|Publication number||US7968473 B2|
|Application number||US 11/697,267|
|Publication date||Jun 28, 2011|
|Filing date||Apr 5, 2007|
|Priority date||Nov 3, 2006|
|Also published as||US8338316, US20080108210, US20110223773, WO2008057157A1|
|Publication number||11697267, 697267, US 7968473 B2, US 7968473B2, US-B2-7968473, US7968473 B2, US7968473B2|
|Inventors||Vijay Parihar, Christopher Dennis Bencher, Rajesh Kanuri, Marlon E. Menezes|
|Original Assignee||Applied Materials, Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (30), Classifications (22), Legal Events (2)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application claims the benefit of U.S. Provisional Application Ser. No. 60/856,621, filed Nov. 3, 2006.
High speed integrated circuits formed on a crystalline semiconductor wafer have ultra shallow semiconductor junctions formed by ion implanting dopant impurities into source and drain regions. The implanted dopant impurities are activated by a high temperature anneal step which causes a large proportion of the implanted atoms to become substitutional in the crystalline semiconductor lattice. Such a post-ion implantation anneal step is performed using a dynamic laser surface anneal process in which a thin line of intense radiation is scanned in a direction transverse to the line across the wafer surface. The scanning rate of the line beam is sufficiently great so that heating of the wafer (to a temperature between 1150 to 1350 degrees C.) is limited to an extremely shallow depth below the surface and to an extremely narrow region corresponding to the thin laser line beam.
The dynamic surface anneal process employs an array of diode lasers whose multiple parallel beams are focused along a narrow line (e.g., about 300 microns wide) having a length less than the wafer diameter or radius. The diode lasers have a wavelength of about 810 nm. The narrow laser beam line is scanned transversely across the wafer surface (e.g., at a rate between 30 mm/sec to 300 mm/sec), so that each point on the wafer surface is exposed for a very short time (e.g., between 0.25 millisec to 5 millisecs). This type of annealing is disclosed in United States Patent Publication No. US 2003/0196996A1 (Oct. 23, 2003) by Dean C. Jennings et al. Each region of the wafer surface reaches a temperature range of about 1150-1300 degrees C. for about 50 microsec to 3 millisec. The depth of this region is about 10-20 microns. This depth is sufficient because it extends well-below the ultra-shallow semiconductor junction depth of about 200 Angstroms. Such a high temperature is sufficient to activate the implanted (dopant) atoms and to anneal lattice damage or defects. Some of these defects like end of range defects may require laser exposure time of 1 millisec to 3 millisec above 1150-1350 degrees C., to fully or to partially resolve end of range defects to a level where their presence does not impact device performance. The optical absorption of the laser radiation must be uniform across the wafer surface for uniform dopant activation.
The problem is that the underlying thin film structures formed on the wafer surface present different optical absorption characteristics and different optical emissivities in different locations on the wafer surface. This makes it difficult if not impossible to attain uniform anneal temperatures across the wafer surface. This problem can be solved by depositing an optical absorption layer over the entire wafer surface that uniformly absorbs the laser radiation and then conducts the heat to the underlying semiconductor wafer. Such a film must withstand the stress of heating during the laser anneal step without damage or separation, and must be selectively removable after the laser anneal step with respect to underlayers and must not contaminate or damage the underlying semiconductor wafer or thin film features. The problem of withstanding stress arises from the thermal expansion of the narrow laser-illuminated portion of the wafer surface. Further, the absorber film must attain excellent step coverage (high degree of conformality) over the underlying thin film features.
An amorphous carbon material is the best choice for the optical absorber layer, as suggested in U.S. Patent Publication No. 2005/0074986, filed Jan. 15, 2004 entitled “Absorber Layer for DSA Processing” by Luc Van Autryve, et al. and assigned to the present assignee, which discloses a plasma enhanced chemical vapor deposition (PECVD) process for depositing the amorphous carbon layer. One advantage of amorphous carbon is that it is readily removed with high selectivity by oxidation at a low wafer temperature. Another advantage is that carbon is generally compatible with semiconductor plasma processes and therefore does not involve contamination, so long as excessive implantation does not occur.
