|Publication number||US7946050 B2|
|Application number||US 12/128,804|
|Publication date||May 24, 2011|
|Filing date||May 29, 2008|
|Priority date||Nov 9, 2007|
|Also published as||US20090120216|
|Publication number||12128804, 128804, US 7946050 B2, US 7946050B2, US-B2-7946050, US7946050 B2, US7946050B2|
|Inventors||Jin-Chern Chiou, Chih-Wei Chang|
|Original Assignee||National Chiao Tung University|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (17), Non-Patent Citations (5), Referenced by (2), Classifications (12), Legal Events (2)|
|External Links: USPTO, USPTO Assignment, Espacenet|
1. Field of the Invention
The present invention relates to a microprobe structure, particularly to a three-dimensional microprobe array assembly structure with depth and angle detection.
2. Description of the Related Art
Probes have been widely used in many fields, such as biochips and semiconductor tests. With the advance of science and technology, test samples are also being miniaturized, and probes thus require higher precision. Hence, more and more personnel have been devoted to related researches and developments.
Daryl R. Kipke et al. published in IEEE a “Silicon Substrate Intracortical Microelectrode Array for Long-Term Recording of Neuronal Spike Activity in Cerebral Cortex”, which is a single-piece edge-type microprobe array, wherein IC is built in the probe substrate. Its disadvantage is that additional substrate area needs preparing for probes in IC fabrication. Thus, the area and cost increases. Besides, it does not reveal the design of a three-dimensional probe array.
Qing Bai et al. proposed a “High-Yield Microassembly Structure for Three-Dimensional Microelectrode Arrays”, wherein general single-piece edge-type microprobe arrays are sequentially inserted into the pre-fabricated holes of a substrate. Such a technology can indeed achieve a three-dimensional microelectrode array. However, the joint of the single-piece edge-type microprobe arrays and the substrate needs ultrasonic welding, which increases technical complexity. Further, such an assembly structure also has the disadvantages of the single-piece edge-type microprobe array—bulky volume and higher cost.
A Taiwan patent No. I224676 disclosed a “Method for Fabricating a Three-Dimensional Probe Array”, wherein a stack of a three-dimensional probe array is formed with several cycles of exposures and developments. However, the more cycles of exposures and developments, the greater the accumulated alignment error. Besides, the probe of this technology cannot have several independent sensing electrodes, which the probe of a general edge-type microprobe array should have.
On the whole, the abovementioned prior arts are all unlikely to detect depths and angles. Thus, the reliability of measurement is influenced, which will be a big problem in detecting a miniature object.
The primary object of the present invention is to provide a novel three-dimensional microprobe array assembly structure to replace current technologies, wherein the present invention has the advantages of easy assemblage, small volume and lower IC-integration cost.
Another object of the present invention is to provide a three-dimensional microprobe array assembly structure, whereby mechanisms for detecting depths and angles can be developed to achieve higher detection reliability.
To achieve the abovementioned objectives, the present invention proposes a three-dimensional microprobe array assembly structure, wherein spacers are used in stacking single-piece edge-type microprobe arrays to form a three-dimensional structure, and wherein a special design of spacers and edge-type microprobe arrays simplifies wire connection. The three-dimensional microprobe array assembly structure of the present invention comprises at least two edge-type microprobe arrays. Each edge-type microprobe array has a substrate. The substrate has at least two microprobes at the front thereof. Each microprobe is connected to several conductive pads of the substrate via several wires. In the present invention, a spacer interposes between two edge-type microprobe arrays but reveals the conductive pads of the edge-type microprobe arrays. In the present invention, the IC substrate is used as the spacer, which benefits circuit integration and reduces fabrication cost. In the present invention, the microprobe has mechanisms to detect depths and angles, which increases detection reliability.
Below, the present invention is described in detail in cooperation with the drawings to make easily understood the objectives, characteristics and efficacies of the present invention.
Described in detail, the three-dimensional microprobe array 100 comprises: a first edge-type microprobe array 110, a second edge-type microprobe array 120, a third edge-type microprobe array 130, a fourth edge-type microprobe array 140, a first spacer 150, a second spacer 160 and a third spacer 170. The first spacer 150 is designed to reveal the conductive pads 115 of the first edge-type microprobe array 110. The second spacer 160 is designed to reveal the conductive pads 125 of the second edge-type microprobe array 120. Similarly, the third spacer 170 is designed to reveal the conductive pads 135 of the third edge-type microprobe array 130.
