USRE42530E1 - Device using a metal-insulator transition - Google Patents

Device using a metal-insulator transition Download PDF

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USRE42530E1
USRE42530E1 US11/234,816 US23481605A USRE42530E US RE42530 E1 USRE42530 E1 US RE42530E1 US 23481605 A US23481605 A US 23481605A US RE42530 E USRE42530 E US RE42530E
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insulator
metal
transition
insulator transition
paramagnetic
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Hyun-Tak Kim
Kwang-Yong Kang
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Electronics and Telecommunications Research Institute ETRI
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N99/00Subject matter not provided for in other groups of this subclass
    • H10N99/03Devices using Mott metal-insulator transition, e.g. field effect transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors

Definitions

  • the present invention relates to a field effect transistor, and more particularly, to a switching field effect transistor (FET) using abrupt metal-insulator transition.
  • FET switching field effect transistor
  • MOSFETs Metal Oxide Semiconductor Field Effect Transistors
  • a MOSFET has two pn junction structures showing linear characteristics at a low drain voltage as a basic structure.
  • a channel length is reduced to about 50 nm or below as the degree of integration of a device increases, an increase in a depletion layer changes the concentration of a carrier and an decrease of the depth of the gate insulator remarkably makes current flowing between a gate and a channel.
  • Mott FETs perform an ON/OFF operation according to metal-insulator transition and do not have a depletion layer, thereby remarkably improving the degree of integration of a device and achieving a higher-speed switching characteristic than MOSFETs.
  • denotes the dielectric constant of a gate insulator
  • e denotes a basic charge
  • d denotes the thickness of the gate insulator
  • V g denotes a gate voltage
  • La 2 CuO 4 which is one of the materials falling under the group Mott-Hubbard insulator
  • LSCO La 2-x Sr x CuO 4
  • the dielectric constant is too great, the fatigue characteristics of a dielectric sharply worsens during a high-speed switching operation, thereby reducing the life of a transistor.
  • there is a limit in decreasing the thickness of the gate insulator due to limitations in fabrication processes.
  • the gate voltage increases, power consumption also increases, which makes it difficult to be the transistor with a low power.
  • a field effect transistor including a substrate; a Mott-Brinkman-Rice insulator formed on the substrate, the Mott-Brinkman-Rice insulator undergoing abrupt metal-insulator transition when holes add therein; a dielectric layer formed on the Mott-Brinkman-Rice insulator, the dielectric layer adding holes into the Mott-Brinkman-Rice insulator when a predetermined voltage is applied thereto; a gate electrode formed on the dielectric layer, the gate electrode applying the predetermined voltage to the dielectric layer; a source electrode formed to be electrically connected to a first portion of the Mott-Brinkman-Rice insulator; and a drain electrode formed to be electrically connected to a second portion of the Mott-Brinkman-Rice insulator.
  • the substrate is formed of SrTiO 3 .
  • the Mott-Brinkman-Rice insulator is formed of LaTiO 3 , YTiO 3 , Ca 2 RuO 4 , Ca 2 IrO 4 , V 2 O 3 , (Cr x V 1-x ) 2 O 3 , CaVO 3 , SrVO 3 and YVO 3 .
  • the dielectric layer is formed of Ba 1-x Sr x TiO 3 or dielectric materials.
  • the source electrode and the drain electrode are separated from each other by the dielectric layer.
  • FIGS. 1A and 1B are diagrams showing atomic lattices within a Mott-Brinkman-Rice insulator having abrupt metal-insulator transition under predetermined conditions;
  • FIG. 2 is a graph showing the effective mass of a carrier versus the band filling factor of a Mott-Brinkman-Rice insulator of LaTiO 3 (LTO);
  • FIG. 3 is a graph showing electrical conductance ⁇ versus the band filling factor of a Mott-Brinkman-Rice insulator of LaTiO 3 (LTO).
  • FIG. 4 is a sectional view of a switching field effect transistor according to the present invention.
  • FET field effect transistor
  • FIGS. 1A and 1B are diagrams showing atomic lattices within a Mott-Brinkman-Rice insulator having abrupt metal-insulator transition under predetermined conditions.
  • the Mott-Brinkman-Rice insulator that is, a paramagnetic insulator in reference “W. F. Brinkman, T. M. Rice, Phys. Rev. B2, 4302 (1970)”, is different from an antiferromagnetic insulator of the Mott-Hubbard insulator used by IBM group.
  • the Mott-Brinkman-Rice insulator 100 is abruptly transformed into a metal due to a decrease in the Coulomb interaction and is thus changed into a non-uniform metallic system having both a metal phase and an insulator phase.
  • Such abrupt transition that is, first-order transition is well described in the reference “Hyun-Tak Kim in Physica C 341-348, 259 (2000); http://xxx.lanl.gov/abs/cond-mat/0110112”. (2000).”
  • the Mott-Brinkman-Rice insulator 100 is changed into a non-uniform metal system because the number of electrons becomes less than the number of atoms due to the addition of holes.
  • the Mott-Brinkman-Rice insulator 100 locally becomes a strong correlation metal (denoted by M in FIG. 1B ) complying with the strong correlation metal theory of Brinkman and Rice.
  • the strong correlation metal theory is well disclosed in the reference “W. F. Brinkman, T. M. Rice, Phys. Rev. B2, 4302 (1970)”.
  • Such a strong correlation metal has an electron structure in which one atom has one electron, that is, a metallic electron structure in which an s energy band is filled with one electron.
  • Equation (2) the effective mass m*/m of a carrier is defined by Equation (2).
  • Equation (3) the effective mass m*/m of a carrier in the entire metal system of FIG. 1B can be expressed by Equation (3).
  • is a band filling factor and can be expressed by a ratio of the number of electrons (or carriers) to the number of atoms.
  • La +3 is substituted for Sr +2 in an insulator of SrTiO 3 (STO) when the material is doped with electrons
  • Sr +2 is substituted for La +3 in a Mott-Brinkman-Rice insulator of LaTiO 3 (LTO) when the material is doped with holes.
  • FIG. 2 is a graph showing the effective mass of a carrier versus the ratio of Sr +2 holes added to a Mott-Brinkman-Rice insulator of LaTiO 3 (LTO), that is, a band filling factor ⁇ .
  • LTO LaTiO 3
  • FIG. 3 is a graph showing electrical conductance ⁇ versus the ratio of Sr +2 holes added to a Mott-Brinkman-Rice insulator of LaTiO 3 (LTO), that is, a band filling factor ⁇ .
  • ⁇ HK denotes the threshold electrical conductance of a metal.
  • FIG. 4 is a sectional view of a FET using abrupt metal-insulator transition according to the present invention.
  • a Mott-Brinkman-Rice insulator 410 of LaTiO 3 (LTO) is disposed on a substrate 400 of SrTiO 3 (STO).
  • the Mott-Brinkman-Rice insulator 410 may be formed of LaTiO 3 , YTiO 3 , h-BaTiO 3 , Ca 2 RuO 4 , Ca 2 IrO 4 , V 2 O 3 , (Cr x V 1-x ) 2 O 3 , CaVO 3 , SrVO 3 and YVO 3 .
  • the dielectric (or ferroelectric) layer 420 of Ba 1-x Sr x TiO 3 (BSTO) makes holes to add into the Mott-Brinkman-Rice insulator 410 so that abrupt metal-insulator transition can occur in the Mott-Brinkman-Rice insulator 410 , thereby forming a conductive channel 415 .
  • a gate electrode 430 is formed on the dielectric layer 420 to apply a predetermined voltage to the dielectric layer 420 .
  • a source electrode 440 is formed on a first portion of the Mott-Brinkman-Rice insulator 410
  • a drain electrode 450 is formed on a second portion of the Mott-Brinkman-Rice insulator 410 .
  • the source electrode 440 and the drain electrode 450 are separated by the dielectric layer 420 .
  • a predetermined voltage is applied to the source electrode 440 and the drain electrode 450 , thereby generating a predetermined potential on the surface of the Mott-Brinkman-Rice insulator 410 of LaTiO 3 (LTO).
  • a gate voltage is applied to the gate electrode 430 so that Sr +2 holes can flow from the dielectric layer 420 of Ba 1-x Sr x TiO 3 (BSTO) into a Mott-Brinkman-Rice insulator 410 at low concentration.
  • BSTO Ba 1-x Sr x TiO 3
  • the Mott-Brinkman-Rice insulator 410 undergoes abrupt metal-insulator transition, and the conductive channel 415 is formed.
  • current flows between the source electrode 440 and the drain electrode 450 through the conductive channel 415 .
  • the number of electrons in a metal region formed due to the abrupt metal-insulator transition is about 4 ⁇ 10 14 /cm 2 .
  • This number of electrons is about at least 100 times of the number of electrons (about 10 12 /cm 2 ) in a channel of a usual Metal Oxide Semiconductor Field Effect Transistor (MOSFET), so a high current amplification can be achieved.
  • MOSFET Metal Oxide Semiconductor Field Effect Transistor
  • a hole concentration N hole is set to about 4 ⁇ 10 14 /cm 2 , and other variables, i.e., the dielectric constant ⁇ and the thickness “d” of the dielectric layer 420 are adjusted to the conditions of transistor fabrication, the gate voltage V g can be significantly decreased, so power consumption can be decreased.
  • a transistor according to the present invention is referred to as a Mott-Gutzwiller-Brinkman-Rice-Kim (MGBRK) transistor in order to discriminate it from a Mott or Mott-Hubbard (MH) FET.
  • MGBRK Mott-Gutzwiller-Brinkman-Rice-Kim
  • a FET according to the present invention provides the following effects.

