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Publication numberUSD641829 S1
Publication typeGrant
Application numberUS 29/378,161
Publication dateJul 19, 2011
Filing dateOct 29, 2010
Priority dateOct 29, 2010
Publication number29378161, 378161, US D641829 S1, US D641829S1, US-S1-D641829, USD641829 S1, USD641829S1
InventorsIvelin A. Angelov, James E. Caron, Ilia Kalinovshi
Original AssigneeNovellus Systems, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Plasma reactor showerhead face plate having concentric ridge pattern
US D641829 S1
Abstract  available in
Images(5)
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Claims(1)
  1. We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.
Description

FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,

FIG. 5 is a cross-sectional view thereof, taken generally along line 55 in FIG. 3, showing succinctly the surface contours seen in FIGS. 1 and 3.

Classifications
U.S. ClassificationD23/213