WO1993021673A1 - Vertical-cavity surface-emitting laser abray display system - Google Patents

Vertical-cavity surface-emitting laser abray display system Download PDF

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Publication number
WO1993021673A1
WO1993021673A1 PCT/US1993/003738 US9303738W WO9321673A1 WO 1993021673 A1 WO1993021673 A1 WO 1993021673A1 US 9303738 W US9303738 W US 9303738W WO 9321673 A1 WO9321673 A1 WO 9321673A1
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WIPO (PCT)
Prior art keywords
emitting
image
display system
visual display
emitting lasers
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Application number
PCT/US1993/003738
Other languages
French (fr)
Inventor
Jack L. Jewell
Gregory R. Olbright
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Bandgap Technology Corporation
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Publication date
Application filed by Bandgap Technology Corporation filed Critical Bandgap Technology Corporation
Priority to JP5518685A priority Critical patent/JPH07506220A/en
Priority to EP93912330A priority patent/EP0637409A1/en
Publication of WO1993021673A1 publication Critical patent/WO1993021673A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42Arrays of surface emitting lasers
    • H01S5/423Arrays of surface emitting lasers having a vertical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/017Head mounted
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/017Head mounted
    • G02B27/0172Head mounted characterised by optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/50Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • G02B2027/014Head-up displays characterised by optical features comprising information/image processing systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18308Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18341Intra-cavity contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
    • H01S5/18388Lenses

Definitions

  • the present invention relates to the field of miniature visual displays and, more particularly, to miniature visual displays that utilize visible emitting vertical-cavity surface-emitting lasers (VCSELs) to project a display within an observer's field of view.
  • VCSELs visible emitting vertical-cavity surface-emitting lasers
  • HMDs helmet-mounted displays
  • miniature visual displays should efficiently deliver an image generated from the display device, typically a cathode ray tube (CRT), to the observer's field of view with 0 minimal or no distortion.
  • CTR cathode ray tube
  • the progress made to date in the miniature visual display and, more particularly, the HMD technology has been primarily in the classical or holographic optics used in the imaging or relaying of the image. See, for example, 5 J. R. Burley et al., "A Full-Color ide-Field-of-View Holographic Helmet Mounted Display for Pilot/Vehicle Interface Development and Human Factors Studies," Proceedings of the SP E. Vol. 1290, pp. 9-15 (1990) .
  • prior art lasers are not suitable for two-dimensional array fabrication or micro-optic integration which is preferred for today's scanning, printing and display applications. This is due to the astigmatic beam quality of conventional semiconductor lasers as well their high divergence which make it prohibitively difficult to project high resolution images within the field of view of the observer without the use of relatively expensive and bulky optics.
  • LCDs liquid crystal displays
  • AC and DC plasma displays thin film electro-luminescence displays
  • vacuum fluorescent displays are other display devices which have also been developed in an effort to replace the dominant image display device.
  • LCDs liquid crystal displays
  • AC and DC plasma displays are other display devices which have also been developed in an effort to replace the dominant image display device.
  • thin film electro-luminescence displays are other display devices which have also been developed in an effort to replace the dominant image display device.
  • vacuum fluorescent displays LCDs
  • LCDs have fundamental shortcomings, particularly for addressing HMD applications.
  • LCDs for example, have a very low efficiency in generating, modulating-, and transmitting light. See, for example, D.L. Jose et al., "An Avionic Grey-Scale Color Head Down Display," Proceedings of the SPIE. Vol. 1289, pp. 74- 98 (1990) .
  • Plasma displays require on the order of approximately 100 volts or more, while the other alternative display devices are difficult to scale down to sizes achievable with either the diode or laser array (approximately 20-40 ⁇ m 2 per element) technology necessary to achieve miniaturization.
  • VLDAs visible .laser diode arrays
  • VCSELs visible emitting vertical-cavity surface-emitting .lasers
  • sweep and sub- scanning techniques are employed to create a full M x M image from 1 x N or N x N arrays of VCSELs, where M is a multiple integer of N.
  • Such scanning techniques advantageously further increase the resolution of the displayed image for a given number of VCSELs by displacing the image of the VCSELs within the field of view of the observer as the VCSELs are simultaneously modulated with the information to be displayed.
  • the VCSELs are contained within a display housing which may be attached to the head of the user by an attachment mechanism or alternatively may be hand held or mounted.
  • the circular symmetry and low divergence of the emitted VCSEL radiation as well as the availability of multiple wavelengths, particularly, red, blue and green, allow high resolution monochrome or color images to be generated. Addressing individual VCSELs within two-dimensional arrays is achieved by utilizing matrix addressing techniques, such as by the use of a row/column addressing geometry.
  • Fig. 1 is a cross-sectional view of a visible emitting vertical-cavity surface-emitting laser (VCSEL) ;
  • VCSEL vertical-cavity surface-emitting laser
  • Fig. 2 is an exemplary VCSEL array display system in accordance with the principles of the invention
  • Fig. 3 is another exemplary VCSEL array
  • Fig. 4 is an illustration of the effective beam positions seen by an observer viewing into the VCSEL array display system of Fig. 3;
  • Fig. 5 is a cross-sectional view of a monolithically integrated VCSEL array and micro- lenslets used in the practice of the present VCSEL array display system;
  • Fig. 6 is an illustration of the effective beam positions seen by an observer viewing into a VCSEL array display system utilizing sub-scanning which improves the image resolution;
  • Fig. 7 is an illustration of the use multiple micro-lenslets with sub-scanning to increase the effective resolution of the display system of the present invention
  • Fig. 8 is a top view of a staggered linear array of VCSELs with electronic drivers fabricated on a different substrate;
  • Fig. 9 is illustration of the effective beam positions seen by an observer viewing into a one- dimensional VCSEL array system utilizing jump scanning
  • Fig. 10 is an illustration of the effective beam positions seen by an observer viewing into a VCSEL array display system utilizing sweep scanning ⁇ i-n conjunction with sub-scanning;
  • Fig. 11 is a top view of a ultra-wide field- of-view helmet mounted display in accordance with the invention.
  • Fig. 12 is a side view of the helmet mounted display of Fig. 11.
  • the present invention is based on utilizing visible emitting vertical-cavity s_urface emitting lasers (VCSELs) to develop a high brightness, high efficient, compact display technology and, more specifically, a VCSEL array display system.
  • VCSELs visible emitting vertical-cavity s_urface emitting lasers
  • the size, structure and nearly-ideal beam qualities of the VCSELs afford high resolution monochrome or color display images, real or virtual, to be placed within an observer's field of view.
  • ⁇ VCSELs are a new class of semiconductor lasers which unlike conventional edge-emitting laser diodes emit laser radiation in a direction perpendicular to the plane of the p-n junction formed therein.
  • VCSELs may now be fabricated to emit visible laser radiation in the range between 0.4 and 0.7 ⁇ m by utilizing an active quantum well region 110 comprising alternating layers of, for example, GalnP and Al-.Ga.. x InP which are sandwiched between two 5 distributed Bragg reflectors (DBRs) or mirrors 120 and ⁇ 130, as illustrated in Fig. 1.
  • DBRs distributed Bragg reflectors
  • VCSELs may be fabricated in one- and/or two-dimensional arrays and may be integrated with micro-optics. With the appropriate selection of materials, each VCSEL can be made to emit laser radiation in different portions of 5 the visible region of the electromagnetic spectrum. The operation and fabrication of these VCSELs are discussed in detail in the above-identified related application and will not be described in detail here for the sake of brevity. 0
  • the basic concept of the VCSEL array display system is illustrated in Fig. 2. It is to be understood, however, that the VCSEL array display system depicted in Fig.
  • the VCSEL array display system which is typically positioned about the observer's head, such as for use as a HMD, comprises an array of VCSELs 200, a lens system 210, and, preferably, a partially transmitting faceplate 220, such as a dichroic filter or mirror.
  • Lens system 210 is placed approximately an effective focal length away from VCSEL array 200 so as to collimate the visible radiation emitted from VCSEL array 200 in order to produce a virtual image of VCSEL array 200 in accordance with well-known optical theory.
  • each laser within VCSEL array 200 may be individually addressed and modulated with the appropriate chroma or monochrome information by driver electronics 230.
  • driver electronics 230 The necessary electrical signals to address and generate the desired light intensity have very low drive currents and voltages that are compatible with analog or digital integrated CMOS and TTL electronic circuits.
  • three-dimensional virtual images can be produced by translating VCSEL ' array 200 or, alternatively, lens system 210 along the optical axis of the system to sweep the virtual image location from infinity to a distance close to the observer.
  • Such translation may be readily accomplished by a translation driver 240 that utilizes mechanical servos or piezoelectric transducers to physically move the array or lens.
  • VCSEL array 200 will be approximately the same as that occupied by the phosphor screens of prior art miniature CRTs, which typically have a dimension of approximately 20 x 20 mm. Accordingly, critical parameters such as the HMD's field of view (FOV) and packaging known in the prior art will remain substantially unaffected by utilizing VCSEL array 200 rather than the conventional CRT or other well known display devices. Moreover, those skilled in the art will know of optical designs and packing means which would further facilitate the use of VCSEL array 200 as a display system suitable for attachment to the head of an observer or for hand-held use. For example, see U.S. Patent Nos. 5,023,905 and 5,048,077 which are incorporated herein by reference.
  • the VCSEL array display of the present invention may be packaged in a display unit having an opening through which the image may be viewed and may be attached to a sidewall of a user's helmet, or a user's eyeglasses.
  • the display system may be attached to a user's belt, with remote display information provided from a computer, pocket calculator, or radio wave transmitter.
  • VCSEL array 200 comprises a two-dimensional M x M array of individually addressable VCSELs.
  • VCSELs within the M x M array may be fabricated to lase either at one predetermined wavelength or at several wavelengths, such as blue, green and red, to produce monochrome or full color images, respectively, in accordance with well known colorimetry theory.
  • the VCSEL array is fabricated using conventional planar JLarge scale integration (LSI) processing techniques, such as molecular beam epitaxy (MBE) , wet chemical etching and the like. More particularly, the two-dimensional array is fabricated by first depositing epitaxially the semiconductor layers of the VCSEL structure and then defining, for example, by optical photolithography and etching a plurality of columns, each a separably addressable VCSEL. Contacts to the VCSELs are formed by conventional deposition techniques wherein, for example, common row and column bus contacts may be formed to individually address each VCSEL, as disclosed in our co-pending application serial No. 07/823,496 entitled "Integration of Transistors With Vertical Cavity Surface Emitting Lasers" filed on January 21, 1992, which is incorporated herein by reference.
  • LSI planar JLarge scale integration
  • MBE molecular beam epitaxy
  • the number of VCSELs in the two-dimensional array will, of course, be dependent on the required resolution as well as the width and length of the displayed image projected to the observer.
  • each VCSEL In comparison to edge-emitting lasers, which are a few hundred microns long by 10 ⁇ m, each VCSEL is approximately 10 ⁇ m in diameter, affording more than twenty-five times more display elements per unit area than prior art display devices.
  • the emitted radiation has a circular symmetry as well as a low divergence which allow low numerical aperture lens system to be employed in generating an enlarged virtual image of the VCSELs.
  • the VCSELs have no inherent astigmatism and can be fabricated as closely-spaced, individually electrically addressable display elements, it will be apparent to those skilled in the art that an enhanced resolution may be achieved.
  • Information is applied to the VCSELs by individually addressing each VCSEL through the use of, for example, a matrix or row/column addressing contacts similar to those used for charged coupled device (CCD) arrays.
  • CCD charged coupled device
  • information is applied to the VCSELs by individually addressing each of the VCSELs through the use of the matrix or row/column addressing geometry, reducing the number of leads from M 2 to 2M. See, for example, M. Orenstein et al., "Matrix-Addressable Vertical Cavity Surface Emitting Laser Array," Electronic Letters. Vol.
  • Associated driver electronics 230 including, for example, shift registers, transistors, and the like, used for addressing and modulating the intensity of the emitted radiation may be integrated on the chip or substrate containing the VCSEL array rather than being located external to the display unit. Such integration further reduces the number of leads, allowing large arrays, e.g., 512 x 512, to be readily fabricated.
  • a M x M display image may be generated from a 1 x M VCSEL array by utilizing a technique known as full-sweep scanning.
  • the full page display is achieved by scanning along one axis the VCSEL's virtual-image position perceived by the observer.
  • the VCSEL array comprises a plurality of linearly-aligned VCSELs having an individual VCSEL or element for each resolution element along one axis. Resolution elements along the other axis are provided by the scanning mechanism discussed in more detail below.
  • a VCSEL array 300 comprises a single vertical column of VCSELs represented by the black dots on the left hand side of Fig. 4. Collimated light output from the array is directed by a lens 310 to, for example, a vibrating mirror 320 of an electro-mechanical scanner 330.
  • Electro-mechanical scanner 330 may be of type disclosed in U.S. Patent No.
  • mirror 320 is vibrated in accordance with control signals from a scanner electronics 350.
  • a scanner electronics 350 By selectively illuminating various lasers within VCSEL array 300 at various points during the vibration of mirror 320, successive columns of pixels or picture elements, i.e. , display points, will be caused to appear within the field of view of the observer.
  • display points are represented in Fig. 4 by the entire two-dimensional array of dots, in which the black dots also represent the image position of radiation from the VCSELs in the absence of scanning and the stippled dots represent the additional display points achieved by scanning.
  • mirror 320 is repetitively oscillated or scanned in the horizontal direction so as to sweep the apparent location of the vertical line of VCSEL array 300 from one edge of the observer's field of view to the other, the observer's eye perceives a full screen of information f as depicted in Fig. 4.
  • mirror 320 is oscillating at approximately 100 Hz so as to create the illusion of a continuous full page or M x M image generated from a 1 x M array. 5
  • VCSEL array 300 is appropriately modulated or electrically excited to selectively emit light for each column within the desired display image.
  • driver electronics may be integrated with the VCSELs.
  • Q Electronic timing ensures that the proper VCSEL for each column or vertical line is illuminated at the correct time during scanning.
  • a miniature visual display and, more particularly, a HMD which utilizes full-sweep scanning is disclosed in 5 U.S. Patent No. 4,934,773, which is incorporated herein by reference.
  • VCSEL array 300 would contain 1024 linearly-aligned VCSELs.
  • VCSELs contemplated for use in this embodiment are approximately 10 ⁇ m in diameter with approximately a 10 ⁇ m space between each VCSEL. 5 It is also possible to use sweep scanning with a VCSEL array which is not linear, such as, for example, with a quasi-linear or staggered array. Those skilled in the art will know how to modify the electronic driver signals to compensate, in this case, 0 for the altered positions of the VCSELs.
  • FIG. 5 depicts an exemplary monolithic integration of a VCSEL array 510 and micro-lenslets 520 which may be used in the practice of the present invention to facilitate the 0 use of various other scanning techniques, such as electro-optic scanning techniques that employ acousto- optic modulators (AOMs) .
  • AOMs acousto- optic modulators
  • micro-lenslets 520 direct the propagation of the radiation emitted by the 5 VCSELs, performing some, if not all, of the imaging functionality of optical lens 310. For instance, micro-lenslets 520 can decrease the beam divergence of the emitted radiation so that lower numerical aperture optical systems can be used for displaying a desired 0 image within the field of view of the observer.
  • they can increase the beam divergence to increase image resolution.
  • a novel sub-scanning technique is employed to create a full M x M display 5 image from a N x N array of VCSELs, where M is a multiple integer of N.
  • Sub-scanning in contrast to sweep scanning, is the real or virtual movement of the VCSEL array within the field of view of the observer by a distance smaller than the inter-element or VCSEL 0 spacing.
  • the solid black dots indicate the position of the image elements of the VCSELs when directly imaged to the observer.
  • the image elements are perceived to be located at those locations represented by the stippled dots to create the illusion that a full page is being displayed.
  • the radiation from the VCSELs is appropriately modulated during the scanning of the VCSEL array.
  • the scanning can also be accomplished by a real image displacement using, for example, piezoelectric transducers.
  • the inter-spacing distance, 1, between each VCSEL is an integer multiple of the spacing, d, between the generated sub-elements or the factor by which the resolution has been improved. It is contemplated that sub-scanning may be achieved by the use of other means, such as piezoelectric transducers, mechanical scanners, acousto-optic modulators and the like.
  • micro-optics may also benefit from the use of micro-optics as well as benefit from their integration with the VCSEL array.
  • the ratio of the inter-element spacing to its beam diameter is approximately 2:1.
  • the utilization of micro-lenslets, such as illustrated in Fig. 5, to focus the radiation output or beamlet from each VCSEL to a reduced spot size increases the inter- element spacing to beam diameter ratio.
  • sub-scanning could hen be used to increase the effective resolution by generating sub- pixels between adjacent VCSELs as discussed above. In contrast, the beam from a light emitting diode cannot be focused effectively to a reduced spot size.
  • lenslet pairs 710 and 720 focus emitted radiation from multiple VCSELs 730a- d to a reduced spot size.
  • the spacing between VCSEL pairs 730a-b and 730c-d is originally a distance, a
  • the spacing after the beamlets traverse through the lenslets pairs is a much smaller distance, b.
  • Sub-scanning may now be used to generate sub- 5 pixels between the imaged VCSELs, which sub-pixels are indicated by the stippled dots. Note that the demagnification factor realized by lenslet pairs 730a- b and 730c-d should be an integer number equal to the number of sub-pixels required to fill the field of
  • a 128 x 128 VCSEL array with a 40 ⁇ m inter-element spacing may be scanned in increments of 5 ⁇ m up to the
  • the information to be displayed may initially be
  • a data storage device such as RAM, ROM, EPROM and the like, which are well known in the art, when a limited set of information needs to be selectively provided to the observer. Otherwise, and for most applications requiring information which varies with time, new information to be displayed may be applied to the VCSELs during the end of a frame, such as at the end of a scan.
  • New information to be displayed may also be directly applied to each VCSEL to create a full display as discussed above by individually addressing each VCSEL without the use of matrix addressing.
  • the N x N VCSEL array may alternatively comprise rows of VCSELs which are staggered in order to compensate for gaps between the devices.
  • Fig. 8 depicts a portion of a staggered linear array of
  • VCSELs 810 having wirebonds to electronic drivers 820 which may be fabricated on a different substrate.
  • the VCSEL array and electronic drivers may alternatively be fabricated on the same substrate to eliminate the need for wire bonding as disclosed in our pending application serial No. 07/823,496.
  • Driver electronics 820 include transistors, such as FETs, bipolar transistors, and the like. In general, the structures disclosed in the above-identified application may be used in the practice of the present invention.
  • one-dimensional sub-scanning may be utilized for laser printing applications, such as a 3600 dots-p_er-inch (dpi) printer covering a 20 x 75 inch area.
  • a 20 inch linear VCSEL array having 300 VCSELs per inch can be sub-scanned in one dimension such that each VCSEL controls the illumination at 12 points (pixels) in a line to achieve the desired 3600 dpi resolution.
  • Advancing the printing material in the other dimension allows printing in that dimension.
  • An alternative to one-dimensional sub- scanning is to translate a one-dimensional array of VLDAs, such as of the VCSEL type, by a distance equal to a multiple integer length of the array size plus
  • a VCSEL array 850 comprising three groups 860a-c of a 1 x 4 VCSEL sub-arrays is scanned by stepping the arrays through the image in multiple illumination phases.
  • the arrays control the illumination Q of display points 870a-c.
  • radiation from arrays 860a-c is translated, such as by electro-mechanical means, to the positions indicated by stippled dots 870a'-c", respectively.
  • the VCSELs are accordingly modulated with appropriate monochrome 5 or chroma information corresponding to their translated positions to generate new effective resolution elements or pixels.
  • a 16 x 16 display image may be generated from 1 4 VCSEL array by sweep scanning along a horizontal axis 910 and sub- scanning along a vertical axis 920.
  • the inter-element spacing, y, between VCSELs is such that 3 sub- positions are generated therebetween by displacing the virtual image of the VCSELs in repeated increments.
  • the virtual image perceived by the observer is displaced in increments corresponding to the desired sub-position spacing, x, up to a distance corresponding to 16 pixels.
  • the virtual image is displaced in increments of the desired sub-position spacing, x, but only up to a distance corresponding to the inter-element VCSEL spacing, y.
  • a unique aspect of the present invention is the ability to generate a full color display.
  • three different types of VCSELs are needed in a single array, each of which types emits light at a different wavelength such as a green, blue and red, in order to provide color visual images.
  • each row of VCSELs in the array comprises VCSELs of only one type and the colors emitted by such rows alternate in regular fashion. The rows themselves may be staggered to eliminate the gaps between each VCSEL.
  • the appropriate chroma data is applied to each row of VCSELs, but at slightly different time intervals.
  • the output from each set of three adjacent rows of different color VCSELs is imaged to the same line within the virtual image so as to produce a color display in accordance with well known colorimetry theory.
  • Approximate ranges for the green, red and blue wavelengths are 610-630 nm, 514-554 nm, and 440- 470 nm, respectively. These wavelength ranges satisfactorily provide the full color spectrum and are within the operating range of the VCSELs disclosed in our co-pending application serial No. 07/790,964. More specifically, alternating layers of GalnP and Al-.Ga-_-.InP within the active region may be used to generate radiation in the red region; alternating layers of GalnP and Al-pa ⁇ P within the active region may be used to generate radiation in the green region; and alternating layers of Al y Ga-. y N and Al x Ga-. x N within the active region may be used to generate radiation in the blue region.
  • 605 nm, 554 nm and 460 nm will be used as the wavelengths for the red, green, and blue radiation, respectively, because these wavelengths provide the highest efficiency for producing white light. Utilizing longer wavelengths above 605 nm as the red source requires greater red light intensity in order to maintain the same irradiance.
  • Partially transmissive reflectors may further be used to direct the color display image within the field of view of the observer. These reflectors may be fabricated with enhanced reflectivities at the radiation wavelengths of the VCSELs to minimize the required optical power. Moreover, the reflectivities elsewhere may be minimized (i.e., high transmissivity) to maximize outside viewing of external information.
  • VCSELs may be also integrated with, or even replaced by, other display devices, such as visible diode lasers or superluminescent .light emitting diodes (SLEDs) to further augment and/or complement the applicability of the present inventive VCSEL array display system.
  • SLEDs light emitting diodes
  • a SLED is a light emitting diode (LED) whose efficiency and emission directionality are enhanced by the addition of a partial cavity.
  • SLEDs can be constructed very similarly to VCSELs using standard planar LSI processing techniques.
  • VCSELs will be integrated with SLED and/or LEDs.
  • sweep scanning in conjunction with sub-scanning may further be utilized to realize a HMD having a ultra-wide field-of-view. More specifically, the sweep scanning is implemented by using a rotating polygonal mirror to achieve fields of view near 180 degrees. Rotating polygonal mirrors are advantageously more robust than vibrating mirrors and, moreover, afford one the capability to exploit the nearly circular symmetry field-of-view of HMDs. Shown in Figs. 11 and 12 are top and side views, respectively, of a ultra-wide field-of-view HMD which utilizes the principles of the present invention.
  • Polygonal mirror 920 rotates about a vertical axis to sweep the apparent location of a VCSEL array 910 from one edge of the observer's field of view to the other, as previously illustrated in Fig. 4.
  • a 180 degree field-of-view may be achieved by a 90-120 degree rotation of polygonal mirror 920 with the appropriate number of sides.
  • the VCSEL array advantageously is a linear array oriented in a vertical direction so that it is parallel to the axis of rotation of mirror 920.
  • a cylindrical lens 930 located near the upper portion of the HMD or forehead of the observer expands the emitted radiation from VCSEL array 910 along the horizontal axis. The beam expansion is sufficient to fill the pupil aperture of both eyes of the observer to achieve full binocular display. Either an appropriate horizontal curvature on polygonal mirror
  • a multiplicity of cylindrical lenses may, however, be used to replace single cylindrical lens 930.
  • a concave partial reflector 940 which is preferably 50-75 mm from the observer' pupils, produces a virtual image of VCSEL array 910 within the field of view of the observer in accordance with well known optical theory. Appropriately addressing and modulating each individual VCSEL in conjunction with sweep scanning then presents a full panorama display to the observer. Note that since radiation from each VCSEL traverses through only a small portion of the system, the system components do not introduce any substantial optical aberrations. Thus, resolution better than one cycle per mrad may be accomplished over the entire field-of-view with only a small number of optical components.
  • both polygonal mirror 920 and partial reflector 940 is used to tailor the vertical beam characteristics of the emitted radiation.
  • Cylindrical lens 930 and the horizontal curvature of concave partial reflector 940 tailor the horizontal shape or beam characteristics of the emitted radiation. In this manner, the emitted radiation can be properly directed into, for example, 180 degree field-of-view.
  • VCSEL arrays 910, 950 and 960 may be placed at different positions around rotating mirror 920, where array 910 emits red radiation, array 950 emits green radiation and array 960 emits blue radiation. Radiation from each array, of course, would be synchronized to generate a color image in accordance with well known colorimetry theory.
  • Each side of rotating mirror 920 further could be tilted vertically with respect to each other so that each side sweeps out a unique set of horizontal pixels.
  • each side having a slight vertical tilt, sub-scanning as described hereinabove may be realized in the vertical direction to effectively increase the vertical resolution by a factor of four.
  • a display resolution of 1024 elements in the vertical direction could be accomplished by utilizing a single array having only 256 VCSELs. Note that this latter scheme effectively combines sub-scanning and sweep scanning techniques to produce extremely high resolution display images over a ultra-wide field-of- view with a minimum number of VCSELs.
  • head- own displays for cockpit environments may also be constructed utilizing the principles of the invention in which a real image is projected from the VCSEL array onto a screen for viewing by an observer.
  • simulators may also be constructed employing a combination of virtual-image and real-image displays.

