USRE33387E - Atomic force microscope and method for imaging surfaces with atomic resolution - Google Patents
Atomic force microscope and method for imaging surfaces with atomic resolution Download PDFInfo
- Publication number
- USRE33387E USRE33387E US07/273,354 US27335488A USRE33387E US RE33387 E USRE33387 E US RE33387E US 27335488 A US27335488 A US 27335488A US RE33387 E USRE33387 E US RE33387E
- Authority
- US
- United States
- Prior art keywords
- sample
- cantilever
- point
- microscope
- tunnel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
Definitions
- This invention relates to a method for imaging surfaces of objects with atomic resolution, and to an atomic force microscope which employs that method.
- Electron microscopes typically have resolutions of 20 nm vertical and 1 nm lateral, but their known disadvantage is that because of the high energies of the electron beam required in achieving a high resolution, most surfaces are severely damaged.
- the scanning tunneling microscope of U.S. Pat. No. 4,343,993 operates with much smaller energies. Since its operation and structure is relevant in connection with the present invention, the brief description of the scanning tunneling microscope is in order.
- a very sharp metal tip is raster-scanned across the surface to be inspected at a distance so small that the electron clouds of the atoms at the apex of the tip and on the surface area closest to the tip gently touch.
- a so-called tunnel current then flows across the gap provided a potential difference exists between said tip and the surface.
- This tunnel current happens to be exponentially dependent on the distance between tip and surface, and this phenomenon is used to generate a correction signal based on the deviations from a predetermined value occurring as the tip is scanned across the surface of the probe.
- the correction signal is used to control the tunnel distance so as to minimize the correction signal, and to be plotted versus a position signal derived from the physical position of the tip over the surface being inspected.
- This technique permits a resolution down to an atomic scale, i.e., individual atoms on a surface can be made visible.
- the scanning tunneling microscope requires the existence of a potential difference across the tunnel gap. Accordingly, tunnel tip and surface to be inspected either have to consist of electrically conductive material or must be coated with such material. (An insulating surface layer thinner than the tunneling length is permissible.) Thus, the scanning tunneling microscope has a natural limitation where the surface of an insulator is to be studied. Obviously, many of its details are sacrificed if a surface must first be coated with a metal layer, however thin that layer may be.
- an object of the invention to describe a method for imaging the surface of any material with atomic resolution, which method does not require high energies or preparatory metal coating, and which is not limited to working with electrical conductors.
- the principle underlying both the method and the microscope is based on the insight that it atoms are approached to one another so closely that their electron clouds touch (i.e., that there is a low-level overlap of the wave function of the front atom of a sharp tip with the surface atoms of the sample to be inspected), interatomic forces occur.
- these forces are extremely small and hitherto have been very difficult to measure outside a laboratory environment and at a reasonable scanning rate.
- This become now possible with the present invention in that the interatomic forces are employed to deflect a very small spring, and the deflections of said spring are measured with a tunneling microscope.
- applicant's method for generating a topographical image of a sample surface with a resolution better than 100 nanometers in characterized by the following steps: A sharp point which is fixed to one end of a spring-like cantilever is brought so close to the surface of a sample to be inspected that the forces occurring between said point and the sample's surface are larger than 10 -20 N such that the resulting force deflects the cantilever.
- the deflection of the cantilever is detected by means of a tunnel tip disposed adjacent the cantilever.
- the tunnel current then flowing across the gap between the cantilever and tunnel tip is maintained at a constant value by using any detected variations of the tunnel current to generate a correction signal.
- the correction signal is used, among other things, to maintain the point-to-sample distance constant.
- Applicant's atomic force microscope performs the method described above and comprises a sample holder designed for moving the sample in xyz-directions by steps in the nanometer range, and means including first and second tunnel electrodes and associated electronics for measuring the distance between the tunnel electrodes and generating a correction signal in response to deviations of said distance from a predetermined value.
- This atomic force microscope is characterized in that the sample holder is disposed opposite a sharp point fixed to one end of a spring-like cantilever.
- the cantilever constitutes or carries the first of the electrodes, the second tunnel electrode being movably disposed adjacent the first tunnel electrode.
- the correction signal is applied to the sample holder for maintaining the sample-to-point distance constant; the correction signal may be applied to a plotter connected to a source of position pulses derived from the scanning of the point across the sample's surface of depicting the contour of the sample surface.
- FIG. 1 illustrates the configuration of the essential parts of the atomic force microscope embodying the invention
- FIG. 2 illustrates a preferred embodiment of the atomic force microscope of FIG. 1
- FIG. 3 depicts circuitry for permitting operation of the microscope of the present invention in a selectable one of four modes.
- the basic configuration of the atomic force microscope embodying the invention comprises a rigid bas 1 which may, for example, consist of an aluminum block.
- a rigid bas 1 which may, for example, consist of an aluminum block.
- an xyz-drive 3 which permits a sample 4 to be displaced in x, y, and z directions with respect to a stationary point 5.
