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Publication numberUSD404374 S
Publication typeGrant
Application numberUS 29/083,717
Publication dateJan 19, 1999
Filing dateFeb 12, 1998
Priority dateAug 20, 1997
Publication number083717, 29083717, US D404374 S, US D404374S, US-S-D404374, USD404374 S, USD404374S
InventorsNorifumi Kimura
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Fin for use in a semiconductor wafer heat processing apparatus
US D404374 S
Abstract  available in
Images(1)
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Claims(1)
  1. I claim the ornamental design for a fin for use in a semiconductor wafer heat processing apparatus, as shown and described.
Description

FIG. 1 a perspective view of fin for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a right side view thereof;

FIG. 3 a front elevational view thereof;

FIG. 4 a top plan view thereof;

FIG. 5 a bottom plan view thereof;

FIG. 6 a cross-sectional view taken along line VI--VI in FIG. 3;

FIG. 7 a cross-sectional view taken along line VII--VII in FIG. 3; and,

FIG. 8 a cross-sectional view taken along line VIII--VIII in FIG. 3.

Classifications
U.S. ClassificationD13/182