Abstract

A visual display system is disclosed which utilizes one- and/or two-dimensional arrays of visible emitting vertical-cavity surface-emitting lasers (VCSELs) (200) in order to provide a desired visual display within an observer's field of view (220). Sweep and subscanning techniques are employed, individually or in combination, to create a full M x N image from 1 x L or K x L arrays of VCSELs, where M and N are multiple integers of K and L, respectively. Preferably, the VCSELs (200) are contained within a display housing which may be attached to the head of the user by an attachment mechanism or may alternatively be hand held or mounted to a surface. The circular symmetry and low divergence of the emitted VCSEL radiation as well as the availability of multiple wavelengths, particularly, red, blue, and green, allow high resolution monochrome or color images to be generated.

Description

VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAY DISPLAY SYSTEM
CROSS-REFERENCE TO RELATED APPLICATION This application is related to our co- pending application serial No. 07/790,964 entitled "Visible Light Surface Emitting Semiconductor Laser" filed on November 7, 1991, which is incorporated herein by reference.
FIELD OF THE INVENTION The present invention relates to the field of miniature visual displays and, more particularly, to miniature visual displays that utilize visible emitting vertical-cavity surface-emitting lasers (VCSELs) to project a display within an observer's field of view.
BACKGROUND OF THE INVENTION Because of the human visual sensory system's enormous capacity to absorb and process information, visual displays are extremely effective in displaying a variety of information formats, such as, for example, moving sceneries, alphanumeric characters, maps, graphs, and targeting data, all of which may be superimposed on an observer's normal field of vision. Particularly, tactical military operations requiring highly complex series of tasks to be performed in unpredictable environments greatly benefit from the use of miniature visual displays, such as head-up, direct view, or helmet-mounted displays. For instance, tactical aircraft personnel are now being equipped with helmet-mounted displays (HMDs) which allow a miniature visual display system to be held on the head of the observer so as to project a display within the observer's field of vision. In the commercial sector, high-resolution HMDs can provide a "virtual reality" for entertainment and education.
In the last decade, a vast amount of effort
5 has been expended to develop compact, lightweight visual displays, such as HMDs. Desirably, miniature visual displays should efficiently deliver an image generated from the display device, typically a cathode ray tube (CRT), to the observer's field of view with 0 minimal or no distortion. Unfortunately, the progress made to date in the miniature visual display and, more particularly, the HMD technology has been primarily in the classical or holographic optics used in the imaging or relaying of the image. See, for example, 5 J. R. Burley et al., "A Full-Color ide-Field-of-View Holographic Helmet Mounted Display for Pilot/Vehicle Interface Development and Human Factors Studies," Proceedings of the SP E. Vol. 1290, pp. 9-15 (1990) .
Very little progress has, in fact, been made 0 in developing compact, high brightness, high contrast, low power CRTs. Accordingly, the lack of suitable compact CRTs severely limited the applicability of miniature visual displays, leading to the development of miniature display systems which utilized other 5 suitable display devices.
One such display system is disclosed in U.S. Patent No. 5,003,330, which is incorporated herein by reference. This display, system utilizes a diode array fixed within a helmet-visor structure. Although these 0 diode arrays perform acceptably in the helmet, they have not been completely satisfactory for displaying high resolution and/or color display images. Linear diode arrays and even diode laser arrays required to achieve such improvements are either not available at
•3C the desired visible wavelengths for color display images or not available in the array sizes required for color or high resolution miniature visual display applications.
Further, prior art lasers are not suitable for two-dimensional array fabrication or micro-optic integration which is preferred for today's scanning, printing and display applications. This is due to the astigmatic beam quality of conventional semiconductor lasers as well their high divergence which make it prohibitively difficult to project high resolution images within the field of view of the observer without the use of relatively expensive and bulky optics.
Other display devices which have also been developed in an effort to replace the dominant image display device, include, for example, liquid crystal displays (LCDs), AC and DC plasma displays, thin film electro-luminescence displays, and vacuum fluorescent displays. Each of these alternative technologies, however, has fundamental shortcomings, particularly for addressing HMD applications. LCDs, for example, have a very low efficiency in generating, modulating-, and transmitting light. See, for example, D.L. Jose et al., "An Avionic Grey-Scale Color Head Down Display," Proceedings of the SPIE. Vol. 1289, pp. 74- 98 (1990) . Plasma displays, on the other hand, require on the order of approximately 100 volts or more, while the other alternative display devices are difficult to scale down to sizes achievable with either the diode or laser array (approximately 20-40 μm2 per element) technology necessary to achieve miniaturization.
To date, therefore, the size, nature and/or availability of wavelengths for display devices have limited the practicality and utility of miniature visual displays.
It is therefore an object of the present invention to provide a visual display system that utilizes compact, solid state, high efficient, high brightness, and high contrast display devices for providing monochrome as well as full color displays to an observer's field of view.
It is a further object of the present invention to provide a miniature visual display system that provides a high resolution color image of visual information and is suitable for a broad range of consumer, industrial, business, medical and military applications. It is still a further object of the present invention to provide a miniature visual display system or technology that is compatible with the existing classical and holographic optics and which utilizes a display device that is superior to the prior art display devices to achieve a higher resolution.
SUMMARY OF THE INVENTION These and other objects are achieved in accordance with the invention in a miniature visual display system that utilizes visible .laser diode arrays (VLDAs) and, more preferably, that utilizes one- and/or two-dimensional arrays of visible emitting vertical-cavity surface-emitting .lasers (VCSELs) in order to provide a desired visual display within an observer's field of view.
In preferred embodiments, sweep and sub- scanning techniques, individually or in combination, are employed to create a full M x M image from 1 x N or N x N arrays of VCSELs, where M is a multiple integer of N. Such scanning techniques advantageously further increase the resolution of the displayed image for a given number of VCSELs by displacing the image of the VCSELs within the field of view of the observer as the VCSELs are simultaneously modulated with the information to be displayed.
Preferably, the VCSELs are contained within a display housing which may be attached to the head of the user by an attachment mechanism or alternatively may be hand held or mounted. Advantageously, the circular symmetry and low divergence of the emitted VCSEL radiation as well as the availability of multiple wavelengths, particularly, red, blue and green, allow high resolution monochrome or color images to be generated. Addressing individual VCSELs within two-dimensional arrays is achieved by utilizing matrix addressing techniques, such as by the use of a row/column addressing geometry.
BRIEF DESCRIPTION OF THE DRAWING A more complete understanding of the invention may be obtained by reading the following description in conjunction with the appended drawings in which:
Fig. 1 is a cross-sectional view of a visible emitting vertical-cavity surface-emitting laser (VCSEL) ;
Fig. 2 is an exemplary VCSEL array display system in accordance with the principles of the invention; Fig. 3 is another exemplary VCSEL array
"display system illustrating the use of full-sweep scanning;
Fig. 4 is an illustration of the effective beam positions seen by an observer viewing into the VCSEL array display system of Fig. 3; Fig. 5 is a cross-sectional view of a monolithically integrated VCSEL array and micro- lenslets used in the practice of the present VCSEL array display system; Fig. 6 is an illustration of the effective beam positions seen by an observer viewing into a VCSEL array display system utilizing sub-scanning which improves the image resolution;
Fig. 7 is an illustration of the use multiple micro-lenslets with sub-scanning to increase the effective resolution of the display system of the present invention;
Fig. 8 is a top view of a staggered linear array of VCSELs with electronic drivers fabricated on a different substrate;
Fig. 9 is illustration of the effective beam positions seen by an observer viewing into a one- dimensional VCSEL array system utilizing jump scanning; Fig. 10 is an illustration of the effective beam positions seen by an observer viewing into a VCSEL array display system utilizing sweep scanning~i-n conjunction with sub-scanning;
Fig. 11 is a top view of a ultra-wide field- of-view helmet mounted display in accordance with the invention; and
Fig. 12 is a side view of the helmet mounted display of Fig. 11.
DETAILED DESCRIPTION
The present invention is based on utilizing visible emitting vertical-cavity s_urface emitting lasers (VCSELs) to develop a high brightness, high efficient, compact display technology and, more specifically, a VCSEL array display system. Particularly, the size, structure and nearly-ideal beam qualities of the VCSELs afford high resolution monochrome or color display images, real or virtual, to be placed within an observer's field of view. ϋ VCSELs are a new class of semiconductor lasers which unlike conventional edge-emitting laser diodes emit laser radiation in a direction perpendicular to the plane of the p-n junction formed therein. As disclosed in our co-pending application serial No. 07/790,964, VCSELs may now be fabricated to emit visible laser radiation in the range between 0.4 and 0.7 μm by utilizing an active quantum well region 110 comprising alternating layers of, for example, GalnP and Al-.Ga..xInP which are sandwiched between two 5 distributed Bragg reflectors (DBRs) or mirrors 120 and ^ 130, as illustrated in Fig. 1.
In operation, injection current is typically confined within active region 110 by the use of annular shaped proton implanted regions 140 to achieve 0 stimulated emission. Importantly, VCSELs may be fabricated in one- and/or two-dimensional arrays and may be integrated with micro-optics. With the appropriate selection of materials, each VCSEL can be made to emit laser radiation in different portions of 5 the visible region of the electromagnetic spectrum. The operation and fabrication of these VCSELs are discussed in detail in the above-identified related application and will not be described in detail here for the sake of brevity. 0 The basic concept of the VCSEL array display system is illustrated in Fig. 2. It is to be understood, however, that the VCSEL array display system depicted in Fig. 2 is for the purpose of illustration only and not for the purpose of 5 limitation. The VCSEL array display system, which is typically positioned about the observer's head, such as for use as a HMD, comprises an array of VCSELs 200, a lens system 210, and, preferably, a partially transmitting faceplate 220, such as a dichroic filter or mirror. Lens system 210 is placed approximately an effective focal length away from VCSEL array 200 so as to collimate the visible radiation emitted from VCSEL array 200 in order to produce a virtual image of VCSEL array 200 in accordance with well-known optical theory. At any instant in time, an observer looking into faceplate 220 sees simultaneously a virtual image of VCSEL array 200 as well as external visual information that is directed toward faceplate 220. In displaying the desired image to the observer, each laser within VCSEL array 200 may be individually addressed and modulated with the appropriate chroma or monochrome information by driver electronics 230. The necessary electrical signals to address and generate the desired light intensity have very low drive currents and voltages that are compatible with analog or digital integrated CMOS and TTL electronic circuits.
Additionally, three-dimensional virtual images can be produced by translating VCSEL'array 200 or, alternatively, lens system 210 along the optical axis of the system to sweep the virtual image location from infinity to a distance close to the observer. Such translation may be readily accomplished by a translation driver 240 that utilizes mechanical servos or piezoelectric transducers to physically move the array or lens.
It is anticipated that the space occupied by VCSEL array 200 will be approximately the same as that occupied by the phosphor screens of prior art miniature CRTs, which typically have a dimension of approximately 20 x 20 mm. Accordingly, critical parameters such as the HMD's field of view (FOV) and packaging known in the prior art will remain substantially unaffected by utilizing VCSEL array 200 rather than the conventional CRT or other well known display devices. Moreover, those skilled in the art will know of optical designs and packing means which would further facilitate the use of VCSEL array 200 as a display system suitable for attachment to the head of an observer or for hand-held use. For example, see U.S. Patent Nos. 5,023,905 and 5,048,077 which are incorporated herein by reference. For instance, the VCSEL array display of the present invention may be packaged in a display unit having an opening through which the image may be viewed and may be attached to a sidewall of a user's helmet, or a user's eyeglasses. Alternatively, the display system may be attached to a user's belt, with remote display information provided from a computer, pocket calculator, or radio wave transmitter.
In one embodiment, VCSEL array 200 comprises a two-dimensional M x M array of individually addressable VCSELs. VCSELs within the M x M array may be fabricated to lase either at one predetermined wavelength or at several wavelengths, such as blue, green and red, to produce monochrome or full color images, respectively, in accordance with well known colorimetry theory.
The VCSEL array is fabricated using conventional planar JLarge scale integration (LSI) processing techniques, such as molecular beam epitaxy (MBE) , wet chemical etching and the like. More particularly, the two-dimensional array is fabricated by first depositing epitaxially the semiconductor layers of the VCSEL structure and then defining, for example, by optical photolithography and etching a plurality of columns, each a separably addressable VCSEL. Contacts to the VCSELs are formed by conventional deposition techniques wherein, for example, common row and column bus contacts may be formed to individually address each VCSEL, as disclosed in our co-pending application serial No. 07/823,496 entitled "Integration of Transistors With Vertical Cavity Surface Emitting Lasers" filed on January 21, 1992, which is incorporated herein by reference.
The number of VCSELs in the two-dimensional array will, of course, be dependent on the required resolution as well as the width and length of the displayed image projected to the observer.
In comparison to edge-emitting lasers, which are a few hundred microns long by 10 μm, each VCSEL is approximately 10 μm in diameter, affording more than twenty-five times more display elements per unit area than prior art display devices. Importantly, the emitted radiation has a circular symmetry as well as a low divergence which allow low numerical aperture lens system to be employed in generating an enlarged virtual image of the VCSELs. Also, since the VCSELs have no inherent astigmatism and can be fabricated as closely-spaced, individually electrically addressable display elements, it will be apparent to those skilled in the art that an enhanced resolution may be achieved. Information is applied to the VCSELs by individually addressing each VCSEL through the use of, for example, a matrix or row/column addressing contacts similar to those used for charged coupled device (CCD) arrays. Fully addressing a M x M array of display devices electronically requires M2 leads. which is prohibitively impractical at array sizes much larger than 16 x 16 (256 leads) . Accordingly, information is applied to the VCSELs by individually addressing each of the VCSELs through the use of the matrix or row/column addressing geometry, reducing the number of leads from M2 to 2M. See, for example, M. Orenstein et al., "Matrix-Addressable Vertical Cavity Surface Emitting Laser Array," Electronic Letters. Vol. 27, pp.437-438 (1991), which is incorporated herein by reference. Associated driver electronics 230, including, for example, shift registers, transistors, and the like, used for addressing and modulating the intensity of the emitted radiation may be integrated on the chip or substrate containing the VCSEL array rather than being located external to the display unit. Such integration further reduces the number of leads, allowing large arrays, e.g., 512 x 512, to be readily fabricated.
If the number of elements in the VCSEL array matches the required resolution of the displayed image, no scanning other than the electronic addressing is necessary. However, to increase the resolution for given number of VCSELs or to reduce the number of VCSELs needed to achieve a desired resolution, various scanning techniques may be employed. More particularly, those skilled in the art will appreciate that scanning allows a full page display to be created from a much smaller number of display devices than is necessary to generate the full page display, whether for a real or virtual image. For example, a M x M display image may be generated from a 1 x M VCSEL array by utilizing a technique known as full-sweep scanning. The full page display is achieved by scanning along one axis the VCSEL's virtual-image position perceived by the observer. In this type of scanning, the VCSEL array comprises a plurality of linearly-aligned VCSELs having an individual VCSEL or element for each resolution element along one axis. Resolution elements along the other axis are provided by the scanning mechanism discussed in more detail below. Referring to both Figs. 3 and 4, a VCSEL array 300 comprises a single vertical column of VCSELs represented by the black dots on the left hand side of Fig. 4. Collimated light output from the array is directed by a lens 310 to, for example, a vibrating mirror 320 of an electro-mechanical scanner 330. Electro-mechanical scanner 330 may be of type disclosed in U.S. Patent No. 4,902,083, which is incorporated herein by reference, in which mirror 320 is vibrated in accordance with control signals from a scanner electronics 350. By selectively illuminating various lasers within VCSEL array 300 at various points during the vibration of mirror 320, successive columns of pixels or picture elements, i.e. , display points, will be caused to appear within the field of view of the observer. These display points are represented in Fig. 4 by the entire two-dimensional array of dots, in which the black dots also represent the image position of radiation from the VCSELs in the absence of scanning and the stippled dots represent the additional display points achieved by scanning. At any instance in time the observer sees only one column or vertical line of VCSEL array 300, but because mirror 320 is repetitively oscillated or scanned in the horizontal direction so as to sweep the apparent location of the vertical line of VCSEL array 300 from one edge of the observer's field of view to the other, the observer's eye perceives a full screen of informationf as depicted in Fig. 4. Typically, mirror 320 is oscillating at approximately 100 Hz so as to create the illusion of a continuous full page or M x M image generated from a 1 x M array. 5 Of course, the vertical line or column of
