|Publication number||US7733101 B2|
|Application number||US 11/450,977|
|Publication date||Jun 8, 2010|
|Filing date||Jun 9, 2006|
|Priority date||May 21, 2004|
|Also published as||US20070152686, WO2007146186A2, WO2007146186A3|
|Publication number||11450977, 450977, US 7733101 B2, US 7733101B2, US-B2-7733101, US7733101 B2, US7733101B2|
|Original Assignee||Microprobe, Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (135), Non-Patent Citations (1), Referenced by (15), Classifications (8), Legal Events (5)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application is a continuation in part of U.S. application Ser. No. 10/850,921, filed on May 21, 2004, now U.S. Pat. No. 7,148,709 entitled “Freely Deflecting Knee Probe with Controlled Scrub Motion”.
This invention relates to electrical probes for automated circuit and device testing.
The present invention relates to probes for testing electronic circuitry. Particularly, the present invention relates to vertical probes having a rigid columnar structure and a suspension knee for controlled scrub motion.
In the field of electronic circuitry testing, scrubbing and contact force is an important factor in establishing a low resistance electrical contact between a probe tip and the test contact. During scrubbing, an eventual insulating oxide layer is removed in the interface between the contact tip and the test contact. Scrubbing is a microscopic shear movement of the probe tip along the test contact surface while a certain pressure is exerted from the probe tip onto the test contact. As size and pitch of test contacts decrease, it becomes increasingly difficult to tune the scrub motion irrespective of friction influences in the tip/contact interface. Also, as the IC manufacturers incorporate designs with I.C. pads and bumps placed over chip's active circuitry it becomes important that the scrub of the probe does not cause damage to the underlying circuitry. The size of the window of acceptable probe operation therefore, is restrained from one side by the contact resistance requirements calling for a sizable scrub, smaller scrub size required by smaller targets that need to be probed as pitches decrease, and smaller scrub (including depth) to avoid damage to the underlying circuitry.
The new generation of I.C. chips has pads that are placed over active circuitry in order to maximize use of the real estate. These types of chips are commonly referred in the industry as chips with “low-K dielectric”. The low-K dielectric refers to the fragile polymer-based insulator now placed between the pads and the underlying circuits for electrical purposes. It is not acceptable to damage the low-K dielectric during probing operations either.
In the prior art, well known buckling beam probes have been utilized to provide a combined resilient deflection and scrubbing. In order for a buckling beam probe to operate properly with a well defined scrub motion it needs to be rigidly held on its peripheral shaft and additionally guided close to the contact tip. This makes the buckling beam probe's assembly increasingly challenging with ever decreasing scale. Therefore, there exists a need for a probe that may be easily assembled in large numbers and small scale while providing a well definable scrub motion.
Testing of electrical devices and circuits has been an important component of electronic manufacturing processes for some time. Such testing typically entails probing a circuit with a fixture including multiple flexible probes, each probe making electrical contact to a contact pad on the circuit chip. Various practical issues that have been noticed in this context have been addressed in the prior art.
For example, it is often necessary to probe contact pads which are closely spaced. For closely spaced contact pads, the probes may undesirably make electrical connection to each other, especially when in a deflected condition. U.S. Pat. Nos. 6,411,112 and 6,486,689 consider probe configurations for alleviating this problem.
It is well known that making electrical contact between the probe and the contact pad can be hampered by the presence of non-conductive material on the pad and/or the probe (e.g., a thin oxide film). Accordingly, considerable attention has been devoted to details of how the tip of the probe moves relative to the contact pad in order to improve the resulting electrical connection. This relative motion is usually referred to as a scrub motion. For example, U.S. Pat. No. 5,923,178 considers a probe having a shape which provides a scrub motion which is primarily a rocking motion without appreciable sliding. U.S. Pat. No. 5,952,843 considers a probe having a canted tip portion to facilitate penetration of the passivation layer. U.S. Pat. No. 6,529,021 considers a probe arrangement where the probe tip can be made to move in a reciprocating manner to reduce contact resistance.
The contact resistance issue has also been addressed by probes having separate parts for scrubbing and for making electrical contact. For example, US 2004/0239352 considers dual probes having a contact probe and a separate scrub probe, where the scrub probe moves in such a way as to clean the part of the contact pad that will end up under the contact probe during test. In some cases (e.g., copper deposition manufacturing), circuit fabrication processes provide contact pads which are covered with a protective dielectric film (e.g., a silicon dioxide film). U.S. Pat. No. 6,727,719 considers a probe having an inner contact needle and an outer hard layer, where the hard outer layer is adapted for penetrating such a protective film.
As circuit manufacturing technology continues to evolve to smaller critical dimensions, new practical issues relating to probing tend to arise which are not fully addressed by prior art approaches. For example, the decreasing size of contact pads as critical dimensions are reduced leads to increasingly demanding requirements on the ability to precisely control the probe scrub motion. Excessive scrub motion can cause loss of electrical contact, if the probe moves off the contact pad. Another consequence of device scaling is that features which are irrelevant for large probes making contact to large pads can be much more significant at a smaller scale. An example of such a feature is a dimple typically found at or near the center of a contact pad made by certain fabrication technologies (e.g., Cu contact pads on flip-chip wafers).
An important consequence of decreasing probe and contact pad dimensions is that the current density at the probe-pad contact increases. This increased current density also raises issues which have not come up before in connection with large probes on large pads. More specifically, the current density can be high enough to form micro-welds between the probe and the pad due to local heating. Breaking these micro-welds as the probe is removed from the contact pad can lead to degradation of the probe tip (e.g., by accumulation of non-conductive material), thereby reducing probe reliability and/or lifetime.
