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Publication numberUSD412513 S
Publication typeGrant
Application numberUS 29/074,109
Publication dateAug 3, 1999
Filing dateJul 28, 1997
Priority dateJan 29, 1997
Publication number074109, 29074109, US D412513 S, US D412513S, US-S-D412513, USD412513 S, USD412513S
InventorsJun Ooyabu
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Upper electrode for manufacturing semiconductors
US D412513 S
Abstract  available in
Images(7)
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Claims(1)
  1. I claim the ornamental design for an upper electrode for manufacturing semiconductors, as shown and described.
Description

FIG. 1 is a front elevational view of an upper electrode for manufacturing semiconductors showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a front elevational view thereof, showing the electrode in an opened state;

FIG. 8 is a rear elevational view thereof, showing the electrode in an opened state;

FIG. 9 is a top plan view thereof, showing the electrode in an opened state;

FIG. 10 is a bottom plan view thereof, showing the electrode in an opened state;

FIG. 11 is a right side elevational view thereof, showing the electrode in an opened state;

FIG. 12 is a left side elevational view thereof, showing the electrode in an opened state; and,

FIG. 13 is a reduced front elevational view thereof, showing the electrode in an opened state, with the broken-line disclosure being for illustrative purposes only and forming no part of the claimed design.

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US20100252197 *Apr 7, 2009Oct 7, 2010Lam Reseach CorporationShowerhead electrode with centering feature
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Classifications
U.S. ClassificationD15/144