WO1987002475A1 - Radiation deflector assembly - Google Patents

Radiation deflector assembly Download PDF

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Publication number
WO1987002475A1
WO1987002475A1 PCT/GB1986/000630 GB8600630W WO8702475A1 WO 1987002475 A1 WO1987002475 A1 WO 1987002475A1 GB 8600630 W GB8600630 W GB 8600630W WO 8702475 A1 WO8702475 A1 WO 8702475A1
Authority
WO
WIPO (PCT)
Prior art keywords
deflector
radiation
waveguides
substrate
assembly according
Prior art date
Application number
PCT/GB1986/000630
Other languages
French (fr)
Inventor
Ian William Stanley
Original Assignee
British Telecommunications Public Limited Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB858525462A external-priority patent/GB8525462D0/en
Priority claimed from GB858525460A external-priority patent/GB8525460D0/en
Priority claimed from GB858525458A external-priority patent/GB8525458D0/en
Priority claimed from GB858525461A external-priority patent/GB8525461D0/en
Priority claimed from GB858525459A external-priority patent/GB8525459D0/en
Priority claimed from GB858526189A external-priority patent/GB8526189D0/en
Application filed by British Telecommunications Public Limited Company filed Critical British Telecommunications Public Limited Company
Priority to JP61505472A priority Critical patent/JPH077149B2/en
Publication of WO1987002475A1 publication Critical patent/WO1987002475A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2817—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using reflective elements to split or combine optical signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3801—Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
    • G02B6/3803—Adjustment or alignment devices for alignment prior to splicing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3516—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Definitions

  • the invention relates to radiation deflector assemblies of the kind comprising at least three radiation waveguides; a controllable radiation deflector positioned such that when the deflector is in a first position radiation passes between one combination of two of the waveguides, and when the deflector is in a second position radiation passes between another combination of two of the waveguides; and control means responsive to control, signals for controlling the position of the deflector.
  • Such assembliess are hereinafter referred to as of the kind described.
  • a radiation deflector assembly of the kind described is characterised in that the waveguides and the deflector are mounted in a common substrate.
  • the invention deals with the alignment problem by mounting both the waveguides and the deflector in the same substrate.
  • the waveguides are substantially coplanar, and conveniently the direction of movement of the deflector is in substantially the same plane as the plane of the waveguides. In alternative arrangements, however, the waveguides may extend in different planes.
  • the invention is particularly suitable where the substrate comprises a single crystal of for example si i-con, since anisotropic etching technigues may be used to define grooves of the same or different depths into which the waveguides are mounted.
  • the invention is particularly suitable for deflecting radiation in the optical waveband and typically a large number of radiation deflector assemblies according to the invention will be assembled together to constitute an optical switch array.
  • the deflector may comprise a piston member which moves to and fro between the first and second positions.
  • the deflector comprises a cantilevered arm which is controlled to pivot between the first and second positions.
  • the deflector is integrally formed with the substrate. This car. be achieved using conventional etching techniques or laser etching technology.
  • the deflector is adapted to deflect the radiation in both the first and second positions although in some examples, radiation could pass directly from one waveguide to another when the deflector is in the first position and be deflected towards another waveguide when the deflector is in the second position.
  • the deflector will typically comprise a radiation reflector but other deflectors are possible such as a refractor or diffractor.
  • the waveguides could be formed by diffusing a suitable material into the substrate but conveniently each waveguide is mounted in a groove formed in a surface of the substrate, typically a V-shaped groove.
  • the substrate may comprise silicon but other substrate materials are possible such as silica or lithium niobate or III-V compounds such as gallium arsenide.
  • the position of the deflector can be controlled using conventional electrostatic techniques or by thermal methods similar to those described in our copending
  • the optical element or assembly shown in the drawing includes a substrate comprising a single crystal silicon slice 1 in the upper surface of which three V-shaped grooves 2-4 have been etched using an anisotropic masking and etching technique.
  • the grooves 2-4 all have substantially the same depth and are effectively coplanar.
  • Each groove 2-4 terminates in a cavity 5 formed in the substrate 1.
  • Monomode optical fibres (not shown) are positioned in each of the grooves 2-4 with their ends facing into the cavity 5.
  • a cantilevered, vertically hinged silicon beam 6 is positioned in the cavity 5 and is integrally formed with the remainder of the substrate 1.
  • the beam 6 acts as an optical reflector.
  • the beam can pivot about its end 7 between first and second positions in response to an electrostatic field generated by a pair of electrodes, one of which 8 is mounted to the substrate and the other of which is mounted to the facing surface of the beam 6. If the beam is at ground potential, the second electrode is not required.
  • the electrodes are connected to electrical control apparatus including a power source (not shown) .
  • the reflector 6 In its first position, the reflector 6 reflects optical radiation passing along the optical fibre in the groove 2 into the optical fibre in the groove 3.
  • optical radiation impinging on the re-flector 6 from the fibre in the groove 2 is reflected int ⁇ the fibre in the groove 4.
  • the element shown in the drawing can thus be used as an optical switch to switch incoming radiation in the optical fibre in the groove 2 into either the optical fibre in the groove 3 or the optical fibre in the groove 4.

