|Publication number||US8007167 B2|
|Application number||US 11/992,470|
|Publication date||Aug 30, 2011|
|Filing date||Oct 2, 2006|
|Priority date||Sep 30, 2005|
|Also published as||EP1929285A1, US20090141767, WO2007036922A1|
|Publication number||11992470, 992470, PCT/2006/107, PCT/IE/2006/000107, PCT/IE/2006/00107, PCT/IE/6/000107, PCT/IE/6/00107, PCT/IE2006/000107, PCT/IE2006/00107, PCT/IE2006000107, PCT/IE200600107, PCT/IE6/000107, PCT/IE6/00107, PCT/IE6000107, PCT/IE600107, US 8007167 B2, US 8007167B2, US-B2-8007167, US8007167 B2, US8007167B2|
|Original Assignee||Silicon Laboratories Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (32), Non-Patent Citations (17), Referenced by (8), Classifications (12), Legal Events (4)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This is a national stage of PCT/IE2006/000107 filed Oct. 2, 2006 and published in English, claiming benefit of US provisional application No. 60/721,968, filed Sep. 30, 2005.
The invention relates to electronic sensors.
One of the main driving forces in the electronics industry is the desire to achieve greater integration of finctionality so that production is more automated, and size and per-unit cost reduced. Most importantly, for battery applications, higher integration generally results in lower power, due to reduced parasitic capacitances.
However the continual shrinking of CMOS transistors means that gate delays are reducing, so that overall delays are now becoming dominated by interconnect delay, especially due to the resistivity of Aluminium and capacitance of silicon dioxide (SiO2, dielectric constant K=4 approx). In the field of sensors, and in particular wireless sensors, greater integration has been slow because of the difficulties encountered in integration of microcontroller, A-to-D converter (ADC), EEPROM memory, RF transceiver, and sensor elements in the one integrated sensor device. These difficulties have arisen because of incompatibilities of materials processing for the various elements. For example, sensor elements have conventionally been manufactured on ceramic or glass substrates and cannot be easily integrated on silicon. It has also been difficult to integrate RF transceivers, EEPROM/Flash EEPROM memories, and mixed-signal converter circuits on a single CMOS chip, due to the different processes required—bipolar transistors, floating-gates, and poly-poly capacitors, which suffer from substrate parasitics, strain, and mis-match effects. Also, the aluminium metallisation used in IC processing is prone to corrosion, thus limiting usefulness for some types of sensor applications.
U.S. Pat. Nos. 6,724,612 and 6,690,569 describe sensor devices having both electronic and sensing components, the latter being capacitive electrodes. However, the electrodes require platinum or gold coating, spray or print deposition of a proprietary polymer as a moisture-sensing dielectric, and laser trimmig for some circuits. This processing is not amenable to high-volume semiconductor processing, since these are non-standard materials (or even regarded as contaminants) in a modem CMOS fabrication plant. Therefore they are typically applied in a specialist fabrication plant, or a post-processing operation in a specialist facility, leading to extra cost and production bottlenecks.
The invention addresses these issues.
According to the invention there is provided an integrated sensor device comprising:
The sensor dielectric preferably comprises an organic polymer.
There are enormous advantages to integrating manufacture of the sensor electrodes and dielectric into the MOS interconnect level manufacture, and to using a Low-K dielectric with an organic polymer instead of being only an oxide. It has been found that such a dielectric allows sufficient ingress of gas or moisture and a good response characteristic.
In one embodiment, the sensor dielectric material is of a type which thermosets with sufficient free space volume for gas or humidity sensing when cured. Such materials are particularly effective for not only low-temperature deposition in a MOS process, but are excellent as sensor dielectrics.
In one embodiment, the sensor dielectric material is hydrophobic. This allows fast egress of the small quantity of gas or humidity which ingresses
In one embodiment, the sensor dielectric material has a moisture uptake level of less than 0.5%.
In one embodiment, the sensor dielectric is a polyimide.
In one embodiment, the sensor dielectric comprises a cross-linked polymer.
In one embodiment, the sensor dielectric has spin-on deposition properties.
In one embodiment, the sensor dielectric comprises a sol-gel SiO2 composition.
In another embodiment, the processor comprises an A-to-D converter connected between the sensor electrodes and the processor and having a precision of at least 8 bits, and preferably at least 16 bits, and in one embodiment 18 bits.