In this embodiment, four edge-type microprobe arrays each having four microprobes are used to form a 4×4 microprobe array. In practical application, when a three-dimensional microprobe array assembly structure comprises n pieces of edge-type microprobe arrays, each edge-type microprobe array must possess n pieces of microprobes so that an n times n microprobe array can be obtained.
In the present invention, the microprobe may be static, stretchable or moveable. The stretchable or moveable microprobe may be driven by an electrostatic actuator, electromagnetic actuator, electrothermal actuator, piezoelectric actuator, pneumatic actuator, water-pressure actuator, or oil-pressure actuator.
In the present invention, the edge-type microprobe arrays and the spacers may be separately fabricated and then assembled together. Alternatively, the spacer is directly fabricated on the backside of the corresponding edge-type microprobe array, and then the spacer-containing edge-type microprobe arrays are assembled together. The three-dimensional microprobe array assembly structure of the present invention can be easily assembled with a common flip-chip bonder without using a pre-perforated substrate or a precision three-dimensional alignment device. Besides, the completed product has a smaller volume.
In integrating a common edge-type microprobe array with IC, a portion of silicon substrate must be reserved for fabricating probes, which will increase the area of the silicon substrate and raise the cost. In the present invention, a substrate, which IC is fabricated on, is directly used as the spacer, and the integration of the edge-type microprobe array and IC is thus easily achieved. The edge-type microprobe array may be connected with the spacer in the way shown in
The feature of the edge-type microprobe array is that each microprobe has a plurality of sensing electrodes to detect signals from different depths. In the present invention, all the microprobes may have an identical length. The microprobes may also have different lengths to simultaneously detect the biological tissues in different depths, wherein long microprobes and short microprobes are arranged alternately. The lengths of the microprobes may also vary in other modes. Refer to from
Firstly, as shown in
The spacer 70, which is needed in assembling a three-dimensional microprobe array, can be directly carved out from a blank silicon substrate and then assembled with the fourth edge-type microprobe array 140.
Alternatively, the spacer is directly formed on the back of the edge-type microprobe array. In other words, the fourth edge-type microprobe array 140, together with the spacer 70, is fabricated into a one-piece component. Refer to from
It should be noted that the portion of substrate 401, which is preserved to function as the spacer 70, may also function as the IC substrate, as shown in
Below is described with a 4×4 three-dimensional microprobe array the designs and mechanisms of the three-dimensional microprobe array assembly structure with depth and angle detection. Refer to
The digital detection method has an advantage that the four microprobes at four corners can also function as common sensing electrodes after the depth detection is completed. Contrarily, the depth-detection microprobes of the analog detection method can only be used in depth detection but cannot function as common sensing electrodes.
The three-dimensional microprobe array assembly structure may not always be inserted into cell tissue so vertically as expected. Refer to
The three-dimensional microprobe array assembly structure of the present invention can extensively apply to physiological inspection systems, particularly to EEG (electroencephalography), EOG (electro-oculography) and ECG (electrocardiography), and provide a convenient interface for the field of physiological monitoring. The present invention can be mass-fabricated with a batch-production technology to provide cost- and quality-efficient products and thus has a great commercial potential.
