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Publication numberUSD642605 S1
Publication typeGrant
Application numberUS 29/358,979
Publication dateAug 2, 2011
Filing dateApr 2, 2010
Priority dateApr 2, 2010
Publication number29358979, 358979, US D642605 S1, US D642605S1, US-S1-D642605, USD642605 S1, USD642605S1
InventorsTetsuya Ishikawa, Alexander Tam, David H. Quach
Original AssigneeApplied Materials, Inc.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Lid assembly for a substrate processing chamber
US D642605 S1
Images(10)
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Claims(1)
  1. The ornamental design for a lid assembly for a substrate processing chamber, as shown and described.
Description

FIG. 1 is a top plan view of a lid assembly for a substrate processing chamber showing our new design.

FIG. 2 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 2 of FIG. 1.

FIG. 3 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 3 of FIG. 1.

FIG. 4 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 4 of FIG. 1.

FIG. 5 is a side elevation view of the lid assembly of FIG. 1, rotated 180°, as viewed from line FIG. 5 of FIG. 1.

FIG. 6 is an isometric top view of the lid assembly of FIG. 1.

FIG. 7 is another isometric top view of the lid assembly of FIG. 1.

FIG. 8 is an isometric bottom view of the lid assembly of FIG. 1; and,

FIG. 9 is a bottom plan view of the lid assembly of FIG. 1.

The broken line showing of structural features is included for the purpose of illustrating non-claimed subject matter and forms no part of the claimed design.

Non-Patent Citations
Reference
1Tam, et al., U.S. Appl. No. 12/831,522, filed Jul. 7, 2010, entitled "Showerhead Assembly With Metrology Port Purge."
Classifications
U.S. ClassificationD15/144.1