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Publication numberUSD406852 S
Publication typeGrant
Application numberUS 29/079,584
Publication dateMar 16, 1999
Filing dateNov 14, 1997
Publication number079584, 29079584, US D406852 S, US D406852S, US-S-D406852, USD406852 S, USD406852S
InventorsVincent E. Burkhart, Allen Flanigan, Steven Sansoni
Original AssigneeApplied Materials, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Electrostatic chuck with improved spacing mask and workpiece detection device
US D406852 S
Abstract  available in
Images(2)
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Claims(1)
  1. The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.
Description

FIG. 1 depicts a top view of the electrostatic chuck with improved spacing mask and workpiece detection device;

FIG. 2 depicts an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1, the view when looking down along the y-axis, being identical to that of FIG. 2;

FIG. 3 depicts a detailed view of part of a surface and circumferential edge of the electrostatic chuck seen in FIG. 2;

FIG. 4 depicts a bottom view of the electrostatic chuck;

FIG. 5 depicts an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1; and,

FIG. 6 depicts an elevation view of the electrostatic chuck when looking to the right along the x-axis of FIG. 1.

Classifications
U.S. ClassificationD15/140