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Publication numberUSD404368 S
Publication typeGrant
Application numberUS 29/082,978
Publication dateJan 19, 1999
Filing dateFeb 2, 1998
Priority dateAug 20, 1997
Publication number082978, 29082978, US D404368 S, US D404368S, US-S-D404368, USD404368 S, USD404368S
InventorsTomohisa Shimazu
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Outer tube for use in a semiconductor wafer heat processing apparatus
US D404368 S
Images(2)
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Claims(1)
  1. I claim the ornamental design for an outertube for use in a semiconductor wafer heat processing apparatus, as shown and described.
Description

FIG. 1 a perspective view of a outertube for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a top plan view thereof;

FIG. 4 a bottom plan view thereof; and,

FIG. 5 a cross-sectional view taken along line V-V in FIG. 3 .

Classifications
U.S. ClassificationD13/182