One problem is that the deposited layer is vulnerable to cracking or peeling under the high temperatures of the laser anneal step, unless the layer is deposited at a very high temperature (e.g., 550 degrees C.). Unfortunately, such a high temperature causes clustering of the implanted dopant atoms during the deposition step itself. Such clustered dopant atoms resist separation during the subsequent laser anneal step, limiting the fraction of the implanted atoms that move during the laser anneal step into substitutional sites in the crystal. This results in unacceptably high sheet resistance in the source or drain regions.
These issues are not problems in the fabrication of semiconductor structures with larger (e.g., 65 nm) feature sizes. This is because the greater gate-source overlap (20 nm) permitted for such larger structures can be annealed by conventional thermal (flash lamp) annealing (prior to deposition of the optical absorber layer). This anneal step is then followed by the dynamic surface (laser) anneal step to obtain a fractional improvement in dopant activation. This improvement is limited because the thermal annealing causes a small amount of dopant clustering which the subsequent laser annealing step cannot undo. The 45 nm devices require better dopant activation, which requires elimination of the thermal annealing step and maintaining wafer temperatures below the threshold (475 degrees C.) at which dopant clustering can occur until the laser anneal step is performed. This results in extremely high dopant activation levels and low sheet resistance in the implanted areas, as required for 45 nm device structures. It can be desirable to maintain the wafer temperature below the dopant clustering threshold temperature in the 45 nm process (unlike the 65 nm process) because none of the implanted dopant atoms have been moved into substitutional crystal sites prior to laser annealing (since the thermal annealing step is not permitted), so that elevation of the wafer temperature prior to laser annealing (e.g., during the amorphous carbon layer deposition) may risk clustering more of the dopant atoms, which would make it more difficult to obtain sufficient dopant activation even by laser annealing.
Attempting to avoid this problem by reducing the wafer temperature (e.g., below 475 degrees C.) during PECVD deposition of the absorber layer creates two problems. First, the mechanical properties of the deposited amorphous carbon layer formed at this lower temperature are inferior so that it will fail (by cracking, peeling or separation from the wafer) during the laser annealing step. Secondly, the amorphous carbon layer deposited at the lower temperature has inferior or insufficient optical absorption qualities (low extinction coefficient) at the 810 nm wavelength of the laser anneal step. The lower extinction coefficient requires a thicker optical absorber (amorphous carbon) layer to attain 90-99% absorption of the laser power. The increased thickness increases the susceptibility of the absorber layer to peeling or separation during the dynamic laser anneal step. The extinction coefficient may be so low that the amorphous carbon layer is transparent to the 810 nm laser light regardless of thickness, and therefore is not functional.
What is needed is a low temperature (i.e., less than 475 degrees C.) deposition process which provides an amorphous carbon layer having a high optical extinction coefficient at the wavelength of the laser anneal step (i.e., an extinction coefficient greater than 0.35 at a wavelength of 81 nm) and which is impervious to mechanical failure such as peeling or separation at the temperature of the laser annealing step (e.g., 1150 to 1350 degrees C.), and which has excellent step coverage.
A plasma enhanced physical vapor deposition process deposits an amorphous carbon layer on an ion-implanted wafer for use in dynamic surface annealing of the wafer with an intense line beam of a laser wavelength. The deposition process is carried out at a wafer temperature below the dopant clustering threshold temperature, and includes introducing the wafer into a chamber having a carbon-containing target overlying the wafer, and furnishing a carrier gas into the chamber. The process further includes generating a wafer bias voltage and applying target source power to the carbon-containing target sufficient to produce ion bombardment of the carbon-containing target. The wafer bias voltage is set to a level at which the amorphous carbon layer that is deposited has a desired extinction coefficient at the laser wavelength. For an extinction coefficient in excess of 0.5 at a wavelength of 810 nm, the process gas may include an inert gas and the wafer bias should be in a range of about −6 volts to −8 volts. For an extinction coefficient in excess of 0.6 at 810 nm, the nitrogen may be added to the process gas (and/or to the carbon-containing target), which case the bias voltage should be about +10 volts.