Accordingly, it would be an advance in the art to provide probing having more precise control of the scrub motion and/or addressing more specific scaling related issues (e.g., contact pad dimples and probe tip degradation from micro-welds).
A preferably vertically assembled probe features a substantially rigid columnar structure and a connected suspension knee. The probe is held in assembly via its columnar structure. The suspension knee has a base arm laterally connecting at and propagating away from a connect end of the columnar structure. The base arm extends up to a lateral knee extension where a reverse arm continues from the base arm back in direction towards a central axis of the columnar structure. The reverse arm terminates in a contact tip in a tip offset to the column axis that is smaller than the lateral knee extension. During application of a contacting force onto the contact tip, a first deflection of the base arm and a second deflection of the reverse arm counter act in conjunction with base and reverse arms structural configuration. As a result, scrub motion may be well defined in direction and magnitude without need for additional guidance of the deflecting probe structure.
The entire probe is preferably symmetric with respect to a symmetry plane through the column axis and a tip axis, which is central with respect to a contacting face of the contact tip. The probe has preferably a continuous profile in direction normal to the symmetry plane fabricated for example by electroplating. Base and reverse arms are preferably linearly protruding with a knee bent in between, which results in combination with continuous probe profile in a scrub motion highly in plane with the symmetry plane.
The probes may be arrayed with tight pitch that is less than the total width of the probe. Adjacent suspension knees may overlap while leaving sufficient clearance. The probes may be assembled via their columnar structures for example in a sandwiching fixture and clamping plates that provide a shearing clamping of the columnar structures. The probes may be also simultaneously fabricated in a probe comb including a number of probes linearly arrayed with final assembly pitch and held together by a bridge connecting to each of the arrayed probes on the peripheral end of the columnar structure. The bridge may be removed after a number of probe combs are stacked and fixed with respect to each other. Improved probing is provided using a knee probe where the knee curves away from the probe axis and then curves back to connect to the probe tip, crossing the probe axis on the way to the tip. The resulting lateral offset between the probe tip and the probe axis is a key geometrical parameter for predetermining the scrub motion provided by the probe in response to a predetermined contact force. The scrub motion preferably includes both a sliding motion and a rocking motion, where the sliding motion acts to clean the contact pad and the rocking motion acts to bring a clean part of the probe tip into contact with the freshly cleaned part of the contact pad. In preferred embodiments, the probe tip can include one or more relatively narrow “skates” for making contact to the contact pad. A dual skate configuration is especially appropriate when small dimples are at the centers of the contact pads.
Improved probing is provided using a knee probe where the knee curves away from the probe axis and then curves back to connect to the probe tip, crossing the probe axis on the way to the tip. The resulting lateral offset between the probe tip and the probe axis is a key geometrical parameter for predetermining the scrub motion provided by the probe in response to a predetermined contact force. The scrub motion preferably includes both a sliding motion and a rocking motion, where the sliding motion acts to clean the contact pad and the rocking motion acts to bring a clean part of the probe tip into contact with the freshly cleaned part of the contact pad. In preferred embodiments, the probe tip can include one or more relatively narrow “skates” for making contact to the contact pad. A dual skate configuration is especially appropriate when small dimples are at the centers of the contact pads.
Embodiments of the invention provide numerous advantages. The use of a probe having an “overshoot” knee as described above and in more detail below generally tends to increase the scrub motion compared to knee probes which do not “overshoot” the probe axis. In preferred embodiments, the invention makes use of multilayer probes, which facilitates the fabrication of probes having narrow “skates” on the probe tips. Such skates advantageously decouple the contact width (which should be small to increase contact for per unit area) from the probe width (which should be large enough to prevent motion in directions other than in the intended deflection plane). Multi-layer probes also allow the skate layers to be made of a suitable tip contact material, while the remaining layers are not constrained to be suitable tip contact materials. Dual-skate probe tips can be employed to probe contact pads having dimples at their centers (e.g., as provided by plating techniques for forming contact pads). In this case, the skates advantageously avoid the dimple, thereby avoiding issues relating to degraded electrical contact and increased mechanical stress on the probe tip that can arise when probing is performed directly at dimple locations.
The probe 1 is preferably symmetric with respect to a symmetry plane SP that coincides with the column axis CA and the tip axis TA. As a preferred result, the scrub motion is substantially in plane with the symmetry plane SP. The probe 1 may have a continuous profile in direction perpendicular with respect to the symmetry plane SP such that the columnar structure 2 as well as the elements of the suspension knee 3 have substantially rectangular cross sections.
