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Publication numberUSD645889 S1
Publication typeGrant
Application numberUS 29/323,536
Publication dateSep 27, 2011
Filing dateAug 27, 2008
Priority dateFeb 29, 2008
Publication number29323536, 323536, US D645889 S1, US D645889S1, US-S1-D645889, USD645889 S1, USD645889S1
InventorsTaichi Nakamura
Original AssigneeNgk Insulators, Ltd.
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Shaft portion of an apparatus for holding and heating semiconductor wafers or the like
US D645889 S1
Abstract  available in
Images(4)
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Claims(1)
  1. The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
Description

FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;

FIG. 2 is a front view thereof, a rear view being the same image of a front view;

FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;

FIG. 4 is a bottom plan view thereof; and,

FIG. 5 is a sectional view taken vertically at the center of the portion shown by 5-5 in FIG. 2.

The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.

Classifications
U.S. ClassificationD15/144.1