|Publication number||USRE40887 E1|
|Application number||US 11/183,300|
|Publication date||Sep 1, 2009|
|Filing date||Jul 15, 2005|
|Priority date||May 17, 2001|
|Also published as||US6593649|
|Publication number||11183300, 183300, US RE40887 E1, US RE40887E1, US-E1-RE40887, USRE40887 E1, USRE40887E1|
|Inventors||Mou-Shiung Lin, Tah-Kang Joseph Ting|
|Original Assignee||Megica Corporation, Etron Technology, Inc.|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (15), Classifications (25), Legal Events (7)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This application is a REI of U.S. application Ser. No. 09/858,528, filed May 17, 2001, now U.S. Pat. No. 6,593,649.
(1) Field of the Invention
The invention relates to the fabrication of integrated circuit devices, and more particularly, to a method of rerouting semiconductor device Input/Output (I/O) connections. This leads to a method of improved logistics control, whereby a variety of Integrated Circuit packages of different dimensions can be handled. The rerouting of the I/O pads of semiconductor devices is achieved by providing an extra layer of polyimide over which relocated pads are created, the relocated pads are attached to the standard pads on a semiconductor die using wire bonding.
(2) Description of the Prior Art
The design and manufacturing of semiconductor devices requires the cooperative application of a number of divers technologies. A large number of these technologies are aimed at creating semiconductor devices, other technical disciplines are aimed at packaging the semiconductor devices after these devices have been created. A major trend in the semiconductor technology has for many years been the reduction in device dimensions, which provides for improved device performance. Reduction in device dimension leads as a natural extension to increased device densities. From this it follows that the interconnection of semiconductor devices, which contain significantly increased functionality while the device is concurrently reduced in size, is a major challenge in the art. This challenge is addressed by the packaging of semiconductor devices, whereby changes in devices are closely followed by changes in the packages in which these devices are mounted. One of the key considerations in the package design is the accessibility of the semiconductor device or, to express this another way, the Input/Output (I/O) capability of the package after one or more devices have been mounted in the package.
The process of packaging semiconductor devices typically starts with a substrate that is ceramic or plastic based, the devices are mounted on the surface of the substrate while layers of interconnect lines and vias are formed that connect the devices to its surrounding circuitry. Many different approaches are known and have been used for the mounting and interconnecting of multiple semiconductor devices, such as Dual-In-Line packages (DIP's), Pin Grid Arrays (PGA's), Plastic Leaded Chip Carriers (PLCC's) and Quad Flat Packages (QFP's). Multi layer structures have further been used to connect physically closely spaced integrated circuits with each other. Using these techniques, a single substrate serves as an interconnect medium, multiple chips are connected to the interconnect medium forming a device package with high packaging density and dense chip wiring. The chip wiring contains layers of interconnect metal that are interconnected with interconnect vias, layers of dielectric (such as polyimide) or insulating layers separate metal layers that make up the interconnect network and the vias and contact points that establish connections between the interconnect networks. The design of overlying and closely spaced interconnect lines is subject to strict rules of design that are aimed at improving package performance despite the high density packaging that is used. For instance, electrical interference between adjacent lines is minimized or avoided by creating interconnect lines for primary signals that intersect under 90 degree angles. Surface planarity must be maintained throughout the construction of multi-layer chip packages due to requirements of photolithography and package reliability. Many of the patterned layers within a layered structure form the base for overlying layers, lack of planarity can therefore have a multiplying effect on overlying layers.
The Quad Flat Package (QFP) has been created to achieve high pin count integrated packages with various point configurations. The pin I/O connections for these packages are typically established by closely spaced leads distributed along the four edges of the flat package. This limits the I/O count of the packages and therefore the usefulness of the QFP. The Bail Grid Array (BGA) package has been created whereby the I/O connects for the package are distributed around the periphery of the package and over the complete bottom of the package. The BGA package can therefore support more I/O points and provides a more desirable package for high circuit density with high I/O count. The BGA contact points are solder balls that in addition facilitate the process of flow soldering of the package onto a printed circuit board. The solder balls can be mounted in an array configuration and can use 40, 50 and 60 mil spacings in a regular or staggered pattern.
Another packaging concept is realized with the use of so-called flip chips. The flip chip is a semiconductor device that has conductive layers formed on its top surface, external electrical interconnects can be made to these conductive layers by wire boning selected points of the conductive layers to surrounding circuitry or interconnect lines. For instance, if CMOS devices are created using the flip chip concept, the VSS and VDD voltage that is needed for the operation of the device can be supplied through selected vias or contact pads in the top surface of the CMOS device. The top surface of the flip chip is further provided with so-called solder bumps. At the time of assembly of the flip chip, the chip is turned over (flipped over) so that the solder bumps are now facing downwards and toward the circuit board, typically a printed circuit board, on which the flip chip is to be mounted. The solder bumps (on the now downward facing surface of the flip chip) are aligned with and brought into contact with contact pads that are for this purpose created in the top surface of the circuit board. The solder bumps are, by means of solder reflow or any other means, connected to the contact pads of the circuit board.
