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Publication numberUSD378873 S
Publication typeGrant
Application numberUS 29/045,247
Publication dateApr 22, 1997
Filing dateOct 13, 1995
Publication number045247, 29045247, US D378873 S, US D378873S, US-S-D378873, USD378873 S, USD378873S
InventorsBarry Gregerson, Brian Wiseman, Gary Gallagher
Original AssigneeEmpak, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
300 mm microenvironment pod with door on side
US D378873 S
Abstract  available in
Images(7)
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Claims(1)
  1. The ornamental design for a 300 mm microenvironment pod with door on side, as shown and described.
Description

FIG. 1 is a perspective view of a 300 mm microenvironment pod with door on side, showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

Referenced by
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US6808668Aug 5, 2002Oct 26, 2004Entegris, Inc.Process for fabricating composite substrate carrier
US6871741Aug 5, 2002Mar 29, 2005Entegris, Inc.Composite substrate carrier
US7168564Mar 29, 2005Jan 30, 2007Entegris, Inc.Composite substrate carrier
US7370764May 18, 2004May 13, 2008Entegris, Inc.Transport module
US8734698Jan 22, 2013May 27, 2014Entegris, Inc.Composite substrate carrier
US20030025245 *Aug 5, 2002Feb 6, 2003Entegris, Inc.Composite substrate carrier
US20040206664 *May 18, 2004Oct 21, 2004Entegris, Inc.Transport module
US20050167312 *Mar 29, 2005Aug 4, 2005Entegris, Inc.Composite substrate carrier
US20080302700 *May 12, 2008Dec 11, 2008Nyseth David LTransport module
US20090127160 *Apr 19, 2008May 21, 2009Chin-Ming LinStorage apparatus for storing semiconductor element or reticle
US20100126905 *Jan 28, 2010May 27, 2010Chin-Ming LinStorage apparatus for storing semiconductor element or reticle
US20100236970 *Sep 23, 2010Entegris, Inc.Composite substrate carrier
USD668865 *Oct 16, 2012Entegris, Inc.Substrate container
USD740031 *Sep 17, 2013Oct 6, 2015Entegris, Inc.Substrate container
Classifications
U.S. ClassificationD03/273, D03/315