VCSEL array 300 is appropriately modulated or electrically excited to selectively emit light for each column within the desired display image. Such driver electronics may be integrated with the VCSELs. Q Electronic timing ensures that the proper VCSEL for each column or vertical line is illuminated at the correct time during scanning. One example of a miniature visual display and, more particularly, a HMD which utilizes full-sweep scanning is disclosed in 5 U.S. Patent No. 4,934,773, which is incorporated herein by reference.
The number of VCSELs in the linear array will be dependent on, for example, the width of the desired image to be displayed to the observer. In one 0 preferred embodiment, for a 1024 x 1024 display, VCSEL array 300 would contain 1024 linearly-aligned VCSELs. VCSELs contemplated for use in this embodiment are approximately 10 μm in diameter with approximately a 10 μm space between each VCSEL. 5 It is also possible to use sweep scanning with a VCSEL array which is not linear, such as, for example, with a quasi-linear or staggered array. Those skilled in the art will know how to modify the electronic driver signals to compensate, in this case, 0 for the altered positions of the VCSELs.
Other scanning techniques which may be more stable are also contemplated. These techniques, for example, involve the use of micro-optics which is readily integrated with the VCSEL array. The formation of sub-millimeter diameter lenslets as well as the formation of waveguides on the substrate containing the VCSEL array, for example, improve the performance, light efficiency, surface scattering, wavelength sensitivity and beam divergence of the
5 display, all of which decreases the size, weight, and complexity of the imaging systems. Fig. 5 depicts an exemplary monolithic integration of a VCSEL array 510 and micro-lenslets 520 which may be used in the practice of the present invention to facilitate the 0 use of various other scanning techniques, such as electro-optic scanning techniques that employ acousto- optic modulators (AOMs) . Those skilled in the art will particularly note that micro-lenslets 520 direct the propagation of the radiation emitted by the 5 VCSELs, performing some, if not all, of the imaging functionality of optical lens 310. For instance, micro-lenslets 520 can decrease the beam divergence of the emitted radiation so that lower numerical aperture optical systems can be used for displaying a desired 0 image within the field of view of the observer.
Alternatively, they can increase the beam divergence to increase image resolution.
In another embodiment, a novel sub-scanning technique is employed to create a full M x M display 5 image from a N x N array of VCSELs, where M is a multiple integer of N. Sub-scanning, in contrast to sweep scanning, is the real or virtual movement of the VCSEL array within the field of view of the observer by a distance smaller than the inter-element or VCSEL 0 spacing. Referring to Fig. 6, the solid black dots indicate the position of the image elements of the VCSELs when directly imaged to the observer. When each image element displayed to the observer is scanned along horizontal and vertical axes 610 and
35 620, respectively, the image elements are perceived to be located at those locations represented by the stippled dots to create the illusion that a full page is being displayed. As with sweep scanning, the radiation from the VCSELs is appropriately modulated during the scanning of the VCSEL array. The scanning can also be accomplished by a real image displacement using, for example, piezoelectric transducers.
Typically, the inter-spacing distance, 1, between each VCSEL is an integer multiple of the spacing, d, between the generated sub-elements or the factor by which the resolution has been improved. It is contemplated that sub-scanning may be achieved by the use of other means, such as piezoelectric transducers, mechanical scanners, acousto-optic modulators and the like.
These scanning techniques may also benefit from the use of micro-optics as well as benefit from their integration with the VCSEL array. For example, typically the ratio of the inter-element spacing to its beam diameter is approximately 2:1. The utilization of micro-lenslets, such as illustrated in Fig. 5, to focus the radiation output or beamlet from each VCSEL to a reduced spot size increases the inter- element spacing to beam diameter ratio. , Advantageously, sub-scanning could hen be used to increase the effective resolution by generating sub- pixels between adjacent VCSELs as discussed above. In contrast, the beam from a light emitting diode cannot be focused effectively to a reduced spot size. Rather than utilizing micro-lenslets, larger lenslets which collect light from multiple VCSELs can be used in conjunction with the above sub-scanning techniques. As shown in Fig. 7, lenslet pairs 710 and 720 focus emitted radiation from multiple VCSELs 730a- d to a reduced spot size. Whereas the spacing between VCSEL pairs 730a-b and 730c-d is originally a distance, a, the spacing after the beamlets traverse through the lenslets pairs is a much smaller distance, b. Sub-scanning may now be used to generate sub- 5 pixels between the imaged VCSELs, which sub-pixels are indicated by the stippled dots. Note that the demagnification factor realized by lenslet pairs 730a- b and 730c-d should be an integer number equal to the number of sub-pixels required to fill the field of
-jQ view of the observer or the space between the imaged VCSEL points. Utilization of a single macro-lens, in contrast, does not increase the effective resolution. Although the macro-lens would decrease the spot size, it would also decrease the inter-element spacing by
15 the same factor. That is, the ratio of the inter- element spacing to spot diameter remains unchanged. Utilization of sub-scanning cannot therefore be used to increase the resolution to its maximum possible extent where a single micro-lens is employed.
20 I is to be understood for the above sub- scanning technique that the scanning lengths along each axis do not have to be symmetric. By utilizing different scanning lengths it is possible to generate in general a M x N array display image from a K x L
25 VCSEL array, where M and N are multiple integers of K and L, respectively.
As an example of a sub-scanning system, a 128 x 128 VCSEL array with a 40 μm inter-element spacing may be scanned in increments of 5 μm up to the
30 maximum distance of 35 μm in both axes to achieve a T.024 x 1024 image (7 sub-positions in each axis between adjacent VCSEL elements) .
In the above embodiments, it is contemplated that the information to be displayed may initially be
35 stored in a data storage device such as RAM, ROM, EPROM and the like, which are well known in the art, when a limited set of information needs to be selectively provided to the observer. Otherwise, and for most applications requiring information which varies with time, new information to be displayed may be applied to the VCSELs during the end of a frame, such as at the end of a scan.
New information to be displayed may also be directly applied to each VCSEL to create a full display as discussed above by individually addressing each VCSEL without the use of matrix addressing. Furthermore, the N x N VCSEL array may alternatively comprise rows of VCSELs which are staggered in order to compensate for gaps between the devices. Fig. 8 depicts a portion of a staggered linear array of
VCSELs 810 having wirebonds to electronic drivers 820 which may be fabricated on a different substrate. The VCSEL array and electronic drivers may alternatively be fabricated on the same substrate to eliminate the need for wire bonding as disclosed in our pending application serial No. 07/823,496. Driver electronics 820 include transistors, such as FETs, bipolar transistors, and the like. In general, the structures disclosed in the above-identified application may be used in the practice of the present invention.
In one example, one-dimensional sub-scanning may be utilized for laser printing applications, such as a 3600 dots-p_er-inch (dpi) printer covering a 20 x 75 inch area. A 20 inch linear VCSEL array having 300 VCSELs per inch can be sub-scanned in one dimension such that each VCSEL controls the illumination at 12 points (pixels) in a line to achieve the desired 3600 dpi resolution. Advancing the printing material in the other dimension allows printing in that dimension. An alternative to one-dimensional sub- scanning is to translate a one-dimensional array of VLDAs, such as of the VCSEL type, by a distance equal to a multiple integer length of the array size plus
5 one inter-pixel distance. As shown in Fig. 9, a VCSEL array 850 comprising three groups 860a-c of a 1 x 4 VCSEL sub-arrays is scanned by stepping the arrays through the image in multiple illumination phases. In the first phase, the arrays control the illumination Q of display points 870a-c. For the second phase, radiation from arrays 860a-c is translated, such as by electro-mechanical means, to the positions indicated by stippled dots 870a'-c", respectively. The VCSELs are accordingly modulated with appropriate monochrome 5 or chroma information corresponding to their translated positions to generate new effective resolution elements or pixels. Then, in the third phase, radiation from arrays 860a-σ is stepped or translated to positions 870a"-c", respectively. This 0 stepping or "jump" technique effectively produces 4 additionally pixels for each translation or step. Here, 8 additional pixels are produced for each of sub-arrays 860a-c. This particular type of scanning, referred to as "jump" scanning, may also be used for 5 laser printing applications. For example, if 6000 lasers on 60 chips of 100 lasers each would be required to achieve a desired resolution, then the same task could be done using 10 chips of 100 lasers each by performing 6 "jumps" or repeated translations. 0 Two-dimensional display images may also be generated by combining both sweep scanning and sub- scanning techniques. Referring to Fig. 10, a 16 x 16 display image may be generated from 1 4 VCSEL array by sweep scanning along a horizontal axis 910 and sub- scanning along a vertical axis 920. The inter-element spacing, y, between VCSELs is such that 3 sub- positions are generated therebetween by displacing the virtual image of the VCSELs in repeated increments. Along horizontal axis 910 the virtual image perceived by the observer is displaced in increments corresponding to the desired sub-position spacing, x, up to a distance corresponding to 16 pixels. Along vertical axis 920, however, the virtual image is displaced in increments of the desired sub-position spacing, x, but only up to a distance corresponding to the inter-element VCSEL spacing, y.
A unique aspect of the present invention is the ability to generate a full color display. In one embodiment of a full-color display, three different types of VCSELs are needed in a single array, each of which types emits light at a different wavelength such as a green, blue and red, in order to provide color visual images. Illustratively, each row of VCSELs in the array comprises VCSELs of only one type and the colors emitted by such rows alternate in regular fashion. The rows themselves may be staggered to eliminate the gaps between each VCSEL.
Under the control of timing and control circuitry, the appropriate chroma data is applied to each row of VCSELs, but at slightly different time intervals. As a result, the output from each set of three adjacent rows of different color VCSELs is imaged to the same line within the virtual image so as to produce a color display in accordance with well known colorimetry theory.
Approximate ranges for the green, red and blue wavelengths are 610-630 nm, 514-554 nm, and 440- 470 nm, respectively. These wavelength ranges satisfactorily provide the full color spectrum and are within the operating range of the VCSELs disclosed in our co-pending application serial No. 07/790,964. More specifically, alternating layers of GalnP and Al-.Ga-_-.InP within the active region may be used to generate radiation in the red region; alternating layers of GalnP and Al-pa^P within the active region may be used to generate radiation in the green region; and alternating layers of AlyGa-.yN and AlxGa-.xN within the active region may be used to generate radiation in the blue region. Preferably, 605 nm, 554 nm and 460 nm will be used as the wavelengths for the red, green, and blue radiation, respectively, because these wavelengths provide the highest efficiency for producing white light. Utilizing longer wavelengths above 605 nm as the red source requires greater red light intensity in order to maintain the same irradiance. X ~~
Partially transmissive reflectors may further be used to direct the color display image within the field of view of the observer. These reflectors may be fabricated with enhanced reflectivities at the radiation wavelengths of the VCSELs to minimize the required optical power. Moreover, the reflectivities elsewhere may be minimized (i.e., high transmissivity) to maximize outside viewing of external information.
In accordance with the principles of the invention, VCSELs may be also integrated with, or even replaced by, other display devices, such as visible diode lasers or superluminescent .light emitting diodes (SLEDs) to further augment and/or complement the applicability of the present inventive VCSEL array display system. Those skilled in the art will know that a SLED is a light emitting diode (LED) whose efficiency and emission directionality are enhanced by the addition of a partial cavity. SLEDs can be constructed very similarly to VCSELs using standard planar LSI processing techniques. In accordance with the principles of inventions, it is contemplated that VCSELs will be integrated with SLED and/or LEDs.
In another embodiment, sweep scanning in conjunction with sub-scanning may further be utilized to realize a HMD having a ultra-wide field-of-view. More specifically, the sweep scanning is implemented by using a rotating polygonal mirror to achieve fields of view near 180 degrees. Rotating polygonal mirrors are advantageously more robust than vibrating mirrors and, moreover, afford one the capability to exploit the nearly circular symmetry field-of-view of HMDs. Shown in Figs. 11 and 12 are top and side views, respectively, of a ultra-wide field-of-view HMD which utilizes the principles of the present invention. Polygonal mirror 920 rotates about a vertical axis to sweep the apparent location of a VCSEL array 910 from one edge of the observer's field of view to the other, as previously illustrated in Fig. 4. A 180 degree field-of-view may be achieved by a 90-120 degree rotation of polygonal mirror 920 with the appropriate number of sides. For this arrangement the VCSEL array advantageously is a linear array oriented in a vertical direction so that it is parallel to the axis of rotation of mirror 920. A cylindrical lens 930 located near the upper portion of the HMD or forehead of the observer expands the emitted radiation from VCSEL array 910 along the horizontal axis. The beam expansion is sufficient to fill the pupil aperture of both eyes of the observer to achieve full binocular display. Either an appropriate horizontal curvature on polygonal mirror
920 , as shown in Fig. 12 , or a multiplicity of cylindrical lenses may, however, be used to replace single cylindrical lens 930.
It is believed that a vertical expansion of only 15-20 mm need be achieved to account for the observer's head motion. Preferably, for binocular displays, horizontal beam widths of 100 mm or more are contemplated. A concave partial reflector 940, which is preferably 50-75 mm from the observer' pupils, produces a virtual image of VCSEL array 910 within the field of view of the observer in accordance with well known optical theory. Appropriately addressing and modulating each individual VCSEL in conjunction with sweep scanning then presents a full panorama display to the observer. Note that since radiation from each VCSEL traverses through only a small portion of the system, the system components do not introduce any substantial optical aberrations. Thus, resolution better than one cycle per mrad may be accomplished over the entire field-of-view with only a small number of optical components.
Those skilled in the art will readily note that the vertical concavity of both polygonal mirror 920 and partial reflector 940 is used to tailor the vertical beam characteristics of the emitted radiation. Cylindrical lens 930 and the horizontal curvature of concave partial reflector 940, on the other hand, tailor the horizontal shape or beam characteristics of the emitted radiation. In this manner, the emitted radiation can be properly directed into, for example, 180 degree field-of-view.
Multiple VCSEL arrays, each array emitting radiation at a different wavelength can further be employed to produce color images. For example, VCSEL arrays 910, 950 and 960 may be placed at different positions around rotating mirror 920, where array 910 emits red radiation, array 950 emits green radiation and array 960 emits blue radiation. Radiation from each array, of course, would be synchronized to generate a color image in accordance with well known colorimetry theory.
Each side of rotating mirror 920 further could be tilted vertically with respect to each other so that each side sweeps out a unique set of horizontal pixels. For example, with a 4 sided rotating mirror, each side having a slight vertical tilt, sub-scanning as described hereinabove may be realized in the vertical direction to effectively increase the vertical resolution by a factor of four. Hence, a display resolution of 1024 elements in the vertical direction could be accomplished by utilizing a single array having only 256 VCSELs. Note that this latter scheme effectively combines sub-scanning and sweep scanning techniques to produce extremely high resolution display images over a ultra-wide field-of- view with a minimum number of VCSELs.
It should be understood that various other modifications will be readily apparent to those skilled in the art without departing from the scope and spirit of the invention. For example, head- own displays for cockpit environments may also be constructed utilizing the principles of the invention in which a real image is projected from the VCSEL array onto a screen for viewing by an observer. Moreover, simulators may also be constructed employing a combination of virtual-image and real-image displays.
Accordingly, it is not intended that the scope of the claims appended hereto be limited to the description set forth therein, but rather that the claims be construed as encompassing all the features of patentable novelty that reside in the present invention, including all features that would be treated as equivalents thereof by those skilled in the art to which this invention pertains.

