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Publication numberUSD589471 S1
Publication typeGrant
Application numberUS 29/278,401
Publication dateMar 31, 2009
Filing dateMar 28, 2007
Priority dateSep 28, 2006
Publication number278401, 29278401, US D589471 S1, US D589471S1, US-S1-D589471, USD589471 S1, USD589471S1
InventorsTomohito Komatsu
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Heater for manufacturing semiconductor
US D589471 S1
Images(4)
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Claims(1)
  1. The ornamental design for a heater for manufacturing semiconductor, as shown and described.
Description

FIG. 1 is a front elevational view of a heater for manufacturing semiconductor, showing my new design;

FIG. 2 is a rear elevational view thereof; and,

FIG. 3 is a sectional view taken along line 33 in FIG. 1.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Classifications
U.S. ClassificationD13/182