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Publication numberUSD571383 S1
Publication typeGrant
Application numberUS 29/252,841
Publication dateJun 17, 2008
Filing dateJan 30, 2006
Priority dateJul 29, 2005
Publication number252841, 29252841, US D571383 S1, US D571383S1, US-S1-D571383, USD571383 S1, USD571383S1
InventorsKinya Ota, Cai zhong Tian, Junichi Kitagawa
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Top panel for microwave introduction window of a plasma processing apparatus
US D571383 S1
Images(5)
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Claims(1)
  1. The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as shown and described.
Description

FIG. 1 is a front view of a top panel for microwave introduction window of a plasma processing apparatus showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a sectional view taken along line 77 of FIG. 5;

FIG. 8 is an enlarged view taken along line 88 of FIG. 7;

FIG. 9 is an enlarged view taken along line 99 of FIG. 7; and,

FIG. 10 is a perspective view thereof.

Classifications
U.S. ClassificationD15/138, D15/199