- Point 5 is supported on an arm 6 protruding from base 1 and carrying a cantilever which in the preferred embodiment takes the form of a leaf spring 7 with point 5 fixed to the upper end of said spring.
- Z-drive 9 permits tunnel tip 8 to advance or retract with respect to spring 7 and is supported on an arm 10 extending from base 1.
- the sample 4 to be inspected is mounted on xyz-drive 3 with its surface facing point 5.
- interatomic forces occur. These forces, which are repulsive, are on the order of 10 -13 N and operate to deflect spring 7, to which point 5 is fixed.
- the masses of point 5 and of spring 7 should be as small as possible. Also, to permit a large deflection, the spring should be soft, but at the same time it should be reasonably insensitive against building vibrations. The strongest frequency components of building vibrations are around 100 Hz. Thus the spring/point assembly should have an eigen frequency f o much higher than 100 Hz, and this requires a very small mass.
- the mass of the point/spring assembly was about 10 -8 kg and the eigen frequency was found to be 2 kHz.
- the spring consisted of a thin gold foil of 25 ⁇ m thickness and 0.8 mm length, and an observed deflection of 40 pm corresponds to a force on the order of 10 -10 N.
- Tunnel tip 8 is advanced by z-drive 9 toward spring 7 to within a preselected distance, i.e., about 0.3 nm, so that a tunnel current will flow across the gap between the spring and tip, provided a suitable potential difference exists between them.
- This tunnel current is exponentially dependent on the distance between the tunnel electrodes.
- the tunnel current is a measure of the deviation of the surface elevation at the actual location of inspection of sample 4 from a predetermined or home level.
- the atomic force microscope according to the invention will be used for mapping a larger part of the surface: e.g., that of a semiconductor wafer or circuit board. Accordingly, point 5 is scanned across the sample in a matrix fashion. If the value of the tunnel current for each spot on the sample surface is plotted (by means not shown) versus the location information of that spot, a topographical image of the sample surface will result.
- the tunnel current variation resulting from the scanning of a (usually non-flat) surface is used to generate a correction signal which is applied in a feedback loop to the z-portion of xyz-drive 3 so as to control the distance between point 5 and sample 4 in such a manner that the interatomic force is maintained at a constant value.
- spring 7 is supported on arm 6 by means of a piezoelectric element 13. This enables oscillation of the spring in the z-direction, e.g., at its eigen frequency, in one particular mode of operation which will be described later.
- FIG. 2 shows in more detail the preferred embodiment of the atomic force microscope of the present invention.
- the distance between point 5 and sample 4 is roughly adjustable by means of a screw 14 which bears against a Viton pad 15 sitting on a member 16.
- the latter is supported via a Viton cushion 17 by the base 1.
- Member 16 carries the xyz-drive 3 on which sample 4 is held.
- Cantilever 7 is fixed to base 1 and carries point 5, the apex of which faces sample 4.
- Tunnel tip 8 is rough-positioned with respect to cantilever 7 by means of a screw 18 which permits squeezing a Viton cushion 19.
- the fine-positioning of tunnel tip 8 is accomplished by z-drive 9 which is supported on a member 20 carried by base 1 via said Viton cushion 19.
- a vibration filter 22 is provided.
- This filter comprises a stack of metal plates 23 separated by rubber pads 24 of decreasing sizes (from the bottom up), as known from IBM Technical Disclosure Bulletin Vol. 27, No. 5, p. 3137.
- FIG. 3 depicts circuitry, including feedback loops that permit four different feedback modes in operating the atomic force microscope of the present invention.
- this circuitry comprises a lead 26 connecting to an I-V converter 27 an electrode associated with the side of cantilever spring 7 adjacent tunnel tip 8.
- converter 27 converts current into voltage to detect variations in the tunnel current.
- Converter 27 forms part of a feedback loop including a controller 28.
- Controller 28 is connected to the z-drive of the xyz-drive 3 to modulate the latter in the z direction. Controller 28 processes the voltage signal from converter 27 to remove noise and provide a signal of appropriate sign and amplitude according to a selectable one of the aforementioned feedback modes which will not be described.
- controller 28 is conditioned to operate in the first mode [ac].
- first mode after proper adjustment of the distances between sample 4 and point 5, and between cantilever 7 and tunnel tip 8, respectively, xyz-drive 3 is modulated to expand and retract in z-direction with an amplitude between 0.1 and 1 nanometer at the eigen frequency of cantilever 7.
- the interatomic force existing between the front atoms at the apex of point 5 and those on the surface of sample 4 causes cantilever 7 to oscillate. This oscillation, of course, changes the distance between cantilever 7 and tunnel tip 8, so as to modulate the tunnel current.
- controller 28 With a switch 30 (FIG. 3) in the position in which it is shown, controller 28 is connected to a modulator 31. Controller 28 filters out the one specific frequency of the modulated tunnel current that is applied as a correction signal in line 32 to the control input of the z-section of xyz-drive 3 forcing sample 4 to be retracted.