In one embodiment, the A-to-D converter comprises an array of dummy capacitors with a constant topography surrounding active A-to-D converter capacitors.
In one embodiment, the sensor is a capacitive sensor.
In a further embodiment, the device comprises a passivation layer protecting at least some MOS circuits.
In one embodiment, the sensor electrodes comprise reference electrodes under the passivation layer and sensing electrodes over the passivation layer.
In one embodiment, the sensor comprises etch stop layers between the interconnect levels, and the passivation layer is of the same composition as the etch stop material.
In one embodiment, the passivation layer is of Si3N4 composition.
In a further embodiment, the passivation layer is recessed over the sensing electrodes.
In one embodiment, there is sensor dielectric material in the recess.
In one embodiment, at least some of the sensor dielectric is between the electrodes and is exposed.
In one embodiment, the MOS circuits are directly beneath the sensor in a vertical dimension.
In one embodiment, the MOS circuits include a temperature sensor.
In one embodiment, the temperature sensor comprises a PNP transistor in the interconnect layers.
In another embodiment, the MOS circuits include a microcontroller for processing signals from the sensor and temperature signals from the temperature sensor to provide an enhanced output.
In one embodiment, the enhanced output includes temperature-corrected gas or humidity readings.
In one embodiment, the sensor further comprises a light emitting diode.
In one embodiment, said diode is formed in a deep trench to a lower interconnect level laterally of the sensor electrodes.
In one embodiment, the device comprises a photo-detector diode.
In one embodiment, said diode is in a deep trench in a lower interconnect level laterally of the sensor electrodes.
In one embodiment, the MOS circuits include a wireless transceiver.
In one embodiment, the wireless transceiver is for communication with other nodes in a network, and it comprises a means for switching channel frequency according to a low frequency channel switching scheme upon detection of interference.
In one embodiment, the sensor comprises an interconnect level including a low noise amplifier.
In one embodiment, the low noise amplifier comprises a MOS device with its channel region formed in a strained silicon region beneath a poly gate.
In one embodiment, the sensor comprises a detecting element connected between pads on an upper surface of the device.
In another aspect, the invention provides a method of producing any sensor device defined above, the method comprising the steps of:
In one embodiment, the method comprises the further step of depositing a passivation layer over a top interconnect level.
In one embodiment, the method comprises the further steps of depositing an etch stop layer over each layer of dielectric in the interconnect levels, and depositing etch stop material over the top interconnect level dielectric to provide the passivation layer.
The invention will be more clearly understood from the following description of some embodiments thereof given by way of example only with reference to the accompanying drawings in which:
A single chip wireless sensor 1 comprises a microcontroller 2 connected to a transmit/receive interface 3, which is coupled to a wireless antenna 4 by an L-C matching circuit. The microcontroller 2 is also connected to an 8 kB RAM 5, a USB interface 6, an RS232 interface 8, 64 kB flash memory 9, and a 32 kHz crystal 10. The device 1 senses humidity and temperature, and a humidity sensor 11 is connected by an 18 bit ΣΔ A-to-D converter 12 to the microcontroller 2 and a temperature sensor 13 is connected by a 12 bit SAR A-to-D converter 14 to the microcontroller 2.
The device 1 is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process.
The manufacturing process 20 is now described in more detail referring to
21. Front End Processing
A substrate 41 of silicon is processed to form CMOS wells, isolation oxidation, poly-silicon gates, and implants to form MOS and EEPROM components 42, as is well known in CMOS processing. Also, in the substrate a temperature-sensitive PNP transistor is formed to provide the temperature sensor 13.
