Search Images Maps Play YouTube News Gmail Drive More »
Sign in
Screen reader users: click this link for accessible mode. Accessible mode has the same essential features but works better with your reader.

Patents

  1. Advanced Patent Search
Publication numberUSD551634 S1
Publication typeGrant
Application numberUS 29/236,991
Publication dateSep 25, 2007
Filing dateAug 25, 2005
Priority dateFeb 28, 2005
Publication number236991, 29236991, US D551634 S1, US D551634S1, US-S1-D551634, USD551634 S1, USD551634S1
InventorsKazuyuki Sugawara
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Wafer-boat for heat-processing of semiconductor wafers
US D551634 S1
Abstract  available in
Images(11)
Previous page
Next page
Claims(1)
  1. The ornamental design for a wafer-boat for heat-processing of semiconductor wafers, as shown and described.
Description

FIG. 1 is a perspective view of the wafer-boat for heat-processing of semiconductor wafers;

FIG. 2 is a front view thereof;

FIG. 3 is a back view thereof;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a left side view thereof. A right side view thereof is a mirror image thereto;

FIG. 7 is a reference drawing showing sectional views thereof;

FIG. 8 is a sectional view taken along line 88 in FIG. 7;

FIG. 9 is a sectional view taken along line 99 in FIG. 7;

FIG. 10 is a sectional view taken along line 1010 in FIG. 7; and,

FIG. 11 is an enlarged sectional view taken along line 1111 in FIG. 7.

Classifications
U.S. ClassificationD13/182
Legal Events
DateCodeEventDescription
Sep 28, 2005ASAssignment
Owner name: INSTITUTE OF NUCLEAR ENERGY RESEARCH, TAIWAN
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:WANG, MEI-HUI;WU, CHANG-YI;LEE, TE-WEI;AND OTHERS;REEL/FRAME:017039/0813
Effective date: 20050620