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Publication numberUSD363464 S
Publication typeGrant
Application numberUS 29/005,246
Publication dateOct 24, 1995
Filing dateFeb 26, 1993
Priority dateAug 27, 1992
Publication number005246, 29005246, US D363464 S, US D363464S, US-S-D363464, USD363464 S, USD363464S
InventorsKazuo Fukasawa
Original AssigneeTokyo Electron Yamanashi Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Electrode for a semiconductor processing apparatus
US D363464 S
Images(2)
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Claims(1)
  1. The ornamental design for an electrode for a semiconductor processing apparatus, as shown and described.
Description

FIG. 1 is a front elevational view of an electrode for a semiconductor processing apparatus showing my new design;

FIG. 2 is a right side elevational view thereof; a left side elevational view being a mirror image thereof;

FIG. 3 is a top plan view thereof; a bottom plan view being a mirror image thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is an enlarged cross-sectional view taken along line 5--5 of FIG. 1; and,

FIG. 6 is an enlarged cross-sectional view taken along line 6--6 of FIG. 1.

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US8402918Apr 7, 2009Mar 26, 2013Lam Research CorporationShowerhead electrode with centering feature
US8414719Jun 19, 2012Apr 9, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8419959Sep 17, 2010Apr 16, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8470127Jan 6, 2011Jun 25, 2013Lam Research CorporationCam-locked showerhead electrode and assembly
US8536071Aug 21, 2012Sep 17, 2013Lam Research CorporationGasket with positioning feature for clamped monolithic showerhead electrode
US8573152Sep 3, 2010Nov 5, 2013Lam Research CorporationShowerhead electrode
US8796153Mar 11, 2013Aug 5, 2014Lam Research CorporationClamped monolithic showerhead electrode
Classifications
U.S. ClassificationD13/182