Claims

CLAIMS What is claimed is:
1. A visual display system comprising: a plurality of visible emitting vertical- cavity surface-emitting lasers, each of said lasers emitting radiation; and means for displaying an image of said plurality of visible emitting vertical-cavity surface- emitting lasers within the field of view of an observer.
2. The visual display system of claim 1 having a size suitable for headgear-mounted use.
3. The visual display system of claim 2 wherein said means for displaying includes means for creating a virtual image of said plurality of visible emitting vertical-cavity surface- emitting lasers, and a rotating mirror for displacing said virtual image over a desired field-of-view.
4. The visual display system of claim 1 further comprising means for selectively modulating the intensity of the radiation from each of said plurality of visible emitting vertical-cavity surface- emitting lasers so that said image substantially represents a predetermined visual display.
5. The visual display system of claim 1 wherein said plurality of visible emitting vertical- cavity surface-emitting lasers emit radiation at a predetermined wavelength so that said image is monochrome.
6. The visual display system of claim 1 wherein said plurality of visible emitting vertical- cavity surface-emitting lasers emit radiation at a plurality of wavelengths so that said image is in color.
7. The visual display system of claim 6 wherein said plurality of visible emitting vertical- cavity surface-emitting lasers are aligned in sets of three lines, said vertical-cavity surface-emitting lasers in each line emitting radiation at a different predetermined wavelength.
8. The visual display system of claim 7 wherein vertical-cavity surface-emitting lasers in a first line of said sets emit in the visible red region of the electromagnetic spectrum, vertical-cavity surface emitting lasers in a second line of said sets emit in the visible green region of the electromagnetic spectrum, and vertical-cavity surface- emitting lasers in a third line of said sets emit in the visible blue region of the electromagnetic spectrum.
9. The visual display system of claim 8 wherein said vertical-cavity surface-emitting lasers in said first, second and third lines are staggered with respect to each other.
10. The visual display system of claim 1 wherein said plurality of visible emitting vertical- cavity surface-emitting lasers are aligned in a substantially one-dimensional array.
11. The visual display system of claim 1 wherein said plurality of visible emitting vertical- cavity surface-emitting lasers are aligned in a substantially two-dimensional array.
12. The visual display system of claim 1 wherein said means for displaying comprises imaging means for creating a virtual image of said plurality of visible emitting vertical-cavity surface-emitting lasers, and means for reflecting said virtual image into the field of view of the observer.
13. The visual display system of claim 12 wherein said means for reflecting includes a mirror.
14,- The visual display system of claim 12 wherein said means for reflecting includes a partially transmissive, partially reflective faceplate such that the observer can simultaneously view the image of said plurality of visible emitting vertical-cavity surface- emitting lasers and external visual information directed to the observer.
15. The visual display system of claim 12 further comprising means for adjusting the location of said virtual image from infinity to a distance close to the observer.
16. The visual display system of claim 15 wherein said means for adjusting includes a mechanical servo for displacing said plurality of vertical-cavity surface emitting lasers.
17. The visual display system of claim 1 further comprising micro-lenslets for directing the propagation of the radiation from said plurality of vertical-cavity surface-emitting lasers.
18. A visual display system for displaying an image having M x N picture elements within the field of view of an observer, said visual display system comprising: a plurality of visible emitting vertical- cavity surface-emitting lasers aligned substantially in at least a first 1 x N array, said lasers emitting radiation; means for creating an image of said plurality of visible emitting vertical-cavity surface- emitting lasers; means for repetitively displacing the position of said image within the field of view of the observer; and means for selectively controlling the intensity of the radiation emitted from each of said plurality.of vertical-cavity surface-emitting lasers as the position of said image is displaced to create the desired M x N image.
19. The visual display system of claim 18 wherein said image is a virtual image.
20. The visual display system of claim 18 wherein said plurality of visible emitting vertical- cavity surface-emitting lasers emit radiation at a predetermined wavelength so that said M x N image is monochrome.
21. The visual display system of claim 18 wherein said plurality of visible emitting vertical- cavity surface emitting lasers emit radiation at a plurality of wavelengths so that said image is in color.
22. The visual display system of claim 21 wherein said plurality of visible emitting vertical- cavity surface-emitting lasers are aligned in three lines of 1 x N arrays, said vertical-cavity surface- emitting lasers in each line emitting radiation at a different predetermined wavelength.
23. The visual display system of claim 22 wherein vertical-cavity surface-emitting lasers in a first line of said 1 x N arrays emit in the visible red region of the electromagnetic spectrum, vertical- cavity surface emitting lasers in a second line of said 1 x N arrays emit in the visible green region of the electromagnetic spectrum, and vertical-cavity surface-emitting lasers in a third line of said 1 x N arrays emit in the visible blue region of the electromagnetic spectrum.
24. The visual display system of claim 18 further comprising micro-lenslets for directing the propagation of the radiation from said plurality of vertical-cavity surface-emitting lasers.
25. The visual display system of claim 18 wherein vertical-cavity surface-emitting lasers within said 1 x N arrays are staggered with respect to one another.
26. A visual display system for displaying an image having M x N picture elements within the field of view of an observer, said visual display system comprising: a plurality of visible emitting lasers aligned substantially in a K x L array, said lasers emitting radiation; means for creating an image of said plurality of visible emitting vertical-cavity surface- emitting lasers; means for repetitively displacing the position of said image within the field of view of the observer; and means for selectively controlling the intensity of the radiation emitted from each of said plurality of vertical-cavity surface-emitting lasers as the position of said image is displaced to create the desired M x N image, where M and N are greater than K and L, respectively.
27. The visual display system of claim 26 wherein said visible emitting lasers are vertical- cavity surface-emitting lasers.
28. The visual display system of claim 26 wherein said visible emitting lasers are light emitting diodes.
29. The visual display system of claim 26 wherein said visible emitting lasers are edge-emitting laser diodes.
30. The visual display system of claim 26 wherein said image is a virtual image.
31. The visual display system of claim 26 wherein said plurality of visible emitting lasers emit radiation at a predetermined wavelength so that said M x N image is monochrome.
32. The visual display system of claim 26 wherein said plurality of visible emitting lasers emit radiation at a plurality of wavelengths so that said image is in color.
33. The visual display system of claim 26 wherein 1 x L arrays of said K x L arrays of said plurality of visible emitting lasers are aligned in three lines, said visible emitting lasers in each line emitting radiation at a different predetermined wavelength.
34. The visual display system of claim 33 wherein visible emitting lasers within said 1 x L arrays are staggered with respect to one another.
35. The visual display system of claim 33 wherein said visible emitting lasers in a first line of said 1 x L arrays emit in the visible red region of the electromagnetic spectrum, vertical-cavity surface emitting lasers in a second line of said 1 x L arrays emit in the visible green region of the electro¬ magnetic spectrum, and vertical-cavity surface- emitting lasers in a third line of the said 1 x L arrays emit in the visible blue region of the electromagnetic spectrum.
36. The visual display system of claim 26 further comprising micro-lenslets for directing the propagation of the radiation from said plurality of visible emitting lasers.
37. A visual display system for displaying 5 a desired image within the field of view of an observer, said visual display system comprising: a laser array including a plurality of vertical-cavity surface-emitting lasers and light emitting diodes, said vertical-cavity surface-emitting Q lasers and light emitting diodes emitting radiation in the visible electromagnetic spectrum; means for creating an optical image of said laser array; means for repetitively displacing the 5 position of said optical image within the field of view of the observer; and means for selectively controlling the intensity of the radiation emitted from said laser array as the position of said optical image is 0 displaced to create the desired image.
38. A visual display system for displaying a desired image having M x N picture elements within the field of view of an observer, said visual display 5 system comprising: a plurality of surface-emitting lasers aligned substantially in K 1 x L arrays, said 1 x L arrays being arranged in groups of two or more lasers; a plurality of lenslet pairs having an 0 optical axis substantially collinear with the direction of propagation of radiation emitted from said lasers, each lenslet pair for imaging lasers within a group to corresponding groups of reduced image size such that the inter-group spacing for the 5 groups of reduced image size is greater than that for said groups of lasers; means for creating an image of said groups of reduced image size; means for repetitively displacing the position of said image within the field of view of the observer so as to generate sub-picture elements between the groups of reduced image size; and means for selectively controlling the intensity of the radiation emitted from each of said plurality of surface-emitting lasers as the position of said image is displaced to create the desired M x N image, where M and N are greater than K and L, respectively.
39. The visual display system of claim 38 wherein said surface-emitting lasers are vertical- cavity surface-emitting lasers.
— 40. The visual display system of claim 38 wherein said surface-emitting lasers are light emitting diodes.
41. The vidual display system of claim 38 wherein said surface-emitting lasers are edge-emitting laser diodes.
42. A visual display system for displaying a desired image having M x N picture elements within the field of view of an observer, said visual display system comprising: a plurality of surface-emitting lasers aligned substantially in a 1 x L array, said 1 x L array being arranged in groups of two or more lasers; a plurality of lenslet pairs having an optical axis substantially collinear with the direction of propagation of radiation emitted from said lasers, each lenslet pair for imaging lasers within a group to corresponding groups of reduced image size such that the inter-group spacing for the groups of reduced image size is greater than that for said groups of lasers; means for creating an image of said groups of reduced image size; means for repetitively displacing the position of said image within the field of view of the observer so as to generate sub-picture elements between the groups of reduced image size and picture elements along first and second directions, respectively, of said image; and means for selectively controlling the intensity of the radiation emitted from each of said plurality of surface-emitting lasers as the position of said image is displaced to create the desired M x N image, where M and N are greater than K and L, respectively.
43. The visual display system of claim 42 wherein said surface-emitting lasers are vertical- cavity surface-emitting lasers.
44. The visual display system of claim 42 wherein said surface-emitting lasers are light emitting diodes.
45. The visual display system of claim 42 wherein said surface-emitting lasers are edge-emitting laser diodes.
46. A scanning configuration comprising: a plurality of surface-emitting lasers substantially aligned in at least a 1 x N array along a first direction, said 1 x N array having an inter-element spacing, d, and each of said lasers corresponding to a picture element; means for creating an image of said plurality of surface-emitting lasers; and means for repetitively displacing the image of said plurality of surface-emitting lasers by a distance less than the inter-element spacing, d, along said first direction so as to generate sub-picture elements between the images of adjacent lasers.
47. The scanning configuration of claim 46 wherein said surface emitting lasers are vertical- cavity surface-emitting lasers.
48. The scanning configuration of claim 46 wherein said surface emitting lasers are light emitting diodes.
49. The scanning configuration of claim 46 wherein said surface emitting laser are edge-emitting laser diodes.
50. The scanning configuration of claim 46 wherein surface-emitting lasers within said 1 x N array are staggered with respect to one another.
51. The scanning configuration of claim 46 further comprising means for respectively displaying the image of said plurality of surface-emitting lasers along a second direction, said second direction substantially perpendicular to said first direction.
52. The scanning configuration of claim 51 wherein said plurality of surface-emitting lasers emit radiation at a plurality of wavelengths so that said image is in color.
53. The scanning configuration of claim 51 wherein said plurality of surface-emitting lasers are aligned in three lines of 1 x N arrays, said surface- emitting lasers in each line emitting radiation at a different predetermined wavelength.
54. The scanning configuration of claim 53 wherein surface-emitting lasers in a first line of said 1 x N arrays emit in the visible red region of the electromagnetic spectrum, surface-emitting lasers in a second line of said 1 x N arrays emit in the visible green region of the electromagnetic spectrum, and surface emitting lasers in a third line of said 1 x N arrays emit in the visible blue region of the electromagnetic spectrum.
55. The scanning configuration of claim 46 further comprising micro-lenslets for directing the propagation for radiation from said plurality of surface-emitting lasers.
56. The scanning configuration of claim 46 wherein said means for creating an image includes an optical lens system.
57. The scanning configuration of claim 46 wherein said means for repetitively displacing said image includes a resonating mirror.
58. The scanning configuration of claim 46 wherein said means for repetitively displacing said image includes a rotating mirror.
59. The scanning configuration of claim 58 wherein said rotating mirror has N sides, each side having a vertical tilt with respect to each other.
PCT/US1993/003738 1992-04-21 1993-04-20 Vertical-cavity surface-emitting laser abray display system WO1993021673A1 (en)

