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Publication numberUSD610176 S1
Publication typeGrant
Application numberUS 29/332,207
Publication dateFeb 16, 2010
Filing dateFeb 11, 2009
Priority dateAug 26, 2008
Publication number29332207, 332207, US D610176 S1, US D610176S1, US-S1-D610176, USD610176 S1, USD610176S1
InventorsShuichi Nagamine, Naofumi Kishita, Koji Takayanagi, Yuichiro Miyata, Yasushi Takiguchi
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Coater cup
US D610176 S1
Abstract  available in
Images(5)
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Claims(1)
  1. The ornamental design for a coater cup, as shown and described.
Description

FIG. 1 is a top perspective view of a coater cup showing new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a vertical sectional view taken along line 77 of FIG. 5 thereof; and,

FIG. 8 is an enlarged view taken along line 88 of FIG. 7 thereof.

The article is mounted on an upper end opening portion of a cup base portion surrounding a lower portion side of a spin chuck of a coater which holds a semiconductor wafer.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
USD744276 *Nov 26, 2013Dec 1, 2015Johnathan H. OlinBowl guard
Classifications
U.S. ClassificationD15/138