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Publication numberUSD559805 S1
Publication typeGrant
Application numberUS 29/242,543
Publication dateJan 15, 2008
Filing dateNov 14, 2005
Priority dateAug 12, 2005
Publication number242543, 29242543, US D559805 S1, US D559805S1, US-S1-D559805, USD559805 S1, USD559805S1
InventorsHiroki Hosaka
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Stage arm for a semiconductor wafer delivery apparatus
US D559805 S1
Abstract  available in
Images(4)
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Claims(1)
  1. The ornamental design for a stage arm for a semiconductor wafer delivery apparatus, as shown and described.
Description

FIG. 1 is a top plan view of a stage arm for a semiconductor wafer delivery apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a cross-sectional view thereof taken along line 44 in FIG. 1;

FIG. 5 is a cross-sectional view thereof taken along line 55 in FIG. 1; and,

FIG. 6 is a perspective view thereof in use.

The broken line showing represents unclaimed subject matter.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
USD785578 *Mar 22, 2016May 2, 2017Asm Ip Holding B.V.Substrate supporting arm for semiconductor manufacturing apparatus
Classifications
U.S. ClassificationD13/182