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Publication numberUSD368802 S
Publication typeGrant
Application numberUS 29/029,711
Publication dateApr 16, 1996
Filing dateOct 13, 1994
Publication number029711, 29029711, US D368802 S, US D368802S, US-S-D368802, USD368802 S, USD368802S
InventorsGary M. Gallagher, Brian S. Wiseman, Boyd C. Wittman
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment
US D368802 S
Images(6)
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Claims(1)
  1. The ornamental design for a "150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment", as shown and described.
Description

FIG. 1 is a front perspective view of a 150 mm wafer cassette for use on 200 mm semi standard wafer handling equipment showing my new design;

FIG. 2 is a right side elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a back elevational view thereof;

FIG. 5 is a top plan view thereof; and,

FIG. 6 is a bottom plan view thereof.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US6625898Jun 13, 2001Sep 30, 2003Applied Materials, IncVariable method and apparatus for alignment of automated workpiece handling systems
US6763281Jun 13, 2001Jul 13, 2004Applied Materials, IncApparatus for alignment of automated workpiece handling systems
US7158857May 6, 2005Jan 2, 2007Applied Materials, Inc.Method and apparatus for aligning a cassette
US8585030 *Sep 18, 2009Nov 19, 2013Tokyo Electron LimitedSubstrate processing apparatus
US20100078867 *Sep 18, 2009Apr 1, 2010Tokyo Electron LimitedSubstrate processing apparatus
Classifications
U.S. ClassificationD03/315