The columnar structure 2 has a first pair of adjacent faces and a second pair of adjacent faces, the first pair opposing the second pair. A first pair may be for example faces 24, 26 and a second pair may be faces 23, 25. The probe 1 may be fabricated in a layered fabrication technique such as well known electroplating in combination with negative shaped mask. Relevant dimensions of the probe 1 include probe thickness TH, total probe width WT, column width CW, column height CH, tip offset TO, lateral knee extension BL and reverse arm length RL. In the preferred case of substantially linearly protruding base arm 32 and/or reverse arm 34, relevant dimensions include also a base arm angle AB and reverse arm angle AR between a knee axis KA and their respective arms 32, 34. The knee axis KA is a geometric element coinciding with a center of a knee bent 33 referencing the orientation of the knee bent 33 with respect to the column axis CA. The knee axis may be utilized to characterize the displacement behavior of the suspension knee 3 as depicted in the spectral displacement plots of
Multiple representations of probe 1 may be arrayed in a two dimensional probe array 10 with the first pitch PX in a preferred direction parallel to the probes' 1 knee axes KA and a second pitch PY preferably perpendicular to the first pitch PX. The second pitch PY may be selected in conjunction with the probe thickness TH such that a second gap GY remains at a minimum required for an assembly for the arrayed probes 1. Providing the probes 1 in a configuration for a sole assembly via their rigid columnar structures 2 and for a scrub motion predetermined in direction and magnitude is highly advantageous for a tight interlaced array of the probes 1. For example, probes 1 having a probe thickness TH of about 2 mils, a total width WT of about 8 mils and a column width CW of about 2 mils may be assembled with a first pitch PX of about 4 mils and a second pitch of about 3 mils.
The clamping plate may be held with respect to the fixture plates 4 in an assembly position as seen in
Plates 4, 5 may be fabricated from ceramic with the cutouts 41, 51 being deep trench etched as may be well appreciated by anyone skilled in the art. The clamping plate 5 may be forced into the clamping offset via any well known mechanical feature such as a screw pressing against a clamping access feature 55. The clamping direction DC is self adjusting as long as the clamping force is applied in direction approximately complying with the predetermined clamping direction DC as may be well appreciated by anyone skilled in the art. The clamping plate 5 may be actuated without particular guides. Assembly position stoppers may be provided for the clamping plate to warrant alignment of the clamping cutouts 51 with the fixing cutouts 41 in assembly position. Positioning of the probes 1 in direction along the column height CH may be provided via an auxiliary stop plate (not shown) temporarily placed adjacent opposite an insertion side of the plate assembly such that the peripheral ends 21 contact the stop plate once fully inserted into the cutouts 41, 51. After clamping, the stop plate may be removed. The probes 1 may be bonded in clamped position by an epoxy or other well known techniques. The cutouts 41, 51 may also be configured as conductively coated via holes conductively connected to peripheral terminals on the plates 41, and/or 51. The probes 1 may also be conductively accessed via well known wire bonding techniques bonding wires to the peripheral ends 21 as may be well appreciated by anyone skilled in the art. The fully fabricated probe assembly 100 may be inserted and/or assembled in a well known probe apparatus.
To facilitate the assembly of large numbers of probes 1, a number of probes 1 may be simultaneously fabricated as a probe comb 11 as is exemplarily illustrated in
After the probe combs 11 are positioning with respect to each other, they may be fixed by use of a resin filled into the gaps between the probes 1. After curing of the resin, the probe bridges 6 may be removed and the individual probes 1 conductively accessed as described above.
Suspension connect 31, base arm 32, knee bent 33, reverse arm 34, and contacting tip 35 may have various tuned configurations resulting in varying scrub motions. Referring to
A third bending momentum acts on the reverse arm 34N/34D hinging on the knee bent 33 generally in direction opposite the second bending momentum. According to
The first tuned configuration includes dimensional and structural configurations of suspension connect 31, central base arm portion 321, peripheral base arm portion 322, knee bent 33 and reverse arm 34 such that maximum local angular deflections DAB1, DAB2 and OAR are substantially equal. An indication for the first tuned configuration is that the natural knee axis KAN of the non deflected suspension knee 3 is substantially parallel to the deflected knee axis KAD of the operationally deflected suspension knee 3.
During deflection of the central base arm portion 321N/321D a lateral offset NOF may be introduced to the remainder of the suspension knee 3 due to the geometric conditions and geometric relations of the deflected and non deflected central base arm portion 321N/321D as may be well appreciated by anyone skilled in the art. The contacting tip 35 may be configured in length and deflection behavior such that the lateral offset NOF may be substantially compensated for. At the contacting face 36D, the contacting tip 35D may consequently have a maximum angular tip deflection DAT contributing to the scrub motion. Hence, in the first tuned configuration, the scrub motion includes substantially only angular movement of the contacting face 36.
For a required contacting force, the operational deflection of the suspension knee 3 may be adjusted by configuring the elements of the suspension knee 3 for a leveled stress maxima as can be seen in the
The same condition of DAB1 being smaller than DAB2 with DAB2 being equal DAR is depicted in
The teachings of
Second or third tuned configuration may be obtained also by adjusting the reverse arm's 34 deflection behavior in conjunction with the peripheral base arm portion's 322 deflection behavior as illustrated in
As may be well appreciated by anyone skilled in the art, the teachings presented under the
As taught under
As the probe 1 is brought into operational deflection with respect to the test contact 210, the multiradius face 38 may be rotated with maximum tip deflection angle DAT such that an operational contacting region 382 comes into contact with the test contact 210. An operational tip axis TA2 may origin from the central interface between operational contacting region 382 and the test contact 210. Between initial contacting at scrub start location SS and operational contacting, the multiradius face 38 prescribes a lateral scrub SL and an angular scrub equal DAT. Orientation of TA1 and TA2 may be affected by friction in the tip/contact interface CI as may be well appreciated by anyone skilled in the art.
The operational contacting region 382 has second contacting radius R382 substantially larger than first contacting radius R381. The mulitradius face 38 hence features at least two radii R381, R382 that contribute to a smooth and continuously curvature of the multiradius face 38. The two radii R381, R382 may be selected in conjunction with the change of contacting force as a function of angular tip displacement such that contacting pressure in the tip/contact interface CI remains within a predetermined limit.
