|Publication number||USD614152 S1|
|Application number||US 29/331,021|
|Publication date||Apr 20, 2010|
|Filing date||Jan 16, 2009|
|Priority date||Jul 21, 2008|
|Publication number||29331021, 331021, US D614152 S1, US D614152S1, US-S1-D614152, USD614152 S1, USD614152S1|
|Inventors||Jeong Ho Lee, Sang Jin Jeong, Young Seok Choi|
|Original Assignee||Asm Genitech Korea, Ltd.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Classifications (1) |
|External Links: USPTO, USPTO Assignment, Espacenet|
Substrate transfer device for semiconductor deposition apparatus
US D614152 S1
The ornamental design for a substrate transfer device for semiconductor deposition apparatus, as shown and described.
FIG. 1 is a perspective view of a substrate transfer device that may be positioned in a semiconductor deposition apparatus, showing our new design;
FIG. 2 is a front elevation view thereof;
FIG. 3 is a rear elevation view thereof;
FIG. 4 is a left side elevation view thereof;
FIG. 5 is a right side elevation view thereof;
FIG. 6 is a top plan view thereof; and,
FIG. 7 is a bottom plan view thereof.
The ornamental design which is claimed is shown in solid lines in the drawings.