WO1993022644A1 - A method of manufacturing a measuring device - Google Patents
A method of manufacturing a measuring device Download PDFInfo
- Publication number
- WO1993022644A1 WO1993022644A1 PCT/SE1993/000393 SE9300393W WO9322644A1 WO 1993022644 A1 WO1993022644 A1 WO 1993022644A1 SE 9300393 W SE9300393 W SE 9300393W WO 9322644 A1 WO9322644 A1 WO 9322644A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon
- measuring device
- cavity
- silicon dioxide
- direct bonding
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Measuring Fluid Pressure (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69308298T DE69308298T2 (en) | 1992-05-05 | 1993-05-05 | MEASURING DEVICE MANUFACTURING METHOD |
EP93924417A EP0639266B1 (en) | 1992-05-05 | 1993-05-05 | A method of manufacturing a measuring device |
JP51919393A JP3409853B2 (en) | 1992-05-05 | 1993-05-05 | Manufacturing method of measuring device |
US08/331,520 US5619046A (en) | 1992-05-05 | 1993-05-05 | Method of manufacturing a measuring device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9201439A SE515191C2 (en) | 1992-05-05 | 1992-05-05 | Process for manufacturing a pressure measuring device and pressure measuring device |
SE9201439-8 | 1992-05-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1993022644A1 true WO1993022644A1 (en) | 1993-11-11 |
Family
ID=20386175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/SE1993/000393 WO1993022644A1 (en) | 1992-05-05 | 1993-05-05 | A method of manufacturing a measuring device |
Country Status (9)
Country | Link |
---|---|
US (1) | US5619046A (en) |
EP (1) | EP0639266B1 (en) |
JP (1) | JP3409853B2 (en) |
AT (1) | ATE149248T1 (en) |
AU (1) | AU4031393A (en) |
DE (1) | DE69308298T2 (en) |
ES (1) | ES2102073T3 (en) |
SE (1) | SE515191C2 (en) |
WO (1) | WO1993022644A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997038291A1 (en) * | 1996-04-10 | 1997-10-16 | Samba Sensors Ab | Device for measuring pressure |
US5731522A (en) * | 1997-03-14 | 1998-03-24 | Rosemount Inc. | Transmitter with isolation assembly for pressure sensor |
WO2001047034A2 (en) * | 1999-12-22 | 2001-06-28 | Micronas Gmbh | Optical transmitting and receiving device and a production method therefor |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5920391A (en) * | 1995-10-27 | 1999-07-06 | Schlumberger Industries, S.A. | Tunable Fabry-Perot filter for determining gas concentration |
AU1172499A (en) * | 1998-05-14 | 1999-11-29 | Masayoshi Esashi | Pressure sensor and a method of manufacturing the same |
GB2338059B (en) * | 1998-05-20 | 2000-03-08 | Bookham Technology Ltd | An optically addressed sensing system |
US6738145B2 (en) | 2000-04-14 | 2004-05-18 | Shipley Company, L.L.C. | Micromachined, etalon-based optical fiber pressure sensor |
US6768590B2 (en) * | 2000-05-19 | 2004-07-27 | Shipley Company, L.L.C. | Method of fabricating optical filters |
GB2384636A (en) * | 2001-10-19 | 2003-07-30 | Visteon Global Tech Inc | Communication system with a signal conduction matrix and surface signal router |
US6843111B2 (en) * | 2001-10-19 | 2005-01-18 | Visteon Global Technologies, Inc. | LCC-based strain-gage sensor integrated with cylinder-head gasket |
JP4916647B2 (en) * | 2003-05-23 | 2012-04-18 | サムスン エレクトロニクス カンパニー リミテッド | External cavity semiconductor laser and manufacturing method thereof |
GB0408073D0 (en) * | 2004-04-08 | 2004-05-12 | Council Cent Lab Res Councils | Optical sensor |
JP4210245B2 (en) * | 2004-07-09 | 2009-01-14 | セイコーエプソン株式会社 | Wavelength tunable filter and detection device |
US7684657B2 (en) * | 2005-08-12 | 2010-03-23 | Fiso Technologies Inc. | Single piece Fabry-Perot optical sensor and method of manufacturing the same |
US7409867B2 (en) * | 2006-05-23 | 2008-08-12 | Rosemount Inc. | Pressure sensor using light source |
US7559701B2 (en) * | 2007-03-19 | 2009-07-14 | General Electric Company | High-temperature pressure sensor and method of assembly |
SE0801139L (en) | 2008-05-16 | 2009-11-17 | Samba Sensors Ab | Method and apparatus for examining physical quantity in a liquid or gas-filled element |
CN102384809B (en) * | 2011-08-09 | 2013-05-08 | 天津大学 | High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method |
CN102607761B (en) * | 2012-03-22 | 2013-12-25 | 天津大学 | Temperature self-correcting and manufacturing methods for Dual-Fabry-Perot optical fiber pressure sensor |
US20140046494A1 (en) * | 2012-08-13 | 2014-02-13 | Mcalister Technologies, Llc | Dynamic sensors |
US10823592B2 (en) | 2013-09-26 | 2020-11-03 | Rosemount Inc. | Process device with process variable measurement using image capture device |
