WO1996016435A3 - Semiconductor device provided with a microcomponent having a fixed and a movable electrode - Google Patents
Semiconductor device provided with a microcomponent having a fixed and a movable electrode Download PDFInfo
- Publication number
- WO1996016435A3 WO1996016435A3 PCT/IB1995/000913 IB9500913W WO9616435A3 WO 1996016435 A3 WO1996016435 A3 WO 1996016435A3 IB 9500913 W IB9500913 W IB 9500913W WO 9616435 A3 WO9616435 A3 WO 9616435A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microcomponent
- semiconductor
- fixed
- electrode
- manufactured
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 8
- 238000004519 manufacturing process Methods 0.000 abstract 4
- 239000004020 conductor Substances 0.000 abstract 3
- 238000001465 metallisation Methods 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00246—Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/04—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/07—Interconnects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/07—Integrating an electronic processing unit with a micromechanical structure
- B81C2203/0707—Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure
- B81C2203/0728—Pre-CMOS, i.e. forming the micromechanical structure before the CMOS circuit
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51670096A JP3936736B2 (en) | 1994-11-23 | 1995-10-24 | Semiconductor device in which a micro component having a fixed electrode and a movable electrode is formed |
EP95933588A EP0752159B1 (en) | 1994-11-23 | 1995-10-24 | Semiconductor device provided with a microcomponent having a fixed and a movable electrode |
DE69514343T DE69514343T2 (en) | 1994-11-23 | 1995-10-24 | SEMICONDUCTOR DEVICE WITH A MICRO COMPONENT THAT HAS A RIGID AND A MOVING ELECTRODE |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP94203409 | 1994-11-23 | ||
NL94203409.1 | 1994-11-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1996016435A2 WO1996016435A2 (en) | 1996-05-30 |
WO1996016435A3 true WO1996016435A3 (en) | 1996-07-18 |
Family
ID=8217402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IB1995/000913 WO1996016435A2 (en) | 1994-11-23 | 1995-10-24 | Semiconductor device provided with a microcomponent having a fixed and a movable electrode |
Country Status (6)
Country | Link |
---|---|
US (1) | US5814554A (en) |
EP (1) | EP0752159B1 (en) |
JP (1) | JP3936736B2 (en) |
KR (1) | KR100398292B1 (en) |
DE (1) | DE69514343T2 (en) |
WO (1) | WO1996016435A2 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5963788A (en) * | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
DE19730715C1 (en) * | 1996-11-12 | 1998-11-26 | Fraunhofer Ges Forschung | Method of manufacturing a micromechanical relay |
FI981457A0 (en) | 1998-06-24 | 1998-06-24 | Valtion Teknillinen | Micromechanical AC and DC reference device |
DE19903195B4 (en) * | 1999-01-27 | 2005-05-19 | Infineon Technologies Ag | Method for improving the quality of metal interconnects on semiconductor structures |
US6316282B1 (en) | 1999-08-11 | 2001-11-13 | Adc Telecommunications, Inc. | Method of etching a wafer layer using multiple layers of the same photoresistant material |
US6229640B1 (en) | 1999-08-11 | 2001-05-08 | Adc Telecommunications, Inc. | Microelectromechanical optical switch and method of manufacture thereof |
US6242363B1 (en) | 1999-08-11 | 2001-06-05 | Adc Telecommunications, Inc. | Method of etching a wafer layer using a sacrificial wall to form vertical sidewall |
US6801682B2 (en) | 2001-05-18 | 2004-10-05 | Adc Telecommunications, Inc. | Latching apparatus for a MEMS optical switch |
DE10146545A1 (en) * | 2001-09-21 | 2003-04-10 | Merck Patent Gmbh | microcomponent |
US6824278B2 (en) * | 2002-03-15 | 2004-11-30 | Memx, Inc. | Self-shadowing MEM structures |
US6767751B2 (en) * | 2002-05-28 | 2004-07-27 | Silicon Light Machines, Inc. | Integrated driver process flow |
US8129801B2 (en) * | 2006-01-06 | 2012-03-06 | Honeywell International Inc. | Discrete stress isolator attachment structures for MEMS sensor packages |
US11279614B2 (en) | 2019-06-28 | 2022-03-22 | Analog Devices, Inc. | Low-parasitic capacitance MEMS inertial sensors and related methods |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
US4851080A (en) * | 1987-06-29 | 1989-07-25 | Massachusetts Institute Of Technology | Resonant accelerometer |
US4948757A (en) * | 1987-04-13 | 1990-08-14 | General Motors Corporation | Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures |
EP0547742A1 (en) * | 1991-12-19 | 1993-06-23 | Motorola, Inc. | Triaxial accelerometer |
EP0560661A1 (en) * | 1992-03-09 | 1993-09-15 | Sagem Sa | Capacitive acceleration sensor and non counterbalancing accelerometer using such a sensor |
EP0566943A1 (en) * | 1992-04-21 | 1993-10-27 | Asulab S.A. | Means for positioning a microelectronic device and arrangement for mounting such a device |
EP0604212A1 (en) * | 1992-12-25 | 1994-06-29 | Nec Corporation | Semiconductor sensor for sensing a physical quantity |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8921722D0 (en) * | 1989-09-26 | 1989-11-08 | British Telecomm | Micromechanical switch |
