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Publication numberUSD361752 S
Publication typeGrant
Application numberUS 29/013,079
Publication dateAug 29, 1995
Filing dateSep 17, 1993
Publication number013079, 29013079, US D361752 S, US D361752S, US-S-D361752, USD361752 S, USD361752S
InventorsKenichi Yamaga
Original AssigneeTokyo Electron Kasbushiki Kaisha, Tokyo Electron Tohoku Kabushiki Kaisha
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Wafer boat or rack for holding semiconductor wafers
US D361752 S
Abstract  available in
Images(3)
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Claims(1)
  1. The ornamental design for wafer boat or rack for holding semiconductor wafers.
Description

FIG. 1 is a front elevational view of a wafer boat or rack for holding semiconductor wafers showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a right side view thereof, the left side view being a mirror image and, therefore, not being shown;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is an enlarged sectional view on section 6--6 in FIG. 1; and,

FIG. 7 is an enlarged sectional view of on section 7--7 in FIG. 1.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US20100282695 *Nov 5, 2009Nov 11, 2010Mark SandiferHigh strength camfer on quartzware
USD734730 *Jun 26, 2013Jul 21, 2015Hitachi Kokusai Electric Inc.Boat of substrate processing apparatus
USD737785 *Jan 27, 2014Sep 1, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD738329 *Jan 27, 2014Sep 8, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD739831 *Sep 20, 2013Sep 29, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD740769 *Sep 20, 2013Oct 13, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD747279 *Jan 27, 2014Jan 12, 2016Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD748593 *Mar 5, 2014Feb 2, 2016Hzo, Inc.Boat for use in a material deposition apparatus
USD769201 *Apr 30, 2015Oct 18, 2016Tokyo Electron LimitedWafer boat
USD772183 *Apr 30, 2015Nov 22, 2016Tokyo Electron LimitedWafer boat
Classifications
U.S. ClassificationD13/182