22. Back End Processing
Tungsten contact plugs and silicon dioxide insulating dielectric 43 are deposited by Chemical Vapour Deposition (CVD). Aluminium is then sputtered onto the wafer and etched, forming a first metal interconnect layer (M1). The sequence of dielectric-deposition, metal sputter and etch is then repeated several times, forming a stack 44 of interconnect layers, typically five to nine metal layers on deep sub-micron CMOS processes. However, only four metal layers are shown in
Low-K dielectrics are also used in the CMOS interconnect stacks because they enable lower capacitance for faster signal transfer between components. K is the relative permittivity or dielectric constant, and is typically 3.9 for SiO2. The following are some examples of some Low-K materials used:
Fluorosilicate glass (FSG)
Black Diamond ™ (SiCOH)
B-staged Polymers (CYCLOTENE ™ &
Methyl silsesquioxane (MSQ)
Aerogels/Xerogels (porous silica)
The top aluminium layer M3 includes a heating element 50 with an internal temperature monitor for instantaneous heating and purging of the humidity sensor 11 with immediate temperature monitoring. Also, at this level, the process includes a thin metal plate for a capacitor top metal (CTM) with a thin layer (0.04 μm) SiO2 dielectric between CTM and one of the Aluminium interconnect layers, forming mixed signal metal-insulator-metal (MIM) capacitors for both of the A-to-D converters. The metal plates result in a much lower voltage coefficient of capacitance than poly-poly capacitors, making MIM capacitors much more amenable to high quality RF and A-to-D converter circuits. The metal layer M3 also includes a reference capacitor 48.
A sandwich of silicon dioxide and silicon nitride is deposited by CVD to form a passivation or protection layer 55. A well-known feature of silicon nitride is its strength and imperviousness, so it acts as an excellent barrier to moisture and contaminants which might enter the chip, and it provides excellent protection for the reference capacitor 48 and all of the components in the interconnect layers 44 and the CMOS components beneath.
Copper Plating 24, Spin-on Low-K 25, and Solder Bumping 26
Taking advantage of the barrier properties of Silicon nitride, a layer 56 of thick copper is formed on top of the chip, enabling high-quality resistors, inductors, and capacitors to be implemented “on-chip”, for example the L-C antenna matching circuit of
In general terms, it has been found that a dielectric which is “Low-K” and comprises an organic polymer also has advantageous properties for allowing ingress of gas or humidity, even though the process of making the material “Low-K” had the aim of achieving the enhanced electrical properties. Also, we have found that if the Low-K material is of th type having a cross-linked polymer which thermosets when cured the sensor dielectric properties are particularly advantageous. These materials offer good resistance to chemicals and solvents and therefore there has been a perception in the industry that they act as a barrier and protection against moisture or other fluids. However, we have found that there is sufficient ingress of gas or moisture to act as a good sensor dielectric, with a linear response. The following is a table of capacitance vs. relative humidity readings for a Cyclotene-BCB 4026 Low-K dielectric, which may be used instead of the polyimide dielectric.
% Capacitance change
A graph of the capacitance vs relative humidity readings is shown in
We expect broadly similar characteristics for other Low-K dielectric materials with organic polymers, such as those of polyimide and sol-gel. Finally, openings are etched in the polyimide, in which solder balls 58 are formed on the copper pad connections to complete the step 26. This enables the chip to be soldered directly to a circuit board (“flip-chip”) without the use of bond-wires. This results in very low inductance and resistance in the I/O connections. This is important for RF circuits and for low current battery operation.
Another example of a Low-K material is MCM 41/33, a sol-gel SiO2 which is spun-on at room temperature. The dielectric SiO2 layer is formed by applying a droplet of 1 ml of the sol-gel. This is spun on at wafer spin speed of 500 RPM for 10 seconds. This is followed by a cure at 70° C. for four hours and a calcination cycle at 300° C. to drive out solvent surfactants. The result is a porous Low-K sol-gel SiO2 dielectric layer with hexagonal pores of diameters in the region of 2 to 10 nanometers, resulting in a low K value of 2.7 approx.
In another example, the sensor dielectric comprises Black Diamond (SiCOH), in which carbon doping breaks up an SiO2 lattice, making it porous and thereby reducing its capacitance.
Moisture or some gases can ingress into the Low-K materials due to their free-space volume. This ingress results in a change of conductivity and/or dielectric constant. The high-resolution A-to-D converter 12 co-located on the same chip measures these changes, resulting in a humidity and/or gas sensor, formed in the interconnect layers.
The hydrophobic nature of some Low-K materials such as polyimide and BCB Low-K materials means the resulting change can be quite small, for example less than 0.5% moisture uptake. An advantage of the hydrophobic property is quick egress of moisture, giving a fast response time, with no requirement for heater purge cycles (which would be detrimental to long battery lifetime and reliability). The small pore sizes also mean very little contaminants entering the Low-K material, resulting in a very reliable sensor. The hydrophobic properties also mean that there is a very low chance of contaminants reaching the electrodes.
