|Publication number||USD559805 S1|
|Application number||US 29/242,543|
|Publication date||Jan 15, 2008|
|Filing date||Nov 14, 2005|
|Priority date||Aug 12, 2005|
|Publication number||242543, 29242543, US D559805 S1, US D559805S1, US-S1-D559805, USD559805 S1, USD559805S1|
|Original Assignee||Tokyo Electron Limited|
|Export Citation||BiBTeX, EndNote, RefMan|
|Referenced by (1), Classifications (1) |
|External Links: USPTO, USPTO Assignment, Espacenet|
Stage arm for a semiconductor wafer delivery apparatus
US D559805 S1
The ornamental design for a stage arm for a semiconductor wafer delivery apparatus, as shown and described.
FIG. 1 is a top plan view of a stage arm for a semiconductor wafer delivery apparatus showing our new design;
FIG. 2 is a front elevation view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a cross-sectional view thereof taken along line 4—4 in FIG. 1;
FIG. 5 is a cross-sectional view thereof taken along line 5—5 in FIG. 1; and,
FIG. 6 is a perspective view thereof in use.
The broken line showing represents unclaimed subject matter.
|Citing Patent||Filing date||Publication date||Applicant||Title|
|USD785578 *||Mar 22, 2016||May 2, 2017||Asm Ip Holding B.V.||Substrate supporting arm for semiconductor manufacturing apparatus|