Abstract

A radiation deflector assembly, primarily for deflecting optical radiation, comprises three waveguides mounted in V-shaped grooves (2, 3, 4) of a substrate (1) which are substantially coplanar. A cantilevered beam (6) integral with the substrate (1) is positioned in a cavity (5) of the substrate such that when the beam (6) is in a first position radiation passes between optical waveguides in two of the grooves (2, 3) and when the beam is in a second position optical radiation passes between optical waveguides in another two of the grooves (2, 4). Control means including electrodes (8, 9) is responsive to control signals to generate a suitable electrostatic field for moving the beam (6) between the two positions.

Description

RADIATION DEFLECTOR ASSEMBLY The invention relates to radiation deflector assemblies of the kind comprising at least three radiation waveguides; a controllable radiation deflector positioned such that when the deflector is in a first position radiation passes between one combination of two of the waveguides, and when the deflector is in a second position radiation passes between another combination of two of the waveguides; and control means responsive to control, signals for controlling the position of the deflector. Such assembliess are hereinafter referred to as of the kind described.
Radiation deflector assemblies of the kind described find particular application as switches in optical transmission systems. IBM Technical Disclosure Bulletin Vol 27, No 2 of July 1984 (pages 11-12) describes a solid-state array of mirrors positioned beneath three groups of optical fibres. In a relaxed position, optical radiation impinging on the mirrors from one group of fibres is reflected towards another group. When the mirrors are in a deflected position, optical radiation is instead reflected towards the third group of fibres.
The major problem with this arrangement is that it is difficult accurately to align the optical fibres with the mirrors'. Alignment is important when large arrays of mirrors are concerned so as to maximise the number of mirrors per unit area.
In accordance with the present invention, a radiation deflector assembly of the kind described is characterised in that the waveguides and the deflector are mounted in a common substrate.
The invention deals with the alignment problem by mounting both the waveguides and the deflector in the same substrate. Preferably, the waveguides are substantially coplanar, and conveniently the direction of movement of the deflector is in substantially the same plane as the plane of the waveguides. In alternative arrangements, however, the waveguides may extend in different planes.
The invention is particularly suitable where the substrate comprises a single crystal of for example si i-con, since anisotropic etching technigues may be used to define grooves of the same or different depths into which the waveguides are mounted.
The invention is particularly suitable for deflecting radiation in the optical waveband and typically a large number of radiation deflector assemblies according to the invention will be assembled together to constitute an optical switch array.
In some arrangements, the deflector may comprise a piston member which moves to and fro between the first and second positions. Preferably, however, the deflector comprises a cantilevered arm which is controlled to pivot between the first and second positions.
It is particularly convenient if the deflector is integrally formed with the substrate. This car. be achieved using conventional etching techniques or laser etching technology. Preferably, the deflector is adapted to deflect the radiation in both the first and second positions although in some examples, radiation could pass directly from one waveguide to another when the deflector is in the first position and be deflected towards another waveguide when the deflector is in the second position.
The deflector will typically comprise a radiation reflector but other deflectors are possible such as a refractor or diffractor.
In some examples, the waveguides could be formed by diffusing a suitable material into the substrate but conveniently each waveguide is mounted in a groove formed in a surface of the substrate, typically a V-shaped groove.
As has previously been mentioned, the substrate may comprise silicon but other substrate materials are possible such as silica or lithium niobate or III-V compounds such as gallium arsenide.
The position of the deflector can be controlled using conventional electrostatic techniques or by thermal methods similar to those described in our copending
British Patent Application of even date entitled "Movable
Member Mounting" (our case ref: 23332/GB) .
An example of an optical reflection assembly according to the invention for use in an optical switch array will now be described with reference to the accompanying drawing which is a schematic perspective view of the assembly. '
The optical element or assembly shown in the drawing includes a substrate comprising a single crystal silicon slice 1 in the upper surface of which three V-shaped grooves 2-4 have been etched using an anisotropic masking and etching technique. The grooves 2-4 all have substantially the same depth and are effectively coplanar. Each groove 2-4 terminates in a cavity 5 formed in the substrate 1. Monomode optical fibres (not shown) are positioned in each of the grooves 2-4 with their ends facing into the cavity 5.
A cantilevered, vertically hinged silicon beam 6 is positioned in the cavity 5 and is integrally formed with the remainder of the substrate 1. The beam 6 acts as an optical reflector.
The beam can pivot about its end 7 between first and second positions in response to an electrostatic field generated by a pair of electrodes, one of which 8 is mounted to the substrate and the other of which is mounted to the facing surface of the beam 6. If the beam is at ground potential, the second electrode is not required. The electrodes are connected to electrical control apparatus including a power source (not shown) . In its first position, the reflector 6 reflects optical radiation passing along the optical fibre in the groove 2 into the optical fibre in the groove 3. In its second position, optical radiation impinging on the re-flector 6 from the fibre in the groove 2 is reflected intσ the fibre in the groove 4. The element shown in the drawing can thus be used as an optical switch to switch incoming radiation in the optical fibre in the groove 2 into either the optical fibre in the groove 3 or the optical fibre in the groove 4.