The embodiments described above are only to exemplify the present invention but not to limit the scope of the present invention. Any equivalent modification or variation according to the spirit of the present invention is to be also included within the scope of the present invention, which is based on the claims stated below.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US4578279 *||Feb 16, 1984||Mar 25, 1986||International Business Machines Corporation||Inspection of multilayer ceramic circuit modules by electrical inspection of unfired green sheets|
|US5091694 *||Jan 30, 1990||Feb 25, 1992||Tokyo Electron Limited||Quartz probe apparatus|
|US5475318 *||Oct 29, 1993||Dec 12, 1995||Robert B. Marcus||Microprobe|
|US5724315 *||May 29, 1996||Mar 3, 1998||The United States Of America As Represented By The Secretary Of The Navy||Omnidirectional ultrasonic microprobe hydrophone|
|US6245444 *||Oct 2, 1997||Jun 12, 2001||New Jersey Institute Of Technology||Micromachined element and method of fabrication thereof|
|US6359757 *||Jun 2, 1999||Mar 19, 2002||Maxtor Corporation||Electrostatic actuator|
|US7304486 *||Mar 14, 2002||Dec 4, 2007||Capres A/S||Nano-drive for high resolution positioning and for positioning of a multi-point probe|
|US7531077 *||Jan 3, 2005||May 12, 2009||Microfabrica Inc.||Electrochemical fabrication process for forming multilayer multimaterial microprobe structures|
|US7567089 *||Dec 7, 2006||Jul 28, 2009||Microfabrica Inc.||Two-part microprobes for contacting electronic components and methods for making such probes|
|US20050223543 *||Jan 3, 2005||Oct 13, 2005||Microfabrica Inc.||Electrochemical fabrication method for fabricating space transformers or co-fabricating probes and space transformers|
|US20060212978 *||Mar 15, 2005||Sep 21, 2006||Sarah Brandenberger||Apparatus and method for reading bit values using microprobe on a cantilever|
|US20080009763 *||Nov 15, 2006||Jan 10, 2008||Jin-Chern Chiou||Microprobe array structure and method for manufacturing the same|
|US20100178810 *||Jul 15, 2010||Imec||Connecting Scheme for Orthogonal Assembly of Microstructures|
|TW224676B||Title not available|
|WO2005065437A2 *||Jan 3, 2005||Jul 21, 2005||Cohen Adam L||Probe arrays and method for making|
|WO2006031280A2 *||Jun 30, 2005||Mar 23, 2006||Microfabrica Inc||Probe arrays and method for making|
|WO2007148890A1 *||Jun 14, 2007||Dec 27, 2007||Conem Co Ltd||Method for manufacturing electrical testing apparatus|
|1||Daryl R. Kipke, Rio J. Vetter, Justin C. Williams, and Jamille F. Hetke,"Silicon Substrate Intracortical Microelectrode Arrays for Long-Term Recording of Neuronal Spike Activity in Cerebral Cortex", IEEE Transactions on Neural Systems and Rehabilitation Engineering, vol. 11, No. 2, Jun. 2003, pp. 151-155.|
|2||Jozsef Csicsvari, Darrell A. Henze, Brian Jamieson, Kenneth D. Harris, Anton Sirota, P'eter Barth, Kensall D. Wise, and György Buzsáki, "Massively Parallel Recording of Unit and Local Field Potentials With Silicon-Based Electrodes", J Neurophysiol 90: 1314-1323, Aug. 2003, György Buzsáki.|
|3||Qing Bai, Kensall D. Wise, and David J. Anderson, "A High-Yield Microassembly Structure for Three-Dimensional Microelectrode Arrays", IEEE Transactions on Biomedical Engineering, vol. 47, No. 3, Mar. 2000, pp. 281-289.|
|4||Rio J. Vetter, Justin C. Williams, Jamille F. Hetke, Elizabeth A. Nunamaker, and Daryl R. Kipke, "Chronic Neural Recording Using Silicon-Substrate Microelectrode Arrays Implanted in Cerebral Cortex" IEEE Transactions on Biomedical Engineering, vol. 51, No. 6, Jun. 2004, pp. 896-904.|
|5||*||TDB-ACC-NO: NN9505131, "Microprobe Structure for Solder-Bump Contact", IBM Technical Disclosure Bulletin, May 1995, vol. 38, No. 5, pp. 131-134, (Figs. 1-2d not readily aavailable).|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US8261428 *||Nov 25, 2009||Sep 11, 2012||National Tsing Hua University||Method for assembling a 3-dimensional microelectrode structure|
|US20110125001 *||May 26, 2011||Weileun Fang||3d microelectrode structure and method for assembling the same|
|U.S. Classification||33/557, 33/560, 73/866.5, 324/754.07, 600/377, 600/373, 600/378|
|International Classification||G01D13/00, G01R31/00|
|Cooperative Classification||G01R1/07321, G01R31/2891|
|May 29, 2008||AS||Assignment|
Owner name: NATIONAL CHIAO TUNG UNIVERSITY, TAIWAN
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CHIOU, JIN-CHERN;CHANG, CHIH-WEI;REEL/FRAME:021013/0620
Effective date: 20080509
|Aug 25, 2014||FPAY||Fee payment|
Year of fee payment: 4