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Publication numberUSD490450 S1
Publication typeGrant
Application numberUS 29/171,253
Publication dateMay 25, 2004
Filing dateNov 19, 2002
Priority dateMay 20, 2002
Publication number171253, 29171253, US D490450 S1, US D490450S1, US-S1-D490450, USD490450 S1, USD490450S1
InventorsDaisuke Hayashi, Toshiya Tsukahara
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Exhaust ring for semiconductor equipment
US D490450 S1
Abstract  available in
Images(3)
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Claims(1)
  1. The ornamental design for exhaust ring for semiconductor equipment, as shown and described.
Description

FIG. 1 is a top/front perspective view of an exhaust ring for semiconductor equipment showing our new design;

FIG. 2 is a front elevational view thereof, the rear, right-and left-side elevational views being mirror images and, therefore, not shown;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof; and,

FIG. 5 is an enlarged sectional view thereof along line 5—5 in FIG. 3.

The exhaust ring for semiconductor equipment is preferably of anodized aluminum and installed around a semiconductor wafer on a lower electrode of a vacuum vessel of semiconductor manufacturing equipment. The through holes in the middle annulus thereof become gas ways and effectively continue a plasma between an upper and the lower electrode. There are additional through holes in the inner and outer annuli. In other embodiments (not shown) one or more of the through holes and the annular grooves in the inner and outer annuli are disclaimed.

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US8206506Jun 26, 2012Lam Research CorporationShowerhead electrode
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US8313805Nov 20, 2012Lam Research CorporationClamped showerhead electrode assembly
US8402918Apr 7, 2009Mar 26, 2013Lam Research CorporationShowerhead electrode with centering feature
US8414719Jun 19, 2012Apr 9, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8419959Apr 16, 2013Lam Research CorporationClamped monolithic showerhead electrode
US8536071Aug 21, 2012Sep 17, 2013Lam Research CorporationGasket with positioning feature for clamped monolithic showerhead electrode
US8573152Sep 3, 2010Nov 5, 2013Lam Research CorporationShowerhead electrode
US8796153Mar 11, 2013Aug 5, 2014Lam Research CorporationClamped monolithic showerhead electrode
US9245716Oct 13, 2010Jan 26, 2016Lam Research CorporationEdge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US20040007179 *Jun 20, 2003Jan 15, 2004Jae-Cheol LeeReaction apparatus for atomic layer deposition
US20100003824 *Jul 7, 2008Jan 7, 2010Lam Research CorporationClamped showerhead electrode assembly
US20100252197 *Apr 7, 2009Oct 7, 2010Lam Reseach CorporationShowerhead electrode with centering feature
US20110070740 *Sep 17, 2010Mar 24, 2011Lam Research CorporationClamped monolithic showerhead electrode
US20110083809 *Oct 13, 2010Apr 14, 2011Lam Research CorporationEdge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
Classifications
U.S. ClassificationD15/199, D15/138, D15/140, D15/122