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Publication numberUSD589471 S1
Publication typeGrant
Application numberUS 29/278,401
Publication dateMar 31, 2009
Filing dateMar 28, 2007
Priority dateSep 28, 2006
Publication number278401, 29278401, US D589471 S1, US D589471S1, US-S1-D589471, USD589471 S1, USD589471S1
InventorsTomohito Komatsu
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Heater for manufacturing semiconductor
US D589471 S1
Abstract  available in
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  1. The ornamental design for a heater for manufacturing semiconductor, as shown and described.

FIG. 1 is a front elevational view of a heater for manufacturing semiconductor, showing my new design;

FIG. 2 is a rear elevational view thereof; and,

FIG. 3 is a sectional view taken along line 33 in FIG. 1.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

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U.S. ClassificationD13/182