Claims

1. A radiation deflector assembly comprising at least three radiation waveguides; a controllable radiation deflector positioned such that when the deflector is in a first position radiation passes between one combination of two of the waveguides and when the deflector is in a second position radiation passes between another combination of two of the waveguides; and control means responsive to control signals for controlling the position of the deflector characterised in that the waveguides and the deflector are mounted in a common substrate.
2. An assembly according to claim 1, wherein the radiation waveguides are substantially coplanar.
3. An assembly according to claim 1 or claim 2, wherein each waveguide comprises a waveguide member mounted in a respective groove formed in the substrate.
4. An assembly according to any of the preceding claims, wherein the deflector is integrally formed with the substrate.
5. An assembly according to any of the preceding claims, wherein the deflector comprises a cantilevered arm.
6. An assembly according to any of the preceding claims, wherein the deflector is adapted to deflect radiation in both the first and second positions.
7. An assembly according to any of the preceding claims, wherein the deflector comprises a radiation reflector.
8. An assembly according to any of the preceding claims, wherein the waveguides and deflector are adapted to guide and deflect optical radiation respectively.
9. An assembly according to any of the preceding claims, wherein the substrate is a single crystal.
10. A radiation deflector assembly substantially as hereinbefore described with reference to the accompanying drawing.
PCT/GB1986/000630 1985-10-16 1986-10-16 Radiation deflector assembly WO1987002475A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61505472A JPH077149B2 (en) 1985-10-16 1986-10-16 Radiator deflector assembly

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
GB858525462A GB8525462D0 (en) 1985-10-16 1985-10-16 Radiation deflector assembly
GB858525460A GB8525460D0 (en) 1985-10-16 1985-10-16 Movable member mounting
GB858525458A GB8525458D0 (en) 1985-10-16 1985-10-16 Positioning optical components & waveguides
GB858525461A GB8525461D0 (en) 1985-10-16 1985-10-16 Wavelength selection device
GB858525459A GB8525459D0 (en) 1985-10-16 1985-10-16 Mounting component to substrate
GB8525462 1985-10-23
GB8525461 1985-10-23
GB858526189A GB8526189D0 (en) 1985-10-23 1985-10-23 Fabry-perot interferometer
GB8525459 1985-10-23
GB8525460 1985-10-23
GB8525458 1985-10-23
GB8526189 1985-10-23

Publications (1)