The 0.5% moisture uptake is quite low, but is detectable by the embedded co-located 18-bit A-to-D converter. This is achieved by forming a sensing capacitor 60 in the copper layer above the silicon-nitride passivation layer 55, and forming an equal value reference capacitor 48 beneath the silicon-nitride in one of the aluminium interconnect layers. The barrier properties of the silicon-nitride passivation 55 prevent moisture ingress to the reference capacitor 48, so that these capacitances form the differential front-end of a second-order over-sampled sigrna-delta modulator, where the small capacitance difference represents the relative humidity signal. This provides a high level of integration between the sensor and converter components.
Take for example a 0.5% change in sensing capacitance as the ambient atmosphere varies from zero to 100% humidity: Since the sensor capacitor is part of a switched-capacitor circuit, it will switch between the reference voltage 1.22V and ground, the effective input signal is: 1.22*0.5%=6.1 mV. To measure the humidity to 0.5% accuracy, means that the ADC must be able to measure 6.1 mV*0.5%=30.5 uV. However, to ensure that the ADC isn't bouncing between values, the RMS noise floor needs to be one sixth of this, 30.5 uV/6=5 uV. Therefore the actual noise floor needs to be 5 μV, while the full input will be 1.22V. This corresponds to 18-bit resolution.
As an integral part of plating the top interconnect layer humidity-sensing capacitive interdigitated fingers (electrodes) 48 are formed. The size and spacing of the fingers is chosen to suit the application. In this embodiment the fingers 48 have a width of 15 μm and a spacing of 15 μm. Using cyclotene (BCB, permittivity K of 2.6) and for a capacitor structure of 2.0×2.0 mm and a copper thickness of 9 μm this gives a sensor capacitance value of 9.7 pF.
It will be appreciated from the above that standard Deep-Sub-Micron CMOS processing techniques and materials are used, thus achieving fully integrated production. The sensor electrodes are made simultaneously with the rest of the chip, using the same dielectric and metal layers as used for interconnect and RF inductor and capacitor components. This ‘standard CMOS’ method is very advantageous to the high-volume manufacturability of this sensor 1.
This approach has not apparently been attempted heretofore because of the perception that such a sensor would require gold or platinum plating and/or other non-standard materials which would be regarded as contaminants in a modem CMOS wafer fabrication plant. In this invention the sensor takes advantage of developments in processing with Low-K dielectric materials in the semiconductor industry for their desirable dielectric properties and low-temperature process deposition. The invention benefits from the allowance of ingress of small quantities of moisture, and also from the hydrophobic nature of the material.
In use, moisture ingresses into the film 57 so that it affects its dielectric constant between the sensing fingers 60. The results are given in the table and plot above.
Humidity variations of 1% or 2% now produce capacitance variations of less than a femtoFarad—still detectable by the highly over-sampled differential sigma-delta high-resolution converter 12. 18 bits of resolution also provides a very large dynamic range, enabling the converter to easily cope with the highly variable and non-linear capacitance-versus-humidity characteristics of different oxides and different pore sizes from wafer to wafer and lot to lot.
The Low-K material may alternatively be deposited by CVD or ‘ink-jet/drop-on-demand’ or print-on methods, eliminating extra etching steps.
In another embodiment, a polyimide mask may include an extra opening to eliminate polyamide from over a reference capacitor. Since polyimide is porous, the portion over the sensing capacitor now experiences a minute change in capacitance versus humidity.
Alternatively, there may be no encapsulation if physical protection is less important and/or if response time to temperature variations is more important.
The high level of integration of this single-chip wireless sensor makes it suitable for the RFID market, where high integration and low cost are key features. By encasing the chip in any of the porous polymer layers listed in the Table above, it becomes a single-chip RFID temperature-humidity sensor.