The contacting tips 351, 352, 353 may be arranged in a tripod like fashion with each contacting segment having a contacting face 36 or 38 for providing a self centering contacting on a test contact in the well known spherical configuration. The suspension knee 3 may be layered in direction along the symmetry plane SP. The layer configuration may also be adjusted in view of low surface resistance for high frequency current flow from the contacting tip 36 or 38 to the peripheral end 21 or the column 2. Tip segments 351, 352 and 353 may also be fabricated from same material resulting in a monolithic structure. The spectral plots of
A probe 2300 includes a shank 2302, a knee section 2304 and a probe tip 2306 as parts of a single structure, as shown. Shank 2302 is straight and does not deflect appreciably during contact, so it is convenient to regard shank 2302 as defining a probe axis 2310 with which it is aligned. Knee section 2304 extends from shank 2302 to probe tip 2306, and includes two parts. A first part of knee section 2304 starts at shank 2302 and extends outward from probe axis 2310 to reach a knee point 2312. Knee point 2312 is a point of maximum separation from probe axis 2310. A second part of knee section 2304 starts at knee point 2312 and extends to a tip location 2314, such that probe axis 2310 is between knee point 2312 and tip location 2314. A lateral tip offset 2316 is thereby defined between the probe tip and the probe axis. Probe tip 2306 is in contact with a contact pad 2320 defining a contact point 2324.
Thus knee section 2304 can be regarded as extending outward for a certain distance D (the first part) and then curving back for a distance greater than D (the second part), thereby establishing the lateral offset 2316. The present inventor has found that this probe configuration can provide improved probing performance. For comparison, U.S. patent application Ser. No. 10/850,921 by the present inventor considers a knee probe having a knee which curves back by a distance less than D (i.e., it does not overshoot the probe axis).
Thus the scrub motion provided in this example includes both a sliding motion of the probe tip relative to the contact pad, and a rocking motion of the probe tip relative to the contact pad. A key aspect of the invention is that parameters of the scrub motion (e.g., slide length and rocking angle) can be predetermined, in part, by geometrical parameters of the probe and by the predetermined contact force (or equivalently, predetermined vertical displacement). More explicitly, a probing method according to the invention includes: providing a probe having the general configuration of
The friction provided by the contact pad is also a relevant factor for determining the scrub motion, so probe designs and/or methods will typically need to account for variations in contact pad friction. The speed with which contact is made has also been found to be relevant. More specifically, the sliding motion length on the contact pad (also referred to as scrub length) tends to decrease as the relative contact velocity between probe tip and contact pad increases. Another method of further controlling the scrub length is by laterally moving the probe as contact is made. Lateral probe motion in the direction of the tip offset will increase the scrub length, and lateral probe motion in the opposite direction will decrease the scrub length. Such lateral probe motion can be provided by appropriate motion control of a chuck holding the probe (or probes), or by appropriate motion control of a stage holding the device under test. Further scrub length control can be provided by controlling relative velocity and/or lateral probe motion. Scrub length can be measured after probing has occurred by measuring the length of the mark left by the probe on the contact pad. Such measurements are important for verifying proper probe performance.
A scrub motion including both a sliding motion and a rocking motion has provided improved results in practice. Investigations indicate that the sliding motion acts to scrape non-conductive material from the contact pad to create an exposed area of the contact pad, and the rocking motion acts to bring a clean part of the probe tip into contact with the freshly exposed area of the contact pad. From
Suitable materials for probe 2300 and probe tip 2306 are well known in the art, and any such materials can be employed in practicing the invention. Suitable tip materials are electrically conductive and wear-resistant, and include Rh and Cr.
Detailed design work in accordance with the above-identified principles of the invention has led to a point design as well as identification of some preferred parameter ranges. A point design for making contact to Cu or Al contact pads (or flat topped columns) has a tip offset (2316 on
For a configuration with a small knee offset and large tip offset one can expect a longer scrub length. For a configuration with large knee offset and small tip offset, a shorter scrub length is expected. Large contact friction requires a probe design that generates larger horizontal reaction force typically produced with larger scrub length. Smoother, less frictional contact pad surfaces require a probe design producing a shorter scrub length.
As indicated above, for any particular probe, there is a predetermined relation between contact force and vertical deflection. As the probe stiffness increases, the amount of contact force required for a given vertical deflection increases. A typical vertical deflection in practice is 75 μm (i.e. about 3 mils), and for this amount of deflection, the contact force is preferably between about 0.025 N and about 0.15 N (i.e., about 2.5 to 15 grams force), and is more preferably between about 0.08 N and about 0.10 N (i.e., about 8 to 10 grams force). The vertical deflection during contact is preferably between about 12 μm and about 125 μm and is more preferably between about 50 μm and about 75 μm.
Another way to describe probing according to the invention is in terms of parameters of the scrub mark left on the contact pad by the probe. The scrub mark width is preferably between about 3.0 μm and about 15.0 μm and is more preferably about 7 μm wide. The scrub mark depth is preferably between about 0.1 μm and about 2.0 μm and is more preferably about 0.6 μm.