- controller 28 is conditioned to operate in the second mode [pz].
- switch 30 is operated to connect the modulator 31 to the z-section of a controller 33.
- Controller 33 controls the xyz-drive 3 in the x and y directions to scan the sample 4 in the x and y directions, and also modulates the piezoelectric element 13 in the z direction.
- Cantilever 8 (FIG. 1) is excited by means of piezoelectric element 13 to oscillate in z-direction with its eigen frequency at an amplitude in the 0.01 . . . 0.1 nanometer range.
- the interatomic force existing at the interface between point 5 and sample 4 will cause the amplitude of the oscillation of cantilever 7 to change. From this change, a correction signal can be derived in line 34.
- controller 28 conditioned to operate in the third mode [ ⁇ ]
- feedback operation is identical with the second mode, except for the fact that here the changes in phase of the cantilever's oscillation are used to derive the correction signal in line 34.
- controller 28 When conditioned to operate in the fourth mode [v(I)], controller 28 converts the voltage from converter 27 into at least one preselected bandwidth of frequencies, which may include the dc component.
- switch 30 In the fourth mode which applies in situations where a small bias force is desirable or necessary, switch 30 is moved to a position 35 in which it disconnects the modulator 31 from both controllers 28 and 33.
- sample 4 is slowly approached to the stationary cantilever 7 the deflection of which varies the tunnel current flowing across the gap between cantilever 7 and tunnel tip 8. Based on the variation of the tunnel current, a control signal is derived in line 32 which directly controls the z-section of xyz-drive 3.
- the interatomic force increases and deflects cantilever 7 which in turn causes the tunnel gap to become smaller and, hence, the tunnel current to increase.
- the increasing tunnel current operates to retract sample 4 and, thus, decrease the interatomic force, and so forth.
- a controller 36 (FIG. 3) is interposed between converter 27 and the z-drive 9 to generate in additional correction signal.
- sample 4 and tunnel tip 8 are driven in opposite directions--tunnel tip 8, however, a factor 10, 100 or 1000, for example, less in amplitude.
- sample 4 is supported on xyz-drive 3, the z-section being used to fine-adjust the distance between sample 4 and point 5.
- the xy-sections of xyz-drive 3 are used for displacing sample 4 in its xy-plane with respect to point 5.
- the displacement is controlled so that point 5 performs a raster scan of the surface of sample 4.
- the raster scan signal is, hence, representative of the position, in the xy-plane, of point 5 over sample 4.
- the apparatus embodying the invention preferably includes a plotter 38 (FIG. 3).
- Plotter 37 provides a plot of the aforementioned raster scan signal versus the aforementioned feedback or correction signal to yield an image of the topography of the surface of sample 4. More specifically, plotter 37 receives its x and y inputs from the x and y outputs, respectively, of controller 33 to xyz-drive 3. The z input of plotter 37 is derived from the output of controller 36 which via z-drive 9 is also responsible for maintaining the distance between cantilever 7 and tunnel tip 8 essentially constant.
- sample 4 is moved by xyz-drive 3 so that point 5 scans the surface of the sample along, e.g. cartesian coordinates
- the stylus of plotter 37 is moved correspondingly (but at enormously enlarged scale), with the z input superpositioned over the y-coordinate signal.
- the roughness of the surface of sample will cause the sample-to-surface distance to vary and thus cause the atomic forces between the sample and surface to vary and cause spring 7 to be deflected.
- the tunneling distance between the spring and tip 8 changes; preferably for each 0.1 nanometer of change of that distance, the tunneling current changes by one order of magnitude. This change is measured by converter 27.
- the feedback output signal of controller 36 is used to control the movement of the stylus of plotter 37 in the y-direction as an addition to the fixed y-value which corresponds to the position of point 5 over the surface of sample 4.
- Two of the dimensions, x and z, can easily be shown on plotter 37.
- the third dimension, y can be represented.
- a viewing screen (not shown) may be used in place of plotter 37. Also, by placing the atomic force microscope of the present invention in an ultra-high vacuum environment, the stability and resolving power of the instrument will be dramatically improved.
