|Publication number||US7650897 B2|
|Application number||US 10/536,624|
|Publication date||Jan 26, 2010|
|Filing date||Nov 28, 2003|
|Priority date||Nov 29, 2002|
|Also published as||CN1711140A, CN100352557C, DE10255884A1, DE10255884B4, DE50303397D1, EP1565268A1, EP1565268B1, US20060102213, WO2004050256A1|
|Publication number||10536624, 536624, PCT/2003/13421, PCT/EP/2003/013421, PCT/EP/2003/13421, PCT/EP/3/013421, PCT/EP/3/13421, PCT/EP2003/013421, PCT/EP2003/13421, PCT/EP2003013421, PCT/EP200313421, PCT/EP3/013421, PCT/EP3/13421, PCT/EP3013421, PCT/EP313421, US 7650897 B2, US 7650897B2, US-B2-7650897, US7650897 B2, US7650897B2|
|Inventors||Lorenz Kopp, Henry Kunze, Ferdinand Wiener|
|Original Assignee||Atotech Deutschland Gmbh|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (25), Referenced by (3), Classifications (20), Legal Events (4)|
|External Links: USPTO, USPTO Assignment, Espacenet|
The present invention concerns a nozzle arrangement, as may be applied in the treatment of a work piece with a treatment fluid or in the flooding of a corresponding treatment bath with a treatment fluid. In particular the present invention concerns a flow nozzle arrangement which can, for example, be applied in continuous systems for wet-chemical treatment of printed-circuit boards.
Nozzle arrangements of the type mentioned are widely known. Thus, for example, such nozzle arrangements are used in continuous systems for wet-chemical treatment of printed-circuit boards in order to achieve the fastest and most even possible treatment of the printed-circuit boards passing through. For this purpose in a known fashion various such nozzle arrangements are arranged above and/or below the level at which the printed-circuit boards pass through as well as diagonally to this direction of flow of the printed-circuit boards, from which the corresponding treatment fluid is sprayed onto the surface of the printed-circuit board or is sucked from it, in order to achieve a constant and even exchange of the treatment fluid along the surface of the printed-circuit boards.
In EP 1 187 515 A2 a number of different nozzle arrangements are proposed in this connection. Here essentially round tubes are used that have various nozzle forms. Thus these nozzle arrangements may, for example, have slot nozzles arranged diagonally, round nozzles arranged alongside each other in rows or also a number of slot nozzles arranged alongside each other and running in an axial direction.
DE 37 08 529 A1 also proposes the use of slot nozzles, whereby by means of a variable slot width of the corresponding nozzle the flow quantity and the spray pressure of the respective medium can be adjusted.
In DE 35 28 575 A1 for cleaning, activation and/or metallization of bore holes in printed-circuit boards passing through horizontally a nozzle below the level at which these pass through and vertically to the direction of flow is used, from which a fluid treatment means in the form of a constant wave is delivered onto the underside of each printed-circuit board that passes through. The nozzle is arranged in the top part of a nozzle housing, which comprises a pre-chamber with inlet nozzle, whereby the pre-chamber is, in turn, separated from an upper part of the inner area of the nozzle by means of a shadow mask. With the help of the shadow mask a distribution of the flow of the fluid treatment means to the nozzle is achieved. The inner area of the nozzle before the actual (slot) nozzle serves as the pre-chamber for an even build-up of the flow of the fluid treatment means.
EP 0 280 078 B1 reveals a nozzle arrangement for cleaning or chemical treatment of work pieces, in particular printed-circuit boards, by means of a corresponding treatment fluid. The nozzle arrangement comprises a lower admission box and a housing box, whereby via the lower admission box the treatment fluid is passed via bore holes in the floor of the housing box into the inside of the housing box. The housing box, in turn, has a central separating wall in combination with two perforation levels and slots arranged on this, which allows the treatment fluid to flow to both slots and via these to form two even, sinusoidal surge wave profiles, which the work pieces, in particular the bore holes of printed-circuit boards, pass through, and by means of the Venturi effect ensure an intensive mass transfer.
In the known flow nozzle arrangements the speed of flow at the inlet is at a maximum, since it is here that the greatest flow volume passes through. With increasing distance from the inlet the flow speed drops accordingly, since via each of the individual nozzle openings only part of the treatment fluid discharges. Apart from the existing static pressure, this leads to banking-up pressure and uneven flow speeds at the nozzle openings. A further consequence is unevenness in the quantities of the treatment fluid discharged.