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Abstract

A switching field effect transistor includes a substrate; a Mott-Brinkman-Rice insulator formed on the substrate, the Mott-Brinkman-Rice insulator undergoing abrupt metal-insulator transition when holes added therein; a dielectric layer formed on the Mott-Brinkman-Rice insulator, the dielectric layer adding holes into the Mott-Brinkman-Rice insulator when a predetermined voltage is applied thereto; a gate electrode formed on the dielectric layer, the gate electrode applying the predetermined voltage to the dielectric layer; a source electrode formed to be electrically connected to a first portion of the Mott-Brinkman-Rice insulator; and a drain electrode formed to be electrically connected to a second portion of the Mott-Brinkman-Rice insulator.

Description

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a field effect transistor, and more particularly, to a switching field effect transistor (FET) using abrupt metal-insulator transition.
2. Description of the Related Art
Metal Oxide Semiconductor Field Effect Transistors (MOSFETs) have been widely used as micro and super-speed switching transistors. A MOSFET has two pn junction structures showing linear characteristics at a low drain voltage as a basic structure. However, when a channel length is reduced to about 50 nm or below as the degree of integration of a device increases, an increase in a depletion layer changes the concentration of a carrier and an decrease of the depth of the gate insulator remarkably makes current flowing between a gate and a channel.
To overcome this problem, IBM institute has performed Mott FETs using the Mott-Hubbard insulator in a channel layer in reference “D. M. Newns, J. A. Misewich, C. C. Tsuei, A. Gupta, B. A. Scott, and A. Schrott, Appl. Phys. Lett. 73, 780 (1998)”. The Mott-Hubbard insulator undergoes a transition from an antiferromagnetic insulator to an metal. This transition is called the Mott-Hubbard metal-insulator transition in reference “J. Hubbard, Proc. Roy. Sci. (London) A276, 238 (1963), A281, 401 (1963)”. This is a continuous (or second order) phase transition. Unlike MOSFETs, Mott FETs perform an ON/OFF operation according to metal-insulator transition and do not have a depletion layer, thereby remarkably improving the degree of integration of a device and achieving a higher-speed switching characteristic than MOSFETs.
Since Mott-Hubbard FETs use continuous metal-insulator transition, charges used as carriers should be continuously added until the best metallic characteristics reach. Accordingly, the added charges must have a high concentration. Generally, charges N per unit area can be expressed by Equation (1).
N = ɛ ed V g ( 1 )
Here, “∈” denotes the dielectric constant of a gate insulator, “e” denotes a basic charge, “d,” denotes the thickness of the gate insulator, and “Vg” denotes a gate voltage.
For example, in the case of La2CuO4, which is one of the materials falling under the group Mott-Hubbard insulator, when holes are added to La2CuO4, the characteristics of La2-xSrxCuO4(LSCO) appear, and a metal having best hole carriers at x=0.15 (15%) is obtained. Here, the added holes become carriers. Generally, x=0.15 is a high concentration, so if the N value increases, the dielectric constant of the gate insulator increases, the thickness of the gate insulator decreases, or the gate voltage increases. However, when the dielectric constant is too great, the fatigue characteristics of a dielectric sharply worsens during a high-speed switching operation, thereby reducing the life of a transistor. Moreover, there is a limit in decreasing the thickness of the gate insulator due to limitations in fabrication processes. In addition, when the gate voltage increases, power consumption also increases, which makes it difficult to be the transistor with a low power.
SUMMARY OF THE INVENTION
To solve the above-described problems, it is an object of the present invention to provide a switching field effect transistor using abrupt metal-insulator transition so that the field effect transistor shows metallic characteristics even if holes of a low concentration are added thereto.
To achieve the above object of the invention, there is provided a field effect transistor including a substrate; a Mott-Brinkman-Rice insulator formed on the substrate, the Mott-Brinkman-Rice insulator undergoing abrupt metal-insulator transition when holes add therein; a dielectric layer formed on the Mott-Brinkman-Rice insulator, the dielectric layer adding holes into the Mott-Brinkman-Rice insulator when a predetermined voltage is applied thereto; a gate electrode formed on the dielectric layer, the gate electrode applying the predetermined voltage to the dielectric layer; a source electrode formed to be electrically connected to a first portion of the Mott-Brinkman-Rice insulator; and a drain electrode formed to be electrically connected to a second portion of the Mott-Brinkman-Rice insulator.
Preferably, the substrate is formed of SrTiO3.
Preferably, the Mott-Brinkman-Rice insulator is formed of LaTiO3, YTiO3, Ca2RuO4, Ca2IrO4, V2O3, (CrxV1-x)2O3, CaVO3, SrVO3 and YVO3.
Preferably, the dielectric layer is formed of Ba1-xSrxTiO3 or dielectric materials.
Preferably, the source electrode and the drain electrode are separated from each other by the dielectric layer.
BRIEF DESCRIPTION OF THE DRAWINGS
The above object and advantages of the present invention will become more apparent by describing in detail a preferred embodiment thereof with reference to the attached drawings in which:
FIGS. 1A and 1B are diagrams showing atomic lattices within a Mott-Brinkman-Rice insulator having abrupt metal-insulator transition under predetermined conditions;
FIG. 2 is a graph showing the effective mass of a carrier versus the band filling factor of a Mott-Brinkman-Rice insulator of LaTiO3(LTO);
FIG. 3 is a graph showing electrical conductance σ versus the band filling factor of a Mott-Brinkman-Rice insulator of LaTiO3(LTO); and
FIG. 4 is a sectional view of a switching field effect transistor according to the present invention.
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. The present invention is not restricted to the following embodiments, and many variations are possible within the spirit and scope of the present invention.
The following description concerns the operating principle of a field effect transistor (FET) according to the present invention.
FIGS. 1A and 1B are diagrams showing atomic lattices within a Mott-Brinkman-Rice insulator having abrupt metal-insulator transition under predetermined conditions. The Mott-Brinkman-Rice insulator, that is, a paramagnetic insulator in reference “W. F. Brinkman, T. M. Rice, Phys. Rev. B2, 4302 (1970)”, is different from an antiferromagnetic insulator of the Mott-Hubbard insulator used by IBM group.
Referring to FIG. 1A, when an atom has two electrons and the intensity U of the repulsive Coulomb interaction between the two electrons is the same as the maximum Coulomb energy Uc between the electrons, that is, U/Uc=k=1, the two electrons cannot exist in the atom together, so one of them moves to a neighboring atom and is bound to the neighboring atom. An insulator having such a bound and metallic electron structure is referred to as a Mott-Brinkman-Rice insulator 100.
If holes are added to the Mott-Brinkman-Rice insulator 100 at a very low concentration, the Mott-Brinkman-Rice insulator 100 is abruptly transformed into a metal due to a decrease in the Coulomb interaction and is thus changed into a non-uniform metallic system having both a metal phase and an insulator phase. Such abrupt transition, that is, first-order transition is well described in the reference “Hyun-Tak Kim in Physica C 341-348, 259 (2000); http://xxx.lanl.gov/abs/cond-mat/0110112”. (2000).” Here, the Mott-Brinkman-Rice insulator 100 is changed into a non-uniform metal system because the number of electrons becomes less than the number of atoms due to the addition of holes.
In this case, as shown in FIG. 1B, the intensity U of the repulsive Coulomb interaction becomes less than the maximum Coulomb energy Uc, that is, U/ Uc=k<1. As a result, the Mott-Brinkman-Rice insulator 100 locally becomes a strong correlation metal (denoted by M in FIG. 1B) complying with the strong correlation metal theory of Brinkman and Rice. The strong correlation metal theory is well disclosed in the reference “W. F. Brinkman, T. M. Rice, Phys. Rev. B2, 4302 (1970)”. Such a strong correlation metal has an electron structure in which one atom has one electron, that is, a metallic electron structure in which an s energy band is filled with one electron.