A further advantage of the multi-layer skate configuration of
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US3518612||Jun 22, 1967||Jun 30, 1970||Ibm||Connector assembly|
|US3599093||Apr 28, 1969||Aug 10, 1971||Rca Corp||Apparatus including a wire tipped probe for testing semiconductor wafers|
|US3710251||Apr 7, 1971||Jan 9, 1973||Collins Radio Co||Microelectric heat exchanger pedestal|
|US3812311 *||Dec 11, 1972||May 21, 1974||Electronic Memories & Magnetic||Miniature type switch probe for testing integrated circuit assemblies or the like|
|US4027935||Jun 21, 1976||Jun 7, 1977||International Business Machines Corporation||Contact for an electrical contactor assembly|
|US4115736||Mar 9, 1977||Sep 19, 1978||The United States Of America As Represented By The Secretary Of The Air Force||Probe station|
|US4116523 *||Jan 23, 1976||Sep 26, 1978||James M. Foster||High frequency probe|
|US4423376 *||Mar 20, 1981||Dec 27, 1983||International Business Machines Corporation||Contact probe assembly having rotatable contacting probe elements|
|US4525697||Dec 13, 1982||Jun 25, 1985||Eaton Corporation||Thermally responsive controller and switch assembly therefor|
|US4532423||May 17, 1983||Jul 30, 1985||Tokyo Shibaura Denki Kabushiki Kaisha||IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested|
|US4593961||Dec 20, 1984||Jun 10, 1986||Amp Incorporated||Electrical compression connector|
|US4618767||Mar 22, 1985||Oct 21, 1986||International Business Machines Corporation||Low-energy scanning transmission electron microscope|
|US4618821||Sep 19, 1983||Oct 21, 1986||Lenz Seymour S||Test probe assembly for microelectronic circuits|
|US4706019||Nov 15, 1985||Nov 10, 1987||Fairchild Camera And Instrument Corporation||Electron beam test probe system for analyzing integrated circuits|
|US4730158||Jun 6, 1986||Mar 8, 1988||Santa Barbara Research Center||Electron-beam probing of photodiodes|
|US4747698||Apr 30, 1986||May 31, 1988||International Business Machines Corp.||Scanning thermal profiler|
|US4757255||Mar 3, 1986||Jul 12, 1988||National Semiconductor Corporation||Environmental box for automated wafer probing|
|US4772846||Dec 29, 1986||Sep 20, 1988||Hughes Aircraft Company||Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy|
|US4773877||Aug 17, 1987||Sep 27, 1988||Feinmetall Gmbh||Contactor for an electronic tester|
|US4807159||Aug 18, 1986||Feb 21, 1989||Kabushiki Kaisha Toshiba||Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system|
|US4901013||Aug 19, 1988||Feb 13, 1990||American Telephone And Telegraph Company, At&T Bell Laboratories||Apparatus having a buckling beam probe assembly|
|US4967148||Aug 28, 1989||Oct 30, 1990||Siemens Aktiengesellschaft||Apparatus for electrical function testing of wiring matrices, particularly of printed circuit boards|
|US5015947||Mar 19, 1990||May 14, 1991||Tektronix, Inc.||Low capacitance probe tip|
|US5026291||Aug 10, 1990||Jun 25, 1991||E. I. Du Pont De Nemours And Company||Board mounted connector system|
|US5030318||Sep 28, 1989||Jul 9, 1991||Polycon Corporation||Method of making electrical probe diaphragms|
|US5145384||Jul 29, 1991||Sep 8, 1992||Molex Incorporated||Electrical connector and terminal therefor|
|US5205739||Apr 2, 1992||Apr 27, 1993||Augat Inc.||High density parallel interconnect|
|US5207585||Oct 31, 1990||May 4, 1993||International Business Machines Corporation||Thin interface pellicle for dense arrays of electrical interconnects|
|US5230632||Dec 19, 1991||Jul 27, 1993||International Business Machines Corporation||Dual element electrical contact and connector assembly utilizing same|
|US5354205||Apr 23, 1993||Oct 11, 1994||Hughes Aircraft Company||Electrical connections with shaped contacts|
|US5422574||Jan 14, 1993||Jun 6, 1995||Probe Technology Corporation||Large scale protrusion membrane for semiconductor devices under test with very high pin counts|
|US5430614||Nov 8, 1993||Jul 4, 1995||Particle Interconnect Inc.||Electrical interconnect using particle enhanced joining of metal surfaces|
|US5436571||Apr 13, 1994||Jul 25, 1995||Tokyo Electron Limited||Probing test method of contacting a plurality of probes of a probe card with pads on a chip on a semiconductor wafer|
|US5531022||Sep 2, 1994||Jul 2, 1996||International Business Machines Corporation||Method of forming a three dimensional high performance interconnection package|
|US5576631||Oct 11, 1994||Nov 19, 1996||Virginia Panel Corporation||Coaxial double-headed spring contact probe assembly|
|US5632631||Sep 14, 1994||May 27, 1997||Tessera, Inc.||Microelectronic contacts with asperities and methods of making same|
|US5635846||Apr 30, 1993||Jun 3, 1997||International Business Machines Corporation||Test probe having elongated conductor embedded in an elostomeric material which is mounted on a space transformer|