The object of the present invention is therefore to provide a nozzle arrangement for releasing a treatment fluid, in which an extensively even flow speed and flow quantity of the treatment fluid in the longitudinal direction of the nozzle arrangement can be achieved. Further requirements that are preferably to be met are a high level of compactness of the nozzle section, in order to use the smallest possible amount of space in systems of the abovementioned type. Apart from this, the number of components and the production costs should be kept low. In addition the spray or flow geometry and the spray direction should preferably be the same at all discharge openings.
The object is achieved according to the invention by a nozzle arrangement as described herein. Preferred and advantageous embodiments of the present invention are also described.
The nozzle arrangement according to the invention has an elongated housing with at least one fluid feed opening for the feeding of a treatment fluid and with at least one fluid delivery opening formed in the housing for releasing the treatment fluid onto the work piece to be treated. In the housing a fluid channel is formed for feeding the treatment fluid from the fluid feed opening to the at least one fluid delivery opening. The minimum of one delivery opening can be slotted or be designed as a row of round bore holes arranged behind one another with an even spacing.
According to a first embodiment of the present invention the section of the fluid channel reduces from the fluid feed opening in the longitudinal direction of the housing, whereby a continuous reduction in the section of the fluid channel in the longitudinal direction and along the minimum of one fluid delivery opening can be provided. By means of this adaptation of the flow section of the fluid channel to the distance from the fluid feed opening or from the fluid inlet, where the greatest fluid quantity passes through, balancing of the flow speed along the entire length of the nozzle arrangement and thus along the at least one fluid delivery opening can be achieved.
In a housing with the same section in the longitudinal direction a longitudinal insert can be provided, the section of which reduces in the longitudinal direction from the fluid feed opening, so that it reduces according to the section of the fluid channel. The insert is preferably arranged in relation to the fluid delivery openings in such a way that all fluid delivery openings have delivery channels of the same length.
It is also equally possible, however, for the thickness of the housing wall to increase at one or more points in the longitudinal direction of the housing from the fluid feed opening.
The insert in the inside of the nozzle arrangement can, for example, also comprise a large number of individual sections or segments. These may be displacers or perforated bodies. In this way, for example, 60 parts per nozzle arrangement, depending on the required length, with differing section, or for discs with a differing inside diameter, are arranged in a row. The individual sections can be glued, welded, or held together with tie rods or with a stiffener. The flow cross section for the fluid decreases constantly here from section to section from the first segment at the fluid entry to the end of the nozzle arrangement. If, for example, one of the sections has a delivery opening, the storage chamber in the section can be cylindrical and not conical. This results in a stepped fluid channel with very low production costs.
According to a second embodiment of the present invention the fluid channel communicates via several distribution openings separated from one another in the longitudinal direction of the housing, and which differ in length. If the length of these distribution openings is increasingly altered starting from the fluid feed opening in the longitudinal direction of the housing, then likewise balancing of the speed of flow of the treatment fluid over the entire length of the nozzle arrangement at the nozzle or fluid delivery openings can be achieved. The differing lengths of the bore holes or distribution openings result in differing flow resistances which lead to a balancing of the flow speed.
The abovementioned distribution openings can all have the same diameter. Similarly, however, it is also conceivable for the distribution openings to be designed with differing diameters. The decisive factor for the change in diameter is a differing flow speed in the feed channel and the associated differing overall pressure conditions.
According to a further variant, therefore, it is proposed that the distribution openings have differing diameters at the fluid delivery and that these are provided with countersinkings with the same diameters. If the diameter of the countersinkings is selected to be identical, then a further evening out of the volume flow and the delivery speed takes place.
The above distribution openings can be fashioned in an insert of the abovementioned type in the form of corresponding bore holes. The insert can be retained with the help of a preferably U-shaped stiffener in the housing.
It has been observed that through the dynamic forces of the flowing fluid the jet is not delivered at the fluid delivery openings in the angle of the opening channel, but diagonally in the direction of flow of the treatment fluid. With increasing length of the delivery channel this effect reduces. This likewise leads to an uneven treatment result on the sensitive treatment product.
It is therefore particularly advantageous if between the at least one fluid delivery opening and the fluid channel a storage chamber is provided, for example in the form of a corresponding milling or recess of the aforementioned insert, which serves to further distribute the pressure and to reduce the dynamic forces. The distribution openings are arranged in a preferred embodiment in such a way that the jet of fluid delivered bounces against the wall in which the fluid delivery openings are arranged. Then the jet is deflected diagonally and bounces against the wall of the milled-out insert, before flowing against the treatment product or work piece once it has been deflected again by the fluid delivery opening.
The fluid delivery opening or the inlet for the treatment fluid can be arranged on a longitudinal side of the housing. It is, of course, conceivable for this fluid delivery opening to be arranged in a central section of the housing however.
