DE4414237A1
(en)
*
|
1994-04-23 |
1995-10-26 |
Bosch Gmbh Robert |
Micromechanical vibrator of an oscillation gyrometer
|
FR2732467B1
(en)
*
|
1995-02-10 |
1999-09-17 |
Bosch Gmbh Robert |
ACCELERATION SENSOR AND METHOD FOR MANUFACTURING SUCH A SENSOR
|
US5635640A
(en)
*
|
1995-06-06 |
1997-06-03 |
Analog Devices, Inc. |
Micromachined device with rotationally vibrated masses
|
US5817942A
(en)
|
1996-02-28 |
1998-10-06 |
The Charles Stark Draper Laboratory, Inc. |
Capacitive in-plane accelerometer
|
JP3409565B2
(en)
*
|
1996-03-01 |
2003-05-26 |
日産自動車株式会社 |
Self-diagnosis method of angular velocity sensor
|
US5880369A
(en)
*
|
1996-03-15 |
1999-03-09 |
Analog Devices, Inc. |
Micromachined device with enhanced dimensional control
|
JPH1047966A
(en)
*
|
1996-07-31 |
1998-02-20 |
Aisin Seiki Co Ltd |
Angular velocity sensor
|
US5914801A
(en)
*
|
1996-09-27 |
1999-06-22 |
Mcnc |
Microelectromechanical devices including rotating plates and related methods
|
US5911156A
(en)
|
1997-02-24 |
1999-06-08 |
The Charles Stark Draper Laboratory, Inc. |
Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
|
EP0911606A1
(en)
*
|
1997-10-23 |
1999-04-28 |
STMicroelectronics S.r.l. |
Integrated angular speed sensor device and production method thereof
|
US6122961A
(en)
|
1997-09-02 |
2000-09-26 |
Analog Devices, Inc. |
Micromachined gyros
|
US6230563B1
(en)
|
1998-06-09 |
2001-05-15 |
Integrated Micro Instruments, Inc. |
Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
|
JP3882973B2
(en)
|
1998-06-22 |
2007-02-21 |
アイシン精機株式会社 |
Angular velocity sensor
|
JP4075022B2
(en)
*
|
1998-06-24 |
2008-04-16 |
アイシン精機株式会社 |
Angular velocity sensor
|
US7051590B1
(en)
|
1999-06-15 |
2006-05-30 |
Analog Devices Imi, Inc. |
Structure for attenuation or cancellation of quadrature error
|
US6508122B1
(en)
*
|
1999-09-16 |
2003-01-21 |
American Gnc Corporation |
Microelectromechanical system for measuring angular rate
|
US6257059B1
(en)
*
|
1999-09-24 |
2001-07-10 |
The Charles Stark Draper Laboratory, Inc. |
Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
|
US6275320B1
(en)
|
1999-09-27 |
2001-08-14 |
Jds Uniphase, Inc. |
MEMS variable optical attenuator
|
KR100374812B1
(en)
*
|
1999-11-04 |
2003-03-03 |
삼성전자주식회사 |
A microgyroscope with two resonant plate
|
US6301965B1
(en)
|
1999-12-14 |
2001-10-16 |
Sandia Corporation |
Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
|
US6373682B1
(en)
|
1999-12-15 |
2002-04-16 |
Mcnc |
Electrostatically controlled variable capacitor
|
JP2001264071A
(en)
|
2000-03-17 |
2001-09-26 |
Aisin Seiki Co Ltd |
Vibrator driving device
|
JP2001264072A
(en)
|
2000-03-17 |
2001-09-26 |
Aisin Seiki Co Ltd |
Angular velocity sensor
|
JP4729801B2
(en)
|
2000-03-17 |
2011-07-20 |
アイシン精機株式会社 |
Vibrator driving device and angular velocity sensor provided with the vibrator driving device
|
FR2809174B1
(en)
*
|
2000-05-16 |
2002-07-12 |
Commissariat Energie Atomique |
VIBRATING STRUCTURE WITH TWO COUPLED OSCILLATORS, ESPECIALLY FOR A GYROMETER
|
JP3589182B2
(en)
*
|
2000-07-07 |
2004-11-17 |
株式会社村田製作所 |
External force measuring device
|
US6485273B1
(en)
|
2000-09-01 |
2002-11-26 |
Mcnc |
Distributed MEMS electrostatic pumping devices
|
US6590267B1
(en)
|
2000-09-14 |
2003-07-08 |
Mcnc |
Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
|
US6377438B1
(en)
|
2000-10-23 |
2002-04-23 |
