|Publication number||US7537149 B2|
|Application number||US 11/528,299|
|Publication date||May 26, 2009|
|Filing date||Sep 26, 2006|
|Priority date||Sep 26, 2006|
|Also published as||US20080073407, WO2008039634A2, WO2008039634A3|
|Publication number||11528299, 528299, US 7537149 B2, US 7537149B2, US-B2-7537149, US7537149 B2, US7537149B2|
|Inventors||Theodore J. Copperthite|
|Original Assignee||Orthodyne Electronics Corporation|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (18), Classifications (24), Legal Events (3)|
|External Links: USPTO, USPTO Assignment, Espacenet|
1. Field of Invention
The present invention relates generally to ribbon bonding systems and, in particular, to bond heads for such systems.
2. Related Art
In the manufacture of semiconductor devices, active elements in a semiconductor device, such as drain and/or source regions in a semiconductor die, are electrically connected to other devices or electronic components, such as on a printed circuit board. Typically, the connection is made by bonding, e.g., ultrasonically bonding, a conductive wire between the two portions. Examples of electrical connections which can be made using wire bonding techniques include connections between the contact surfaces of discrete or integrated chips and the contact leads of their packages, and, in the case of hybrid circuits, the connections between inserted monolithic elements and the film circuit which contains them.
A number of bonding techniques have been developed, and one which has been particularly successful is a micro-welding technique using ultrasound. Conductive wire, in contact with the surface to which it is to be bonded, is moved rapidly in the direction of the surface to which it is to be bonded, so that its oxide layer breaks open. The wire is then subjected to pressure, and a permanent joint is created between the two materials. Motion of the wire is generated by an ultrasonic transducer excited by an ultrasonic generator to produce high-frequency mechanical vibrations.
One type of ultrasonic bonding uses a wedge bonding tool. The ultrasonic energy is directed to the wire by the wedge tool. The wire is fed through a guide at the bottom of the wedge. The wire is then pressed down with a small defined force to slightly deform the wire. Ultrasonic energy is then switched on, and the bonding process starts. During this time, the wire portion under the bond tool is deformed, primarily widened, with the actual change in shape depending on the size and the physical properties of the wire, the bond tool geometry, and the process parameter settings.
In addition to wires, flexible conductive ribbons can be used to electrically connect two bonding areas. Compared to round wires, wide and thin ribbons allow bonding larger cross sections and creating larger contact areas. Ultrasonic bonding can also be used to connect the ribbon to a bonding surface. Ribbon bonding is disclosed in commonly-owned U.S. Patent Publication No. 20040217488, filed May 2, 2003, which is hereby incorporated by reference in its entirety.
A typical bond head for ribbon bonding includes a transducer with a slot through which the ribbon passes. A clamping mechanism, such as two opposing clamp arms, holds the ribbon near the bonding area. In operation, the ribbon passes through the slot in the transducer, where it is held by the two opposing clamp arms. The bond head is brought down onto the ribbon and the bonding surface with ultrasonic energy to bond the ribbon to the bonding surface.
This type of bond head has certain disadvantages. Because the ribbon can be very wide, e.g., 80 mil or wider, the slot necessarily has to be very wide. Wide slots may require the transducer to be re-designed, especially if the slot is near the same width or greater than the diameter of the transducer cone. The ribbon can also easily rub against the slot, especially when the ribbon and slot are comparable in size. As a result, the ribbon can be damaged or subject to unnecessary wear. Another disadvantage is with the clamping mechanism. Since the ribbon passes between the two clamp arms, it is difficult for the user to access the ribbon for deep access bonding. If the faces of the clamp arms are not as wide as the ribbon, the ribbon may not be clamped securely, thereby possibly comprising the quality of the bond or damaging the ribbon.
Therefore, there is a need for a bond head that overcomes the disadvantages of conventional ribbon bond heads discussed above.