US5326726A (en) * | 1990-08-17 | 1994-07-05 | Analog Devices, Inc. | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure |
JP3627761B2 (en) * | 1994-03-09 | 2005-03-09 | 株式会社デンソー | Manufacturing method of semiconductor dynamic quantity sensor |
-
1995
- 1995-10-24 DE DE69514343T patent/DE69514343T2/en not_active Expired - Lifetime
- 1995-10-24 KR KR1019960704041A patent/KR100398292B1/en not_active IP Right Cessation
- 1995-10-24 EP EP95933588A patent/EP0752159B1/en not_active Expired - Lifetime
- 1995-10-24 JP JP51670096A patent/JP3936736B2/en not_active Expired - Fee Related
- 1995-10-24 WO PCT/IB1995/000913 patent/WO1996016435A2/en active IP Right Grant
- 1995-11-21 US US08/561,573 patent/US5814554A/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
US4948757A (en) * | 1987-04-13 | 1990-08-14 | General Motors Corporation | Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures |
US4851080A (en) * | 1987-06-29 | 1989-07-25 | Massachusetts Institute Of Technology | Resonant accelerometer |
EP0547742A1 (en) * | 1991-12-19 | 1993-06-23 | Motorola, Inc. | Triaxial accelerometer |
EP0560661A1 (en) * | 1992-03-09 | 1993-09-15 | Sagem Sa | Capacitive acceleration sensor and non counterbalancing accelerometer using such a sensor |
EP0566943A1 (en) * | 1992-04-21 | 1993-10-27 | Asulab S.A. | Means for positioning a microelectronic device and arrangement for mounting such a device |
EP0604212A1 (en) * | 1992-12-25 | 1994-06-29 | Nec Corporation | Semiconductor sensor for sensing a physical quantity |
Also Published As
Publication number | Publication date |
---|---|
EP0752159A1 (en) | 1997-01-08 |
DE69514343D1 (en) | 2000-02-10 |
US5814554A (en) | 1998-09-29 |
DE69514343T2 (en) | 2000-08-10 |
WO1996016435A2 (en) | 1996-05-30 |
EP0752159B1 (en) | 2000-01-05 |
JPH09508503A (en) | 1997-08-26 |
JP3936736B2 (en) | 2007-06-27 |
KR970700934A (en) | 1997-02-12 |
KR100398292B1 (en) | 2004-07-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2005013363A3 (en) | Circuit arrangement placed on a substrate and method for producing the same | |
WO2001088954A3 (en) | Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing | |
WO2003028098A3 (en) | Programmable chip-to-substrate interconnect structure and device and method of forming same | |
EP1164637A3 (en) | Method of making metallization and contact structures in an integrated circuit comprising an etch stop layer | |
WO1996016435A3 (en) | Semiconductor device provided with a microcomponent having a fixed and a movable electrode | |
TW368746B (en) | Semiconductor device and method for manufacturing the same | |
CA2011235A1 (en) | Method of forming contacts to a semiconductor device | |
KR960702172A (en) | PROCESS FOR PRODUCING VERTICALLY CONNECTED SEMICONDUCTOR COMPONENTS | |
EP1335422A3 (en) | Chip sized semiconductor device and a process for making it | |
EP1168434A3 (en) | Method of making metallization and contact structures in an integrated circuit | |
WO2004077548A3 (en) | Connection technology for power semiconductors | |
DE10351028B4 (en) | Semiconductor component and suitable manufacturing / assembly process | |
EP0698293B1 (en) | Method of manufacturing a semiconductor component with supply terminals for high integration density | |
KR970007831B1 (en) | Simultaneously forming method of metal wire and contact plug | |
EP0307671A3 (en) | Method of making an electrically programmable integrated circuit with meltable contact bridges | |
DE102004041904B4 (en) | Method for adjusting a series resistance at the gate of a power transistor | |
EP1191578A3 (en) | Semiconductor apparatus and method for producing the same | |
EP0406025A3 (en) | Method for fabricating a semiconductor device in which an insulating layer thereof has a uniform thickness | |
EP0848420A3 (en) | Fabricating plug and near-zero overlap interconnect line | |
EP0769813A3 (en) | Integrated circuit with planarized dielectric layer between successive polysilicon layers | |
EP0752724A3 (en) | Method of forming an alloyed drain field effect transistor and device formed | |
EP0717438A3 (en) | Method for forming side contact of semiconductor device | |
KR890011035A (en) | Integrated circuit manufacturing method and electrical connection forming method | |
EP0072690A3 (en) | A mis device and a method of manufacturing it | |
EP1334515B1 (en) | Method for producing an integrated semiconductor component |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): JP KR |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1995933588 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1019960704041 Country of ref document: KR |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWP | Wipo information: published in national office |
Ref document number: 1995933588 Country of ref document: EP |
|
WWG | Wipo information: grant in national office |
Ref document number: 1995933588 Country of ref document: EP |