Mcnc |
Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
|
US6396620B1
(en)
|
2000-10-30 |
2002-05-28 |
Mcnc |
Electrostatically actuated electromagnetic radiation shutter
|
US6742389B2
(en)
|
2001-01-24 |
2004-06-01 |
The Regents Of The University Of Michigan |
Filter-based method and system for measuring angular speed of an object
|
DE10108196A1
(en)
*
|
2001-02-21 |
2002-10-24 |
Bosch Gmbh Robert |
Yaw rate sensor
|
DE10108197A1
(en)
|
2001-02-21 |
2002-09-12 |
Bosch Gmbh Robert |
Yaw rate sensor
|
DE10108198A1
(en)
|
2001-02-21 |
2002-09-12 |
Bosch Gmbh Robert |
Yaw rate sensor
|
US6928872B2
(en)
*
|
2001-04-27 |
2005-08-16 |
Stmicroelectronics S.R.L. |
Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
|
US6722197B2
(en)
|
2001-06-19 |
2004-04-20 |
Honeywell International Inc. |
Coupled micromachined structure
|
FR2834055B1
(en)
|
2001-12-20 |
2004-02-13 |
Thales Sa |
MICRO-MACHINED INERTIAL SENSOR FOR MEASURING ROTATIONAL MOVEMENTS
|
US7089792B2
(en)
*
|
2002-02-06 |
2006-08-15 |
Analod Devices, Inc. |
Micromachined apparatus utilizing box suspensions
|
JP4392246B2
(en)
*
|
2002-02-06 |
2009-12-24 |
アナログ・デバイスズ・インク |
Micromachined gyroscope
|
FR2838423B1
(en)
*
|
2002-04-12 |
2005-06-24 |
Thales Sa |
METHOD FOR MANUFACTURING A MICROSTRUCTURE COMPRISING A VACUUM CAVITY AND CORRESPONDING MICROSTRUCTURE
|
US6718823B2
(en)
|
2002-04-30 |
2004-04-13 |
Honeywell International Inc. |
Pulse width modulation drive signal for a MEMS gyroscope
|
US6959583B2
(en)
*
|
2002-04-30 |
2005-11-01 |
Honeywell International Inc. |
Passive temperature compensation technique for MEMS devices
|
US6823733B2
(en)
*
|
2002-11-04 |
2004-11-30 |
Matsushita Electric Industrial Co., Ltd. |
Z-axis vibration gyroscope
|
US6966224B2
(en)
*
|
2003-03-06 |
2005-11-22 |
Bei Technologies, Inc. |
Micromachined vibratory gyroscope with electrostatic coupling
|
US6845665B2
(en)
*
|
2003-04-28 |
2005-01-25 |
Analog Devices, Inc. |
Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
|
US6848304B2
(en)
*
|
2003-04-28 |
2005-02-01 |
Analog Devices, Inc. |
Six degree-of-freedom micro-machined multi-sensor
|
US7234539B2
(en)
*
|
2003-07-10 |
2007-06-26 |
Gyrodata, Incorporated |
Method and apparatus for rescaling measurements while drilling in different environments
|
FR2860865B1
(en)
*
|
2003-10-10 |
2006-01-20 |
Thales Sa |
INFERTIAL MICROMECHANICAL GYROMETER WITH DIAPASON
|
US6964195B2
(en)
*
|
2004-01-30 |
2005-11-15 |
Bei Technologies, Inc. |
Micromachined vibratory gyroscope and method with electronic coupling
|
US6938483B1
(en)
|
2004-03-28 |
2005-09-06 |
Hai Yan |
Phase-locked mechanical resonator pair and its application in micromachined vibration gyroscope
|
US7117605B2
(en)
*
|
2004-04-13 |
2006-10-10 |
Gyrodata, Incorporated |
System and method for using microgyros to measure the orientation of a survey tool within a borehole
|
JP4512636B2
(en)
*
|
2004-04-14 |
2010-07-28 |
アナログ デバイシス, インコーポレイテッド |
Inertial sensor with linearly arrayed sensor elements
|
US7753072B2
(en)
*
|
2004-07-23 |
2010-07-13 |
Afa Controls Llc |
Valve assemblies including at least three chambers and related methods
|
US7478557B2
(en)
*
|
2004-10-01 |
2009-01-20 |
Analog Devices, Inc. |
Common centroid micromachine driver
|
FR2876180B1
(en)
*
|
2004-10-06 |
2006-12-08 |
Commissariat Energie Atomique |
RESONATOR WITH OSCILLATING MASSES.