Abstract
Description
Claims (26)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/273,354 USRE33387E (en) | 1985-11-26 | 1988-11-16 | Atomic force microscope and method for imaging surfaces with atomic resolution |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80212385A | 1985-11-26 | 1985-11-26 | |
US07/273,354 USRE33387E (en) | 1985-11-26 | 1988-11-16 | Atomic force microscope and method for imaging surfaces with atomic resolution |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US80212385A Continuation-In-Part | 1985-11-26 | 1985-11-26 | |
US06/892,977 Reissue US4724318A (en) | 1985-11-26 | 1986-08-04 | Atomic force microscope and method for imaging surfaces with atomic resolution |
Publications (1)
Publication Number | Publication Date |
---|---|
USRE33387E true USRE33387E (en) | 1990-10-16 |
Family
ID=26956122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US07/273,354 Expired - Lifetime USRE33387E (en) | 1985-11-26 | 1988-11-16 | Atomic force microscope and method for imaging surfaces with atomic resolution |
Country Status (1)
Country | Link |
---|---|
US (1) | USRE33387E (en) |
Cited By (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5144833A (en) * | 1990-09-27 | 1992-09-08 | International Business Machines Corporation | Atomic force microscopy |
US5150392A (en) * | 1991-09-09 | 1992-09-22 | International Business Machines Corporation | X-ray mask containing a cantilevered tip for gap control and alignment |
US5168159A (en) * | 1990-11-19 | 1992-12-01 | Olympus Optical Co., Ltd. | Barrier height measuring apparatus including a conductive cantilever functioning as a tunnelling probe |
US5193383A (en) * | 1990-07-11 | 1993-03-16 | The United States Of America As Represented By The Secretary Of The Navy | Mechanical and surface force nanoprobe |
US5204531A (en) * | 1992-02-14 | 1993-04-20 | Digital Instruments, Inc. | Method of adjusting the size of the area scanned by a scanning probe |
US5231286A (en) * | 1990-08-31 | 1993-07-27 | Olympus Optical Co., Ltd. | Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide |
US5254854A (en) * | 1991-11-04 | 1993-10-19 | At&T Bell Laboratories | Scanning microscope comprising force-sensing means and position-sensitive photodetector |
US5260824A (en) * | 1989-04-24 | 1993-11-09 | Olympus Optical Co., Ltd. | Atomic force microscope |
US5264696A (en) * | 1991-05-20 | 1993-11-23 | Olympus Optical Co., Ltd. | Cantilever chip for scanning probe microscope having first and second probes formed with different aspect ratios |
US5267471A (en) * | 1992-04-30 | 1993-12-07 | Ibm Corporation | Double cantilever sensor for atomic force microscope |
US5274230A (en) * | 1990-08-31 | 1993-12-28 | Olympus Optical Co., Ltd. | Scanning probe microscope having first and second optical waveguides |
US5294804A (en) * | 1992-03-11 | 1994-03-15 | Olympus Optical Co., Ltd. | Cantilever displacement detection apparatus |
US5317533A (en) * | 1988-01-27 | 1994-05-31 | The Board Of Trustees Of The Leland Stanford University | Integrated mass storage device |
US5345815A (en) * | 1991-01-04 | 1994-09-13 | Board Of Trustees, Leland Stanford Jr. University | Atomic force microscope having cantilever with piezoresistive deflection sensor |
US5400647A (en) * | 1992-11-12 | 1995-03-28 | Digital Instruments, Inc. | Methods of operating atomic force microscopes to measure friction |
US5406832A (en) * | 1993-07-02 | 1995-04-18 | Topometrix Corporation | Synchronous sampling scanning force microscope |
US5410910A (en) * | 1993-12-22 | 1995-05-02 | University Of Virginia Patent Foundation | Cryogenic atomic force microscope |
US5440920A (en) | 1994-02-03 | 1995-08-15 | Molecular Imaging Systems | Scanning force microscope with beam tracking lens |
US5481908A (en) * | 1993-04-28 | 1996-01-09 | Topometrix Corporation | Resonance contact scanning force microscope |
US5497656A (en) * | 1992-07-24 | 1996-03-12 | Matsushita Electric Industrial Co., Ltd. | Method of measuring a surface profile using an atomic force microscope |
US5515719A (en) * | 1994-05-19 | 1996-05-14 | Molecular Imaging Corporation | Controlled force microscope for operation in liquids |
USRE35317E (en) | 1991-07-26 | 1996-08-27 | The Arizona Board Of Regents | Potentiostatic preparation of molecular adsorbates for scanning probe microscopy |
US5589686A (en) * | 1994-03-22 | 1996-12-31 | Ohara; Tetsuo | Method of an apparatus for real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces |
US5612491A (en) * | 1994-05-19 | 1997-03-18 | Molecular Imaging Corporation | Formation of a magnetic film on an atomic force microscope cantilever |
US5616916A (en) * | 1994-11-28 | 1997-04-01 | Matsushita Electric Industrial Co., Ltd. | Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force |
US5621210A (en) * | 1995-02-10 | 1997-04-15 | Molecular Imaging Corporation | Microscope for force and tunneling microscopy in liquids |