The fluid delivery openings are preferably in the form of several slots arranged at intervals in the longitudinal direction of the housing which can all have identical dimensions or also different dimensions. It is particularly advantageous if the fluid delivery openings are designed in the form of several rows of slots offset against each other, which each run in the longitudinal direction of the housing. In place of the offset rows of slots, however, rows of bore holes can also be used. In both cases an even flow against the treatment product takes place.
It is also important that the distance from the fluid delivery openings and the treatment product is always the same. This should avoid the nozzle arrangement bending under the build-up or jet pressure of the treatment fluid. High temperatures or deformations caused by the production process (e.g. those brought about by welding) should also be avoided. The required stability can in particular be achieved by having longitudinally arranged metal stiffeners on or in the nozzle arrangement.
According to a further embodiment, the nozzle arrangement according to the invention can also have a preferably bilaterally continuously reducing section of the fluid channel, whereby on one side of the housing a fluid-tight lid or covering is arranged on the housing which together with the housing defines the fluid delivery openings. According to this embodiment the fluid delivery openings, in particular, comprise a plurality of slots arranged in the longitudinal direction of the nozzle arrangement at intervals and which run diagonally to the longitudinal direction, i.e. in the width direction of the nozzle arrangement, whereby the fluid delivery openings are arranged bilaterally on the nozzle arrangement. Each slot or connecting channel thus communicates at one end with the fluid channel of the housing and at the other flows into each of two fluid delivery openings.
This embodiment is particularly well suited to the totally even flooding of treatment baths with a treatment fluid or a treatment medium. In certain processes where there is a danger of substances being absorbed from the environment, such as for example oxygen from the air, the flooding must be carried out as far as possible without the formation of jets or vortexes that could increase the surface area of the treatment fluid. This object is achieved by the nozzle arrangement according to the embodiment described above by an even, slow flow speed over the entire effective length of the nozzle arrangement.
The last embodiment given can be combined with the features of the embodiments described before it. Of course the last embodiment given may also be constructed without the features described above concerning the creation of a storage chamber or the use of distribution openings, etc.
The nozzle arrangement according to the invention is preferably suited to use as a flow nozzle in wet-chemical systems with a horizontal throughput of the printed-circuit boards. The present invention is not, of course, limited to this preferred range of application, however. It can be used wherever a work piece has to have a flow against it from a nozzle arrangement of a treatment fluid, for example also for cleaning or chemical treatment etc. of the work piece or wherever the most even possible flooding of a treatment bath with a treatment fluid of this kind has to be possible. In its most generalized form, therefore, the invention can be used wherever the most even possible release of a treatment fluid is desired.
The present invention is explained in more detail in the following with reference to the attached drawings on the basis of a preferred embodiment.
The nozzle arrangement illustrated in
In the inside of the housing 2 a wedge-shaped insert 3, which is preferably made from plastic is arranged, along with a U-shaped stiffener 4 for stabilising this insert 3 that is made from a metal that is resistant to the chemicals used, such as special steel, titanium, niobium or similar.
As described in more detail in the following, the purpose of the insert 3 is to balance the flow speed in the fluid channel and thus to evenly distribute the treatment fluid over the entire length of the nozzle arrangement.
As can be seen from
The nozzle arrangement has, on the surface opposite to the treatment product and along its length the preferably evenly spaced delivery openings 8 in the form of through holes, which in the embodiment illustrated all have the same diameter. In place of the bore holes illustrated slotted delivery opening can also be used.
As can be seen, again, from
Since on account of the wedge-shaped insert 3 the flow speed at all points of the fluid channel 5 is the same and all delivery openings 8 have the same dimensions, a very even spray picture results.
The distribution openings 7 have differing lengths due to the wedge-shaped insert 3. If this difference in length proves troublesome the bore holes can be provided with countersinkings 9 of differing length in accordance with detail D (illustrated in
A combination of the continuously reducing fluid channel 5 from the feed opening to the opposite end of the nozzle arrangement communicating with the storage chamber 6 and the multiple deviations of the fluid flow before delivery from the delivery openings 8 (e.g. a row of slots) ensures that the same quantity of fluid emerges from each slot and at the same discharge speed.
As can be seen from
In the embodiments illustrated in
The flow resistance in the distribution openings 7 increases continuously because of their increasing length. In order that this does not have any effect on the fluid distribution, the inclination of the insert 3, illustrated in
A combination of the two measures (inclined or tapered insert and fluid deviation in the additional storage chamber) leads to the best results, since the reduction in section of the fluid channel 5 alone can possibly only bring about an inadequate pressure equalisation and the jets emerge diagonally. Since with this combination the delivery openings 8 preferably all have the same widths or diameters, the same volume of fluid per unit of time flows from all the delivery openings.