In advanced microelectronic packaging of integrated circuits, particularly high-speed, high-density packaging for main frame computer applications, the chips are often mounted on multi-chip modules such as polyimide substrates, which contain buried wiring patterns to conduct electrical signals between various chips. These modules usually contain multiple layers of interconnect metallization separated by alternating layers of an isolating dielectric whose function is to serve as electrical isolation between the metal features. Any conductor material that is used in a multilevel interconnect has to satisfy certain essential requirements such as low resistively, resistance to electromigration, adhesion to the underlying substrate material, stability (both electrical and mechanical) and ease of processing.
It is clear from the above that, in a typical semiconductor device package, the device can be mounted or positioned in a package and further connected to interconnect lines of the device package by bond wires or solder bumps. For this purpose the to be packaged semiconductor device is provided with pads (bond pads) that are, for ease of access, mounted around the perimeter of the device. Wires are connected from the bond pads to the supporting circuit board or to other means of providing interconnect lines such as Tape Automated Bonding (TAB) device packages. For the packaging techniques that are used, the requirements that are imposed on the method of packaging universally address the same concerns and limitations. These concerns and limitations are imposed by considerations of the (type of) device that is being packaged, by the number of the devices that are mounted within one package, by electrical performance of the individual devices in the package and the impact of the package on the electrical performance, by thermal considerations and the like. In addition, the cost that is incurred in creating semiconductor packages may have a significant impact on the package that is used. For this reason, universality of the package, whereby the package can be used to package a variety of different semiconductor devices, is a desired objective. In addition and most importantly, the package must be of a nature where the package protects the packaged device from the environment.
The Thermal Coefficient of Expansion (TCE) that is in force for both the semiconductor device and the package in which the semiconductor device is mounted must be such that no undue thermal stress is exerted on the device or any of its components such as contact balls or solder bumps. With increasing temperature, the semiconductor device expands as do the surrounding components of leadframe (molded plastic based, TAB based or other) and the main body of the package. If the relative expansion of these components differs considerably, a great amount of stress may be introduced at the points where the semiconductor device interfaces with the package, typically solder balls or solder bumps. This stress can lead to solder ball fatigue and eventual damage to or destruction of the solder ball.
It has already been pointed out that many of the considerations that go into the design of a semiconductor package are driven by I/O availability. For this reason, many of the device packages have the bond pads located along the periphery of the die which allows for an increase in the number of I/O connections that can be established to the package. In addition, the Ball Gird Array device further enhances the availability of the number of I/O connections for a package. The number of I/O points that can be connected to a package is further enhanced if the contact pads (bond pads) that are used for the I/O interconnects are reduced in size. Reliability considerations however limit the reduction that can be applied to the size of the bond pads.
Many of the electrical performance parameters are determined by the length of the path that electrical signals have to travel over interconnects, including bond pads and I/O's. In general, the shorter the path that is traveled, the less the impact of resistive voltage drop and parasitic capacitance. Special arrangements are therefore frequently made to shorten the paths that signals have to travel inside a package, one of these arrangements is the creation of a bond pad buffer zone that serves as the interface between the semiconductor die and the bond pads that interconnect the die.
U.S. Pat. No. 5,172,471 (Huang) shows a die with standard pads.
U.S. Pat. No. 5,567,655 (Rostoker et al.) shows a zig-zag layout of I/O pads.
U.S. Pat. No. 6,060,683 (Estrada) shows a process to remove a dielectric layer over a panel. However, this reference differs from the present invention.
A principle objective of the invention is to provide a method of I/O pad relocation that allows for the packaging of semiconductor devices of different dimensions while using a more universal package.
Another objective of the invention is to provide improved packaging capability and the therefrom following improved manufacturing capability of semiconductor devices.
Yet another objective of the invention is to provide a method of packaging semiconductor devices that allows for the use of more cost effective tools and equipment while the method of the invention of packaging semiconductor devices can be implemented in a clean room environment of less stringent requirements of room environmental control.
A still further objective of the invention is to provide a method of pad relocation that can be implemented in a processing sequence after the process of device passivation, allowing for improved inventory control.
A still further objective of the invention is to provide a method of pad relocation that further enhances the reliability of wire bond operations.
