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Publication numberUSD658691 S1
Publication typeGrant
Application numberUS 29/400,581
Publication dateMay 1, 2012
Filing dateAug 30, 2011
Priority dateMar 30, 2011
Publication number29400581, 400581, US D658691 S1, US D658691S1, US-S1-D658691, USD658691 S1, USD658691S1
InventorsKouki Suzuki, Jun Yamashita, Masakazu Ban, Atsushi Ueda
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Liner for plasma processing apparatus
US D658691 S1
Images(4)
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Claims(1)
  1. The ornamental design for a liner for plasma processing apparatus, as shown and described.
Description

FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a sectional view taken along line 7-7 of FIG. 1 thereof;

FIG. 8 is a sectional view taken along line 8-8 of FIG. 1 thereof; and,

FIG. 9 is a perspective view thereof.

Classifications
U.S. ClassificationD15/138