|US5644249||Jun 7, 1996||Jul 1, 1997||Probe Technology||Method and circuit testing apparatus for equalizing a contact force between probes and pads|
|US5676599||May 9, 1995||Oct 14, 1997||Lohr & Bromkamp Gmbh||Outer joint part for a tripod joint|
|US5720098||May 12, 1995||Feb 24, 1998||Probe Technology||Method for making a probe preserving a uniform stress distribution under deflection|
|US5742174||Nov 3, 1995||Apr 21, 1998||Probe Technology||Membrane for holding a probe tip in proper location|
|US5751157||Jul 22, 1996||May 12, 1998||Probe Technology||Method and apparatus for aligning probes|
|US5764070||Feb 21, 1996||Jun 9, 1998||Plessey Semiconductors Limited||Structure for testing bare integrated circuit devices|
|US5764072||Dec 20, 1996||Jun 9, 1998||Probe Technology||Dual contact probe assembly for testing integrated circuits|
|US5764409||Apr 26, 1996||Jun 9, 1998||Alpha Innotech Corp||Elimination of vibration by vibration coupling in microscopy applications|
|US5767691||Dec 14, 1995||Jun 16, 1998||International Business Machines Corporation||Probe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor wafer|
|US5773987||Feb 26, 1996||Jun 30, 1998||Motorola, Inc.||Method for probing a semiconductor wafer using a motor controlled scrub process|
|US5802699||Jun 7, 1994||Sep 8, 1998||Tessera, Inc.||Methods of assembling microelectronic assembly with socket for engaging bump leads|
|US5806181||Jan 24, 1997||Sep 15, 1998||Formfactor, Inc.||Contact carriers (tiles) for populating larger substrates with spring contacts|
|US5832601||Apr 15, 1997||Nov 10, 1998||Form Factor, Inc.||Method of making temporary connections between electronic components|
|US5884395||Apr 4, 1997||Mar 23, 1999||Probe Technology||Assembly structure for making integrated circuit chip probe cards|
|US5892539||Nov 8, 1995||Apr 6, 1999||Alpha Innotech Corporation||Portable emission microscope workstation for failure analysis|
|US5914613||Aug 8, 1996||Jun 22, 1999||Cascade Microtech, Inc.||Membrane probing system with local contact scrub|
|US5917707 *||Nov 15, 1994||Jun 29, 1999||Formfactor, Inc.||Flexible contact structure with an electrically conductive shell|
|US5923178||Apr 17, 1997||Jul 13, 1999||Cerprobe Corporation||Probe assembly and method for switchable multi-DUT testing of integrated circuit wafers|
|US5932323||Mar 13, 1995||Aug 3, 1999||Texas Instruments Incorporated||Method and apparatus for mounting, inspecting and adjusting probe card needles|
|US5934914||Apr 22, 1997||Aug 10, 1999||Tessera, Inc.||Microelectronic contacts with asperities and methods of making same|
|US5936421||Dec 15, 1997||Aug 10, 1999||Virginia Panel Corporation||Coaxial double-headed spring contact probe assembly and coaxial surface contact for engagement therewith|
|US5945836||Oct 29, 1996||Aug 31, 1999||Hewlett-Packard Company||Loaded-board, guided-probe test fixture|
|US5952843||Mar 24, 1998||Sep 14, 1999||Vinh; Nguyen T.||Variable contact pressure probe|
|US5970167||Nov 7, 1996||Oct 19, 1999||Alpha Innotech Corporation||Integrated circuit failure analysis using color voltage contrast|
|US6027630||Apr 3, 1998||Feb 22, 2000||University Of Southern California||Method for electrochemical fabrication|
|US6064215||Apr 8, 1998||May 16, 2000||Probe Technology, Inc.||High temperature probe card for testing integrated circuits|
|US6071630||Feb 28, 1997||Jun 6, 2000||Shin-Etsu Chemical Co., Ltd.||Electrostatic chuck|
|US6086386||May 22, 1997||Jul 11, 2000||Tessera, Inc.||Flexible connectors for microelectronic elements|
|US6133072||Dec 11, 1997||Oct 17, 2000||Tessera, Inc.||Microelectronic connector with planar elastomer sockets|
|US6204674||Oct 31, 1997||Mar 20, 2001||Probe Technology, Inc.||Assembly structure for making integrated circuit chip probe cards|
|US6205660||Apr 22, 1997||Mar 27, 2001||Tessera, Inc.||Method of making an electronic contact|
|US6218203||Jun 28, 1999||Apr 17, 2001||Advantest Corp.||Method of producing a contact structure|
|US6246245||Feb 23, 1998||Jun 12, 2001||Micron Technology, Inc.||Probe card, test method and test system for semiconductor wafers|
|US6247228||Dec 12, 1997||Jun 19, 2001||Tessera, Inc.||Electrical connection with inwardly deformable contacts|
|US6278284||Feb 16, 1999||Aug 21, 2001||Nec Corporation||Testing IC socket|
|US6292003||Jul 1, 1998||Sep 18, 2001||Xilinx, Inc.||Apparatus and method for testing chip scale package integrated circuits|
|US6344753||Jan 11, 2000||Feb 5, 2002||Mitsubishi Denki Kabushiki Kaisha||Test socket having improved contact terminals, and method of forming contact terminals of the test socket|
|US6411112||Feb 19, 1998||Jun 25, 2002||International Business Machines Corporation||Off-axis contact tip and dense packing design for a fine pitch probe|
|US6419500||Mar 8, 1999||Jul 16, 2002||Kulicke & Soffa Investment, Inc.||Probe assembly having floatable buckling beam probes and apparatus for abrading the same|