In the metal region M of FIG. 1B, the effective mass m*/m of a carrier is defined by Equation (2).
m * m = 1 1 - k 2 ( 2 )
Here, k<1 is satisfied, and abrupt metal-insulator transition occurs at a value within a range between k=1 and a certain value close to k=1. This theoretical equation is introduced in the reference “W. F. Brinkman, T. M. Rice, Phys. Rev. B2, 4302 (1970)”. The theory about a strong correlation was introduced in the reference “N. F. Mott, Metal-Insulator Transition, Chapter 3, (Taylor & Frances, 2nd edition, 1990) for the first time.
Meanwhile, the effective mass m*/m of a carrier in the entire metal system of FIG. 1B can be expressed by Equation (3).
m * m = 1 1 - k 2 ρ 4 ( 3 )
Here, ρ is a band filling factor and can be expressed by a ratio of the number of electrons (or carriers) to the number of atoms. In this case, when k=1, there occurs a abrupt transition from a value close to ρ=1 to ρ=1. This theory is well described in the reference “Hyun-Tak Kim in Physica C 341-348, 259 (2000); http://xxx.lanl.gov/abs/cond-mat/0110112”. (2000).”
For example, in the case of a material of Sr1-xLaxTiO3 (SLTO), La+3 is substituted for Sr+2 in an insulator of SrTiO3(STO) when the material is doped with electrons, and in contrast, Sr+2 is substituted for La+3 in a Mott-Brinkman-Rice insulator of LaTiO3(LTO) when the material is doped with holes.
FIG. 2 is a graph showing the effective mass of a carrier versus the ratio of Sr+2 holes added to a Mott-Brinkman-Rice insulator of LaTiO3(LTO), that is, a band filling factor ρ. As shown in FIG. 2, when k=1, there occurs abrupt transition from a metal having a maximum effective mass of a carrier to a Mott-Brinkman-Rice insulator (represented by an arrow in the graph) in a section from ρ=1 to ρ=0.95, that is, until the percentage of the Sr+2 holes added to the Mott-Brinkman-Rice insulator of LaTiO3(LTO) becomes 5%. Here, it was observed in a test that the quantity Nc of electrons corresponding to ρ=0.95 was about 1.7×1022 cm−3. The result of the test is disclosed in references “Y. Tokura, Y, Taguchi, Y. Okada, Y. Fujishima, T. Arima, K. Kumagi, and Y. Iye, Phys. Rev. Lett. 70, 2126 (1993)” and “K. Kumagai, T. Suzuki, Y. Taguchi, Y. Okada, Y. Fumjishima, and Y. Tokura, Phys. Rev. B48, 7636 (1993)”. When p<0.95, that is, when the quantity of added La+3 electrons decreases or when the quantity of added Sr+2 holes does not increase to at least 5%, continuous metal-insulator transition occurs due to a decrease in the number of carriers.
FIG. 3 is a graph showing electrical conductance σ versus the ratio of Sr+2 holes added to a Mott-Brinkman-Rice insulator of LaTiO3(LTO), that is, a band filling factor ρ. In FIG. 3, σHK denotes the threshold electrical conductance of a metal.
As shown in FIG. 3, it was observed in a test that the electrical conductance sharply increases to a maximum value at ρ=0.95 in a section from ρ=1 to ρ=0.95, that is, until the percentage of the Sr+2 holes added to the Mott-Brinkman-Rice insulator of LaTiO3(LTO) becomes 5%. The result of the test is disclosed in references “Y. Tokura, Y, Taguchi, Y. Okada, Y. Fujishima, T. Arima, K. Kumagi, and Y. Iye, Phys. Rev. Lett. 70. 2126 (1993)” and “K. Kumagai, T. Suzuki, Y. Taguchi, Y. Okada, Y. Fumjishima, and Y. Tokura, Phys. Rev. B48, 7636 (1993)”.
It can be concluded from the results of the tests shown in FIGS. 2 and 3 that adding holes to a Mott-Brinkman-Rice insulator of LaTiO3(LTO) is more effective than adding electrons to an insulator of SrTiO3(STO) in obtaining the maximum electrical conductance.
FIG. 4 is a sectional view of a FET using abrupt metal-insulator transition according to the present invention. Referring to FIG. 4, a Mott-Brinkman-Rice insulator 410 of LaTiO3(LTO) is disposed on a substrate 400 of SrTiO3 (STO). The Mott-Brinkman-Rice insulator 410 may be formed of LaTiO3, YTiO3, h-BaTiO3, Ca2RuO4, Ca2IrO4, V2O3, (CrxV1-x)2O3, CaVO3, SrVO3 and YVO3. A dielectric (or ferroelectric) layer 420 having a dielectric constant of at least 200, for example, Ba1-xSrxTiO3(BSTO), is partially formed as a gate insulation layer on the surface of the Mott-Brinkman-Rice insulator 410. When a predetermined voltage is applied, the dielectric (or ferroelectric) layer 420 of Ba1-xSrxTiO3(BSTO) makes holes to add into the Mott-Brinkman-Rice insulator 410 so that abrupt metal-insulator transition can occur in the Mott-Brinkman-Rice insulator 410, thereby forming a conductive channel 415.
A gate electrode 430 is formed on the dielectric layer 420 to apply a predetermined voltage to the dielectric layer 420. A source electrode 440 is formed on a first portion of the Mott-Brinkman-Rice insulator 410, and a drain electrode 450 is formed on a second portion of the Mott-Brinkman-Rice insulator 410. The source electrode 440 and the drain electrode 450 are separated by the dielectric layer 420.
The following description concerns the operations of the FET. A predetermined voltage is applied to the source electrode 440 and the drain electrode 450, thereby generating a predetermined potential on the surface of the Mott-Brinkman-Rice insulator 410 of LaTiO3(LTO). Next, a gate voltage is applied to the gate electrode 430 so that Sr+2 holes can flow from the dielectric layer 420 of Ba1-xSrxTiO3 (BSTO) into a Mott-Brinkman-Rice insulator 410 at low concentration. Then, the Mott-Brinkman-Rice insulator 410 undergoes abrupt metal-insulator transition, and the conductive channel 415 is formed. As a result, current flows between the source electrode 440 and the drain electrode 450 through the conductive channel 415.
When the concentration of holes is 5%, that is, ρ=0.95, the number of electrons in a metal region formed due to the abrupt metal-insulator transition is about 4×1014/cm2. This number of electrons is about at least 100 times of the number of electrons (about 1012/cm2) in a channel of a usual Metal Oxide Semiconductor Field Effect Transistor (MOSFET), so a high current amplification can be achieved.
According to circumstances, electrons can be added to the Mott-Brinkman-Rice insulator 410. However, the addition of electrons increases power consumption more than the addition of holes. In other words, when a gate voltage Vg is 0.12 volts, the dielectric constant ∈ of the dielectric layer 420 is 200, and the thickness “d” of the dielectric layer 420 is 50 nm, then the number Ncharge of static hole charges corresponding to a low concentration ρ=0.95 is about 4×1014/cm2 (Ncharge=Vg∈/ed). Accordingly, if a hole concentration Nhole is set to about 4×1014/cm2, and other variables, i.e., the dielectric constant ∈ and the thickness “d” of the dielectric layer 420 are adjusted to the conditions of transistor fabrication, the gate voltage Vg can be significantly decreased, so power consumption can be decreased.
However, when static electrons corresponding to a high concentration ρ=0.95 are added to the Mott-Brinkman-Rice insulator 410, the number Nelectron of electrons is more than the number Nhole of holes. Accordingly, even if the dielectric constant ∈ and the thickness “d” of the dielectric layer 420 are properly adjusted, the gate voltage Vg becomes greater than in the case of adding holes. As a result, power consumption increases compared to the case of adding holes at a low concentration. In this specification, a transistor according to the present invention is referred to as a Mott-Gutzwiller-Brinkman-Rice-Kim (MGBRK) transistor in order to discriminate it from a Mott or Mott-Hubbard (MH) FET.
As described above, a FET according to the present invention provides the following effects. First, since a depletion layer does not exist, there is no limit in the length of a channel. Therefore, the degree of integration of a device and a switching speed can be greatly increased. Second, since a dielectric layer having a properly high dielectric constant is used as a gate insulator, an appropriate concentration of holes for doping can be obtained with a low voltage without greatly reducing the thickness of the dielectric layer. Third, when holes are added to a Mott-Brinkman-Rice insulator at a low concentration to provoke abrupt metal-insulator transition, a high current gain and a low power consumption can be achieved.