According to one aspect of the invention, a ribbon bond head assembly includes a ribbon guide tube connected to the bond head, where the ribbon exits the guide tube, passes through the bond head and by the transducer. Thus, the ribbon does not pass through a slot in the transducer, but rather passes outside the transducer. The ribbon head assembly also includes a clamping assembly comprised of a stationary body having a planar portion against which one side of the ribbon contacts and an opposing movable clamp arm having an open interior portion and a planar end portion for clamping the ribbon against the stationary body. This enables the user easy access to the ribbon from the front, yet still allows relatively long, narrow sections to be secured near the tip of the bond tool for deep access bonding. In another embodiment, the clamping assembly has a stationary body and a stationary clamp arm, with a separation between the two sufficient to allow the ribbon to freely move through the clamp, but not so wide such that the ribbon can be twisted and turned.
These and other features and advantages of the present invention will be more readily apparent from the detailed description of the preferred embodiments set forth below taken in conjunction with the accompanying drawings.
Embodiments of the present invention and their advantages are best understood by referring to the detailed description that follows. It should be appreciated that like reference numerals are used to identify like elements illustrated in one or more of the figures.
A flexible conductive ribbon passes through an opening in ribbon guide tube 108 from the de-spooling system out to bond head assembly 100, where it passes through bond head assembly 100, in front of transducer 106, and down to clamp 104. Clamp 104 holds the ribbon for bonding to electrically connect two elements, such as a die and an external lead in a package. The connection to the die is by ultrasonic bonding in one embodiment. Bonding of the lead may also be by ultrasonic bonding. The ribbon is of a rectangular cross-section and can be of a single layer, such as aluminum or copper, or can be of multiple layers, such as a thin aluminum bonding layer underlying a thicker copper conducting layer. In some embodiments, a single ribbon is used, while in other embodiments, multiple parallel ribbons are bonded.
The size of the ribbon can be of different widths and thicknesses. For example, the width of the ribbon may range from 20 mil to 100 mil or more. In one embodiment, the width is 120 mil. Larger width ribbons generally are able to replace larger numbers of wires. The thickness of the ribbon may range from 2 mil to 10 mil or more, although lower thicknesses may be possible with improved equipment and processes. In one embodiment, the thickness is 12 mil. Some typical sizes for the ribbon are 20 mil×2 mil, 20 mil×4 mil, 30 mil×3 mil, 40 mil×4 mil, 50 mil×5 mil, 60 mil×8 mil, 80 mil×6 mil, 80 mil×8 mil, 80 mil×10 mil, and 100 mil×10 mil.
In operation, according to one embodiment, ribbon is fed from the de-spooler, passing outside transducer 106, and clamped near a bonding area by clamp 104. A portion of the ribbon is then pressed against the bonding area by the bond head, such as a wedge tool, to deform the ribbon. Ultrasonic energy from transducer 106 is applied to the ribbon, thereby forming the bond. The bond head is then moved to the next bonding area or a cutter is brought down onto the ribbon to cut the ribbon.
As shown in
Accordingly, the clamps enable the ribbon to be constrained during a looping operation so that a repeatable loop shape is obtained. The clamps hold the end or free “tail” of the ribbon in a correct location when moving to the next bonding position. The opening in the movable clamp arm gives the user easy access to the ribbon from the front, yet still allows relatively long, narrow sections down to near the tip of the bond tool or wedge.
The above-described embodiments of the present invention are merely meant to be illustrative and not limiting. It will thus be obvious to those skilled in the art that various changes and modifications may be made without departing from this invention in its broader aspects. Therefore, the appended claims encompass all such changes and modifications as fall within the true spirit and scope of this invention.
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|JP2007035827A *||Title not available|
|U.S. Classification||228/1.1, 228/4.5|
|International Classification||B23K1/06, B23K37/00|
|Cooperative Classification||H01L2224/45147, H01L2224/45124, H01L2924/01082, H01L2224/45014, B23K1/06, B23K20/10, H01L2224/78, H01L24/78, H01L2924/01013, H01L2924/01033, H01L2924/01029, B23K20/004, H01L2924/00014, B23K20/106, H01L2924/01075|
|European Classification||H01L24/78, B23K20/10, B23K20/00D2, B23K20/10D, B23K1/06|
|Nov 7, 2006||AS||Assignment|
Owner name: ORTHODYNE ELECTRONICS CORPORATION, CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:COPPERTHITE, THEODORE J.;REEL/FRAME:018491/0097
Effective date: 20060926
|Nov 26, 2012||FPAY||Fee payment|
Year of fee payment: 4
|Nov 28, 2016||FPAY||Fee payment|
Year of fee payment: 8