Search Images Maps Play YouTube News Gmail Drive More »
Sign in
Screen reader users: click this link for accessible mode. Accessible mode has the same essential features but works better with your reader.

Patents

  1. Advanced Patent Search
Publication numberUSD401252 S
Publication typeGrant
Application numberUS 29/082,647
Publication dateNov 17, 1998
Filing dateJan 27, 1998
Publication number082647, 29082647, US D401252 S, US D401252S, US-S-D401252, USD401252 S, USD401252S
InventorsAndrew William Tudhope, David Bruce Jordan, Jose Luis Gonzalez
Original AssigneeSemiconductor Equipment Technology
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Shield and cover for target of sputter coating apparatus
US D401252 S
Images(4)
Previous page
Next page
Claims(1)
  1. The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.
Description

FIG. 1 is a perspective view of a shield and cover for target of sputter coating apparatus embodying the design of the invention;

FIG. 2 is a top plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 3 is a bottom plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 4 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the bottom of FIG. 2;

FIG. 5 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the top of FIG. 2;

FIG. 6 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the left side of FIG. 2;

FIG. 7 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the right side of FIG. 2; and,

FIG. 8 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 8--8 of FIG. 2.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US7097744Jun 12, 2003Aug 29, 2006Applied Materials, Inc.target device with a sputterable target surface, an alignment surface and a target support movable between a first and second target position and a darkspace shield
US7952373 *Oct 23, 2006May 31, 2011Verigy (Singapore) Pte. Ltd.Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
Classifications
U.S. ClassificationD15/138