Search Images Maps Play YouTube News Gmail Drive More »
Sign in
Screen reader users: click this link for accessible mode. Accessible mode has the same essential features but works better with your reader.

Patents

  1. Advanced Patent Search
Publication numberUSD658693 S1
Publication typeGrant
Application numberUS 29/401,106
Publication dateMay 1, 2012
Filing dateSep 7, 2011
Priority dateMar 30, 2011
Publication number29401106, 401106, US D658693 S1, US D658693S1, US-S1-D658693, USD658693 S1, USD658693S1
InventorsKouki Suzuki, Jun Yamashita, Masakazu Ban, Atsushi Ueda
Original AssigneeTokyo Electron Limited
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Liner for plasma processing apparatus
US D658693 S1
Images(4)
Previous page
Next page
Claims(1)
  1. The ornamental design for a liner for plasma processing apparatus, as shown and described.
Description

FIG. 1 is a front view of a liner for plasma processing apparatus showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a sectional view taken along line 5-5 of FIG. 2 thereof; and,

FIG. 6 is a perspective view thereof.

Classifications
U.S. ClassificationD15/138