In addition to the metal heater temperature sensor described above, a substrate PNP temperature sensor 13 is also developed as an integral part of the substrate 41, as shown in
In a 0.18 um CMOS process, the size of the chip 1 is small enough that it can be mounted directly in various standard probe fittings such as a humidity probe 170 or a temperature-humidity RF probe 180, as shown in
The typical analogue voltage ranges are less than 1V, since the maximum allowable voltage on deep-sub-micron CMOS processes is low, for example 1.8V or 1.2V (on 0.18 um and 0.13 um CMOS respectively). Most of these processes have a thicker oxide (typically 70 angstrom) to facilitate a 3.3V I/O transistor capability. These transistors may be used for the input track-and-hold, and other critical sections of the A-to-D converters, where headroom and noise floor are limiting factors. These factors are constant, therefore if the analog signal swing can be doubled or quadrupled, e.g. from 0.6V to 1.2V or 2.4V, this represents a 3 dB or 6 dB improvement in converter performance, respectively.
Having the 8-bit microcontroller 2 and the 64 KB Flash memory 9 on the same chip as the sensor enables significant improvements in accuracy and functionality. This is because real-time continuous calibration or in-situ calibration over various conditions of temperature is achieved. This amount of memory is also sufficient to accommodate the entire IEEE802.15.4 protocol and Zigbee software stack to perform beacon, peer-to-peer, star and mesh networking, key requirements of modern wireless sensor networks. An on-chip regulator generates 1.2V, which powers most of the microcontroller, memory blocks, and wireless RF transceiver, which are fabricated on thin-oxide (e.g. 28 angstrom) minimum geometry devices.
To facilitate lower power, the time-interval counter and part of the microcontroller's interrupt logic 200 is implemented on thick-oxide 3.3V transistors, as shown in
Turning now to the wireless transceiver 3, and its low noise amplifier (LNA) in particular, the LNA is designed to have extra low power and low noise operation. This is enabled by copper inductors on the fifth or sixth interconnect levels, (i.e. same top metal layer which forms the sensor electrodes), and the use of strained silicon MOS devices 210 for the front-end LNA, see
All nodes are pre-programmed with the hop sequence for the frequency-hopping scheme to work. Further, they must all be initialised to the same channel so that they can “hop together”, typically after installation or battery replacement.
In more detail, upon installation (or battery replacement), the installer manually puts the node into “initialise” mode, by, for example, pressing a button. The node then switches on its receiver and “listens” for a nearby node transmission (or master beacon), on channel 0 for example. If it receives nothing after an appropriate time, for example a few seconds or minutes (because the current channel might be blocked), it steps to the next channel in the sequence, and again waits and listens. Eventually by this means it should receive a beacon or data packet from a neighbouring node; it can then re-synchronise its timer, request the hop interval timing, join the sequence, and go to sleep until the next hop and transmit period.
This initialisation method means the node has to stay “on” in full-power receive mode just once at installation; it can then revert to sleep mode for 99.9% of the time (as defined in the 802.15.4 standard) for the 1 to 3 year lifetime of the battery. Since the 802.15.4 standard allows for sleep periods of up to about 4 minutes, the node could be in full-power receive mode for this duration. In practice this is unlikely, however, since the installer will know about this period. Using a spectrum analyser (or hand-held wireless ‘sniffer’), he can roughly predict when the next beacon transmission is due, and press the ‘initialise’ button just before this.
Testing and Calibration
This is traditionally difficult for humidity sensors, requiring special chambers of controlled humidity, along with special package handling and electrical connections. In this invention, since the entire humidity sensor is fabricated in a standard CMOS process, it can be tested—and calibrated—at the normal wafer-level test before wafers are shipped. This takes advantage of the fact that wafer probe and factory test areas are generally operated at a precise humidity level, for example 40% relative humidity. This known value can be stored by the production wafer tester in on-chip Flash EEPROM memory for later use by the microcontroller in correctly calibrating the output value under software control, or it can be used in a non-Flash-EEPROM version of the chip to blow poly fuses to calibrate the sensor at 40% RH. This 1-point calibration may be sufficient for many applications, e.g. office air-conditioning control around a set-point, typically 40%. If more accuracy over a wider range of humidity is desired, then a second calibration point may be required. This is achieved by doing a “second-pass” wafer probe, in an enclosed chamber at 85% RH for example, or a dry-nitrogen desiccant chamber (0.001% RH). Although the second pass wafer test adds some additional cost, it is significantly less than package based testing—and in some cases (for example EEPROM CMOS), a second-pass wafer test is often done as standard. For this higher accuracy testing, a chilled-mirror hygrometer may be attached to monitor the humidity in the wafer tester. Chilled mirror hygrometers may be calibrated against national standard laboratories, and give humidity and dew-point readings within accuracies of 0.3% approx.
