|Publication number||USD553104 S1|
|Application number||US 29/215,644|
|Publication date||Oct 16, 2007|
|Filing date||Oct 19, 2004|
|Priority date||Apr 21, 2004|
|Publication number||215644, 29215644, US D553104 S1, US D553104S1, US-S1-D553104, USD553104 S1, USD553104S1|
|Inventors||Kaoru Oohashi, Shunsuke Mizukami, Takehiro Ueda|
|Original Assignee||Tokyo Electron Limited|
|Export Citation||BiBTeX, EndNote, RefMan|
|Referenced by (14), Classifications (1) |
|External Links: USPTO, USPTO Assignment, Espacenet|
Absorption board for an electric chuck used in semiconductor manufacture
US D553104 S1
We claim the ornamental design for an absorption board for an electric chuck used in semiconductor manufacture, as shown.
FIG. 1 is a perspective view of an absorption board for an electric chuck used in semiconductor manufacture.
FIG. 2 is a front elevational view thereof.
FIG. 3 is a rear elevational view thereof.
FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image and not shown; and,
FIG. 5 is a top plan view thereof, the bottom plan view being a mirror image and not shown.
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