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Publication numberUSD562524 S1
Publication typeGrant
Application numberUS 29/220,627
Publication dateFeb 19, 2008
Filing dateJan 5, 2005
Priority dateJul 20, 2004
Publication number220627, 29220627, US D562524 S1, US D562524S1, US-S1-D562524, USD562524 S1, USD562524S1
InventorsTsutomu Hiroki, Wataru Machiyama, Takehiro Shindo
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Wafer transfer apparatus
US D562524 S1
Abstract  available in
Images(17)
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Claims(1)
  1. We claim the ornamental design for a wafer transfer apparatus, as shown and described.
Description

FIG. 1 is a top view of the wafer transfer apparatus of the present design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a back elevational view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus;

FIG. 8 is a reference figure showing a top view seen from a back-left hand side of the apparatus;

FIG. 9 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 10 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus;

FIG. 11 is a reference figure showing a right side view seen from a back side of the apparatus;

FIG. 12 is a reference figure showing a perspective view seen from the back-left hand side of the apparatus;

FIG. 13 is a reference figure showing a perspective view seen from a front-right hand side of the apparatus;

FIG. 14 is a reference figure showing a perspective view seen from the front-left hand side of the apparatus;

FIG. 15 is a reference figure showing a perspective view seen from a back-left hand side of the apparatus; and,

FIG. 16 is a reference figure showing a perspective view seen from a back-right hand side of the apparatus.

The broken line showing of wafers in some of the figures is included for the purpose of illustrating environment and forms no part of the claimed design.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US9245783May 24, 2013Jan 26, 2016Novellus Systems, Inc.Vacuum robot with linear translation carriage
Classifications
U.S. ClassificationD34/28, D34/35