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Publication numberUSD614153 S1
Publication typeGrant
Application numberUS 29/334,984
Publication dateApr 20, 2010
Filing dateApr 6, 2009
Priority dateOct 10, 2006
Also published asCN101522943A, CN101522943B, US8137462, US20080085226, US20120156108, WO2008045972A2, WO2008045972A3
Publication number29334984, 334984, US D614153 S1, US D614153S1, US-S1-D614153, USD614153 S1, USD614153S1
InventorsKyle Fondurulia, Eric J Shero, Mohith Verghese, Carl L White
Original AssigneeAsm America, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Reactant source vessel
US D614153 S1
Abstract  available in
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  1. The ornamental design for a reactant source vessel, as shown and described.

FIG. 1 is a top perspective view of a reactant source vessel of the present invention;

FIG. 2 is top view thereof;

FIG. 3 is a side view thereof; and,

FIG. 4 is a cross-sectional side view thereof, taken along the line 44 of FIG. 2.

The bottom view has been omitted and forms no part of the claimed design.

The ornamental design which is claimed is shown in solid lines in the drawings. Any broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.

Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US8728832May 7, 2012May 20, 2014Asm Ip Holdings B.V.Semiconductor device dielectric interface layer
US8802201Dec 29, 2011Aug 12, 2014Asm America, Inc.Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
US8986456 *Apr 19, 2010Mar 24, 2015Asm America, Inc.Precursor delivery system
US9005539Nov 14, 2012Apr 14, 2015Asm Ip Holding B.V.Chamber sealing member
US9096931Dec 6, 2011Aug 4, 2015Asm America, IncDeposition valve assembly and method of heating the same
US20100322604 *Apr 19, 2010Dec 23, 2010Kyle FonduruliaPrecursor delivery system
U.S. ClassificationD13/182, D23/366
Cooperative ClassificationC23C16/4481
European ClassificationC23C16/448B