In accordance with the objectives of the invention a new method is provided for the creation of Input/Output connection points to a semiconductor device package. An extension is applied to the conventional I/O connect points of a semiconductor device, allowing the original I/O point location to be relocated to a new point of I/O interconnect that may be in the vicinity of the original point of I/O interconnect but can also be located at a distance from this original point of I/O interconnect. Layers of passivation and polyimide are provided for proper creation and protection of the extended and relocated I/O pads. Bond wires are used extensively as part of the invention to interconnect the original I/O points of interconnect with the relocated I/O points of interconnect.
The method of the invention focuses on considerations of I/O connect that apply to semiconductor device packages. The invention specifically addresses the packaging concern of providing a package that has I/O points of connection that can be used in a flexible manner, this flexible manner being dependent in its implementation on using bond wires.
The process of the invention makes use of the deposition of a thick, soft layer of dielectric material such as a layer of polyimide over which relocated I/O pads are formed. Since polyimide is one of the suggested materials that can be used for this purpose, some of the salient features of polyimide will be highlighted at this time. These features are assumed to be equally applicable to any other material that is selected for this thick, soft layer of dielectric.
Polyimide films as inter-level dielectrics are used in the art as a technique for providing partial planarization of a dielectric surface. Polyimides are known to have the following characteristics:
Polyimide is a frequently used dielectric, and is an example of an organic polymeric material. Other such dielectrics are for instance silicon dioxide (doped or undoped), silicon oxynitride, parylene or polyimide, spin-on-glass, plasma oxide or LPCVD oxide.
The processing of polyimide is well understood in the semiconductor and is frequently applied to give extra protection to the surface of a silicon chip against scratching, cracking and other types of mechanical damage. Most often, mechanical damage may occur during assembly, packaging or any subsequent handling of the die. As a passivation layer, polyimide also guards against thin film cracking, which frequently results from the packaging of very large die into plastic packages. Existing polyimide processes are further compatible with standard forms of wire bonding technology.
Referring now specifically to
One point that has already been mentioned but that deserves being stated again is that the sequence and adjacency of pads 16′ is not connected in any manner with the sequence and adjacency of the original pads 12. By means of a connection scheme between pads 12 (the original I/O pads) and pads 16 (the relocated I/O pads) of which relocation connections 20, 22 and 24 are examples, the relocated pads 16 (16′) can be connected to any of the pads 12. The complexity of the relocation scheme and the therewith of incurred length of interconnection between the original I/O pads and the relocated I/O pads is, needless to say, subject to rules and limitations of electrical behavior and the impact that the I/O relocation interconnection lines have on this electrical behavior. Interconnections that are created between original points of I/O and relocated points of I/O, such as 20, 22, 24 and other, preferably use bond wire.
The preferred method of the invention to connect (external circuitry, not shown in
It must be emphasized that the invention uses thick, soft dielectric material (such as polyimide) for the layers that underlie the relocated I/O pads while the metal layers that are etched overlying this thick soft dielectric material are wide metals, making these etched metals suitable for I/O pads The thick soft material on which the relocated pads are located avoids damage to the underlying devices and structure during wire bonding operations that are performed on the relocated pads.
In order to create semiconductor devices, metal lines of the various layers of conducting lines in a semiconductor device are typically separated by insulating layers such as silicon oxide and oxygen-containing polymers that are deposited using Chemical Vapor Deposition (CVD) techniques. The insulating layers are deposited over patterned layers of interconnecting lines where electrical contact between successive layers of interconnecting lines is established with metal vias created for this purpose in the insulating layers. Electrical contact to the chip is typically established by means of bonding pads that from electrical interfaces with patterned levels of interconnecting metal lines. Signal lines and power/ground lines can be connected to the bonding pads. After the bonding pads have been created on the surfaces of the chip package, the bonding pads are passivated and electrically insulated by the deposition of a passivation layer over the surface of the bonding pads. Passivation layers can contain but are not limited to silicon oxide/silicon nitride (SiO2/Si3N4), photosensitive polyimide, titanium nitride or phosphorus doped silicon dioxide deposited by CVD. The passivation layer is patterned and etched to create openings in the passivation layer for the bonding pads after which a second and relatively thick passivation layer is deposited that further insulates and protects the surface of the chips from moisture and other contaminants and from mechanical damage during the final assembling of the chips.