|
US7552781B2
(en)
|
2004-10-20 |
2009-06-30 |
Black & Decker Inc. |
Power tool anti-kickback system with rotational rate sensor
|
US7421897B2
(en)
|
2005-04-14 |
2008-09-09 |
Analog Devices, Inc. |
Cross-quad and vertically coupled inertial sensors
|
US20060271199A1
(en)
*
|
2005-05-20 |
2006-11-30 |
Johnson Lanny L |
Navigational markers in implants
|
US7621183B2
(en)
*
|
2005-11-18 |
2009-11-24 |
Invensense Inc. |
X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
|
FR2895501B1
(en)
*
|
2005-12-23 |
2008-02-29 |
Commissariat Energie Atomique |
MICROSYSTEM, ESPECIALLY MICROGYROMETER, WITH AT LEAST TWO OSCILLATING MASSESM MECHANICALLY COUPLED
|
US8302476B2
(en)
*
|
2006-09-15 |
2012-11-06 |
Hitachi, Ltd. |
Angular velocity measuring device
|
US7934423B2
(en)
*
|
2007-12-10 |
2011-05-03 |
Invensense, Inc. |
Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
|
US8141424B2
(en)
*
|
2008-09-12 |
2012-03-27 |
Invensense, Inc. |
Low inertia frame for detecting coriolis acceleration
|
US20100071467A1
(en)
*
|
2008-09-24 |
2010-03-25 |
Invensense |
Integrated multiaxis motion sensor
|
US8020441B2
(en)
*
|
2008-02-05 |
2011-09-20 |
Invensense, Inc. |
Dual mode sensing for vibratory gyroscope
|
US8250921B2
(en)
*
|
2007-07-06 |
2012-08-28 |
Invensense, Inc. |
Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
|
US20090262074A1
(en)
*
|
2007-01-05 |
2009-10-22 |
Invensense Inc. |
Controlling and accessing content using motion processing on mobile devices
|
US8047075B2
(en)
|
2007-06-21 |
2011-11-01 |
Invensense, Inc. |
Vertically integrated 3-axis MEMS accelerometer with electronics
|
US8462109B2
(en)
*
|
2007-01-05 |
2013-06-11 |
Invensense, Inc. |
Controlling and accessing content using motion processing on mobile devices
|
US8952832B2
(en)
*
|
2008-01-18 |
2015-02-10 |
Invensense, Inc. |
Interfacing application programs and motion sensors of a device
|
US20090265671A1
(en)
*
|
2008-04-21 |
2009-10-22 |
Invensense |
Mobile devices with motion gesture recognition
|
US8508039B1
(en)
|
2008-05-08 |
2013-08-13 |
Invensense, Inc. |
Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
|
US7796872B2
(en)
*
|
2007-01-05 |
2010-09-14 |
Invensense, Inc. |
Method and apparatus for producing a sharp image from a handheld device containing a gyroscope
|
DE102007057042A1
(en)
*
|
2007-09-10 |
2009-03-12 |
Continental Teves Ag & Co. Ohg |
Micromechanical rotation rate sensor with coupling bars and suspension elements for quadrature suppression
|
US8065085B2
(en)
|
2007-10-02 |
2011-11-22 |
Gyrodata, Incorporated |
System and method for measuring depth and velocity of instrumentation within a wellbore using a bendable tool
|
US7677099B2
(en)
*
|
2007-11-05 |
2010-03-16 |
Invensense Inc. |
Integrated microelectromechanical systems (MEMS) vibrating mass Z-axis rate sensor
|
US8185312B2
(en)
|
2008-10-22 |
2012-05-22 |
Gyrodata, Incorporated |
Downhole surveying utilizing multiple measurements
|
US8095317B2
(en)
|
2008-10-22 |
2012-01-10 |
Gyrodata, Incorporated |
Downhole surveying utilizing multiple measurements
|
US8065087B2
(en)
|
2009-01-30 |
2011-11-22 |
Gyrodata, Incorporated |
Reducing error contributions to gyroscopic measurements from a wellbore survey system
|
FI20095201A0
(en)
*
|
2009-03-02 |
2009-03-02 |
Vti Technologies Oy |
Oscillating micromechanical angular velocity sensor
|
US8640541B2
(en)
*
|
2009-05-27 |
2014-02-04 |
King Abdullah University Of Science And Technology |
MEMS mass-spring-damper systems using an out-of-plane suspension scheme
