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Publication numberUSD641030 S1
Publication typeGrant
Application numberUS 29/323,530
Publication dateJul 5, 2011
Filing dateAug 27, 2008
Priority dateFeb 29, 2008
Publication number29323530, 323530, US D641030 S1, US D641030S1, US-S1-D641030, USD641030 S1, USD641030S1
InventorsTaichi Nakamura
Original AssigneeNgk Insulators, Ltd.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like
US D641030 S1
Images(4)
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Claims(1)
  1. The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
Description

FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;

FIG. 2 is a front view thereof, a rear view being the same image of a front view;

FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;

FIG. 4 is a bottom plan view thereof; and,

FIG. 5 is a sectional view taken vertically at the center of the portion shown by 55 in FIG. 2.

The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.

Classifications
U.S. ClassificationD15/144.1
Legal Events
DateCodeEventDescription
Jan 8, 2009ASAssignment
Owner name: CCS TECHNOLOGY, INC., DELAWARE
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KLUWE, WOLF;SYPLACZ, ROMAN ARNOLD THEODOR;MULLER, THORSTEN;REEL/FRAME:022073/0909
Effective date: 20081113