US5654546A (en) * | 1995-11-07 | 1997-08-05 | Molecular Imaging Corporation | Variable temperature scanning probe microscope based on a peltier device |
US5675154A (en) * | 1995-02-10 | 1997-10-07 | Molecular Imaging Corporation | Scanning probe microscope |
US5681987A (en) * | 1993-04-28 | 1997-10-28 | Topometrix Corporation | Resonance contact scanning force microscope |
US5729026A (en) * | 1996-08-29 | 1998-03-17 | International Business Machines Corporation | Atomic force microscope system with angled cantilever having integral in-plane tip |
US5750989A (en) * | 1995-02-10 | 1998-05-12 | Molecular Imaging Corporation | Scanning probe microscope for use in fluids |
US5753814A (en) | 1994-05-19 | 1998-05-19 | Molecular Imaging Corporation | Magnetically-oscillated probe microscope for operation in liquids |
US5753912A (en) * | 1996-03-12 | 1998-05-19 | Olympus Optical Co., Ltd. | Cantilever chip |
US5821545A (en) * | 1995-11-07 | 1998-10-13 | Molecular Imaging Corporation | Heated stage for a scanning probe microscope |
US5850038A (en) * | 1995-12-14 | 1998-12-15 | Olympus Optical Co., Ltd. | Scanning probe microscope incorporating an optical microscope |
US5856672A (en) * | 1996-08-29 | 1999-01-05 | International Business Machines Corporation | Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system |
US5866805A (en) * | 1994-05-19 | 1999-02-02 | Molecular Imaging Corporation Arizona Board Of Regents | Cantilevers for a magnetically driven atomic force microscope |
US5866807A (en) * | 1997-02-04 | 1999-02-02 | Digital Instruments | Method and apparatus for measuring mechanical properties on a small scale |
US5874668A (en) * | 1995-10-24 | 1999-02-23 | Arch Development Corporation | Atomic force microscope for biological specimens |
US5958701A (en) * | 1999-01-27 | 1999-09-28 | The United States Of America As Represented By The Secretary Of The Navy | Method for measuring intramolecular forces by atomic force |
US5992226A (en) * | 1998-05-08 | 1999-11-30 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for measuring intermolecular interactions by atomic force microscopy |
USRE36488E (en) | 1992-08-07 | 2000-01-11 | Veeco Instruments Inc. | Tapping atomic force microscope with phase or frequency detection |
US6499340B1 (en) * | 1998-02-19 | 2002-12-31 | Seiko Instruments Inc. | Scanning probe microscope and method of measuring geometry of sample surface with scanning probe microscope |
US6520005B2 (en) | 1994-12-22 | 2003-02-18 | Kla-Tencor Corporation | System for sensing a sample |
US6545492B1 (en) * | 1999-09-20 | 2003-04-08 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US6583411B1 (en) | 2000-09-13 | 2003-06-24 | Europaisches Laboratorium Für Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US20050005688A1 (en) * | 1994-12-22 | 2005-01-13 | Amin Samsavar | Dual stage instrument for scanning a specimen |
US7146034B2 (en) | 2003-12-09 | 2006-12-05 | Superpower, Inc. | Tape manufacturing system |
US20070227236A1 (en) * | 2006-03-13 | 2007-10-04 | Bonilla Flavio A | Nanoindenter |
US20080154521A1 (en) * | 2006-12-22 | 2008-06-26 | Tianming Bao | Systems and methods for utilizing scanning probe shape characterization |
US7761255B1 (en) | 2006-03-02 | 2010-07-20 | Clarkson University | Method of and apparatus for studying fast dynamical mechanical response of soft materials |
US9110092B1 (en) | 2013-04-09 | 2015-08-18 | NT-MDT Development Inc. | Scanning probe based apparatus and methods for low-force profiling of sample surfaces and detection and mapping of local mechanical and electromagnetic properties in non-resonant oscillatory mode |
US20160274144A1 (en) * | 2008-11-13 | 2016-09-22 | Bruker Nano, Inc. | Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample |
WO2020076877A1 (en) * | 2018-10-08 | 2020-04-16 | The Regents Of The University Of California | Array atomic force microscopy for enabling simultaneous multi-point and multi-modal nanoscale analyses and stimulations |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
US4618767A (en) * | 1985-03-22 | 1986-10-21 | International Business Machines Corporation | Low-energy scanning transmission electron microscope |
US4668865A (en) * | 1985-03-07 | 1987-05-26 | International Business Machines Corporation | Scanning tunneling microscope |
-
1988
- 1988-11-16 US US07/273,354 patent/USRE33387E/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
US4668865A (en) * | 1985-03-07 | 1987-05-26 | International Business Machines Corporation | Scanning tunneling microscope |
US4618767A (en) * | 1985-03-22 | 1986-10-21 | International Business Machines Corporation | Low-energy scanning transmission electron microscope |
Non-Patent Citations (2)
Title |
---|
"Scanning Tunneling Microscope Combined with a Scanning Electron Microscope", Gerber et al., Rev. of Sci. Ins., vol. 57, No. 2, Feb. 1986. |