|
US8534127B2
(en)
|
2009-09-11 |
2013-09-17 |
Invensense, Inc. |
Extension-mode angular velocity sensor
|
US9097524B2
(en)
|
2009-09-11 |
2015-08-04 |
Invensense, Inc. |
MEMS device with improved spring system
|
DE102009046110A1
(en)
*
|
2009-10-28 |
2011-05-05 |
Robert Bosch Gmbh |
Coupling spring for yaw rate sensor
|
US9266178B2
(en)
|
2010-01-07 |
2016-02-23 |
Black & Decker Inc. |
Power tool having rotary input control
|
US8418778B2
(en)
|
2010-01-07 |
2013-04-16 |
Black & Decker Inc. |
Power screwdriver having rotary input control
|
WO2011085194A1
(en)
|
2010-01-07 |
2011-07-14 |
Black & Decker Inc. |
Power screwdriver having rotary input control
|
US9475180B2
(en)
|
2010-01-07 |
2016-10-25 |
Black & Decker Inc. |
Power tool having rotary input control
|
US8459111B1
(en)
|
2010-01-23 |
2013-06-11 |
Minyao Mao |
Angular rate sensor with suppressed linear acceleration response
|
US8616057B1
(en)
*
|
2010-01-23 |
2013-12-31 |
Minyao Mao |
Angular rate sensor with suppressed linear acceleration response
|
US8453504B1
(en)
|
2010-01-23 |
2013-06-04 |
Minyao Mao |
Angular rate sensor with suppressed linear acceleration response
|
CN103245340B
(en)
*
|
2012-02-01 |
2016-07-13 |
苏州敏芯微电子技术股份有限公司 |
A kind of single-chip tri-axial gyroscope
|
EP2631035B1
(en)
|
2012-02-24 |
2019-10-16 |
Black & Decker Inc. |
Power tool
|
US9476711B2
(en)
*
|
2013-06-24 |
2016-10-25 |
Freescale Semiconductor, Inc. |
Angular rate sensor with quadrature error compensation
|
US9546868B2
(en)
*
|
2013-07-26 |
2017-01-17 |
The Charles Stark Draper Laboratory, Inc. |
Modal decoupling via flexure-based transmissions as applied to a micromachined tuning fork gyroscope
|
EP3161416A2
(en)
|
2014-06-26 |
2017-05-03 |
Lumedyne Technologies Incorporated |
Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
|
TWI650558B
(en)
|
2015-05-20 |
2019-02-11 |
美商路梅戴尼科技公司 |
Method and system for determining inertia parameters
|
US10589413B2
(en)
|
2016-06-20 |
2020-03-17 |
Black & Decker Inc. |
Power tool with anti-kickback control system
|
US10234477B2
(en)
|
2016-07-27 |
2019-03-19 |
Google Llc |
Composite vibratory in-plane accelerometer
|
US10514259B2
(en)
|
2016-08-31 |
2019-12-24 |
Analog Devices, Inc. |
Quad proof mass MEMS gyroscope with outer couplers and related methods
|
US10627235B2
(en)
|
2016-12-19 |
2020-04-21 |
Analog Devices, Inc. |
Flexural couplers for microelectromechanical systems (MEMS) devices
|
US10415968B2
(en)
|
2016-12-19 |
2019-09-17 |
Analog Devices, Inc. |
Synchronized mass gyroscope
|
US10697774B2
(en)
|
2016-12-19 |
2020-06-30 |
Analog Devices, Inc. |
Balanced runners synchronizing motion of masses in micromachined devices
|
JP2019066224A
(en)
*
|
2017-09-29 |
2019-04-25 |
セイコーエプソン株式会社 |
Physical quantity sensor, inertia measuring device, mobile body positioning device, portable electronic apparatus, electronic apparatus, and mobile body
|
US10948294B2
(en)
|
2018-04-05 |
2021-03-16 |
Analog Devices, Inc. |
MEMS gyroscopes with in-line springs and related systems and methods
|
US11193771B1
(en)
|
2020-06-05 |
2021-12-07 |
Analog Devices, Inc. |
3-axis gyroscope with rotational vibration rejection
|
WO2021252364A1
(en)
|
2020-06-08 |
2021-12-16 |
Analog Devices, Inc. |
Stress-relief mems gyroscope
|
WO2021252398A1
(en)
|
2020-06-08 |
2021-12-16 |
Analog Devices, Inc. |
Drive and sense stress relief apparatus
|
US11698257B2
(en)
|
2020-08-24 |
2023-07-11 |
Analog Devices, Inc. |
Isotropic attenuated motion gyroscope
|