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Publication numberUSD600222 S1
Publication typeGrant
Application numberUS 29/309,701
Publication dateSep 15, 2009
Filing dateSep 26, 2008
Priority dateMar 28, 2008
Publication number29309701, 309701, US D600222 S1, US D600222S1, US-S1-D600222, USD600222 S1, USD600222S1
InventorsIzumi Sato
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Wafer boat
US D600222 S1
Abstract  available in
Images(9)
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Claims(1)
  1. The ornamental design for a wafer boat, as shown and described.
Description

FIG. 1 is a front view;

FIG. 2 is a partial enlarged perspective view of a bottom along 22 of the frontal view shown in FIG. 1;

FIG. 3 is an enlarged bottom view;

FIG. 4 is a rear view;

FIG. 5 is a left side view the right side being a mirror image thereof;

FIG. 6 is a plan view;

FIG. 7 is a bottom view; and,

FIG. 8 is a partial, enlarged view, along 22 of a front view shown in FIG. 1 of the wafer boat in use.

Salients are formed on a bottom board of a wafer boat to get into reentrants of a heat insulating cylinder for manufacturing a semiconductor wafer, and stabilize it in a setting condition. The portion shown in solid lines is my claimed design. The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US8727179 *Oct 1, 2010May 20, 2014Rtc Industries, Inc.Merchandise dispensing apparatus providing theft deterrence
US20080000851 *Jun 1, 2007Jan 3, 2008Rohm And Haas Electronic Materials LlcApparatus with fillet radius joints
US20110017763 *Oct 1, 2010Jan 27, 2011Colelli Robert PMerchandise dispensing apparatus providing theft deterrence
USD734730 *Jun 26, 2013Jul 21, 2015Hitachi Kokusai Electric Inc.Boat of substrate processing apparatus
USD737785 *Jan 27, 2014Sep 1, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD738329 *Jan 27, 2014Sep 8, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD739831 *Sep 20, 2013Sep 29, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD740769 *Sep 20, 2013Oct 13, 2015Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD747279 *Jan 27, 2014Jan 12, 2016Hitachi Kokusai Electric Inc.Boat for substrate processing apparatus
USD748593 *Mar 5, 2014Feb 2, 2016Hzo, Inc.Boat for use in a material deposition apparatus
Classifications
U.S. ClassificationD13/182