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Publication numberUSD590359 S1
Publication typeGrant
Application numberUS 29/264,779
Publication dateApr 14, 2009
Filing dateAug 18, 2006
Priority dateFeb 20, 2006
Publication number264779, 29264779, US D590359 S1, US D590359S1, US-S1-D590359, USD590359 S1, USD590359S1
InventorsHirofumi Kaneko
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Process tube for manufacturing semiconductor wafers or the like
US D590359 S1
Abstract  available in
Images(10)
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Claims(1)
  1. The ornamental design for a process tube for manufacturing semiconductor wafers or the like, as shown and described.
Description

FIG. 1 is a front elevational view of the process tube for manufacturing semiconductor wafers or the like, showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevational view thereof,

FIG. 6 is a left side elevational view thereof;

FIG. 7 is an enlarged cross-sectional view thereof taken along line 77 in FIG. 3

FIG. 8 is an enlarged cross-sectional view thereof taken along line 88 in FIG. 3

FIG. 9 is an enlarged cross-sectional view thereof taken along line 99 in FIG. 3

FIG. 10 is a vertical cross-sectional view thereof taken along line 1010 in FIG. 3; and,

FIG. 11 is a bottom and right side perspective view thereof shown on reduced scale.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Classifications
U.S. ClassificationD13/182