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JP5518685A JPH07506220A (en) 1992-04-21 1993-04-20 Vertical cavity/surface emitting laser array display system
EP93912330A EP0637409A1 (en) 1992-04-21 1993-04-20 Vertical-cavity surface-emitting laser abray display system

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996021171A2 (en) * 1995-01-04 1996-07-11 Visualabs Inc. 3-d imaging system
WO1999008145A1 (en) * 1997-08-07 1999-02-18 Isis Innovation Limited Three dimensional image display
DE102005008992B3 (en) * 2005-02-28 2006-08-31 Rößner, Max Image projecting device, has arrays of light emitting optoelectronic units, in which light of central projection lamp is absorbed or reflected at dark region of image or pixels of arrays are switched off to represent black region of image
US8979338B2 (en) 2009-12-19 2015-03-17 Trilumina Corp. System for combining laser array outputs into a single beam carrying digital data
US10038304B2 (en) 2009-02-17 2018-07-31 Trilumina Corp. Laser arrays for variable optical properties
WO2018147963A1 (en) 2017-02-08 2018-08-16 Princeton Optronics, Inc. Vcsel illuminator package including an optical structure integrated in the encapsulant
US10244181B2 (en) 2009-02-17 2019-03-26 Trilumina Corp. Compact multi-zone infrared laser illuminator
US10615871B2 (en) 2009-02-17 2020-04-07 Trilumina Corp. High speed free-space optical communications
US11095365B2 (en) 2011-08-26 2021-08-17 Lumentum Operations Llc Wide-angle illuminator module
EP4142076A3 (en) * 2021-08-23 2023-07-26 Palo Alto Research Center Incorporated Independently-addressable high power surface-emitting laser array with tight-pitch packing

