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Publication numberUSD407696 S
Publication typeGrant
Application numberUS 29/082,977
Publication dateApr 6, 1999
Filing dateFeb 2, 1998
Priority dateAug 20, 1997
Publication number082977, 29082977, US D407696 S, US D407696S, US-S-D407696, USD407696 S, USD407696S
InventorsTomohisa Shimazu
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Inner tube for use in a semiconductor wafer heat processing apparatus
US D407696 S
Abstract  available in
Images(2)
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Claims(1)
  1. I claim the ornamental design for inner tube for use in a semiconductor wafer heat processing apparatus, as shown and described.
Description

FIG. 1 a perspective view of an inner tube for use in a semiconductor wafer heat processing apparatus;

FIG. 2 a front elevational view thereof;

FIG. 3 a top plan view thereof; and,

FIG. 4 a cross-sectional view taken along line IV--IV in FIG. 3.

Classifications
U.S. ClassificationD13/182