EP3967998A4 (en) * | 2019-06-25 | 2023-01-18 | Nagano Keiki Co., Ltd. | Optical sensor and physical quantity measurement device |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0196784A2 (en) * | 1985-03-14 | 1986-10-08 | Imperial Chemical Industries Plc | Fabry Perot pressure sensor with diaphragm |
US4678904A (en) * | 1984-07-06 | 1987-07-07 | Technology Dynamics, Inc. | Optical measuring device using a spectral modulation sensor having an optically resonant structure |
GB2186360A (en) * | 1986-02-07 | 1987-08-12 | Ford Motor Co | Stress transducer |
EP0310225A2 (en) * | 1987-08-06 | 1989-04-05 | Hamilton Standard Controls, Inc. | Method for the series production of capacitive pressure sensors |
US4825262A (en) * | 1985-10-16 | 1989-04-25 | British Telecommunications Public Limited Company | Fabry-perot interferometer |
US4933545A (en) * | 1985-12-30 | 1990-06-12 | Metricor, Inc. | Optical pressure-sensing system using optical resonator cavity |
US4942767A (en) * | 1986-11-19 | 1990-07-24 | Massachusetts Institute Of Technology | Pressure transducer apparatus |
US4983824A (en) * | 1989-07-06 | 1991-01-08 | Metricor Inc. | Optically resonant sensor with increased monotonic range |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61235731A (en) * | 1985-04-11 | 1986-10-21 | Sharp Corp | Pressure sensing element |
GB2197069B (en) * | 1986-11-03 | 1990-10-24 | Stc Plc | Sensor device |
US5195374A (en) * | 1989-08-30 | 1993-03-23 | Schlumberger Industries Limited | Sensor systems |
US5309772A (en) * | 1992-08-03 | 1994-05-10 | United Technologies Corporation | Self-exciting optical strain gage |
-
1992
- 1992-05-05 SE SE9201439A patent/SE515191C2/en not_active IP Right Cessation
-
1993
- 1993-05-05 ES ES93924417T patent/ES2102073T3/en not_active Expired - Lifetime
- 1993-05-05 EP EP93924417A patent/EP0639266B1/en not_active Expired - Lifetime
- 1993-05-05 US US08/331,520 patent/US5619046A/en not_active Expired - Lifetime
- 1993-05-05 DE DE69308298T patent/DE69308298T2/en not_active Expired - Fee Related
- 1993-05-05 AT AT93924417T patent/ATE149248T1/en not_active IP Right Cessation
- 1993-05-05 WO PCT/SE1993/000393 patent/WO1993022644A1/en active IP Right Grant
- 1993-05-05 JP JP51919393A patent/JP3409853B2/en not_active Expired - Fee Related
- 1993-05-05 AU AU40313/93A patent/AU4031393A/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4678904A (en) * | 1984-07-06 | 1987-07-07 | Technology Dynamics, Inc. | Optical measuring device using a spectral modulation sensor having an optically resonant structure |
EP0196784A2 (en) * | 1985-03-14 | 1986-10-08 | Imperial Chemical Industries Plc | Fabry Perot pressure sensor with diaphragm |
US4825262A (en) * | 1985-10-16 | 1989-04-25 | British Telecommunications Public Limited Company | Fabry-perot interferometer |
US4933545A (en) * | 1985-12-30 | 1990-06-12 | Metricor, Inc. | Optical pressure-sensing system using optical resonator cavity |
GB2186360A (en) * | 1986-02-07 | 1987-08-12 | Ford Motor Co | Stress transducer |
US4942767A (en) * | 1986-11-19 | 1990-07-24 | Massachusetts Institute Of Technology | Pressure transducer apparatus |
EP0310225A2 (en) * | 1987-08-06 | 1989-04-05 | Hamilton Standard Controls, Inc. | Method for the series production of capacitive pressure sensors |
US4983824A (en) * | 1989-07-06 | 1991-01-08 | Metricor Inc. | Optically resonant sensor with increased monotonic range |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997038291A1 (en) * | 1996-04-10 | 1997-10-16 | Samba Sensors Ab | Device for measuring pressure |
US5731522A (en) * | 1997-03-14 | 1998-03-24 | Rosemount Inc. | Transmitter with isolation assembly for pressure sensor |
WO2001047034A2 (en) * | 1999-12-22 | 2001-06-28 | Micronas Gmbh | Optical transmitting and receiving device and a production method therefor |
WO2001047034A3 (en) * | 1999-12-22 | 2002-08-08 | Micronas Gmbh | Optical transmitting and receiving device and a production method therefor |
Also Published As
Publication number | Publication date |
---|---|
SE515191C2 (en) | 2001-06-25 |
ATE149248T1 (en) | 1997-03-15 |
EP0639266A1 (en) | 1995-02-22 |
JP3409853B2 (en) | 2003-05-26 |
US5619046A (en) | 1997-04-08 |
SE9201439D0 (en) | 1992-05-05 |
AU4031393A (en) | 1993-11-29 |
EP0639266B1 (en) | 1997-02-26 |
DE69308298T2 (en) | 1997-09-11 |
SE9201439L (en) | 1993-11-06 |
DE69308298D1 (en) | 1997-04-03 |
JPH08504032A (en) | 1996-04-30 |
ES2102073T3 (en) | 1997-07-16 |
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