Families Citing this family (242)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102509A (en) * 1992-06-17 1994-04-15 Xerox Corp Full-color display device having optical coupling lens array
US5670935A (en) 1993-02-26 1997-09-23 Donnelly Corporation Rearview vision system for vehicle including panoramic view
US5910854A (en) 1993-02-26 1999-06-08 Donnelly Corporation Electrochromic polymeric solid films, manufacturing electrochromic devices using such solid films, and processes for making such solid films and devices
US6498620B2 (en) 1993-02-26 2002-12-24 Donnelly Corporation Vision system for a vehicle including an image capture device and a display system having a long focal length
US6822563B2 (en) 1997-09-22 2004-11-23 Donnelly Corporation Vehicle imaging system with accessory control
US5877897A (en) 1993-02-26 1999-03-02 Donnelly Corporation Automatic rearview mirror, vehicle lighting control and vehicle interior monitoring system using a photosensor array
DE69421873T2 (en) * 1993-09-20 2000-06-15 Canon Kk Image acquisition and display system
US5546209A (en) * 1994-03-11 1996-08-13 University Of Southern California One-to-many simultaneous and reconfigurable optical two-dimensional plane interconnections using multiple wavelength, vertical cavity, surface-emitting lasers and wavelength-dependent detector planes
US5412680A (en) * 1994-03-18 1995-05-02 Photonics Research Incorporated Linear polarization of semiconductor laser
US5668663A (en) 1994-05-05 1997-09-16 Donnelly Corporation Electrochromic mirrors and devices
DE4429582C2 (en) * 1994-08-19 1998-02-26 Draegerwerk Ag Radiation source for a measuring system
US5557627A (en) * 1995-05-19 1996-09-17 Sandia Corporation Visible-wavelength semiconductor lasers and arrays
US6891563B2 (en) 1996-05-22 2005-05-10 Donnelly Corporation Vehicular vision system
US5781671A (en) * 1995-10-04 1998-07-14 Nec Research Institute, Inc. Free-space angle-multiplexed optical interconnect network
US5657165A (en) * 1995-10-11 1997-08-12 Reflection Technology, Inc. Apparatus and method for generating full-color images using two light sources
US5978401A (en) * 1995-10-25 1999-11-02 Honeywell Inc. Monolithic vertical cavity surface emitting laser and resonant cavity photodetector transceiver
US5707139A (en) * 1995-11-01 1998-01-13 Hewlett-Packard Company Vertical cavity surface emitting laser arrays for illumination
JP3279464B2 (en) * 1995-11-08 2002-04-30 富士ゼロックス株式会社 Two-dimensional surface emitting laser array, and method and device for driving the same
US7330494B1 (en) * 1995-12-18 2008-02-12 Jds Uniphase Corporation Conductive element with lateral oxidation barrier
US6144685A (en) * 1996-01-23 2000-11-07 Fuji Xerox Co., Ltd. Two-dimensional surface emitting laser array, two-dimensional surface emitting laser beam scanner, two-dimensional surface emitting laser beam recorder, and two-dimensional surface emitting laser beam recording method
JP3198909B2 (en) * 1996-01-23 2001-08-13 富士ゼロックス株式会社 Two-dimensional surface emitting laser beam scanner and laser beam recording device
US5742421A (en) * 1996-03-01 1998-04-21 Reflection Technology, Inc. Split lens video display system
US7655894B2 (en) 1996-03-25 2010-02-02 Donnelly Corporation Vehicular image sensing system
US5959780A (en) * 1996-04-15 1999-09-28 Olympus Optical Co., Ltd. Head-mounted display apparatus comprising a rotationally asymmetric surface
AU3123997A (en) * 1996-05-09 1997-11-26 Via, Inc. Miniature display devices and systems
JP2001501318A (en) * 1996-08-28 2001-01-30 リフレクション・テクノロジー・インコーポレーテッド Compact image generator with dual line illuminant array
JP3013886B2 (en) * 1996-09-27 2000-02-28 富士ゼロックス株式会社 Two-dimensional element array, two-dimensional surface emitting laser array, and image forming apparatus
US6204974B1 (en) 1996-10-08 2001-03-20 The Microoptical Corporation Compact image display system for eyeglasses or other head-borne frames
US5886822A (en) * 1996-10-08 1999-03-23 The Microoptical Corporation Image combining system for eyeglasses and face masks
US6023372A (en) * 1997-10-30 2000-02-08 The Microoptical Corporation Light weight, compact remountable electronic display device for eyeglasses or other head-borne eyewear frames
US5774487A (en) * 1996-10-16 1998-06-30 Honeywell Inc. Filamented multi-wavelength vertical-cavity surface emitting laser
KR100195137B1 (en) * 1996-10-24 1999-06-15 윤종용 Compatible optical pickup
US6243407B1 (en) 1997-03-21 2001-06-05 Novalux, Inc. High power laser devices
US6057966A (en) * 1997-05-09 2000-05-02 Via, Inc. Body-carryable display devices and systems using E.G. coherent fiber optic conduit
US5971547A (en) * 1997-07-22 1999-10-26 Reilley; Peter Astigmatic lenticular projector system
US6326613B1 (en) 1998-01-07 2001-12-04 Donnelly Corporation Vehicle interior mirror assembly adapted for containing a rain sensor
US6124886A (en) 1997-08-25 2000-09-26 Donnelly Corporation Modular rearview mirror assembly
US8294975B2 (en) 1997-08-25 2012-10-23 Donnelly Corporation Automotive rearview mirror assembly
US6172613B1 (en) 1998-02-18 2001-01-09 Donnelly Corporation Rearview mirror assembly incorporating vehicle information display
DE69840547D1 (en) 1997-10-30 2009-03-26 Myvu Corp INTERFACE SYSTEM FOR GLASSES
US6195135B1 (en) * 1997-11-13 2001-02-27 Peter J. Wilk Thin video display with superluminescent or laser diodes
US6121603A (en) * 1997-12-01 2000-09-19 Hang; Zhijiang Optical confocal device having a common light directing means
US6118414A (en) * 1997-12-02 2000-09-12 Kintz; Gregory J. Virtual reality system and method
US6191759B1 (en) * 1997-12-02 2001-02-20 Gregory J. Kintz Virtual reality system with a static light emitting surface and magnifying optical system
US8288711B2 (en) 1998-01-07 2012-10-16 Donnelly Corporation Interior rearview mirror system with forwardly-viewing camera and a control
US6445287B1 (en) 2000-02-28 2002-09-03 Donnelly Corporation Tire inflation assistance monitoring system
US6051848A (en) * 1998-03-02 2000-04-18 Motorola, Inc. Optical device packages containing an optical transmitter die
FR2776881B1 (en) * 1998-03-24 2001-11-16 Thomson Csf THREE-DIMENSIONAL VIEWING DEVICE
US6477464B2 (en) 2000-03-09 2002-11-05 Donnelly Corporation Complete mirror-based global-positioning system (GPS) navigation solution
US6693517B2 (en) 2000-04-21 2004-02-17 Donnelly Corporation Vehicle mirror assembly communicating wirelessly with vehicle accessories and occupants
US6329925B1 (en) 1999-11-24 2001-12-11 Donnelly Corporation Rearview mirror assembly with added feature modular display
ES2191920T3 (en) * 1998-04-10 2003-09-16 Datasensor Spa PROCEDURE TO DISCRIMINATE THE COLOR OF A SURFACE AND APPLIANCE TO CARRY OUT THE PROCEDURE.
US6097528A (en) * 1998-07-20 2000-08-01 Motorola, Inc. Microscanner for portable laser diode displays
US6084697A (en) * 1998-07-20 2000-07-04 Motorola, Inc. Integrated electro-optical package
US6229503B1 (en) * 1998-08-25 2001-05-08 Robert Mays, Jr. Miniature personal display
SE516881C2 (en) 1999-05-31 2002-03-19 Saabtech Electronics Ab Method and apparatus for superimposing an image onto a direct external image to be presented to an observer
US6724354B1 (en) 1999-06-21 2004-04-20 The Microoptical Corporation Illumination systems for eyeglass and facemask display systems
US6618099B1 (en) 1999-06-21 2003-09-09 The Microoptical Corporation Display device with eyepiece assembly and display on opto-mechanical support
WO2000079327A1 (en) 1999-06-21 2000-12-28 The Microoptical Corporation Eyeglass display lens system employing off-axis optical design
US7158096B1 (en) 1999-06-21 2007-01-02 The Microoptical Corporation Compact, head-mountable display device with suspended eyepiece assembly
US7167615B1 (en) * 1999-11-05 2007-01-23 Board Of Regents, The University Of Texas System Resonant waveguide-grating filters and sensors and methods for making and using same
US8111401B2 (en) 1999-11-05 2012-02-07 Robert Magnusson Guided-mode resonance sensors employing angular, spectral, modal, and polarization diversity for high-precision sensing in compact formats
WO2001064481A2 (en) 2000-03-02 2001-09-07 Donnelly Corporation Video mirror systems incorporating an accessory module
US7167796B2 (en) 2000-03-09 2007-01-23 Donnelly Corporation Vehicle navigation system for use with a telematics system
US7855755B2 (en) 2005-11-01 2010-12-21 Donnelly Corporation Interior rearview mirror assembly with display
US7370983B2 (en) 2000-03-02 2008-05-13 Donnelly Corporation Interior mirror assembly with display
US6396408B2 (en) 2000-03-31 2002-05-28 Donnelly Corporation Digital electrochromic circuit with a vehicle network
US7082267B1 (en) 2000-08-25 2006-07-25 R& Dm Foundation Shared multi-channel parallel optical interface
US7099590B2 (en) 2000-08-25 2006-08-29 R&Dm Foundation Filtering technique for free space interconnects
US6680788B1 (en) * 2000-10-12 2004-01-20 Mcnc Scanning apparatus and associated method
AU2002220035A1 (en) * 2000-10-30 2002-05-15 Santur Corporation Tunable controlled laser array
US6905900B1 (en) * 2000-11-28 2005-06-14 Finisar Corporation Versatile method and system for single mode VCSELs
US7065124B2 (en) * 2000-11-28 2006-06-20 Finlsar Corporation Electron affinity engineered VCSELs
US6990135B2 (en) * 2002-10-28 2006-01-24 Finisar Corporation Distributed bragg reflector for optoelectronic device
US6556349B2 (en) 2000-12-27 2003-04-29 Honeywell International Inc. Variable focal length micro lens array field curvature corrector
US6909554B2 (en) 2000-12-27 2005-06-21 Finisar Corporation Wafer integration of micro-optics
TWI227799B (en) * 2000-12-29 2005-02-11 Honeywell Int Inc Resonant reflector for increased wavelength and polarization control
US6782027B2 (en) 2000-12-29 2004-08-24 Finisar Corporation Resonant reflector for use with optoelectronic devices
US6727520B2 (en) * 2000-12-29 2004-04-27 Honeywell International Inc. Spatially modulated reflector for an optoelectronic device
US6836501B2 (en) * 2000-12-29 2004-12-28 Finisar Corporation Resonant reflector for increased wavelength and polarization control
US7255451B2 (en) 2002-09-20 2007-08-14 Donnelly Corporation Electro-optic mirror cell
US7581859B2 (en) 2005-09-14 2009-09-01 Donnelly Corp. Display device for exterior rearview mirror
WO2006124682A2 (en) 2005-05-16 2006-11-23 Donnelly Corporation Vehicle mirror assembly with indicia at reflective element
ES2287266T3 (en) 2001-01-23 2007-12-16 Donnelly Corporation IMPROVED VEHICLE LIGHTING SYSTEM.
US6853812B2 (en) 2001-05-09 2005-02-08 Robert Mays, Jr. Polarized-holographic filtering providing improved extinction ratio
US20020191254A1 (en) * 2001-06-19 2002-12-19 Robert Mays Network routing employing free-space optical broadcasting
US20020191598A1 (en) * 2001-06-19 2002-12-19 Robert Mays Network switch employing free-space optical switching technique
US6882287B2 (en) 2001-07-31 2005-04-19 Donnelly Corporation Automotive lane change aid
US7697027B2 (en) 2001-07-31 2010-04-13 Donnelly Corporation Vehicular video system
WO2003015225A2 (en) * 2001-08-08 2003-02-20 Santur Corporation Method and system for selecting an output of a dbr array
WO2003015226A2 (en) * 2001-08-08 2003-02-20 Santur Corporation Method and system for selecting an output of a vcsel array
WO2003023756A1 (en) * 2001-09-07 2003-03-20 The Microoptical Corporation Light weight, compact, remountable face-supported electronic display
US7313246B2 (en) * 2001-10-06 2007-12-25 Stryker Corporation Information system using eyewear for communication
US6606199B2 (en) 2001-10-10 2003-08-12 Honeywell International Inc. Graded thickness optical element and method of manufacture therefor
US6910780B2 (en) * 2002-04-01 2005-06-28 Santur Corporation Laser and laser signal combiner
US6918674B2 (en) 2002-05-03 2005-07-19 Donnelly Corporation Vehicle rearview mirror system
US7038577B2 (en) 2002-05-03 2006-05-02 Donnelly Corporation Object detection system for vehicle
US7329013B2 (en) 2002-06-06 2008-02-12 Donnelly Corporation Interior rearview mirror system with compass
WO2003105099A1 (en) 2002-06-06 2003-12-18 Donnelly Corporation Interior rearview mirror system with compass
US6965626B2 (en) * 2002-09-03 2005-11-15 Finisar Corporation Single mode VCSEL
US7310177B2 (en) 2002-09-20 2007-12-18 Donnelly Corporation Electro-optic reflective element assembly
WO2004026633A2 (en) 2002-09-20 2004-04-01 Donnelly Corporation Mirror reflective element assembly
WO2004103772A2 (en) 2003-05-19 2004-12-02 Donnelly Corporation Mirror assembly for vehicle
US6845114B2 (en) * 2002-10-16 2005-01-18 Eastman Kodak Company Organic laser that is attachable to an external pump beam light source
US6813293B2 (en) * 2002-11-21 2004-11-02 Finisar Corporation Long wavelength VCSEL with tunnel junction, and implant
US6947459B2 (en) * 2002-11-25 2005-09-20 Eastman Kodak Company Organic vertical cavity laser and imaging system
US6950454B2 (en) * 2003-03-24 2005-09-27 Eastman Kodak Company Electronic imaging system using organic laser array illuminating an area light valve
US20040222363A1 (en) * 2003-05-07 2004-11-11 Honeywell International Inc. Connectorized optical component misalignment detection system
US20040247250A1 (en) * 2003-06-03 2004-12-09 Honeywell International Inc. Integrated sleeve pluggable package
US7298942B2 (en) 2003-06-06 2007-11-20 Finisar Corporation Pluggable optical optic system having a lens fiber stop
US7433381B2 (en) 2003-06-25 2008-10-07 Finisar Corporation InP based long wavelength VCSEL
US7054345B2 (en) 2003-06-27 2006-05-30 Finisar Corporation Enhanced lateral oxidation
US7075962B2 (en) * 2003-06-27 2006-07-11 Finisar Corporation VCSEL having thermal management
US7277461B2 (en) * 2003-06-27 2007-10-02 Finisar Corporation Dielectric VCSEL gain guide
US7149383B2 (en) * 2003-06-30 2006-12-12 Finisar Corporation Optical system with reduced back reflection
US6961489B2 (en) * 2003-06-30 2005-11-01 Finisar Corporation High speed optical system
US20060056762A1 (en) * 2003-07-02 2006-03-16 Honeywell International Inc. Lens optical coupler
US20050013542A1 (en) * 2003-07-16 2005-01-20 Honeywell International Inc. Coupler having reduction of reflections to light source
US7210857B2 (en) * 2003-07-16 2007-05-01 Finisar Corporation Optical coupling system
