|Publication number||USD641030 S1|
|Application number||US 29/323,530|
|Publication date||Jul 5, 2011|
|Filing date||Aug 27, 2008|
|Priority date||Feb 29, 2008|
|Publication number||29323530, 323530, US D641030 S1, US D641030S1, US-S1-D641030, USD641030 S1, USD641030S1|
|Original Assignee||Ngk Insulators, Ltd.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Classifications (1) |
|External Links: USPTO, USPTO Assignment, Espacenet|
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like
US D641030 S1
The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;
FIG. 2 is a front view thereof, a rear view being the same image of a front view;
FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;
FIG. 4 is a bottom plan view thereof; and,
FIG. 5 is a sectional view taken vertically at the center of the portion shown by 5—5 in FIG. 2.
The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.