Scanning Tunneling Microscope Combined with a Scanning Electron Microscope , Gerber et al., Rev. of Sci. Ins., vol. 57, No. 2, Feb. 1986. * |
Cited By (85)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317533A (en) * | 1988-01-27 | 1994-05-31 | The Board Of Trustees Of The Leland Stanford University | Integrated mass storage device |
US5260824A (en) * | 1989-04-24 | 1993-11-09 | Olympus Optical Co., Ltd. | Atomic force microscope |
US5193383A (en) * | 1990-07-11 | 1993-03-16 | The United States Of America As Represented By The Secretary Of The Navy | Mechanical and surface force nanoprobe |
US5274230A (en) * | 1990-08-31 | 1993-12-28 | Olympus Optical Co., Ltd. | Scanning probe microscope having first and second optical waveguides |
US5231286A (en) * | 1990-08-31 | 1993-07-27 | Olympus Optical Co., Ltd. | Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide |
US5144833A (en) * | 1990-09-27 | 1992-09-08 | International Business Machines Corporation | Atomic force microscopy |
USRE37299E1 (en) * | 1990-09-27 | 2001-07-31 | International Business Machines Corporation | Atomic force microscopy |
US5168159A (en) * | 1990-11-19 | 1992-12-01 | Olympus Optical Co., Ltd. | Barrier height measuring apparatus including a conductive cantilever functioning as a tunnelling probe |
US5345815A (en) * | 1991-01-04 | 1994-09-13 | Board Of Trustees, Leland Stanford Jr. University | Atomic force microscope having cantilever with piezoresistive deflection sensor |
US5264696A (en) * | 1991-05-20 | 1993-11-23 | Olympus Optical Co., Ltd. | Cantilever chip for scanning probe microscope having first and second probes formed with different aspect ratios |
US5386110A (en) * | 1991-05-20 | 1995-01-31 | Olympus Optical Co., Ltd. | Method of making cantilever chip for scanning probe microscope |
USRE35317E (en) | 1991-07-26 | 1996-08-27 | The Arizona Board Of Regents | Potentiostatic preparation of molecular adsorbates for scanning probe microscopy |
US5150392A (en) * | 1991-09-09 | 1992-09-22 | International Business Machines Corporation | X-ray mask containing a cantilevered tip for gap control and alignment |
US5254854A (en) * | 1991-11-04 | 1993-10-19 | At&T Bell Laboratories | Scanning microscope comprising force-sensing means and position-sensitive photodetector |
US5204531A (en) * | 1992-02-14 | 1993-04-20 | Digital Instruments, Inc. | Method of adjusting the size of the area scanned by a scanning probe |
US5294804A (en) * | 1992-03-11 | 1994-03-15 | Olympus Optical Co., Ltd. | Cantilever displacement detection apparatus |
US5267471A (en) * | 1992-04-30 | 1993-12-07 | Ibm Corporation | Double cantilever sensor for atomic force microscope |
US5497656A (en) * | 1992-07-24 | 1996-03-12 | Matsushita Electric Industrial Co., Ltd. | Method of measuring a surface profile using an atomic force microscope |
USRE36488E (en) | 1992-08-07 | 2000-01-11 | Veeco Instruments Inc. | Tapping atomic force microscope with phase or frequency detection |
US5553487A (en) * | 1992-11-12 | 1996-09-10 | Digital Instruments, Inc. | Methods of operating atomic force microscopes to measure friction |
US5400647A (en) * | 1992-11-12 | 1995-03-28 | Digital Instruments, Inc. | Methods of operating atomic force microscopes to measure friction |
US5681987A (en) * | 1993-04-28 | 1997-10-28 | Topometrix Corporation | Resonance contact scanning force microscope |
US5481908A (en) * | 1993-04-28 | 1996-01-09 | Topometrix Corporation | Resonance contact scanning force microscope |
US5625142A (en) * | 1993-04-28 | 1997-04-29 | Topometrix Corporation | Resonance contact scanning force microscope |
US5507179A (en) * | 1993-07-02 | 1996-04-16 | Topometrix | Synchronous sampling scanning force microscope |
US5406832A (en) * | 1993-07-02 | 1995-04-18 | Topometrix Corporation | Synchronous sampling scanning force microscope |
US5410910A (en) * | 1993-12-22 | 1995-05-02 | University Of Virginia Patent Foundation | Cryogenic atomic force microscope |
US5440920A (en) | 1994-02-03 | 1995-08-15 | Molecular Imaging Systems | Scanning force microscope with beam tracking lens |
US5587523A (en) * | 1994-02-03 | 1996-12-24 | Molecular Imaging Corporation | Atomic force microscope employing beam tracking |
US5763767A (en) | 1994-02-03 | 1998-06-09 | Molecular Imaging Corp. | Atomic force microscope employing beam-tracking |
US5589686A (en) * | 1994-03-22 | 1996-12-31 | Ohara; Tetsuo | Method of an apparatus for real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces |
US5612491A (en) * | 1994-05-19 | 1997-03-18 | Molecular Imaging Corporation | Formation of a magnetic film on an atomic force microscope cantilever |
US5515719A (en) * | 1994-05-19 | 1996-05-14 | Molecular Imaging Corporation | Controlled force microscope for operation in liquids |
US6134955A (en) | 1994-05-19 | 2000-10-24 | Molecular Imaging Corporation | Magnetic modulation of force sensor for AC detection in an atomic force microscope |