US20050013539A1 (en) * 2003-07-17 2005-01-20 Honeywell International Inc. Optical coupling system
US6887801B2 (en) * 2003-07-18 2005-05-03 Finisar Corporation Edge bead control method and apparatus
EP1511138B1 (en) * 2003-09-01 2010-08-04 Avalon Photonics AG A high power top emitting vertical cavity surface emitting laser
US7446924B2 (en) 2003-10-02 2008-11-04 Donnelly Corporation Mirror reflective element assembly including electronic component
US7308341B2 (en) 2003-10-14 2007-12-11 Donnelly Corporation Vehicle communication system
US7031363B2 (en) * 2003-10-29 2006-04-18 Finisar Corporation Long wavelength VCSEL device processing
US20050151828A1 (en) * 2004-01-14 2005-07-14 Xerox Corporation. Xerographic printing system with VCSEL-micro-optic laser printbar
DE102004004296A1 (en) * 2004-01-28 2005-08-25 Siemens Ag Device for generating a view with a spatial impression of a spatial object
US7526103B2 (en) 2004-04-15 2009-04-28 Donnelly Corporation Imaging system for vehicle
US7724210B2 (en) * 2004-05-07 2010-05-25 Microvision, Inc. Scanned light display system using large numerical aperture light source, method of using same, and method of making scanning mirror assemblies
US7920612B2 (en) * 2004-08-31 2011-04-05 Finisar Corporation Light emitting semiconductor device having an electrical confinement barrier near the active region
US7596165B2 (en) * 2004-08-31 2009-09-29 Finisar Corporation Distributed Bragg Reflector for optoelectronic device
US7829912B2 (en) * 2006-07-31 2010-11-09 Finisar Corporation Efficient carrier injection in a semiconductor device
US20060061846A1 (en) * 2004-09-17 2006-03-23 Microvision, Inc. Scanned light display system using array of collimating elements in conjunction with large numerical aperture light emitter array
US7881496B2 (en) 2004-09-30 2011-02-01 Donnelly Corporation Vision system for vehicle
US7720580B2 (en) 2004-12-23 2010-05-18 Donnelly Corporation Object detection system for vehicle
WO2008024639A2 (en) 2006-08-11 2008-02-28 Donnelly Corporation Automatic headlamp control system
US20080043487A1 (en) * 2006-08-21 2008-02-21 Sprague Randall B Light bar structure having light conduits and scanned light display system employing same
DE102006045626A1 (en) * 2006-09-27 2008-04-03 Giesecke & Devrient Gmbh Device and method for the optical examination of value documents
US8013780B2 (en) 2007-01-25 2011-09-06 Magna Electronics Inc. Radar sensing system for vehicle
US8031752B1 (en) 2007-04-16 2011-10-04 Finisar Corporation VCSEL optimized for high speed data
DE102007034958A1 (en) * 2007-04-30 2008-11-06 Osram Opto Semiconductors Gmbh Beam combiner for a multicolored laser display
US7914187B2 (en) 2007-07-12 2011-03-29 Magna Electronics Inc. Automatic lighting system with adaptive alignment function
US8017898B2 (en) 2007-08-17 2011-09-13 Magna Electronics Inc. Vehicular imaging system in an automatic headlamp control system
US8451107B2 (en) 2007-09-11 2013-05-28 Magna Electronics, Inc. Imaging system for vehicle
WO2009046268A1 (en) 2007-10-04 2009-04-09 Magna Electronics Combined rgb and ir imaging sensor
JP5274038B2 (en) * 2008-02-06 2013-08-28 キヤノン株式会社 Manufacturing method of vertical cavity surface emitting laser and manufacturing method of laser array
US8154418B2 (en) 2008-03-31 2012-04-10 Magna Mirrors Of America, Inc. Interior rearview mirror system
US20100020170A1 (en) 2008-07-24 2010-01-28 Higgins-Luthman Michael J Vehicle Imaging System
US9487144B2 (en) 2008-10-16 2016-11-08 Magna Mirrors Of America, Inc. Interior mirror assembly with display
FR2938908B1 (en) * 2008-11-24 2011-01-21 Commissariat Energie Atomique DEVICE AND METHOD FOR MEASURING THE POSITION OF AT LEAST ONE MOVING OBJECT IN A THREE-DIMENSIONAL MARK
US8995493B2 (en) 2009-02-17 2015-03-31 Trilumina Corp. Microlenses for multibeam arrays of optoelectronic devices for high frequency operation
US7949024B2 (en) 2009-02-17 2011-05-24 Trilumina Corporation Multibeam arrays of optoelectronic devices for high frequency operation
US8995485B2 (en) 2009-02-17 2015-03-31 Trilumina Corp. High brightness pulsed VCSEL sources
EP2401176B1 (en) 2009-02-27 2019-05-08 Magna Electronics Alert system for vehicle
US8376595B2 (en) 2009-05-15 2013-02-19 Magna Electronics, Inc. Automatic headlamp control
EP2459416B2 (en) 2009-07-27 2019-12-25 Magna Electronics Inc. Parking assist system
US9495876B2 (en) 2009-07-27 2016-11-15 Magna Electronics Inc. Vehicular camera with on-board microcontroller
EP2473871B1 (en) 2009-09-01 2015-03-11 Magna Mirrors Of America, Inc. Imaging and display system for vehicle
CA2784958C (en) * 2009-12-19 2014-12-02 Trilumina Corp. System and method for combining laser arrays for digital outputs
US9740019B2 (en) 2010-02-02 2017-08-22 Apple Inc. Integrated structured-light projector
US20110187878A1 (en) * 2010-02-02 2011-08-04 Primesense Ltd. Synchronization of projected illumination with rolling shutter of image sensor
US8890955B2 (en) 2010-02-10 2014-11-18 Magna Mirrors Of America, Inc. Adaptable wireless vehicle vision system based on wireless communication error
US9117123B2 (en) 2010-07-05 2015-08-25 Magna Electronics Inc. Vehicular rear view camera display system with lifecheck function
US8781794B2 (en) 2010-10-21 2014-07-15 Lockheed Martin Corporation Methods and systems for creating free space reflective optical surfaces
US8625200B2 (en) * 2010-10-21 2014-01-07 Lockheed Martin Corporation Head-mounted display apparatus employing one or more reflective optical surfaces
US9632315B2 (en) 2010-10-21 2017-04-25 Lockheed Martin Corporation Head-mounted display apparatus employing one or more fresnel lenses
US10359545B2 (en) 2010-10-21 2019-07-23 Lockheed Martin Corporation Fresnel lens with reduced draft facet visibility
US9180908B2 (en) 2010-11-19 2015-11-10 Magna Electronics Inc. Lane keeping system and lane centering system
US9900522B2 (en) 2010-12-01 2018-02-20 Magna Electronics Inc. System and method of establishing a multi-camera image using pixel remapping
MX2013006722A (en) 2010-12-16 2014-01-31 Lockheed Corp Collimating display with pixel lenses.
US9264672B2 (en) 2010-12-22 2016-02-16 Magna Mirrors Of America, Inc. Vision display system for vehicle
KR101928764B1 (en) * 2010-12-28 2018-12-13 록히드 마틴 코포레이션 Head-mounted display apparatus employing one or more reflective optical surfaces
US9085261B2 (en) 2011-01-26 2015-07-21 Magna Electronics Inc. Rear vision system with trailer angle detection
US9194943B2 (en) 2011-04-12 2015-11-24 Magna Electronics Inc. Step filter for estimating distance in a time-of-flight ranging system
US9547795B2 (en) 2011-04-25 2017-01-17 Magna Electronics Inc. Image processing method for detecting objects using relative motion
US10793067B2 (en) 2011-07-26 2020-10-06 Magna Electronics Inc. Imaging system for vehicle
US8749796B2 (en) 2011-08-09 2014-06-10 Primesense Ltd. Projectors of structured light
US10054430B2 (en) 2011-08-09 2018-08-21 Apple Inc. Overlapping pattern projector
DE112012003931T5 (en) 2011-09-21 2014-07-10 Magna Electronics, Inc. Image processing system for a motor vehicle with image data transmission and power supply via a coaxial cable
WO2013048994A1 (en) 2011-09-26 2013-04-04 Magna Electronics, Inc. Vehicle camera image quality improvement in poor visibility conditions by contrast amplification
US9146898B2 (en) 2011-10-27 2015-09-29 Magna Electronics Inc. Driver assist system with algorithm switching
DE102011085978A1 (en) * 2011-11-09 2013-05-16 Osram Gmbh LASER FLASH DEVICE WITH LASER ARRAY
WO2013081985A1 (en) 2011-11-28 2013-06-06 Magna Electronics, Inc. Vision system for vehicle
TWI559034B (en) * 2011-12-26 2016-11-21 洛伊馬汀公司 Head-mounted display apparatus employing one or more reflective optical surfaces
US9329080B2 (en) 2012-02-15 2016-05-03 Aplle Inc. Modular optics for scanning engine having beam combining optics with a prism intercepted by both beam axis and collection axis
KR101709844B1 (en) 2012-02-15 2017-02-23 애플 인크. Apparatus and method for mapping
JP5919885B2 (en) * 2012-02-28 2016-05-18 セイコーエプソン株式会社 Virtual image display device
US8694224B2 (en) 2012-03-01 2014-04-08 Magna Electronics Inc. Vehicle yaw rate correction
US10609335B2 (en) 2012-03-23 2020-03-31 Magna Electronics Inc. Vehicle vision system with accelerated object confirmation
WO2013158592A2 (en) 2012-04-16 2013-10-24 Magna Electronics, Inc. Vehicle vision system with reduced image color data processing by use of dithering
US10089537B2 (en) 2012-05-18 2018-10-02 Magna Electronics Inc. Vehicle vision system with front and rear camera integration
US9340227B2 (en) 2012-08-14 2016-05-17 Magna Electronics Inc. Vehicle lane keep assist system
DE102013217430A1 (en) 2012-09-04 2014-03-06 Magna Electronics, Inc. Driver assistance system for a motor vehicle
US9558409B2 (en) 2012-09-26 2017-01-31 Magna Electronics Inc. Vehicle vision system with trailer angle detection
US9446713B2 (en) 2012-09-26 2016-09-20 Magna Electronics Inc. Trailer angle detection system
US9090234B2 (en) 2012-11-19 2015-07-28 Magna Electronics Inc. Braking control system for vehicle
US9743002B2 (en) 2012-11-19 2017-08-22 Magna Electronics Inc. Vehicle vision system with enhanced display functions
US10025994B2 (en) 2012-12-04 2018-07-17 Magna Electronics Inc. Vehicle vision system utilizing corner detection
US9481301B2 (en) 2012-12-05 2016-11-01 Magna Electronics Inc. Vehicle vision system utilizing camera synchronization
US20140218529A1 (en) 2013-02-04 2014-08-07 Magna Electronics Inc. Vehicle data recording system
US9092986B2 (en) 2013-02-04 2015-07-28 Magna Electronics Inc. Vehicular vision system
US10027930B2 (en) 2013-03-29 2018-07-17 Magna Electronics Inc. Spectral filtering for vehicular driver assistance systems
US9327693B2 (en) 2013-04-10 2016-05-03 Magna Electronics Inc. Rear collision avoidance system for vehicle
JP6339665B2 (en) * 2013-04-22 2018-06-06 トリルミナ コーポレーション Microlens for optoelectronic multi-beam array for high frequency operation
US10232797B2 (en) 2013-04-29 2019-03-19 Magna Electronics Inc. Rear vision system for vehicle with dual purpose signal lines
US9508014B2 (en) 2013-05-06 2016-11-29 Magna Electronics Inc. Vehicular multi-camera vision system
US10567705B2 (en) 2013-06-10 2020-02-18 Magna Electronics Inc. Coaxial cable with bidirectional data transmission
US9260095B2 (en) 2013-06-19 2016-02-16 Magna Electronics Inc. Vehicle vision system with collision mitigation
US20140375476A1 (en) 2013-06-24 2014-12-25 Magna Electronics Inc. Vehicle alert system
US10326969B2 (en) 2013-08-12 2019-06-18 Magna Electronics Inc. Vehicle vision system with reduction of temporal noise in images
US9038883B2 (en) 2013-09-11 2015-05-26 Princeton Optronics Inc. VCSEL packaging
US9988047B2 (en) 2013-12-12 2018-06-05 Magna Electronics Inc. Vehicle control system with traffic driving control
US10160382B2 (en) 2014-02-04 2018-12-25 Magna Electronics Inc. Trailer backup assist system
US9623878B2 (en) 2014-04-02 2017-04-18 Magna Electronics Inc. Personalized driver assistance system for vehicle
US20160072258A1 (en) * 2014-09-10 2016-03-10 Princeton Optronics Inc. High Resolution Structured Light Source
US10684476B2 (en) 2014-10-17 2020-06-16 Lockheed Martin Corporation Head-wearable ultra-wide field of view display device
US9553423B2 (en) * 2015-02-27 2017-01-24 Princeton Optronics Inc. Miniature structured light illuminator
US9939650B2 (en) 2015-03-02 2018-04-10 Lockheed Martin Corporation Wearable display system
US10819943B2 (en) 2015-05-07 2020-10-27 Magna Electronics Inc. Vehicle vision system with incident recording function
US10078789B2 (en) 2015-07-17 2018-09-18 Magna Electronics Inc. Vehicle parking assist system with vision-based parking space detection
US10086870B2 (en) 2015-08-18 2018-10-02 Magna Electronics Inc. Trailer parking assist system for vehicle
US10754156B2 (en) 2015-10-20 2020-08-25 Lockheed Martin Corporation Multiple-eye, single-display, ultrawide-field-of-view optical see-through augmented reality system
KR102597579B1 (en) 2015-10-21 2023-11-01 프린스톤 옵트로닉스, 인크. Coded Pattern Projector
US10875403B2 (en) 2015-10-27 2020-12-29 Magna Electronics Inc. Vehicle vision system with enhanced night vision
EP3168641B1 (en) * 2015-11-11 2020-06-03 Ibeo Automotive Systems GmbH Method and device for optically measuring distances
US11277558B2 (en) 2016-02-01 2022-03-15 Magna Electronics Inc. Vehicle vision system with master-slave camera configuration
US11433809B2 (en) 2016-02-02 2022-09-06 Magna Electronics Inc. Vehicle vision system with smart camera video output
US10132971B2 (en) 2016-03-04 2018-11-20 Magna Electronics Inc. Vehicle camera with multiple spectral filters
US10055651B2 (en) 2016-03-08 2018-08-21 Magna Electronics Inc. Vehicle vision system with enhanced lane tracking
US9995936B1 (en) 2016-04-29 2018-06-12 Lockheed Martin Corporation Augmented reality systems having a virtual image overlaying an infrared portion of a live scene
JP6268224B2 (en) * 2016-05-31 2018-01-24 トリルミナ コーポレーション System and method for combining laser arrays for digital output
WO2018102955A1 (en) * 2016-12-05 2018-06-14 Goertek.Inc Micro laser diode display device and electronics apparatus
US20210026069A1 (en) * 2017-03-31 2021-01-28 Universiteit Gent Integrated near-eye display
US10153614B1 (en) * 2017-08-31 2018-12-11 Apple Inc. Creating arbitrary patterns on a 2-D uniform grid VCSEL array
TWI818941B (en) * 2017-12-28 2023-10-21 美商普林斯頓光電公司 Structured light projection system including narrow beam divergence semiconductor sources
US11002969B2 (en) * 2018-01-25 2021-05-11 Facebook Technologies, Llc Light projection system including an optical assembly for correction of differential distortion
US10168537B1 (en) * 2018-03-16 2019-01-01 Facebook Technologies, Llc Single chip superluminous light emitting diode array for waveguide displays
US11056032B2 (en) 2018-09-14 2021-07-06 Apple Inc. Scanning display systems with photonic integrated circuits
CN111045210B (en) * 2018-10-15 2022-04-26 中强光电股份有限公司 Near-to-eye display device
US10852532B2 (en) 2018-11-21 2020-12-01 Microsoft Technology Licensing, Llc VCSEL array scanning display
US20230060689A1 (en) * 2020-01-10 2023-03-02 Sony Group Corporation Video projection device
CN117241858A (en) 2021-03-24 2023-12-15 赛纳吉亚医疗公司 Active Implantable Medical Device (AIMD) with in situ optimization of power consumption

