from a sample|
|US20020060156||Jul 16, 2001||May 23, 2002||Affymetrix, Inc.||Integrated microvolume device|
|US20020066319||Aug 7, 2001||Jun 6, 2002||Beach Robert A.||Semiconductor nitride pressure microsensor and method of making and using the same|
|US20020068334||May 25, 2001||Jun 6, 2002||Nanogen, Inc. /Becton Dickinson Partnership||Multiplex amplification and separation of nucleic acid sequences using ligation-dependant strand displacement amplification and bioelectronic chip technology|
|US20020068357||Aug 9, 2001||Jun 6, 2002||Mathies Richard A.||Miniaturized integrated nucleic acid processing and analysis device and method|
|US20020071785||Aug 7, 2001||Jun 13, 2002||Beach Robert A.||Integrated micropump analysis chip and method of making the same|
|US20020084510 *||Dec 14, 2001||Jul 4, 2002||Jun Chi Hoon||Microchannel array structure embedded in silicon substrate and its fabrication method|
|US20020097900||Aug 14, 2001||Jul 25, 2002||Stmicroelectronics S.R.1.||System for the automatic analysis of images such as DNA microarray images|
|US20020117659 *||Dec 11, 2001||Aug 29, 2002||Lieber Charles M.||Nanosensors|
|US20030070677||Jul 23, 2001||Apr 17, 2003||The Regents Of The University Of Michigan||Compositions and methods for liquid metering in microchannels|
|US20030127329 *||Jun 1, 2002||Jul 10, 2003||Devoe Donald Lad||Field effect flow control apparatus for microfluidic networks|
|US20040096964||Nov 12, 2003||May 20, 2004||Stmicroelectronics S.R.1.||Integrated device for amplification and other biological tests, and manufacturing process thereof|
|US20040227207||Sep 18, 2003||Nov 18, 2004||Stmicroelectronics S.R.L.||Method for forming horizontal buried channels or cavities in wafers of monocrystalline semiconductor material|
|US20050247357 *||Jun 24, 2004||Nov 10, 2005||Welle Richard P||Microfluidic valve apparatuses with separable actuation and fluid-bearing modules|
|JPS60251873A *||Title not available|
|WO1996015576A1||Nov 9, 1995||May 23, 1996||David Sarnoff Research Center, Inc.||Liquid distribution system|
|WO1998025701A1||Dec 3, 1997||Jun 18, 1998||The Regents Of The University Of California||Microfabricated sleeve devices for chemical reactions|
|1||Canter, On-Chip Amplification of Genomic DNA with Short Tandem Repeat and Single Nucleotide Polymorphism Analysis, Nanogen website.|
|2||Search report, EP 03 425 822 filed May 26, 2004.|
|3||Zhang, N., Automated and Integrated System for Thigh-Throughput DNA Genotyping Directly from Blood, Analytical Chemistry, Mar. 15, 1999, pp. 1138-1145, vol. 71(6).|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US8377280 *||Feb 19, 2013||Vecenergy Aegir, Llc||Microscale capacitive deionization apparatus|
|US9128101||Mar 1, 2011||Sep 8, 2015||Caris Life Sciences Switzerland Holdings Gmbh||Biomarkers for theranostics|
|US9469876||Apr 6, 2011||Oct 18, 2016||Caris Life Sciences Switzerland Holdings Gmbh||Circulating biomarkers for metastatic prostate cancer|
|US20080023333 *||Jul 17, 2007||Jan 31, 2008||Brendan Johnson||Microscale capacitive deionization apparatus|
|EP2730662A1||Nov 12, 2009||May 14, 2014||Caris Life Sciences Luxembourg Holdings||Methods and systems of using exosomes for determining phenotypes|
|WO2014068408A2||Oct 23, 2013||May 8, 2014||Caris Life Sciences Switzerland Holdings, S.A.R.L.||Aptamers and uses thereof|
|U.S. Classification||204/660, 204/601, 204/600|
|International Classification||B03C5/02, G01N1/40, B01L3/00|
|Cooperative Classification||G01N2001/4038, B01L2200/0647, B01L2300/0887, B01L2400/0415, B01L3/502707, B03C5/026, B01L3/502753|
|European Classification||B01L3/5027G, B01L3/5027A, B03C5/02B4|
|Mar 31, 2005||AS||Assignment|
Owner name: STMICROELECTRONICS S.R.L., ITALY
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PALMIERI, MICHELE;REEL/FRAME:015987/0953
Effective date: 20050222
|Jul 25, 2012||FPAY||Fee payment|
Year of fee payment: 4
|Jul 22, 2016||FPAY||Fee payment|
Year of fee payment: 8