Claims (55)

1. A switching field effect transistor comprising:
a substrate;
a Mott-Brinkman-Rice insulator formed on the substrate, the Mott-Brinkman-Rice insulator undergoing abrupt metal-insulator transition when holes add therein;
a dielectric layer formed on the Mott-Brinkman-Rice insulator, the dielectric layer adds holes into the Mott-Brinkman-Rice insulator when a predetermined voltage is applied thereto;
a gate electrode formed on the dielectric layer, the gate electrode applying the predetermined voltage to the dielectric layer;
a source electrode formed to be electrically connected to a first portion of the Mott-Brinkman-Rice insulator; and
a drain electrode formed to be electrically connected to a second portion of the Mott-Brinkman-Rice insulator.
2. The switching field effect transistor of claim 1, wherein the substrate is formed of a material selected from the group consisting of SrTiO3, Oxide materials, Silicon on Insulator (SOI), and Silicon.
3. The switching filed effect transistor of claim 1, wherein the Mott-Brinkman-Rice insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3 (0≦x≦0.1), where R is a cation with trivalent rare-earch ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr).
4. The switching filed effect transistor of claim 1, wherein the Mott-Brinkman-Rice insulator is formed of a material, h-BaTiO3.
5. The switching field effect transistor of claim 1, wherein the Mott-Brinkman-Rice insulator is formed of a material selected from the group consisting of Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4 (0≦x≦0.05).
6. The switching field effect transistor of claim 1, wherein the Mott-Brinkman-Rice insulator is formed of a material selected from the group consisting of V2O3, (CrxV1-x)2O3(0≦×0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
7. The switching field effect transistor of claim 1, wherein the dielectric layer is formed of Ba1-xSrxTiO3(0≦x≦0.05), Pb(Zr1-xTix)O3(0≦x≦0.05), and SrBi2Ta2O9.
8. The switching field effect transistor of claim 1, wherein the dielectric layer is formed of a material selected from the group consisting of SiO2, Si3N4, Al2O3, Y2O3, La2O3, Ta2O5, TiO2, HfO2, ZrO2.
9. The switching field effect transistor of claim 1, wherein the source electrode and the drain electrode are separated from each other by the dielectric layer.
10. A device using metal-insulator transition, wherein a paramagnetic insulator is abruptly phase-transited to metal due to an energy change between electrons to form a conductive channel, wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
11. The device using metal-insulator transition of claim 10, wherein the paramagnetic insulator has a bound and metallic electron structure.
12. The device using metal-insulator transition of claim 10, wherein the carriers generated due to the metal-insulator transition are electrons.
13. The device using metal-insulator transition of claim 10, wherein the energy change is caused by implantation of holes.
14. The device using metal-insulator transition of claim 10, wherein the paramagnetic insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
15. A device using metal-insulator transition, wherein a paramagnetic insulator is abruptly phase-transited to metal due to implantation of holes to form a conductive channel, wherein the effective mass, m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
16. The device using metal-insulator transition of claim 15, wherein the paramagnetic insulator has a bound and metallic electron structure.
17. The device using metal-insulator transition of claim 15, wherein the carriers generated due to the metal-insulator transition are electrons.
18. The device using metal-insulator transition of claim 15, wherein the paramagnetic insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
19. A device using metal-insulator transition, wherein holes are implanted into a paramagnetic insulator having a bound and metallic electron structure to form a conductive channel, wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
20. The device using metal-insulator transition of claim 19, wherein the carriers generated due to the metal-insulator transition are electrons.
21. The device using metal-insulator transition of claim 19, wherein the conductive channel is formed by abruptly transiting the phase of the paramagnetic insulator to metal.
22. The device using metal-insulator transition of claim 19, wherein the paramagnetic insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
23. A device using metal-insulator transition, wherein a paramagnetic insulator having a bound and metallic electron structure undergoes abrupt transition to metal due to an energy change between electrons caused by implantation of holes to form a conductive channel, wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
24. The device using metal-insulator transition of claim 23, wherein the carriers generated due to the metal-insulator transition are electrons.
25. The device using metal-insulator transition of claim 23, wherein the paramagnetic insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
26. A device using metal-insulator transition comprising:
a paramagnetic insulator forming a conductive channel by abruptly transiting the phase of the paramagnetic insulator to metal due to an energy change between electrons; and
an electrode making the energy change occur in the insulator,
wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
27. The device using metal-insulator transition of claim 26, wherein the paramagnetic insulator has a bound and metallic electron structure.
28. The device using metal-insulator transition of claim 26, wherein the carriers generated due to the metal-insulator transition are electrons.
29. The device using metal-insulator transition of claim 26, wherein the energy change is caused by implantation of holes.
30. The device using metal-insulator transition of claim 26, further comprising at least one electrode formed on the paramagnetic insulator, the electrode applying a predetermined voltage to the conductive channel.
31. A device using metal-insulator transition comprising:
a paramagnetic insulator forming a conductive channel by abruptly transiting the phase of the paramagnetic insulator to metal due to an energy change between electrons;
a first electrode making the energy change occur in the paramagnetic insulator; and
a second electrode formed on the paramagnetic insulator, the second electrode applying a predetermined voltage to the conductive channel,
wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
32. The device using metal-insulator transition of claim 31, wherein the paramagnetic insulator has a bound and metallic electron structure.
33. The device using metal-insulator transition of claim 31, wherein the carriers generated due to the metal-insulator transition are electrons.
34. The device using metal-insulator transition of claim 31, wherein the energy change is caused by implantation of holes.
