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Publication numberUSD568914 S1
Publication typeGrant
Application numberUS 29/256,744
Publication dateMay 13, 2008
Filing dateMar 24, 2006
Priority dateSep 10, 2002
Publication number256744, 29256744, US D568914 S1, US D568914S1, US-S1-D568914, USD568914 S1, USD568914S1
InventorsDavid T. Or, Keith K. Koai, Hiroyuki Takahama, Takahiro Ito, Koji Ota, Hiroshi Sato
Original AssigneeApplied Materials, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Substrate support lift pin
US D568914 S1
Abstract  available in
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Claims(1)
  1. The ornamental design for a substrate support lift pin, as shown and described.
Description

A lift pin for selectively spacing a substrate from a substrate support is provided. Embodiments of the lift pin include a lift pin shaft and at least one larger diameter shoulder section symmetrical the lift pin shaft that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section reduces pin scratching, particle generation, and component wear, thus increasing the life of the lift pin. The shoulder section also minimizes sticking of the lift pin, thus enhancing movement of the lift pin through the guide hole. The shoulder section may be made of a different material than the lift pin shaft and/or an outer surface of the shoulder section may be machined to a micro-smooth surface. An upper portion of the lift pin also includes a tapered portion configured to provide a stop for the lift pin to prevent the lift pin from falling through the guide hole in the substrate support.

FIG. 1 is a schematic side view of one embodiment of a lift pin.

FIG. 2 is a top view of FIG. 1; and,

FIG. 3 is a cross-sectional view taken along line 33 of FIG. 1.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US8681472 *Jun 18, 2009Mar 25, 2014Varian Semiconductor Equipment Associates, Inc.Platen ground pin for connecting substrate to ground
US20090314211 *Dec 24, 2009Applied Materials, Inc.Big foot lift pin
US20090317964 *Dec 24, 2009Varian Semiconductor Equipment Associates, Inc.Platen for reducing particle contamination on a substrate and a method thereof
Classifications
U.S. ClassificationD15/138