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Publication numberUSD553104 S1
Publication typeGrant
Application numberUS 29/215,644
Publication dateOct 16, 2007
Filing dateOct 19, 2004
Priority dateApr 21, 2004
Publication number215644, 29215644, US D553104 S1, US D553104S1, US-S1-D553104, USD553104 S1, USD553104S1
InventorsKaoru Oohashi, Shunsuke Mizukami, Takehiro Ueda
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Absorption board for an electric chuck used in semiconductor manufacture
US D553104 S1
Abstract  available in
Images(5)
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Claims(1)
  1. We claim the ornamental design for an absorption board for an electric chuck used in semiconductor manufacture, as shown.
Description

FIG. 1 is a perspective view of an absorption board for an electric chuck used in semiconductor manufacture.

FIG. 2 is a front elevational view thereof.

FIG. 3 is a rear elevational view thereof.

FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image and not shown; and,

FIG. 5 is a top plan view thereof, the bottom plan view being a mirror image and not shown.

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Classifications
U.S. ClassificationD13/182