35. The device using metal-insulator transition of claim 31, wherein the paramagnetic insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
36. A device using metal-insulator transition comprising:
a paramagnetic insulator forming a conductive channel by abruptly transiting the phase of the paramagnetic insulator to metal due to an energy change between electrons;
a first electrode making the energy change occur in the paramagnetic insulator; and
two second electrodes insulated from the first electrode and electrically connected to each other by the conductive channel,
wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
37. The device using metal-insulator transition of claim 36, wherein the paramagnetic insulator has a bound and metallic electron structure.
38. The device using metal-insulator transition of claim 36, wherein the carriers generated due to the metal-insulator transition are electrons.
39. The device using metal-insulator transition of claim 36, wherein the energy change is caused by implantation of holes.
40. The device using metal-insulator transition of claim 36, wherein the paramagnetic insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
41. A device using metal-insulator transition comprising:
a paramagnetic insulator forming a conductive channel by abruptly transiting the phase of the paramagnetic insulator to metal due to an energy change between electrons; and
a compound adding holes into the paramagnetic insulator when a predetermined voltage is applied to the compound,
wherein the holes are generated when a first element of the compound is substituted with a second element having a different atomic structure from the first element, and the holes are added to the paramagnetic insulator,
wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
42. The device using metal-insulator transition of claim 41, wherein the paramagnetic insulator has a bound and metallic electron structure.
43. The device using metal-insulator transition of claim 41, wherein the carriers generated due to the metal-insulator transition are electrons.
44. The device using metal-insulator transition of claim 41, wherein the paramagnetic insulator is formed of a material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
45. The device using metal-insulator transition of claim 41, wherein the compound is formed of at least one material selected from the group consisting of Ba1-xSrxTiO3(0≦x≦0.05), Pb(Zr1-xTix)O3(0≦x≦0.05), and SrBi2Ta2O9.
46. A device using metal-insulator transition, comprising:
a paramagnetic insulator formed of at least one material selected from the group consisting of LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with a divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3; and
a compound formed of at least one material selected from the group consisting of Ba1-xSrxTiO3(0≦x≦0.05), Pb(Zr1-xTix)O3(0≦x≦0.05), and SrBi2Ta2O9, wherein holes included in the compound are added to the insulator, wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
47. A field effect transistor using metal-insulator transition, comprising:
a paramagnetic insulator forming a conductive channel by abruptly transiting the phase of the paramagnetic insulator to metal due to an energy change between electrons;
a gate electrode formed on one side of the insulator, the gate electrode applying a predetermined voltage to the paramagnetic insulator to induce the energy change; and
a source electrode and a drain electrode formed to be electrically connected to each other by the conductive channel, wherein the effective mass m*/m of carriers generated due to the metal-insulator transition can be expressed by:
m * m = 1 1 - k 2 ρ 4
wherein k denotes a ratio between a Coulomb energy exerted between electrons and the maximum Coulomb energy, and ρ is a band filling factor, and the band filling factor is equal to or greater than 0.95 and less than 1.
48. The field effect transistor using metal-insulator transition of claim 47, wherein the paramagnetic insulator has a bound and metallic electron structure.
49. The field effect transistor using metal-insulator transition of claim 47, wherein the carriers generated due to the metal-insulator transition are electrons.
50. The field effect transistor using metal-insulator transition of claim 47, wherein the energy change is caused by implantation of holes.
51. The field effect transistor using metal-insulator transition of claim 50, wherein a voltage is applied to the gate electrode to form a low concentration of holes causing the abrupt metal-insulator transition.
52. The field effect transistor using metal-insulator transition of claim 47, wherein the paramagnetic insulator is formed of a material selected from the group consisting a LaTiO3, YTiO3, and R1-xAxTiO3(0≦x≦0.1) (where R is a cation with trivalent rare-earth ions (Y, La) and A is a cation with divalent alkali-earth ions (Ca, Sr)), h-BaTiO3, Ca2RuO4, Ca2-xSrxRuO4(0≦x≦0.05), Ca2IrO4, and Ca2-xSrxIrO4(0≦x≦0.05), V2O3, (CrxV1-x)2O3(0≦x≦0.05), CaVO3, Ca1-xSrxVO3(0≦x≦0.05), and YVO3.
53. The field effect transistor using metal-insulator transition of claim 47, further comprising a gate insulation layer formed between the paramagnetic insulator and the gate electrode.
54. The field effect transistor using metal-insulator transition of claim 53, wherein the gate insulation layer is formed of at least one material selected from the group consisting of Ba1-xSrxTiO3(0≦x≦0.05), Pb(Zr1-xTix)O3(0≦x≦0.05), and SrBi2Ta2O9.
55. The field effect transistor using metal-insulator transition of claim 53, wherein the gate insulation layer is formed of at least one material selected from the group consisting of SiO2, Si3N4, Al2O3, Y2O3, La2O3, Ta2O5, HfO2, and ZrO2.
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Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100513719B1 (en) 2002-08-12 2005-09-07 삼성전자주식회사 Precursor for the hafnium oxide film and process for preparing the hafnium oxide film by the precursor
KR100503421B1 (en) * 2003-05-20 2005-07-22 한국전자통신연구원 Field effect transistor using insulator-semiconductor transition material layer as channel
KR100467330B1 (en) * 2003-06-03 2005-01-24 한국전자통신연구원 Field effect transistor using Vanadium dioxide layer as channel material
KR100576703B1 (en) 2003-10-23 2006-05-03 한국전자통신연구원 Metal-insulator transition high speed switching device and method for manufacturing the same
KR100576704B1 (en) * 2003-11-06 2006-05-03 한국전자통신연구원 Cuurrent control circuit including abrubt a metal-insulator-transition type devices
JPWO2005078399A1 (en) * 2004-02-16 2007-08-30 松下電器産業株式会社 Infrared imaging device
KR100959982B1 (en) * 2004-05-19 2010-05-27 주식회사 엘지화학 Safety element for battery and battery with the same
KR100609699B1 (en) 2004-07-15 2006-08-08 한국전자통신연구원 2-terminal semiconductor device using abrupt metal-insulator transition semiconductor material
KR100745354B1 (en) * 2004-08-24 2007-08-02 주식회사 엘지화학 A safty device for preventing overcharge of secondary batteries and a secondary device therewith
KR100639990B1 (en) * 2004-12-08 2006-10-31 한국전자통신연구원 Devices using abrupt metal-insulator transition and fabrication method thereof
