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Publication numberUSD409158 S
Publication typeGrant
Application numberUS 29/083,420
Publication dateMay 4, 1999
Filing dateFeb 5, 1998
Priority dateAug 20, 1997
Publication number083420, 29083420, US D409158 S, US D409158S, US-S-D409158, USD409158 S, USD409158S
InventorsTomohisa Shimazu
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Wafer boat for use in a semiconductor wafer heat processing apparatus
US D409158 S
Abstract  available in
Images(2)
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Claims(1)
  1. I claim the ornamental design for wafer boat for use in a semiconductor wafer heat processing apparatus, as shown and described.
Description

FIG. 1 a perspective view of a wafer boat for use in a semiconductor wafer heat processing apparatus.

FIG. 2 a front elevational view thereof.

FIG. 3 a cross-sectional view taken along line III--III in FIG. 2.

FIG. 4 a rear elevational view thereof.

FIG. 5a right side view thereof.

FIG. 6 a cross-sectional view taken along line VI--VI in FIG. 2.

FIG. 7 a top plan view thereof; and,

FIG. 8 a bottom plan view thereof.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US6571964 *Mar 28, 2001Jun 3, 2003International Business Machines CorporationDisk drive supports comprising rods, plates, rails and titanium wires in zig-zag layouts to provide strength, shock and crack resistance
US6871657 *Jan 17, 2002Mar 29, 2005Akrion, LlcLow profile wafer carrier
Classifications
U.S. ClassificationD13/182, 211/41.18, 206/832