In recent years, photosensitive polyimide has frequently been used for the creation of passivation layers. Photosensitive polyimides have the same characteristics as conventional polyimides but can, in addition, be patterned like a photoresist mask and can, after patterning and etching, remain on the surface on which it has been deposited to serve as a passivation layer. Typically and to improve surface adhesion and tension reduction, a precursor layer is first deposited by, for example, conventional photoresist spin coating. The precursor layer is, after a low temperature pre-bake, exposed using, for example, a step and repeat projection aligner and Ultra Violet (UV) light as a light source. The curing of a polyimide layer can take place at a temperature of 350 degrees C. in a N2 gas environment for a time of 20 hours and a pressure of 760 Torr. The portions of the precursor that have been exposed in this manner are cross linked thereby leaving unexposed regions (that are not cross linked) over the bonding pads. During subsequent development, the unexposed polyimide precursor layer (over the bonding pads) is dissolved thereby providing openings over the bonding pads. A final step of thermal curing leaves a permanent high quality passivation layer of polyimide over the substrate.
The dielectric layers 34 and 36 can, in line with the above indicate process of treating photosensitive polyimides and if these layers are created using polyimide, be cured after deposition and patterning, thereby outgassing solvents contained in the polyimide and enhancing the mechanical strength of the layers of polyimide. The process of curing can be thermal curing, E-beam or UV curing. Curing of a polyimide provides extra protection to the device circuitry. This step is typically a high temperature cure, at 350 to 400 degrees C., in a N2 gas ambient for a time period between about 1.5 and 2.5 hours.
The layer 34 of dielectric is deposited to a thickness within the range of between 5.0 and 9.5 μm. If a polyimide is used for this layer 34, shrinkage of up to 40% of this thickness can occur as a result of the curing of the polyimide.
The process of curing of layers 32 and 34 has to be performed using extreme care and may, in some instances, better not be performed. The curing may harden the layers of dielectric to the point where the benefit of the softness of the layer is negated, resulting in the possibility of damage to this layer at the time of wire bonding to the relocated I/O pad 40.
Conventional semiconductor device processing calls for the deposition of passivation layer over the entire top surface of the wafer. The passivation layer forms an insulting, protective layer that shields and protects the surface that it covers from mechanical and chemical damage during subsequent device assembly and packaging. The passivation layer must therefore have good adhesion to the underlying metal and any level of inter-level dielectric over which it is deposited, it must provide uniform step coverage so as not to hinder subsequent steps of planarization, it must be deposited in a uniform thickness, it must protest against mechanical damage such as surface scratch while it must also protect against moisture penetration, it must not introduce stress related problems while easy patterning of the passivation layer is required. It is clear that, in order to meet the requirements that are placed on the passivation layer; the passivation layer must be thick. In many applications, the passivation layer is therefore created using two depositions of passivation material.
Passivation layers can contain for instance Plasma Enhanced oxide or Plasma Enhanced Si3N4, deposited using PECVD technology at a temperature between about 350 and 450 degrees C. with a pressure of between about 2.0 and 5.0 Torr for the duration between about 10 and 60 seconds.
The conductive layer 40 can contain metal such as aluminum, copperor , aluminum/copper alloys, Ti, Ta, W, or Mo, or a combination of these materials. This metal can be deposited by methods of electroplating, electroless plating, and the like. This cold metal deposition can for instance be a deposition of Al or copper at approximately 200 degrees C. Copper can further be deposited by electroplating or electroless-plating.
A number of salient points that relate to the process of the invention are the following:
It is clear from the above that the process of the invention in not limited to the examples that have been shown above. The process of the invention lends itself to using soft and thick layers of dielectric material while wide strips of metal can be used for purposes of re-routing the I/O pads. This rerouting enables the easy connection of the I/O pads to different format packages. In addition, the wire bonding pads can be located on the upper surface of a thick layer of material such as polyimide, thereby avoiding potential damage to underlying devices and structures during the process of wire bonding.
Although the invention has been described and illustrated with reference to specific illustrative embodiments thereof, it is not intended that the invention be limited to those illustrative embodiments. Those skilled in the art will recognize that variations and modifications can be made without departing from the spirit of the invention. It is therefore intended to include within the invention all such variations and modifications which fall within the scope of the appended claims and equivalents thereof.
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|U.S. Classification||257/697, 257/E23.019, 257/759, 257/692, 257/700, 257/781|
|International Classification||H01L23/48, H01L23/528|
|Cooperative Classification||H01L2224/05624, H01L2224/05647, H01L2224/45099, H01L2924/00014, H01L24/49, H01L24/48, H01L2924/10253, H01L23/528, H01L2924/01029, H01L2924/3025, H01L2924/12044, H01L2224/49171, H01L2924/04941, H01L2224/4813, H01L2924/01078, H01L2924/14|
|Oct 4, 2005||AS||Assignment|
Owner name: RENESAS TECHNOLOGY CORP., JAPAN
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|May 3, 2006||AS||Assignment|
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|Jul 10, 2013||AS||Assignment|
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