We have discovered a process that meets the requirements for ion implantation and annealing of semiconductor structures having 45 nm feature sizes. This process employs ion implantation by suitable conventional processes (e.g., plasma immersion ion implantation and/or beam ion implantation), deposition of an amorphous carbon layer (ACL) for uniform optical absorption followed by dynamic surface annealing by a scanned laser line beam. Our process overcomes the obstacles that have limited the prior art by depositing an ACL at a low wafer temperature (below the dopant clustering threshold temperature) in such a manner that the ACL has a high optical extinction coefficient at the laser wavelength, and has sufficient adhesion and strength to avoid damage during the laser anneal step. We have discovered that deposition of an ACL having a high extinction coefficient at 810 nm capable of withstanding laser annealing is obtained using plasma enhanced physical vapor deposition from a carbon-containing target at a wafer temperature below 475 degrees C. While conventional plasma-enhanced physical vapor deposition processes can employ a wafer bias voltage within a very large range (e.g., 0 to −50 volts), part of our discovery is that the desired extinction coefficient at 810 nm is obtained by confining the wafer bias voltage to a very narrow range during the deposition step, such as between about −6 volts and about −8 volts. This range of bias voltage also optimizes mechanical strength of the amorphous carbon layer, enabling it to withstand the stresses of laser annealing. An additional element for obtaining a high extinction coefficient is limiting the amount of hydrogen in the carbon target or in the carrier gas to a few percent of the target or gas.
Low Temperature Deposition of ACL with Optimum Optical Qualities:
Referring now to
During this step, certain measures are carried out to ensure that the deposited ACL has both high extinction coefficient (e.g., greater than 0.35) at 810 nm and sufficient adhesion and strength to withstand the laser anneal process at 1300 degrees C. (block 56 of
The ACL is deposited to a sufficient thickness for the ACL be able to absorb all of the laser radiation, e.g., to a thickness between about 4000 Angstroms and 8000 Angstroms (block 66 of
Upon completion of the ACL deposition, the wafer is transferred to a dynamic surface anneal apparatus for laser annealing (block 70 of
Dynamic Surface Annealing:
The dynamic surface anneal step uses a large array of CW 810 nm diode lasers to produce a single intense beam of light that is projected on the wafer surface as a thin long line of radiation. The line is then scanned over the surface of the wafer in a direction perpendicular to the long dimension of the line beam. One embodiment of the light source is illustrated in the schematic orthographic representation of
In typical operation, the gantry beams 116, 118 are set at a particular position along the fixed rails 112, 114 and the beam source 120 is moved at a uniform speed along the gantry beams 116, 118 to scan the line beam 126 perpendicularly relative to its long dimension in a direction conveniently called the fast direction. The line beam 126 is thereby scanned from one side of the wafer 122 to the other to irradiate a 1 cm swath of the wafer 122. The line beam 126 is narrow enough and the scanning speed in the fast direction fast enough that a particular area of the wafer is only momentarily exposed to the optical radiation of the line beam 126 but the intensity at the peak of the line beam is enough to heat the surface region to very high temperatures. However, the deeper portions of the wafer 122 are not significantly heated and further act as a heat sink to quickly cool the surface region. Once the fast scan has been completed, the gantry beams 116, 118 are moved along the fixed rails 112, 114 to a new position such that the line beam 126 is moved along its long dimension extending along the slow axis. The fast scanning is then performed to irradiate a neighboring swath of the wafer 122. The alternating fast and slow scanning are repeated, perhaps in a serpentine path of the beam source 120, until the entire wafer 122 has been thermally processed. One example of optics beam source 120, orthographically illustrated in
The following are working examples of the plasma enhanced physical vapor deposition process of block 54 of
First example: The process parameters were set as follows: D.C. target power: 3,000 Watts, chamber pressure: 6 milliTorr, wafer bias voltage: −6 volts to −8 volts, process gas: 100% Argon, target material: graphite, wafer temperature: 65 degrees C. The characteristics of the ACL were as follows: transmittance at 810 nm: 12%-14%, extinction coefficient: 0.51, thickness: 2600 Angstroms, deposition rate: 150 Angstroms/minute, sidewall thickness to top thickness ratio: 20%, bottom thickness to top thickness ratio: 30%. Damage at 1300 degrees C. during laser annealing: none.
