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Publication numberUST954010 I4
Publication typeGrant
Application numberUS 05/687,965
Publication dateJan 4, 1977
Filing dateMay 19, 1976
Priority dateAug 24, 1973
Publication number05687965, 687965, US T954010 I4, US T954010I4, US-I4-T954010, UST954010 I4, UST954010I4
InventorsFriedrich C. Brunner, Peter U. Frasch, Friedrich W. Schwerdt, Theodor P. Vogtmann
Original AssigneeInternational Business Machines Corporation
Export CitationBiBTeX, EndNote, RefMan
External Links: USPTO, USPTO Assignment, Espacenet
Method of coating oxidized inorganic substrates with polyimide
US T954010 I4
substrates with oxidized surfaces, as e.g. SiO2 layers on silicon semiconductors and aluminum surfaces, are wetted with an organic silicon compound, for example, γ-aminopropyltriethoxysilane dissolved in an organic solvent such as trichlorotrifluoro ethane. The solvent is then removed in a dry atmosphere. The evaporation step can be carried out by suspending the substrate in volvent vapor over a supply of refluxing solvent while cooling the solvent vapor such that fresh, dry solvent vapor continuously passes along the substrate and absorbs traces of moisture. Subsequently, a coating is applied from a solution of a polyamido carbon acid formed of pyromellitic acid anhydride and an aromatic amino component and the polyamido carbon acid is heated to form an adherent layer of polyimide.
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Referenced by
Citing PatentFiling datePublication dateApplicantTitle
US5622784 *Jan 18, 1994Apr 22, 1997Seiko Epson CorporationSynthetic resin ophthalmic lens having an inorganic coating
US6942924Oct 31, 2001Sep 13, 2005Chemat Technology, Inc.Radiation-curable anti-reflective coating system
US20060014101 *Sep 12, 2005Jan 19, 2006Liu HeRadiation-curable anti-reflective coating system
U.S. Classification427/335, 427/407.2, 428/458, 427/409, 438/780, 428/450, 428/447
International ClassificationC03C17/32, H05K1/03, H01L23/29, B05D7/26, C03C17/30, H05K3/38, B05D5/12, H05K3/46, H01B3/30
Cooperative ClassificationY10T428/31681, Y10T428/31663, C03C17/30, H05K3/4644, C03C17/32, H01B3/306, B05D7/26, H05K1/0346, H01L23/293, C03C2218/31, B05D5/12, H05K3/389, H01L2924/0002
European ClassificationB05D5/12, B05D7/26, H01L23/29P, C03C17/30, C03C17/32, H01B3/30C4