KR100682926B1 (en) * 2005-01-31 2007-02-15 삼성전자주식회사 Nonvolatile memory device using resistance material and fabrication method of the same
KR100640001B1 (en) * 2005-02-21 2006-11-01 한국전자통신연구원 Circuit for protecting electrical and electronic system using abrupt MIT device and electrical and electronic system comprising of the same circuit
KR100714125B1 (en) * 2005-03-18 2007-05-02 한국전자통신연구원 Circuit for preventing low voltage noise adapting abrupt MIT device and electrical and electronic system comprising the same the circuit
JP4853859B2 (en) * 2005-06-27 2012-01-11 独立行政法人情報通信研究機構 Non-conductive nanowire and manufacturing method thereof
KR100723872B1 (en) * 2005-06-30 2007-05-31 한국전자통신연구원 Memory device using abruptly metal-insulator transition and method of operating the same
KR100734882B1 (en) * 2005-07-28 2007-07-03 한국전자통신연구원 Wafer having abruptly metal-insulator transition and apparatus of heat treating the same and method of heat treating using the same
KR100714115B1 (en) * 2005-07-29 2007-05-02 한국전자통신연구원 Abrupt MIT device, circuit for removing high voltage noise adapting the same device, and electrical and electronic system comprising the same circuit
WO2007013724A1 (en) * 2005-07-29 2007-02-01 Electronics And Telecommunications Research Institute Abrupt metal-insulator transition device, circuit for removing high-voltage noise using the abrupt metal-insulator transition device, and electrical and/or electronic system comprising the circuit
KR100744551B1 (en) * 2005-10-12 2007-08-01 한국전자통신연구원 Temperature sensor using abrupt MIT device and alarm comprising the same sensor
KR100668347B1 (en) * 2005-10-13 2007-01-12 삼성전자주식회사 Semiconductor memory device having a metal insulator transition film resistor
WO2007089097A1 (en) * 2006-02-01 2007-08-09 Electronics And Telecommunications Research Institute Abrupt metal-insulator transition device with parallel conducting layers
WO2007111478A1 (en) * 2006-03-28 2007-10-04 Electronics And Telecommunications Research Institute Materials of continuous metal-insulator transition and device using the same
KR100702033B1 (en) * 2006-04-25 2007-03-30 삼성전자주식회사 MOSFET having Mott pattern
KR100825760B1 (en) * 2006-06-02 2008-04-29 한국전자통신연구원 Abrupt metal-insulator transitionMIT device, MIT sensor using the same abrupt MIT device, and alarming apparatus and secondary battery anti-explosion circuit comprising the same MIT sensor
KR100864827B1 (en) 2006-11-02 2008-10-23 한국전자통신연구원 Logic circuit using metal-insulator transitionMIT device
US7872900B2 (en) * 2006-11-08 2011-01-18 Symetrix Corporation Correlated electron memory
US7639523B2 (en) * 2006-11-08 2009-12-29 Symetrix Corporation Stabilized resistive switching memory
US7778063B2 (en) * 2006-11-08 2010-08-17 Symetrix Corporation Non-volatile resistance switching memories and methods of making same
WO2008058264A2 (en) * 2006-11-08 2008-05-15 Symetrix Corporation Correlated electron memory
US20080107801A1 (en) * 2006-11-08 2008-05-08 Symetrix Corporation Method of making a variable resistance memory
KR100864833B1 (en) * 2006-11-23 2008-10-23 한국전자통신연구원 Oscillation circuit based on metal-insulator transitionMIT device and method of driving the same oscillation circuit
KR100842296B1 (en) * 2007-03-12 2008-06-30 한국전자통신연구원 Oscillation circuit based on metal-insulator transition(mit) device and method of adjusting oscillation frequency of the same oscillation circuit
KR100859717B1 (en) 2007-05-07 2008-09-23 한국전자통신연구원 Three terminal metal-insulator transition(mit) switch, switching system using the same switch, and method of controlling mit of the same switch
WO2009014348A2 (en) * 2007-07-20 2009-01-29 Electronics And Telecommunications Research Institute Three-terminal metal-insulator transition switch, switching system including the same, and method of controlling metal-insulator transition of the same
KR20090013657A (en) * 2007-08-02 2009-02-05 한국전자통신연구원 Germanium(ge) based metal-insulator transition(mit) thin film, mit device comprising the same mit thin film and method of fabricating the same mit device
KR101213471B1 (en) * 2008-02-25 2012-12-18 한국전자통신연구원 Circuit for preventing self-heating of Metal-Insulator-Transition(MIT) device and method of fabricating a integrated-device for the same circuit
KR20100006059A (en) * 2008-07-08 2010-01-18 삼성전자주식회사 Electrical fuse device and method of operating the same
US7974119B2 (en) 2008-07-10 2011-07-05 Seagate Technology Llc Transmission gate-based spin-transfer torque memory unit
US20110181345A1 (en) * 2008-08-01 2011-07-28 President And Fellows Of Harvard College Phase transition devices and smart capacitive devices
US9030867B2 (en) 2008-10-20 2015-05-12 Seagate Technology Llc Bipolar CMOS select device for resistive sense memory
US7936580B2 (en) 2008-10-20 2011-05-03 Seagate Technology Llc MRAM diode array and access method
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US7825478B2 (en) 2008-11-07 2010-11-02 Seagate Technology Llc Polarity dependent switch for resistive sense memory
US8178864B2 (en) 2008-11-18 2012-05-15 Seagate Technology Llc Asymmetric barrier diode
US8203869B2 (en) 2008-12-02 2012-06-19 Seagate Technology Llc Bit line charge accumulation sensing for resistive changing memory
KR101109667B1 (en) * 2008-12-22 2012-01-31 한국전자통신연구원 The package of power device having enhanced heat dissipation
US8159856B2 (en) 2009-07-07 2012-04-17 Seagate Technology Llc Bipolar select device for resistive sense memory
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US7936585B2 (en) * 2009-07-13 2011-05-03 Seagate Technology Llc Non-volatile memory cell with non-ohmic selection layer
US8648426B2 (en) 2010-12-17 2014-02-11 Seagate Technology Llc Tunneling transistors
WO2012172898A1 (en) * 2011-06-16 2012-12-20 富士電機株式会社 Strongly correlated oxide field effect element
JP5453628B2 (en) * 2011-09-20 2014-03-26 独立行政法人情報通信研究機構 Non-conductive nanowire and manufacturing method thereof
WO2013066006A1 (en) * 2011-10-31 2013-05-10 한국전자통신연구원 Three-terminal device for metal-insulator transition, electrical and electronic system including same, and method for removing electrostatic noise signals
KR101834904B1 (en) 2011-10-31 2018-03-08 한국전자통신연구원 Technology for reducing high speed voltage noise in the metal-insulator transition device and electronic system
WO2015147849A1 (en) * 2014-03-28 2015-10-01 Intel Corporation Tunneling field effect transistors with a variable bandgap channel
KR20160023338A (en) 2014-08-22 2016-03-03 에스케이하이닉스 주식회사 Electronic device
US9419016B2 (en) * 2014-11-10 2016-08-16 International Business Machines Corporation Junctionless tunnel FET with metal-insulator transition material
JP6297754B2 (en) 2014-12-09 2018-03-20 シメトリックス・メモリー・エルエルシー Transition metal oxide resistance switching device with doped buffer region
US9379253B1 (en) 2015-08-27 2016-06-28 International Business Machines Corporation Symmetric tunnel field effect transistor
WO2019139584A1 (en) * 2018-01-11 2019-07-18 Intel Corporation Multi-gate ferroelectric / insulator-metal transition memory device