US5866805A (en) * | 1994-05-19 | 1999-02-02 | Molecular Imaging Corporation Arizona Board Of Regents | Cantilevers for a magnetically driven atomic force microscope |
US5753814A (en) | 1994-05-19 | 1998-05-19 | Molecular Imaging Corporation | Magnetically-oscillated probe microscope for operation in liquids |
US5616916A (en) * | 1994-11-28 | 1997-04-01 | Matsushita Electric Industrial Co., Ltd. | Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force |
US6931917B2 (en) | 1994-12-22 | 2005-08-23 | Kla-Tencor Corporation | System for sensing a sample |
US20040118193A1 (en) * | 1994-12-22 | 2004-06-24 | Mcwaid Thomas | System for sensing a sample |
US7278301B2 (en) | 1994-12-22 | 2007-10-09 | Kla-Tencor Corporation | System for sensing a sample |
US6520005B2 (en) | 1994-12-22 | 2003-02-18 | Kla-Tencor Corporation | System for sensing a sample |
US7100430B2 (en) | 1994-12-22 | 2006-09-05 | Kla-Tencor Corporation | Dual stage instrument for scanning a specimen |
US20050262931A1 (en) * | 1994-12-22 | 2005-12-01 | Mcwaid Thomas | System for sensing a sample |
US20050005688A1 (en) * | 1994-12-22 | 2005-01-13 | Amin Samsavar | Dual stage instrument for scanning a specimen |
US5675154A (en) * | 1995-02-10 | 1997-10-07 | Molecular Imaging Corporation | Scanning probe microscope |
US5750989A (en) * | 1995-02-10 | 1998-05-12 | Molecular Imaging Corporation | Scanning probe microscope for use in fluids |
US5760396A (en) * | 1995-02-10 | 1998-06-02 | Molecular Imaging Corporation | Scanning probe microscope |
US5621210A (en) * | 1995-02-10 | 1997-04-15 | Molecular Imaging Corporation | Microscope for force and tunneling microscopy in liquids |
US5874668A (en) * | 1995-10-24 | 1999-02-23 | Arch Development Corporation | Atomic force microscope for biological specimens |
US5821545A (en) * | 1995-11-07 | 1998-10-13 | Molecular Imaging Corporation | Heated stage for a scanning probe microscope |
US5654546A (en) * | 1995-11-07 | 1997-08-05 | Molecular Imaging Corporation | Variable temperature scanning probe microscope based on a peltier device |
US5850038A (en) * | 1995-12-14 | 1998-12-15 | Olympus Optical Co., Ltd. | Scanning probe microscope incorporating an optical microscope |
US5753912A (en) * | 1996-03-12 | 1998-05-19 | Olympus Optical Co., Ltd. | Cantilever chip |
US5729026A (en) * | 1996-08-29 | 1998-03-17 | International Business Machines Corporation | Atomic force microscope system with angled cantilever having integral in-plane tip |
US5856672A (en) * | 1996-08-29 | 1999-01-05 | International Business Machines Corporation | Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system |
US5866807A (en) * | 1997-02-04 | 1999-02-02 | Digital Instruments | Method and apparatus for measuring mechanical properties on a small scale |
US6499340B1 (en) * | 1998-02-19 | 2002-12-31 | Seiko Instruments Inc. | Scanning probe microscope and method of measuring geometry of sample surface with scanning probe microscope |
US5992226A (en) * | 1998-05-08 | 1999-11-30 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for measuring intermolecular interactions by atomic force microscopy |
US5958701A (en) * | 1999-01-27 | 1999-09-28 | The United States Of America As Represented By The Secretary Of The Navy | Method for measuring intramolecular forces by atomic force |
US6943574B2 (en) | 1999-09-20 | 2005-09-13 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US20050184746A1 (en) * | 1999-09-20 | 2005-08-25 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US6798226B2 (en) | 1999-09-20 | 2004-09-28 | Europäisches Laboratorium für Molekularbiologie (EMBL) | Multiple local probe measuring device and method |
US7098678B2 (en) | 1999-09-20 | 2006-08-29 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US20060255818A1 (en) * | 1999-09-20 | 2006-11-16 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US6545492B1 (en) * | 1999-09-20 | 2003-04-08 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US7312619B2 (en) | 1999-09-20 | 2007-12-25 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US6583411B1 (en) | 2000-09-13 | 2003-06-24 | Europaisches Laboratorium Für Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US7146034B2 (en) | 2003-12-09 | 2006-12-05 | Superpower, Inc. | Tape manufacturing system |
US20070093376A1 (en) * | 2003-12-09 | 2007-04-26 | Superpower, Inc. | Tape manufacturing system |
US7805173B2 (en) | 2003-12-09 | 2010-09-28 | Superpower, Inc. | Tape manufacturing system |
USRE43117E1 (en) | 2006-03-02 | 2012-01-17 | Clarkson University | Method of and apparatus for studying fast dynamical mechanical response of soft materials |
US7761255B1 (en) | 2006-03-02 | 2010-07-20 | Clarkson University | Method of and apparatus for studying fast dynamical mechanical response of soft materials |
