Search Images Maps Play YouTube News Gmail Drive More »
Sign in
Screen reader users: click this link for accessible mode. Accessible mode has the same essential features but works better with your reader.

Patents

  1. Advanced Patent Search
Publication numberUSD425919 S
Publication typeGrant
Application numberUS 29/079,585
Publication dateMay 30, 2000
Filing dateNov 14, 1997
Publication number079585, 29079585, US D425919 S, US D425919S, US-S-D425919, USD425919 S, USD425919S
InventorsVincent E. Burkhart, Allen Flanigan, Steven Sansoni
Original AssigneeApplied Materials, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Electrostatic chuck with improved spacing mask and workpiece detection device
US D425919 S
Abstract  available in
Images(2)
Previous page
Next page
Claims(1)
  1. The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.
Description

FIG. 1 depicts a top view of the electrostatic chuck with improved spacing mask and workpiece detection device;

FIG. 2 depicts an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1;

FIG. 3 depicts a detailed view of part of a surface and circumferential edge of the electrostatic chuck seen of FIG. 2;

FIG. 4 depicts an elevation view of the electrostatic chuck when looking down along the y-axis of FIG. 1;

FIG. 5 depicts an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1, the view when looking to the right being a mirror image to that of FIG. 5; and,

FIG. 6 is a bottom view of the electrostatic chuck.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US8161906Jul 7, 2008Apr 24, 2012Lam Research CorporationClamped showerhead electrode assembly
US8206506Jul 7, 2008Jun 26, 2012Lam Research CorporationShowerhead electrode
US8221582Jul 7, 2008Jul 17, 2012Lam Research CorporationClamped monolithic showerhead electrode
US8272346Apr 10, 2009Sep 25, 2012Lam Research CorporationGasket with positioning feature for clamped monolithic showerhead electrode
US8313805Mar 16, 2012Nov 20, 2012Lam Research CorporationClamped showerhead electrode assembly
US8402918Apr 7, 2009Mar 26, 2013Lam Research CorporationShowerhead electrode with centering feature
US8414719Jun 19, 2012Apr 9, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8419959Sep 17, 2010Apr 16, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8536071Aug 21, 2012Sep 17, 2013Lam Research CorporationGasket with positioning feature for clamped monolithic showerhead electrode
US8573152Sep 3, 2010Nov 5, 2013Lam Research CorporationShowerhead electrode
US8796153Mar 11, 2013Aug 5, 2014Lam Research CorporationClamped monolithic showerhead electrode
US9245716Oct 13, 2010Jan 26, 2016Lam Research CorporationEdge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US20100003824 *Jul 7, 2008Jan 7, 2010Lam Research CorporationClamped showerhead electrode assembly
US20100252197 *Apr 7, 2009Oct 7, 2010Lam Reseach CorporationShowerhead electrode with centering feature
US20110070740 *Sep 17, 2010Mar 24, 2011Lam Research CorporationClamped monolithic showerhead electrode
US20110083809 *Oct 13, 2010Apr 14, 2011Lam Research CorporationEdge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
USD795208 *Feb 1, 2016Aug 22, 2017Tokyo Electron LimitedElectrostatic chuck for semiconductor manufacturing equipment
Classifications
U.S. ClassificationD15/140