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5304538A (en) * 1992-03-11 1994-04-19 The United States Of America As Repeated By The Administrator Of The National Aeronautics And Space Administration Epitaxial heterojunctions of oxide semiconductors and metals on high temperature superconductors
JPH0878743A (en) 1994-07-04 1996-03-22 Sumitomo Electric Ind Ltd Superconductive field effect type element
JPH09312424A (en) 1996-05-22 1997-12-02 Hitachi Ltd Superconducting transistor
JPH1136644A (en) 1997-07-22 1999-02-09 Press Kogyo Co Ltd Multistoried parking facility
US6121642A (en) 1998-07-20 2000-09-19 International Business Machines Corporation Junction mott transition field effect transistor (JMTFET) and switch for logic and memory applications
JP2000294796A (en) 1999-03-16 2000-10-20 Internatl Business Mach Corp <Ibm> Manufacture of field effect transistor having buried mott material oxide channel
US6198119B1 (en) * 1996-03-13 2001-03-06 Hitachi, Ltd. Ferroelectric element and method of producing the same
US6259114B1 (en) 1999-05-07 2001-07-10 International Business Machines Corporation Process for fabrication of an all-epitaxial-oxide transistor
US6274916B1 (en) 1999-11-19 2001-08-14 International Business Machines Corporation Ultrafast nanoscale field effect transistor
US20010050409A1 (en) * 2000-03-28 2001-12-13 Nec Corporation. MIM capacitor having reduced capacitance error and phase rotation
US6365913B1 (en) * 1999-11-19 2002-04-02 International Business Machines Corporation Dual gate field effect transistor utilizing Mott transition materials
JP2003031815A (en) 2001-04-16 2003-01-31 Internatl Business Mach Corp <Ibm> Field-effect transistor structure having double layer perovskite oxide electrode and method for forming it
US6518609B1 (en) * 2000-08-31 2003-02-11 University Of Maryland Niobium or vanadium substituted strontium titanate barrier intermediate a silicon underlayer and a functional metal oxide film