Publication Number Publication Date
WO1987002475A1 true WO1987002475A1 (en) 1987-04-23

Family

ID=27546918

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/GB1986/000628 WO1987002472A1 (en) 1985-10-16 1986-10-16 Movable member-mounting
PCT/GB1986/000630 WO1987002475A1 (en) 1985-10-16 1986-10-16 Radiation deflector assembly
PCT/GB1986/000626 WO1987002474A1 (en) 1985-10-16 1986-10-16 Positioning optical components and waveguides
PCT/GB1986/000627 WO1987002518A1 (en) 1985-10-16 1986-10-16 Mounting a component to a substrate
PCT/GB1986/000629 WO1987002476A1 (en) 1985-10-16 1986-10-16 Wavelength selection device and method
PCT/GB1986/000631 WO1987002470A1 (en) 1985-10-16 1986-10-16 Fabry-perot interferometer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/GB1986/000628 WO1987002472A1 (en) 1985-10-16 1986-10-16 Movable member-mounting

Family Applications After (4)

Application Number Title Priority Date Filing Date
PCT/GB1986/000626 WO1987002474A1 (en) 1985-10-16 1986-10-16 Positioning optical components and waveguides
PCT/GB1986/000627 WO1987002518A1 (en) 1985-10-16 1986-10-16 Mounting a component to a substrate
PCT/GB1986/000629 WO1987002476A1 (en) 1985-10-16 1986-10-16 Wavelength selection device and method
PCT/GB1986/000631 WO1987002470A1 (en) 1985-10-16 1986-10-16 Fabry-perot interferometer

Country Status (9)

Country Link
US (7) US4867532A (en)
EP (6) EP0219359B1 (en)
JP (5) JP2514343B2 (en)
AT (6) ATE50864T1 (en)
DE (6) DE3667864D1 (en)
ES (3) ES2013599B3 (en)
GR (3) GR3000242T3 (en)
SG (1) SG892G (en)
WO (6) WO1987002472A1 (en)

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US6711321B2 (en) 2000-01-20 2004-03-23 Japan Science And Technology Corporation Mechanical optical switch and method for manufacturing the same

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JPH0769520B2 (en) 1995-07-31
DE3667335D1 (en) 1990-01-11
DE3669401D1 (en) 1990-04-12
DE3667864D1 (en) 1990-02-01
GR3000242T3 (en) 1991-03-15
JPS63501383A (en) 1988-05-26
WO1987002474A1 (en) 1987-04-23
EP0219358B1 (en) 1991-03-06
US4871244A (en) 1989-10-03
DE3689537D1 (en) 1994-02-24
GR3000376T3 (en) 1991-06-07
WO1987002476A1 (en) 1987-04-23
US4896936A (en) 1990-01-30
EP0219359A1 (en) 1987-04-22
DE3687063T2 (en) 1993-03-18
US4825262A (en) 1989-04-25
US4846930A (en) 1989-07-11
ATE100245T1 (en) 1994-01-15
EP0219357A1 (en) 1987-04-22
EP0223414A1 (en) 1987-05-27
ES2012346B3 (en) 1990-03-16
ATE50864T1 (en) 1990-03-15
WO1987002472A1 (en) 1987-04-23
JPH077149B2 (en) 1995-01-30
ATE48480T1 (en) 1989-12-15
WO1987002470A1 (en) 1987-04-23
EP0219356B1 (en) 1989-12-06
EP0219357B1 (en) 1989-12-27
ES2013599B3 (en) 1990-05-16
JPS63501600A (en) 1988-06-16
US4854658A (en) 1989-08-08
ATE49064T1 (en) 1990-01-15
JPS63501382A (en) 1988-05-26
EP0219358A1 (en) 1987-04-22
US4802727A (en) 1989-02-07
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ATE82076T1 (en) 1992-11-15
US4867532A (en) 1989-09-19
ES2011773B3 (en) 1990-02-16
EP0219356A1 (en) 1987-04-22
WO1987002518A1 (en) 1987-04-23
JPS63501385A (en) 1988-05-26
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JP2514343B2 (en) 1996-07-10
SG892G (en) 1992-03-20
EP0226296A1 (en) 1987-06-24
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GR3000264T3 (en) 1991-03-15
DE3687063D1 (en) 1992-12-10

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