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4902083A (en) * 1988-05-31 1990-02-20 Reflection Technology, Inc. Low vibration resonant scanning unit for miniature optical display apparatus
US4934773A (en) * 1987-07-27 1990-06-19 Reflection Technology, Inc. Miniature video display system
US4949350A (en) * 1989-07-17 1990-08-14 Bell Communications Research, Inc. Surface emitting semiconductor laser
US5003300A (en) * 1987-07-27 1991-03-26 Reflection Technology, Inc. Head mounted display for miniature video display system
US5009473A (en) * 1988-05-31 1991-04-23 Reflection Technology, Inc. Low vibration resonant scanning unit for miniature optical display apparatus
US5023905A (en) * 1988-07-25 1991-06-11 Reflection Technology, Inc. Pocket data receiver with full page visual display
US5031187A (en) * 1990-02-14 1991-07-09 Bell Communications Research, Inc. Planar array of vertical-cavity, surface-emitting lasers
US5034344A (en) * 1989-07-17 1991-07-23 Bell Communications Research, Inc. Method of making a surface emitting semiconductor laser
US5048077A (en) * 1988-07-25 1991-09-10 Reflection Technology, Inc. Telephone handset with full-page visual display

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897715A (en) * 1988-10-31 1990-01-30 General Electric Company Helmet display
US4991179A (en) * 1989-04-26 1991-02-05 At&T Bell Laboratories Electrically pumped vertical cavity laser
US5028802A (en) * 1990-01-11 1991-07-02 Eye Research Institute Of Retina Foundation Imaging apparatus and methods utilizing scannable microlaser source

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4934773A (en) * 1987-07-27 1990-06-19 Reflection Technology, Inc. Miniature video display system
US5003300A (en) * 1987-07-27 1991-03-26 Reflection Technology, Inc. Head mounted display for miniature video display system
US4902083A (en) * 1988-05-31 1990-02-20 Reflection Technology, Inc. Low vibration resonant scanning unit for miniature optical display apparatus
US5009473A (en) * 1988-05-31 1991-04-23 Reflection Technology, Inc. Low vibration resonant scanning unit for miniature optical display apparatus
US5023905A (en) * 1988-07-25 1991-06-11 Reflection Technology, Inc. Pocket data receiver with full page visual display
US5048077A (en) * 1988-07-25 1991-09-10 Reflection Technology, Inc. Telephone handset with full-page visual display
US4949350A (en) * 1989-07-17 1990-08-14 Bell Communications Research, Inc. Surface emitting semiconductor laser
US5034344A (en) * 1989-07-17 1991-07-23 Bell Communications Research, Inc. Method of making a surface emitting semiconductor laser
US5031187A (en) * 1990-02-14 1991-07-09 Bell Communications Research, Inc. Planar array of vertical-cavity, surface-emitting lasers

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
Displays, January 1991, MUELLER, "Flat-Panel Display for High Definition Television", pp. 31-40, see the entire document. *
Displays, January 1991, WOODHEAD, "Recent Developments in Displays", pp. 50-51, see the entire document. *
Electronics Letters, Vol. 27, 1991, ORENSTEIN et al., "Matrix-Addressable Vertical Cavity Surface Emitting Laser Array", pp. 437-438, see the entire document. *
See also references of EP0637409A4 *
SPIE, Vol. 1289, Cockpit Display and Visual Simulation, 1990, JOSE et al., "An Avionic Gray-Scale Color Head Down Display", pp. 74-80, see the entire document. *
Spie, Vol. 1290, Helmet-Mounted Displays, 1990, BURLEY et al., "Holographic Helmet-Mounted Display for Pilot/Vehicle Interface Development and Human Factor Studies", pp. 9-15, see the entire document. *

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996021171A2 (en) * 1995-01-04 1996-07-11 Visualabs Inc. 3-d imaging system
WO1996021171A3 (en) * 1995-01-04 1996-09-06 Sheldon S Zelitt 3-d imaging system
US5790086A (en) * 1995-01-04 1998-08-04 Visualabs Inc. 3-D imaging system
EP0957385A1 (en) * 1995-01-04 1999-11-17 Visualabs Inc. 3-D imaging system
EP0957386A1 (en) * 1995-01-04 1999-11-17 Visualabs Inc. 3-D Imaging system
WO1999008145A1 (en) * 1997-08-07 1999-02-18 Isis Innovation Limited Three dimensional image display
DE102005008992B3 (en) * 2005-02-28 2006-08-31 Rößner, Max Image projecting device, has arrays of light emitting optoelectronic units, in which light of central projection lamp is absorbed or reflected at dark region of image or pixels of arrays are switched off to represent black region of image
US10244181B2 (en) 2009-02-17 2019-03-26 Trilumina Corp. Compact multi-zone infrared laser illuminator
US11075695B2 (en) 2009-02-17 2021-07-27 Lumentum Operations Llc Eye-safe optical laser system
US11405105B2 (en) 2009-02-17 2022-08-02 Lumentum Operations Llc System for optical free-space transmission of a string of binary data
US11121770B2 (en) 2009-02-17 2021-09-14 Lumentum Operations Llc Optical laser device
US10615871B2 (en) 2009-02-17 2020-04-07 Trilumina Corp. High speed free-space optical communications
US10038304B2 (en) 2009-02-17 2018-07-31 Trilumina Corp. Laser arrays for variable optical properties
US10938476B2 (en) 2009-02-17 2021-03-02 Lumentum Operations Llc System for optical free-space transmission of a string of binary data
US8979338B2 (en) 2009-12-19 2015-03-17 Trilumina Corp. System for combining laser array outputs into a single beam carrying digital data
US11095365B2 (en) 2011-08-26 2021-08-17 Lumentum Operations Llc Wide-angle illuminator module
US11451013B2 (en) 2011-08-26 2022-09-20 Lumentum Operations Llc Wide-angle illuminator module
EP3580820A4 (en) * 2017-02-08 2020-05-06 Princeton Optronics, Inc. Vcsel illuminator package including an optical structure integrated in the encapsulant
US11128100B2 (en) 2017-02-08 2021-09-21 Princeton Optronics, Inc. VCSEL illuminator package including an optical structure integrated in the encapsulant
WO2018147963A1 (en) 2017-02-08 2018-08-16 Princeton Optronics, Inc. Vcsel illuminator package including an optical structure integrated in the encapsulant
EP4142076A3 (en) * 2021-08-23 2023-07-26 Palo Alto Research Center Incorporated Independently-addressable high power surface-emitting laser array with tight-pitch packing

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JPH07506220A (en) 1995-07-06
EP0637409A1 (en) 1995-02-08
EP0637409A4 (en) 1994-12-14
CA2133977A1 (en) 1993-10-28
AU4291593A (en) 1993-11-18
US5325386A (en) 1994-06-28

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