US7685869B2 (en) | 2006-03-13 | 2010-03-30 | Asylum Research Corporation | Nanoindenter |
US20100180356A1 (en) * | 2006-03-13 | 2010-07-15 | Asylum Research Corporation | Nanoindenter |
US20070227236A1 (en) * | 2006-03-13 | 2007-10-04 | Bonilla Flavio A | Nanoindenter |
US8196458B2 (en) | 2006-03-13 | 2012-06-12 | Asylum Research Corporation | Nanoindenter |
US9063042B2 (en) | 2006-03-13 | 2015-06-23 | Oxford Instruments Plc | Nanoindenter |
US7578176B2 (en) | 2006-12-22 | 2009-08-25 | Veeco Metrology, Inc. | Systems and methods for utilizing scanning probe shape characterization |
US20080154521A1 (en) * | 2006-12-22 | 2008-06-26 | Tianming Bao | Systems and methods for utilizing scanning probe shape characterization |
US20160274144A1 (en) * | 2008-11-13 | 2016-09-22 | Bruker Nano, Inc. | Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample |
US9995765B2 (en) * | 2008-11-13 | 2018-06-12 | Bruker Nano, Inc. | Method and apparatus of using peak force tapping mode to measure physical properties of a sample |
US10663483B2 (en) * | 2008-11-13 | 2020-05-26 | Bruker Nano, Inc. | Method and apparatus of using peak force tapping mode to measure physical properties of a sample |
US9110092B1 (en) | 2013-04-09 | 2015-08-18 | NT-MDT Development Inc. | Scanning probe based apparatus and methods for low-force profiling of sample surfaces and detection and mapping of local mechanical and electromagnetic properties in non-resonant oscillatory mode |
WO2020076877A1 (en) * | 2018-10-08 | 2020-04-16 | The Regents Of The University Of California | Array atomic force microscopy for enabling simultaneous multi-point and multi-modal nanoscale analyses and stimulations |
US11287444B2 (en) | 2018-10-08 | 2022-03-29 | The Regents Of The University Of California | Array atomic force microscopy for enabling simultaneous multi-point and multi-modal nanoscale analyses and stimulations |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
USRE33387E (en) | Atomic force microscope and method for imaging surfaces with atomic resolution | |
US4724318A (en) | Atomic force microscope and method for imaging surfaces with atomic resolution | |
EP0223918B1 (en) | Method and atomic force microscope for imaging surfaces with atomic resolution | |
EP0410131B1 (en) | Near-field lorentz force microscopy | |
JPH06213910A (en) | Method and interaction device for accurately measuring parameter of surface other than shape or for performing work associated with shape | |
JP2915554B2 (en) | Barrier height measurement device | |
US6167753B1 (en) | Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope | |
US5193383A (en) | Mechanical and surface force nanoprobe | |
US5204531A (en) | Method of adjusting the size of the area scanned by a scanning probe | |
US5025658A (en) | Compact atomic force microscope | |
US5283442A (en) | Surface profiling using scanning force microscopy | |
US5253516A (en) | Atomic force microscope for small samples having dual-mode operating capability | |
EP0536827A1 (en) | Combined scanning force microscope and optical metrology tool | |
US5907096A (en) | Detecting fields with a two-pass, dual-amplitude-mode scanning force microscope | |
US6349591B1 (en) | Device and method for controlling the interaction of a tip and a sample, notably for atomic force microscopy and nano-indentation | |
EP0517270A1 (en) | Scanning probe microscope | |
US5652377A (en) | Scanning method with scanning probe microscope | |
JPH0642953A (en) | Interatomic force microscope | |
US5773824A (en) | Method for improving measurement accuracy using active lateral scanning control of a probe | |
TW201546456A (en) | Method of advancing a probe tip of a scanning microscopy device towards a sample surface, and device therefore | |
JP2002116132A (en) | Signal detection apparatus, scanning atomic force microscope constructed of it, and signal detection method | |
JPH09264897A (en) | Scanning probe microscope | |
CN113092825B (en) | Atomic force microscope system and current detection method thereof | |
JPH1010140A (en) | Scanning probe microscope | |
JPH063397A (en) | Potential distribution measuring device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
REFU | Refund |
Free format text: REFUND PROCESSED. MAINTENANCE FEE HAS ALREADY BEEN PAID (ORIGINAL EVENT CODE: R160); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
AS | Assignment |
Owner name: NIKON VENTURES CORPORATION, CALIFORNIA Free format text: SECURITY INTEREST;ASSIGNOR:PARK SCIENTIFIC INSTRUMENTS CORPORATION;REEL/FRAME:007078/0409 Effective date: 19940726 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
SULP | Surcharge for late payment | ||
AS | Assignment |
Owner name: SILICON VALLEY BANK, CALIFORNIA Free format text: SECURITY INTEREST;ASSIGNOR:PARK SCIENTIFIC INSTRUMENTS CORP.;REEL/FRAME:007773/0802 Effective date: 19970131 |
|
FPAY | Fee payment |
Year of fee payment: 12 |