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794739A (en) * 1993-09-20 1995-04-07 Sony Corp Field effect transistor having quantum boxes and its manufacturing method
JPH0883934A (en) * 1994-09-12 1996-03-26 Fuji Electric Co Ltd Superconducting field effect transistor

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5304538A (en) * 1992-03-11 1994-04-19 The United States Of America As Repeated By The Administrator Of The National Aeronautics And Space Administration Epitaxial heterojunctions of oxide semiconductors and metals on high temperature superconductors
JPH0878743A (en) 1994-07-04 1996-03-22 Sumitomo Electric Ind Ltd Superconductive field effect type element
US6198119B1 (en) * 1996-03-13 2001-03-06 Hitachi, Ltd. Ferroelectric element and method of producing the same
JPH09312424A (en) 1996-05-22 1997-12-02 Hitachi Ltd Superconducting transistor
JPH1136644A (en) 1997-07-22 1999-02-09 Press Kogyo Co Ltd Multistoried parking facility
US6121642A (en) 1998-07-20 2000-09-19 International Business Machines Corporation Junction mott transition field effect transistor (JMTFET) and switch for logic and memory applications
JP2000294796A (en) 1999-03-16 2000-10-20 Internatl Business Mach Corp <Ibm> Manufacture of field effect transistor having buried mott material oxide channel
US6259114B1 (en) 1999-05-07 2001-07-10 International Business Machines Corporation Process for fabrication of an all-epitaxial-oxide transistor
US6274916B1 (en) 1999-11-19 2001-08-14 International Business Machines Corporation Ultrafast nanoscale field effect transistor
US6365913B1 (en) * 1999-11-19 2002-04-02 International Business Machines Corporation Dual gate field effect transistor utilizing Mott transition materials
US20010050409A1 (en) * 2000-03-28 2001-12-13 Nec Corporation. MIM capacitor having reduced capacitance error and phase rotation
US6518609B1 (en) * 2000-08-31 2003-02-11 University Of Maryland Niobium or vanadium substituted strontium titanate barrier intermediate a silicon underlayer and a functional metal oxide film
JP2003031815A (en) 2001-04-16 2003-01-31 Internatl Business Mach Corp <Ibm> Field-effect transistor structure having double layer perovskite oxide electrode and method for forming it

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
A field effect transistor based on the Mott transition in a molecular layer by C. Zhou; Applied physics letters Feb. 3, 1997 pp. 598-600.
Application of Gutzwiller's Variational Method to the Metal-Insulator Transition. W. F. Brinkman and T. M. Rice Bell Telephone Laboratories, Murray Hill, New Jersey 07974 Apr. 16, 1970. *
Mott Transition field effect transistor by DM Newns; Applied physics letters Aug. 10, 1998 pp. 780-782.

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