|US6420887||Jun 13, 2000||Jul 16, 2002||Kulicke & Soffa Investment, Inc.||Modulated space transformer for high density buckling beam probe and method for making the same|
|US6424164||Jun 13, 2000||Jul 23, 2002||Kulicke & Soffa Investment, Inc.||Probe apparatus having removable beam probes|
|US6433571||Jan 20, 2000||Aug 13, 2002||Motorola, Inc.||Process for testing a semiconductor device|
|US6441315||Nov 10, 1998||Aug 27, 2002||Formfactor, Inc.||Contact structures with blades having a wiping motion|
|US6443784||Sep 22, 2000||Sep 3, 2002||Gunsei Kimoto||Contact and contact assembly using the same|
|US6482013||Feb 18, 1997||Nov 19, 2002||Formfactor, Inc.||Microelectronic spring contact element and electronic component having a plurality of spring contact elements|
|US6486689||May 26, 2000||Nov 26, 2002||Nidec-Read Corporation||Printed circuit board testing apparatus and probe device for use in the same|
|US6525552||May 11, 2001||Feb 25, 2003||Kulicke And Soffa Investments, Inc.||Modular probe apparatus|
|US6526021||Apr 3, 1998||Feb 25, 2003||Alcatel Network Systems, Inc.||Clear channel 1:N SONET transport system and method|
|US6529021||Apr 25, 2000||Mar 4, 2003||International Business Machines Corporation||Self-scrub buckling beam probe|
|US6530148||May 26, 2000||Mar 11, 2003||Kulicke And Soffa Investments, Inc.||Method for making a probe apparatus for testing integrated circuits|
|US6570396||Nov 24, 2000||May 27, 2003||Kulicke & Soffa Investment, Inc.||Interface structure for contacting probe beams|
|US6573738 *||Mar 24, 2000||Jun 3, 2003||Tokyo Cathode Laboratory Co., Ltd.||Multi-layered probe for a probecard|
|US6575767||May 16, 2001||Jun 10, 2003||Enplas Corporation||Contact pin assembly, contact pin assembly manufacturing method, contact pin assembling structure, contact pin assembling structure manufacturing method, and socket for electrical parts|
|US6576485||Sep 30, 2002||Jun 10, 2003||Advantest Corp.||Contact structure and production method thereof and probe contact assembly using same|
|US6633176||Mar 19, 2001||Oct 14, 2003||Mitsubishi Denki Kabushiki Kaisha||Semiconductor device test probe having improved tip portion and manufacturing method thereof|
|US6677245||Jul 13, 2002||Jan 13, 2004||Advantest Corp.||Contact structure production method|
|US6707311||Jul 9, 2002||Mar 16, 2004||Advantest Corp.||Contact structure with flexible cable and probe contact assembly using same|
|US6727719||Jan 11, 2002||Apr 27, 2004||Taiwan Semiconductor Manufacturing Co., Ltd.||Piercer combined prober for CU interconnect water-level preliminary electrical test|
|US6731123||Sep 3, 2002||May 4, 2004||Gunsei Kimoto||Probe device|
|US6765228||Oct 11, 2002||Jul 20, 2004||Taiwan Semiconductor Maunfacturing Co., Ltd.||Bonding pad with separate bonding and probing areas|
|US6842023||Jan 15, 2001||Jan 11, 2005||Innotech Corporation||Probe card apparatus and electrical contact probe having curved or sloping blade profile|
|US6847221||Mar 28, 2002||Jan 25, 2005||Gunsei Kimoto||Probe pin assembly|
|US6853208||May 10, 2001||Feb 8, 2005||Nihon Denshizairyo Kabushiki Kaisha||Vertical probe card|
|US6890185||Nov 3, 2003||May 10, 2005||Kulicke & Soffa Interconnect, Inc.||Multipath interconnect with meandering contact cantilevers|
|US6917525||Jun 24, 2002||Jul 12, 2005||Nanonexus, Inc.||Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs|
|US6956389||Aug 16, 2004||Oct 18, 2005||Jem America Corporation||Highly resilient cantilever spring probe for testing ICs|
|US6965245||May 1, 2003||Nov 15, 2005||K&S Interconnect, Inc.||Prefabricated and attached interconnect structure|
|US6970005||Jul 26, 2001||Nov 29, 2005||Texas Instruments Incorporated||Multiple-chip probe and universal tester contact assemblage|
|US7015707||Mar 19, 2003||Mar 21, 2006||Gabe Cherian||Micro probe|
|US7046021||Jun 30, 2004||May 16, 2006||Microprobe||Double acting spring probe|
|US7059865||Jan 16, 2004||Jun 13, 2006||K & S Interconnect, Inc.||See-saw interconnect assembly with dielectric carrier grid providing spring suspension|
|US7064564||Feb 1, 2001||Jun 20, 2006||Antares Contech, Inc.||Bundled probe apparatus for multiple terminal contacting|
|US7078921||Oct 10, 2002||Jul 18, 2006||Sumitomo Electric Industries, Ltd.||Contact probe|
|US7091729||Jul 9, 2004||Aug 15, 2006||Micro Probe||Cantilever probe with dual plane fixture and probe apparatus therewith|
|US7150658||Jun 19, 2006||Dec 19, 2006||Excel Cell Electronic Co., Ltd.||Terminal for an electrical connector|
|US7202682||Dec 20, 2002||Apr 10, 2007||Formfactor, Inc.||Composite motion probing|
|US7218127||Feb 18, 2004||May 15, 2007||Formfactor, Inc.||Method and apparatus for probing an electronic device in which movement of probes and/or the electronic device includes a lateral component|
|US7218131||Mar 7, 2005||May 15, 2007||Renesas Technology Corp.||Inspection probe, method for preparing the same, and method for inspecting elements|
