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Publication numberUSD441348 S1
Publication typeGrant
Application numberUS 29/114,741
Publication dateMay 1, 2001
Filing dateNov 30, 1999
Priority dateNov 30, 1999
Publication number114741, 29114741, US D441348 S1, US D441348S1, US-S1-D441348, USD441348 S1, USD441348S1
InventorsCraig B. Todd, James E. Yu
Original AssigneeApplied Materials, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Process chamber lid
US D441348 S1
Abstract  available in
Images(6)
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Claims(1)
  1. The ornamental design for a process chamber lid, as shown and described.
Description

FIG. 1 is a top perspective view of a process chamber lid showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a side elevational view thereof;

FIG. 4 is an opposite side elevational view thereof;

FIG. 5 is an enlarged end elevational view thereof;

FIG. 6 is an enlarged opposite end elevational view thereof; and,

FIG. 7 is a bottom plan view thereof.

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US8402918Apr 7, 2009Mar 26, 2013Lam Research CorporationShowerhead electrode with centering feature
US8414719Jun 19, 2012Apr 9, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8419959Apr 16, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8536071Aug 21, 2012Sep 17, 2013Lam Research CorporationGasket with positioning feature for clamped monolithic showerhead electrode
US8573152Sep 3, 2010Nov 5, 2013Lam Research CorporationShowerhead electrode
US8796153Mar 11, 2013Aug 5, 2014Lam Research CorporationClamped monolithic showerhead electrode
US9245716Oct 13, 2010Jan 26, 2016Lam Research CorporationEdge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US20100003824 *Jul 7, 2008Jan 7, 2010Lam Research CorporationClamped showerhead electrode assembly
US20100252197 *Apr 7, 2009Oct 7, 2010Lam Reseach CorporationShowerhead electrode with centering feature
US20110070740 *Sep 17, 2010Mar 24, 2011Lam Research CorporationClamped monolithic showerhead electrode
US20110083809 *Oct 13, 2010Apr 14, 2011Lam Research CorporationEdge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
Classifications
U.S. ClassificationD13/184, D13/199