Nevertheless, by taking just one of the two measures described above it may be possible in a particular application to achieve a sufficiently even flow speed of the treatment fluid to the delivery openings 8.
Of course, a number of modifications to the embodiments illustrated in the figures are conceivable, without deviating from the basic ideas of the invention. Thus, for example, the connecting sleeve 1 could be moved to the middle of the housing 2 of the nozzle arrangement, so that the feed of the treatment fluid takes place centrally. With this variant the throughput section of the fluid channel 5 inside the housing 2 from the central connecting sleeve 1 to both ends of the housing 2, i.e. bilaterally, would decrease and the thickness of the insert 3, correspondingly from the central connecting sleeve 1 to the two ends would increase in width, so that the length of the distribution openings 7 in the insert 3 also increases bilaterally.
Furthermore, in the embodiments illustrated the continuously reducing throughput section of the fluid channel 5 is achieved solely through the increasing width of the insert 3. It is, of course, also conceivable for several side faces of the fluid channel 5 to be increasingly broadened in the longitudinal direction of the housing 2. On top of this it may be possible to dispense with the storage chamber 6 for further pressure distribution.
In order to improve the evenness of the flow speed the slotted delivery openings 8 may also have a different width, whereby the width, in particular in the longitudinal direction of the housing 2, can decrease from the inlet sleeve 1. This generally leads to differing volume flows that may cause varying results on the treatment product.
Notwithstanding the embodiments illustrated the distribution openings 7 may also be designed with differing diameters, whereby in order to create a continuously increasing flow resistance in particular a continuous reduction in the diameter of the distribution openings 7 is conceivable, since towards the end of the nozzle arrangement the overall pressure is at its highest.
On the side of the distribution openings 7 bordering the fluid channel 5 the former can be provided with countersinkings 9 with a larger diameter (see
It may also be possible to dispense with the stiffener 4 illustrated in the drawing. It is also conceivable that the insert 3 and the housing 2 are built as a single piece. Finally, it should be mentioned that with the embodiment illustrated a number of delivery openings 8 are in fact provided at intervals in the longitudinal direction of the housing 2, which are in particular evenly spaced and arranged in two rows of slots that are arranged with an offset to one another, whereby in principle, however, a proper and satisfactory operability of the nozzle arrangement is also guaranteed with simply an, in particular, longitudinal delivery opening 8, for example with just a slotted delivery opening 8 extending in the longitudinal direction of the housing 2.
The nozzle arrangement shown in
The nozzle arrangement illustrated in
On one side of the housing 2 a fluid-tight lid or covering 11 is arranged on the housing by means of a suitable jointing method such as welding or gluing. As can be seen from
As can be seen from
Of course, the nozzle arrangement illustrated in
The description of the nozzle arrangement according to the invention involves, in all the embodiments, the transport of the treatment fluid from the nozzle arrangement to the treatment product. The nozzle arrangement functions in the same way as well for the sucking of the treatment fluid from the treatment product into the nozzle arrangement. If during the treatment decomposition products result or solid matter is applied, this form of electrolyte transport is particularly advantageous. By sucking the treatment liquid into the nozzle arrangement the decomposition products or solid matter are entrained and thus reach a regeneration unit or a filter that removes the solid matter, as quickly as possible. Interference with the treatment results by this matter is thus virtually excluded.
Distribution openings (distribution bore holes)
Fluid delivery openings
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|U.S. Classification||134/198, 239/548, 134/72, 134/86|
|International Classification||B08B3/02, H05K3/00, B05B1/20, B08B6/00, B08B3/12, H01L21/00|
|Cooperative Classification||B05B1/205, H01L21/67051, B08B3/02, H05K2203/0746, H05K3/0085, H05K2203/1509|
|European Classification||H01L21/67S2D4W4, B05B1/20D, H05K3/00P, B08B3/02|
|Oct 11, 2005||AS||Assignment|
Owner name: ATOTECH DEUTSCHLAND GMBH, GERMANY
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KOPP, LORENZ;KUNZE, HENRY;WIENER, FERDINAND;REEL/FRAME:016866/0655;SIGNING DATES FROM 20050523 TO 20050613
|Mar 14, 2013||FPAY||Fee payment|
Year of fee payment: 4
|Feb 1, 2017||AS||Assignment|
Owner name: BARCLAYS BANK PLC, AS COLLATERAL AGENT, NEW YORK
Free format text: SECURITY INTEREST;ASSIGNORS:ATOTECH DEUTSCHLAND GMBH;ATOTECH USA INC;REEL/FRAME:041590/0001
Effective date: 20170131
|Jul 17, 2017||FPAY||Fee payment|
Year of fee payment: 8