|US7265565||Jan 3, 2005||Sep 4, 2007||Microfabrica Inc.||Cantilever microprobes for contacting electronic components and methods for making such probes|
|US7274195||Aug 22, 2003||Sep 25, 2007||Mitsubishi Denki Kabushiki Kaisha||Semiconductor device test probe|
|US7285966||Mar 16, 2004||Oct 23, 2007||Phicom Corporation||Probe and method of making same|
|US7511523||Apr 2, 2007||Mar 31, 2009||Microfabrica Inc.||Cantilever microprobes for contacting electronic components and methods for making such probes|
|US20020070743||Aug 3, 2001||Jun 13, 2002||Technoprobe S.R.L.||Testing head having vertical probes|
|US20020153913||Nov 27, 2001||Oct 24, 2002||Japan Electronic Materials Corp.||Probe for the probe card|
|US20040104737||Oct 10, 2002||Jun 3, 2004||Tsuyoshi Haga||Contact probe|
|US20040119485||Dec 20, 2002||Jun 24, 2004||Koch Daniel J.||Probe finger structure and method for making a probe finger structure|
|US20040239352||May 26, 2004||Dec 2, 2004||Nec Electronics Corporation||Probe card used for inspecting semiconductor devices|
|US20050179458||Jan 3, 2005||Aug 18, 2005||Microfabrica Inc.||Cantilever microprobes for contacting electronic components and methods for making such probes|
|US20050189955||Aug 22, 2003||Sep 1, 2005||Mitsubishi Denki Kabushiki Kaisha||Semiconductor device test probe having improved tip portion|
|US20060073712||Aug 17, 2005||Apr 6, 2006||Ephraim Suhir||Apparatus and test device for the application and measurement of prescribed, predicted and controlled contact pressure on wires|
|US20060082380||Mar 7, 2005||Apr 20, 2006||Nec Corporation||Inspection probe, method for preparing the same, and method for inspecting elements|
|US20060170440||Jan 5, 2006||Aug 3, 2006||Mjc Probe Incorporation||Vertical probe card, probes for vertical probe card and method of making the same|
|US20060171425||Mar 16, 2004||Aug 3, 2006||Phicom Corporation||Probe and method of making same|
|US20070167022||Dec 20, 2006||Jul 19, 2007||Industrial Technology Research Institute||Method of fabricating vertical probe head|
|USD507198||Sep 19, 2003||Jul 12, 2005||K&S Interconnect, Inc.||Straight protruding probe beam contour surfaces|
|USD510043||Jun 11, 2003||Sep 27, 2005||K&S Interconnect, Inc.||Continuously profiled probe beam|
|USD525207||Dec 2, 2003||Jul 18, 2006||Antares Contech, Inc.||Sheet metal interconnect array|
|EP0764352B1||Jun 7, 1995||May 19, 2004||Tessera, Inc.||Microelectronic contacts and assemblies|
|1||Sporck, Nicholas, "A New Probe Card Technology Using Compliant Microsprings", Proceedings 1997 IEEE International Test Conference, Nov. 1, 1997, pp. 527-532.|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US8415963||May 16, 2011||Apr 9, 2013||Microprobe, Inc.||Low profile probe having improved mechanical scrub and reduced contact inductance|
|US8723546||Mar 2, 2010||May 13, 2014||Microprobe, Inc.||Vertical guided layered probe|
|US8907689||Aug 30, 2010||Dec 9, 2014||Microprobe, Inc.||Probe retention arrangement|
|US8988091||Sep 13, 2010||Mar 24, 2015||Microprobe, Inc.||Multiple contact probes|
|US9097740||Feb 9, 2010||Aug 4, 2015||Formfactor, Inc.||Layered probes with core|
|US9121868||Jun 19, 2012||Sep 1, 2015||Formfactor, Inc.||Probes with offset arm and suspension structure|
|US9250266||Jul 25, 2012||Feb 2, 2016||Microprobe, Inc.||Probe bonding method having improved control of bonding material|
|US9274143||Dec 4, 2012||Mar 1, 2016||Formfactor, Inc.||Vertical probe array arranged to provide space transformation|
|US9310428||Dec 9, 2014||Apr 12, 2016||Formfactor, Inc.||Probe retention arrangement|
|US9316670||Mar 20, 2015||Apr 19, 2016||Formfactor, Inc.||Multiple contact probes|
|US9476911||Mar 19, 2012||Oct 25, 2016||Microprobe, Inc.||Probes with high current carrying capability and laser machining methods|
|US20100176832 *||Mar 2, 2010||Jul 15, 2010||Microprobe, Inc.||Vertical Guided Layered Probe|
|US20100182031 *||Feb 9, 2010||Jul 22, 2010||Microprobe, Inc.||Layered Probes With Core|
|USRE44407||Dec 23, 2009||Aug 6, 2013||Formfactor, Inc.||Space transformers employing wire bonds for interconnections with fine pitch contacts|
|USRE46221||Jul 10, 2012||Nov 29, 2016||Microprobe, Inc.||Probe skates for electrical testing of convex pad topologies|
|International Classification||G01R1/073, G01R1/067, G01R31/02|
|Cooperative Classification||G01R1/06716, G01R1/07357, G01R1/06733|
|Aug 28, 2006||AS||Assignment|
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Year of fee payment: 4
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|Jul 12, 2016||AS||Assignment|
Owner name: HSBC BANK USA, NATIONAL ASSOCIATION, CALIFORNIA
Free format text: SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS;ASSIGNORS:FORMFACTOR, INC.;ASTRIA SEMICONDUCTOR HOLDINGS, INC.;CASCADE MICROTECH, INC.;AND OTHERS;REEL/FRAME:039184/0280
Effective date: 20160624