In another embodiment, illustrated in
By use of different materials instead of the oxides 230
A piezo-electric polymer may be applied in the configuration shown in
An audio sensor (microphone) is a useful feature on a remote wireless node, for example to “listen” if a motor is running, if an alarm bell is ringing, if an air compressor is leaking. Arrangements are needed for this audio due to the 0.1% duty cycle of IEEE802.15.4; the 250 Kb/s max data rate in the 802.15.4 2.4 GHz band corresponds to a sustained constant data rate of 250 b/s at 0.1% duty cycle. A variable-bit-rate audio compressor block (VBR) is employed to achieve 15:1 or better compression ratio, achieving an effective audio bit-rate of 3.75 Kb/s—sufficient for many industrial low-grade audio requirements.
The etch also reveals a porous silicon region 250 in this embodiment, created at the start of the process by electrochemical etching of the substrate in this particular region. Passing current through this makes it function as a light emitting diode (LED) due to the well known luminescence property of porous silicon. Isolation trenches placed around the porous region can minimize any currents leaking to the substrate and improve the light efficiency.
Electrochemical etching to form porous silicon is well known to those skilled in the art, and available on some CMOS processes, but is non-standard on most CMOS processes. An alternative LED construction is a doped polymer organic light emitting device. Hybrid Ink-jet printing is used to directly deposit patterned luminescent doped-polymer films, for example polyvinylcarbazol (PVK) film, onto electrodes in the manner shown in
The following are some other materials which can be added at lower temperatures, typically 300° C. or less, making them amenable to much easier integration with CMOS processes without altering any of the CMOS junction or device parameters.
One example is a Gold-Ferric-oxide combination (AuFe2O3) as a sensing layer for Carbon Monoxide. It can be sputtered onto the wafer surface at room temperature, e.g. sputter the Ferric-oxide from an Fe2O3 target or from an Iron target in an Oxygen Plasma (Reactive Sputtering), then dope or coat the Iron oxide with gold, and anneal (or sinter) at approx 250 C. This causes the gold to cluster and increases reactivity (e.g. to Carbon Monoxide) by forming Fe2O3-x at the surface, i.e. unformed bonds to which CO will attach, thereby changing the conductivity and dielectric constant of the material, which can be detected by the 18-bit A-to-D converter, as a capacitance or resistance change as per
For SO2 sensing, a thin-film of NNDE (N,N-diethyl-3-amino-propyl-trimethoxysilane) is applied as in
Other materials which can be deposited with CMOS-compatible processing and temperatures are:
The lower temperatures and CMOS-compatibility of these materials, and the parasitic sensing method with tightly coupled high-resolution converter underneath the sensor on the same IC, all means that single-chip gas leak detectors and gas-sensors with room-temperature operating capability are enabled, with very low power, enabling battery operation. The integration on deep sub-micron CMOS, 0.18 um in this disclosure, enables the cost-effective integration of microcontroller, memory (for look-up table calibration and cross-correlation of different on-chip sensor readings) and wireless transceiver. The barrier layers on these processes prevent these gas-sensing materials from diffusing into and contaminating the other CMOS circuitry.
The invention is not limited to the embodiments described but may be varied in construction and detail. For example, conductors other than copper may be used for the interconnects, such as aluminium. Also, the sensor device may be a “stripped down” version of the sensor, a “humidity-to-digital” sensor chip, having no radio or microcontroller or flash memory. In this case, calibration of the A-to-D and sensor is achieved by blowing various poly fuses in the voltage reference circuit and capacitor array. It should be noted that testing need not involve testing every code of the A-to-D, thereby simplifying testing significantly, and reducing cost. Also, some or more of the following features may be provided individually or in combination in a method and device other than as described in the embodiments above:
The detecting element of a gas-sensing device may alternatively be Gold-Ferric Oxide, NNDE, Copper Bromide, Polyanylene, or WO3.
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|U.S. Classification||374/16, 73/73, 257/506, 327/565, 374/170, 374/178|
|International Classification||G01K7/01, G01N25/66, G01N25/26, H01L29/02|
|May 19, 2010||AS||Assignment|
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