Second example: The process parameters were set as follows: D.C. target power: 3,000 Watts, chamber pressure: 6 milliTorr, wafer bias voltage: +10 volts, process gas: 97% Argon and 3% Nitrogen, target material: graphite, wafer temperature: 65 degrees C. The characteristics of the ACL were as follows: transmittance at 810 nm: 3.5%, extinction coefficient: 0.67, thickness: 4000 Angstroms, deposition rate: 200 Angstroms/minute, sidewall thickness to top thickness ratio: 25%, bottom thickness to top thickness ratio: 50%. Damage at 1300 degrees C. during laser annealing: none.
The extinction coefficient at 810 nm obtained in the second working examples is double that obtained in the high temperature PECVD process described in the background discussion above. This improvement permits the ACL thickness to be reduced by a factor of two to obtain the same percentage absorption of the incident laser power (e.g., 90-99%). For a given absorption (e.g., 99%) of the incident laser power in the ACL, the required ACL thickness depends directly upon the extinction coefficient. For example, in order to absorb 99% of the incident laser power, an ACL with an extinction coefficient of 0.55 must be 5400 Angstroms thick while an ACL with an extinction coefficient of only 0.35 (obtained in the conventional PECVD process described in the background discussion above) must be 8700 Angstroms thick. The dramatic reduction in required ACL thickness achieved in the present invention (by the improvement in extinction coefficient) renders the ACL much more durable and impervious to peeling, separation or cracking during the laser annealing step. This is because the stress on the ACL laser during its inevitable expansion and contraction with the scanning laser line beam is a direct function of the ACL thickness. Therefore, the improvement in extinction coefficient obtained in the invention has the direct advantage of higher or more efficient absorption and the indirect advantage of permitting a thinner ACL to reduce stress during the laser anneal.
Several process parameters are exploited in our process to produce an ACL with a higher extinction coefficient at 810 nm. First, the bias power applied to the wafer support pedestal preferably is set at a level at which the wafer bias voltage is on the order of +10 volts (e.g., in a range between +9 volts and +11 volts) if nitrogen is present in the process gas, and in a range of −6 to −8 volts if nitrogen is not employed in the process gas. It is our discovery that such narrow ranges of wafer bias maintained during the PEPVD process 54 of
The wafer temperature during the PEPVD step 54 of
While the invention has been described in detail by specific reference to preferred embodiments, it is understood that variations and modifications thereof may be made without departing from the true spirit and scope of the invention.
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|U.S. Classification||438/795, 438/82, 438/301, 438/303, 438/302, 257/E21.218, 257/E21.049, 257/E21.041, 438/99|
|Cooperative Classification||C23C14/02, H01L21/3146, H01L21/26513, C23C14/35, H01L21/2236, H01L21/268, C23C14/0605|
|European Classification||C23C14/06B, C23C14/35, C23C14/02, H01L21/314C, H01L21/268|
|Apr 6, 2007||AS||Assignment|
Owner name: APPLIED MATERIALS, INC., CALIFORNIA
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PARIHAR, VIJAY;BENCHER, CHRISTOPHER DENNIS;KANURI, RAJESH;AND OTHERS;REEL/FRAME:019127/0014;SIGNING DATES FROM 20070326 TO 20070403
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